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MPS75SLE-050
Aerotech MPS75SLE-050 Manuals
Manuals and User Guides for Aerotech MPS75SLE-050. We have
1
Aerotech MPS75SLE-050 manual available for free PDF download: Hardware Manual
Aerotech MPS75SLE-050 Hardware Manual (48 pages)
Brand:
Aerotech
| Category:
DC Drives
| Size: 5 MB
Table of Contents
Table of Contents
3
List of Figures
4
List of Tables
5
Safety Procedures and Warnings
7
EC Declaration of Incorporation
9
Chapter 1: Overview
11
Table 1-1: Model Numbers and Ordering Options
11
Environmental Specifications
12
Accuracy and Temperature Effects
12
Table 1-2: Environmental Specifications
12
Basic Specifications
13
Table 1-3: MPS75SLE Series Mechanical Specifications
13
Vacuum Operation
14
Chapter 2: Mechanical Specifications and Installation
15
Unpacking and Handling the Stage
15
Dimensions
16
Figure 2-1: MPS75SLE Dimensions
16
Figure 2-2: MPS75SLE with Bellows Dimensions
17
Figure 2-3: MPS75SLE Mounting Plate Dimensions
18
Figure 2-4: MPS75SLE HDZ Angle Bracket Dimensions
19
Securing the Stage to the Mounting Surface
20
Figure 2-5: Mounting Hole Location
20
Figure 2-6: Access to All Mounting Holes
21
For XY Assemblies and Special Cases
21
Attaching the Payload to the Stage
22
Figure 2-7: Load Capability of MPS75SLE Series Stages
22
Figure 2-8: Stage Orientations
23
Figure 2-9: Torque Required to Turn Ball-Screw in Vertical Orientation
24
Chapter 3: Electrical Specifications and Installation
25
Motor and Feedback Connectors
26
Table 3-1: Connector Pin Assignments (DC Motor)
27
Table 3-2: Encoder Connector Pin Assignments (DC Motor)
28
Table 3-3: Connector Pin Assignments (Stepper Motor)
28
Motor and Feedback Wiring
29
Figure 3-1: DC Motor and Feedback Wiring
29
Figure 3-2: Stepper Motor and Feedback Wiring
30
Motor and Feedback Specifications
31
Table 3-4: Feedback Specifications
31
Table 3-5: Motor Specifications
32
Table 3-6: Encoder Specifications
32
Limits, Marker, and Machine Direction
33
Figure 3-3: Machine Direction
33
Motor and Feedback Phasing
34
Figure 3-4: Analog Encoder Phasing Reference Diagram
34
Figure 3-5: Encoder Phasing Reference Diagram (Standard)
34
Chapter 4: Maintenance
35
Service and Inspection Schedule
35
Cleaning and Lubrication
36
Bellows Removal for Re-Lubrication
38
Figure 4-1: Remove the Bellows Bolts
38
Figure 4-2: Slide the Stage Carriage and Bellow Compression
38
Bellows Installation
39
Figure 4-3: Motor Cover Screw Location
39
Figure 4-4: Bellows Support Rods
39
Figure 4-5: Secure the Bellows Support Rods
40
Figure 4-6: Attach the Bellows
40
Figure 4-7: Attach the Bellows Cover
40
Figure 4-8: Attach the Bellows Tabletop
41
Troubleshooting
42
Table 4-1: Troubleshooting
42
Appendix A: Warranty and Field Service
43
Appendix B: Revision History
45
Index
47
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