Related Manuals for ONTRAK DSS-200
Summarization of Contents
Installation Manual Overview
Installation
Main section detailing the installation process for the DSS-200 Series II CE system.
Preface
Introduction
Overview of the manual's purpose, structure, and how to use it.
Safety
Discusses safety issues relevant to unpacking and installing the system.
Site Preparation
Defines facility requirements for system installation and operation.
Unpacking
Explains steps for unpacking and inspecting the system for damage.
Installation
Details the steps for installing and hooking up the system.
Technical Bulletins
Section for storing OnTrak technical bulletins.
Facility Layout
Contains facility layout drawings for system installation.
Reorder and Revision History
Reorder Instructions
Instructions for ordering system manuals and documentation.
Revision History Details
Release Date March, 1999
Details the third release of the Installation Manual, Revision C.
Installation Procedure
Removing Component Restraints
Instructions for removing shipping restraints from system components.
Installation Sequence
Recommended sequence of events for hooking up facilities to the system.
Customer (Installation) Engineer
Defines the role and responsibilities of the OnTrak Customer (Installation) Engineer.
Facility Confirmation Report
Report for verifying correct and safe system installation.
Installation Start-up
Prerequisites
Documents, drawings, and materials required before beginning installation.
Customer Documents
Customer-specific documents required before system installation.
Appendix Documents
List of documents and forms found in the Appendix.
Technical Service Bulletins (TSB)
Information on obtaining applicable TSBs for the DSS-200.
DSS-200 Facilities Drawings
Facility drawings for system installation.
POR Files and Materials
POR Files (Appendix)
OnTrak process of record (POR) files for system recipes.
Materials
Equipment and support documents required for installation.
Equipment and Tools
Particle Measurements Analysis Equipment
Systems used for DSS-200 installation particle measurements.
Trace Metals Measurement Equipment
OnTrak approved procedure for trace metal measurement.
Tools
Standard installation tool kit components.
Torque Requirements
Torque Requirements Table
Table specifying torque settings for various screw sizes and types.
Installation Start-up Checklist
Day 1 – Electrical Setup
Checklist items for initial electrical setup of the DSS-200 system.
Installation Start-up Checklist (Mechanical Adjustments)
Day 2 – Mechanical Adjustment
Checklist items for mechanical adjustments and system purging.
Installation Start-up Checklist (Testing)
Day 3 – Reliability Testing
Steps for conducting the DSS-200 reliability testing.
Installation Start-up Checklist (Qualification)
Day 4 – Process Acceptance Qualification
Steps for qualifying the DSS-200 system's process acceptance.
System Baselines
System Baseline - DI Water
Procedure for determining particle neutrality using DI water.
System Baselines (Continued)
Megasonic Station Baseline
Test for determining particle neutrality with Megasonic option.
System Baselines (Continued)
System Baseline - Ammonium Hydroxide
Test for determining particle neutrality using Ammonium Hydroxide.
Appendix
Forms Contents
List of installation checklists and forms available in the Appendix.
Procedures Contents
List of installation procedures included in the Appendix.
Facility Confirmation Report
Checklist Verification
Checklist to verify correct and safe installation of the DSS-200 system.
Installation Report
System Information
Fields for customer, serial number, software version, and dates.
Test Results and Deficiencies
Summary of test results and count of hardware/software deficiencies.
Installation Deficiency Log Sheet
Defect Tracking
Log for recording defects, correction status, and dates.
Parts Requirements for Installation
Part Tracking Table
Table for listing parts used, quantity, description, part number, and price.
System Offsets
Offset Configuration
Table for recording initial, final, and default system offset values.
Smooth Wafer Travel Checklist
Visual Inspection Area
Checklist for visually inspecting wafer travel through system stations.
Process of Record (POR)
First Brush Station Program
Parameters for the first brush station's process program (OX-AMM).
Second Brush Station Program
Parameters for the second brush station's process program (OX-AMM).
Spin Station Program
Parameters for the Spin Station's process program.
Process of Record (POR) (Continued)
DSS 200 Series IICE Process Program - DI Water
Process program parameters for DI Water, Particle Neutrality, and Prime SI.
Data Collection Forms
Particle Neutrality Data Collection
Form for collecting particle neutrality test data.
Data Collection Forms (Continued)
Water Test Data
Form for collecting water test data.
Megasonic Test Data
Form for collecting megasonic test data.
Data Collection Forms (Continued)
NH4OH and Megasonic Test Data
Form for collecting chemical and megasonic test data.
Data Collection Forms (Continued)
Air Test Data
Form for collecting air test data.
Brush Matrix Data Forms
Particle Bin Split Pre Counts
Data collection for particle counts before brush testing.
Particle Bin Split Post Counts
Data collection for particle counts after brush testing.
Brush Matrix Data Forms (Continued)
Particle Bin Split Pre Counts
Data collection for particle counts before brush testing for Station 2.
Particle Bin Split Post Counts
Data collection for particle counts after brush testing for Station 2.
