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SENSIRION SFC6000D Manual

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Engineering guidelines for Mass Flow Controllers
(SFC6xxx) and Mass Flow Meters (SFM6xxx)
Summary
This guide provides recommendations for evaluation, testing and integration of Sensirion Mass Flow Controllers and
Meters. It is applicable to SFC6xxx as well as SFM6xxx products.
For clarity, the document was written for Mass Flow Controllers, yet most guidelines are also valid for Mass Flow Meters.
www.sensirion.com
Version 1 – Mar 2023
1 / 13
Copyright © Sensirion AG 2022.

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Summary of Contents for SENSIRION SFC6000D

  • Page 1 (SFC6xxx) and Mass Flow Meters (SFM6xxx) Summary This guide provides recommendations for evaluation, testing and integration of Sensirion Mass Flow Controllers and Meters. It is applicable to SFC6xxx as well as SFM6xxx products. For clarity, the document was written for Mass Flow Controllers, yet most guidelines are also valid for Mass Flow Meters.

  • Page 2: Table Of Contents

    CAD models ......................................12 7.3. Software tools ...................................... 12 7.3.1. Control Center software ............................12 7.3.2. Software drivers ................................12 7.4. Calibration and FAQ ..................................12 www.sensirion.com Version 1 – Mar 2023 2 / 13 Copyright © Sensirion AG 2022.

  • Page 3: How To Choose Your Mass Flow Controller (Mass Flow Meter)

    Flow Selection for SFC6000(D)/SFM6000(D) The Sensirion SFC6000 flow controllers and SFM6000 flow meteres are available for full flow rates from 0.5 slm to 50 slm. SFC6000D and SFM6000D are available at different flow ranges, shown in Table 1, to suit your application best.

  • Page 4: Analog Interface: Coming Soon

    Quick, plug-and-play Simple implementation and flexibility EK-F5x Sensirion EK-F5x Sensirion C / Python library Evaluation Kit Control Center Evaluation Kit RS-485: Custom design with full implementation flexibility C: Custom design with full implementation flexibility: Coming Soon Custom cabling and external power...

  • Page 5: Testing Recommendations

    Controller, the behaviour can be tuned to the specific requirements. The settling time of Sensirion’s Mass Flow Controllers is specified for a step answer from 10% to 100% of full scale within 5% of setpoint. When starting from zero flow the settling time may be longer than specification.

  • Page 6: The Effect Of Vibrations On Valve Function

    It is important to verify that at the maximum required flow rate, for a given gas, the inlet pressure is higher than the pressure drop. If this cannot be achieved, contact Sensirion – it might be possible to order a similar mass flow controller with larger- sized valve.

  • Page 7: Fluidic And Electrical Connectors

    6.1.2. Mounting from the top of device The SFC6000 and SFM6000 can also be mounted from the top when removing their cap. This is done with M2.5 X 20 screws. www.sensirion.com Version 1 – Mar 2023 7 / 13 Copyright © Sensirion AG 2022.

  • Page 8: Downmount Manifold

    A mass Flow Controller is placed on top of the manifold. Figure 3. Downmount manifold design for SFM6000(D) (left) and SFC6000(D) (right). www.sensirion.com Version 1 – Mar 2023 8 / 13 Copyright © Sensirion AG 2022.

  • Page 9: Useful Resources

    Useful resources 7.1. Documentation Various guides and application notes are available on Sensirion website. Mass Flow Controllers (SFC): Product catalog (sensirion.com) Mass Flow Meters (SFM): Product catalog (sensirion.com) General technical download section: sensirion.com/products/downloads/ The most relevant resources are linked below.
  • Page 10 SHDLC Communication Interface Reference I2C Communication Interface Reference Reference and Flow Conversions between mass and volumetric flow Brochure Mass Flow Controllers www.sensirion.com Version 1 – Mar 2023 10 / 13 Copyright © Sensirion AG 2022.
  • Page 11 REACH and RoHS declaration SFC Introduction video: SFC6000 Mass Flow Controllers Introduction video Informational video: 4 Questions at 4 PM 4 Questions at 4 PM www.sensirion.com Version 1 – Mar 2023 11 / 13 Copyright © Sensirion AG 2022.

  • Page 12: Cad Models

    7.4. Calibration and FAQ Thanks to the stability of the MEMS-based sensor element and the robust mechanical design, Sensirion Mass Flow Controllers do not drift and do not require recalibration in the field. High manufacturing standards used during production ensure that our Mass Flow Controllers are extremely reliable and have a very low failure rate.
  • Page 13 Warranty SENSIRION warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in SENSIRION’s published specifications of the product. Within such period, if proven to be defective, SENSIRION shall repair and/or replace this product, in SENSIRION’s discretion, free of charge to the...

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