BOC Edwards Seiko Seiki STP A803 Manuals

Manuals and User Guides for BOC Edwards Seiko Seiki STP A803. We have 1 BOC Edwards Seiko Seiki STP A803 manual available for free PDF download: Instruction Manual

BOC Edwards Seiko Seiki STP A803 Instruction Manual (117 pages)

Turbomolecular Pump System

Brand: BOC Edwards | Category: Water Pump | Size: 3 MB

Limited Warranty
10
Table of Contents
12
Precautions for Safe Operation of the STP Pump
17
Usable Gases
17
Maintenance and Inspection Precautions
17
Labels
17
Operation Principle of the STP Pump
21
Figure 2.1 Cross Sectional View of the STP Pump
22
Unpacking
23
Unpacking the STP Pump and the STP Control Unit
23
Accessories
24
Table 3.1 Accessories
24
Figure 3.1 Example of Lifting the STP Pump
24
Installation of the STP Pump
25
Name and Function of each Part
25
Precautions before Installation
27
Operating Environment
27
Installation Area
28
Bench
28
How to Install the STP Pump
30
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
30
Cleaning the Seal
31
STP Pump Installation Positions
32
Figure 4.3 STP Pump Installation Positions
32
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
32
How to Secure the STP Pump
33
Table 4.1 Tightening Torque of Bolt
33
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
34
Figure 4.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
34
Table 4.3 Number of Claw Clamps by Size of Flange
35
Figure 4.6 Shape of Reduced Diameter Shank Bolts
35
Figure 4.7 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)
36
Figure 4.8 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)
36
Vacuum Piping
37
Connecting the Purge Port
39
Figure 4.9 Connecting the Purge Port
39
Gas Pumping, Cooling and Baking the STP Pump
40
Gas Pumping
40
How to Introduce a Purge Gas
40
Cooling the STP Pump
41
Water Cooling Method
41
Baking the STP Pump
42
Attaching a Baking Heater
42
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
43
Installation of the STP Control Unit
44
Name and Function of each Part
44
Front Panel
44
Figure 6.1 STP Control Unit Front Panel
46
Rear Panel
47
Figure 6.2 STP Control Unit Rear Panel
47
Precautions before Installation
48
Operating Environment
48
Insulation Test
48
Installation Area
49
Figure 6.3 Peripheral Space of the STP Control Unit
49
Attaching the STP Control Unit to a Rack
50
Figure 6.4 Example of Securing the STP Control Unit
50
Cable Connection
51
Name and Dimensions of each Cable
51
Figure 6.5 External Dimensions of each Cable
51
Figure 6.6 External Dimensions of each Cable
52
How to Connect the Cables
53
Table 6.1 Connecting the Power Cable
54
Connecting to Semiconductor Equipment
55
Connecting to Power
55
Emergency off Circuit (EMO Circuit)
55
How to Start/Stop the STP Pump
56
Before Starting
56
Start Procedures
57
Stop Procedures
57
Stopping the STP Pump
57
Starting the STP Pump after Stopping
59
Powering off
59
Starting the STP Pump after a Safety Function Operates
59
Remote Operation
60
Powering on
60
Starting/Stopping the STP Pump
60
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (REMOTE X7)
60
Starting the STP Pump after Stopping
61
Powering off
61
Starting the STP Pump after a Safety Function Operates
61
Table 7.2 Reset Operation During Remote Operation (REMOTE X7)
61
Operating the TMS Unit (for Use with the TMS Unit Only)
62
Starting/Stopping
62
Temperature Control
62
Figure 7.1 STP Pump Operation Procedures
63
Remote Input/Output Signal Connector
64
Input Signal Pins
64
Table 8.1 REMOTE X7 Input Signal Pins
65
Figure 8.1 REMOTE X7 Input Signal Pins
66
Output Signal Pins
67
Table 8.2 REMOTE X7 Output Signal Pins
67
Figure 8.2 REMOTE X7 Output Signal Pins
69
Table 8.3 Rated Contacts for Relays CR1 to CR8
70
Adjustment Methods
71
Tuning
71
Tuning Method
71
Each of Data after Tuning
72
Table 9.1 Data List
72
Figure 9.1 Tuning Procedures
73
Confirmation Mode
74
Parameter Set Mode
76
Figure 9.3 Parameter Setting Method
77
Figure 9.4 Remote Mode Setting Method
78
Safety Functions
79
Power Failure
79
Table 10.1 States of Lamps and REMOTE Output Signals at a Power Failure
80
Table 10.2 Operations of the STP Pump after a Power Recovery
80
Abnormal State of Magnetic Bearing
81
Excessive Vibration
81
Motor Driver Overload
81
Overheating Inside the STP Pump
81
Overheating Inside the STP Control Unit
82
Overspeed
82
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
82
Troubleshooting, Maintenance, and Inspection
87
Troubleshooting Immediately after an Abnormality/Error Occurs
87
Troubleshooting Power Failure
87
Troubleshooting Other Abnormality/Error
87
When Error Message Is Displayed on LCD
88
Error Messages
88
Table 11.1 Error Messages
89
Other Abnormalities
94
Abnormalities When Powering on
94
Abnormalities When Performing the STP Pump Start Operation
94
Table 11.2 Troubleshooting after Powering on
94
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
94
Other Abnormalities
95
Table 11.4 Troubleshooting While the STP Pump Is Rotating
95
WARNING" Message Display Function
96
First Damage Limit
96
Second Damage Limit
97
ERROR RECORD" Message Display Function
97
Maintenance and Inspection
98
Cleaning and Decontamination
99
Table 11.5 Cleaning and Decontamination
99
Inspecting the Deposit
100
Overhaul
101
Transporting for Repair or Overhaul
102
Storage and Disposal
103
Storage of the STP Pump
103
Storage of the STP Control Unit
103
Disposal
104
Specifications
105
Specifications for the STP Pump
105
Table 13.1 Specifications for the STP Pump
105
Figure 13.1 External Appearance of the STP Pump (STP-H803 Series)
106
Figure 13.2 External Appearance of the STP Pump (STP-H1303 Series)
107
Specifications for the STP Control Unit
109
Table 13.2 Specifications for the STP Control Unit
109
Unit Conversion Table
113

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