SENSIRION SFC6 Series Manual

Engineering guidelines for Mass Flow Controllers
(SFC6xxx) and Mass Flow Meters (SFM6xxx)
Summary
This guide provides recommendations for evaluation, testing and integration of Sensirion Mass Flow Controllers and
Meters. It is applicable to SFC6xxx as well as SFM6xxx products.
For clarity, the document was written for Mass Flow Controllers, yet most guidelines are also valid for Mass Flow Meters.
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