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Engineering guidelines for Mass Flow Controllers
(SFC5xxx) and Mass Flow Meters (SFM5xxx)
Summary
This guide provides recommendations for evaluation, testing and integration of Sensirion Mass Flow Controllers and
Meters. It is applicable to SFC55xx, SFC54xx, SFC53xx as well as SFM55xx, SFM54xx and SFM53xx products.
For clarity, the document was written for Mass Flow Controllers, yet most guidelines are also valid for Mass Flow Meters.
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Version 1.0 – Aug 2022
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