Process Installation Data Tables
Table IPA 1.0 Particle Density
Table showing particle density for different processes.
Table IPA 1.0A Total Particles
Table showing total particles and density conversion.
System Baselines (DI Water)
Pre and Post Counts
Data table for DI Water baseline pre and post particle counts.
System Baselines (Megasonic)
Pre and Post Counts
Data table for Megasonic Station baseline pre and post particle counts.
System Baselines (Ammonium Hydroxide)
Pre and Post Counts
Data table for Ammonium Hydroxide baseline pre and post particle counts.
Acceptance Procedure
General Requirements
Facilities and environmental requirements for acceptance testing.
Test Wafer Preparation
Procedure for preparing test wafers for acceptance testing.
Acceptance Procedures (Post CMP)
Process of Record (POR)
Requirement to use OnTrak POR or customer process for acceptance.
Acceptance Procedures (Slurry Dip)
Test Wafer Requirements
Requirements for test wafers used in the Slurry Dip Test.
Technical Bulletins
TSB Receipt Log
Log for recording received Technical Service Bulletins.
Facilities Drawings
Drawing Descriptions and P/N
List of facilities drawings and their corresponding part numbers.
Safety
Safety Notations
Explanation of safety symbols used in the manual.
Safety (Continued)
General Safety Provisions
Describes system safety features and general precautions.
Safety (Continued)
Safety Precautions
Detailed safety precautions, including electrical safety.
Safety (Continued)
Electrical Safety
Guidelines and procedures for safe electrical work on the system.
Safety (Continued)
Electrical Hazard Rating
Classification of electrical task hazards based on SEMI S2 standards.
Safety (Continued)
DSS-200 Type 3 and Type 4 Task Hazards
Specific hazards for Type 3 and Type 4 electrical tasks.
Safety (Continued)
Safety Interlocks
Explanation of safety interlock switches for station covers and doors.
Safety (Continued)
Emergency Machine Off
Information on Emergency Machine Off (EMO) switches and their operation.
Safety (Continued)
Maintenance Issues
Safety considerations during maintenance, including chemical and fluid lines.
Safety (Continued)
General Operational Safety
General safety guidelines for operating the DSS-200 system.
Safety (Continued)
Ergonomic Issues
Discussion of ergonomic hazards and potential solutions.
Safety (Continued)
Chemical Safety Using Ammonium Hydroxide
Detailed safety information for using Ammonium Hydroxide.
Safety (Continued)
Material Safety Data Sheet (MSDS)
Summary of chemical and physical hazards of Ammonium Hydroxide.
Safety (Continued)
Health Effects and First Aid
Information on health effects and first aid for chemical exposure.
Safety (Continued)
Storage and Disposal
Guidelines for storing and disposing of chemicals.
Safety (Continued)
Spill and Leak Procedures
Procedures for handling spills and leaks of hazardous materials.
Safety (Continued)
Protective Equipment
Recommendations for protective equipment during operation and maintenance.
Safety (Continued)
Ventilation
Requirement for local exhaust ventilation.
Respirator
Recommendations for respirator use based on contamination levels.
Safety (Continued)
Respirator Categories
Categories of contamination concentration and required respirators.
Site Preparation
Facility Requirements
Specifies facility requirements for system installation, including electrical, gas, and water.
Site Preparation (Continued)
Facility Requirements Table
Detailed table of facility requirements and hookup specifications.
Site Preparation (Continued)
Process Supply Quality Requirements
Specifies quality requirements for customer-supplied process solutions and environment.
Site Preparation (Continued)
Facility Connections
Information on plumbing and electrical facility connections.
Site Preparation (Continued)
Plumbing Facility Hookup
Details on 'through-the-wall' and 'through-the-floor' plumbing connections.
Electrical Facility Hookup
Information on the primary electrical hookup to facility power.
Unpacking
Packaging and Inspection
Details on system packaging and inspection upon arrival.
Unpacking (Continued)
Warning Devices
Description of warning devices affixed to the crate (Shock Detector, Tip-N-Tell).
Unpacking (Continued)
Removing the Crate
Step-by-step instructions for removing the system from its shipping crate.
Unpacking (Continued)
Power Cords
Information on locating and detaching the main power cord.
Lockout and Door Keys
Instructions for securing system access keys.
Installation Procedure
Removing the Component Restraints
Instructions for removing shipping restraints and bubble wrap.
Installation Procedure (Continued)
Installation Sequence
Step-by-step sequence for connecting facilities to the DSS-200 system.
Installation Procedure (Continued)
Inspect For Magnetic Fields
Procedure to verify absence of strong magnetic fields near the system.
ULPA Filter (Option)
Instructions for installing the ULPA filter on the Spin Station cover.
ULPA Power and Heat Lamp (Option)
Instructions for connecting ULPA and Heat Lamp electrical cables.
Installation Procedure (Continued)
Subframe (Option)
Instructions for installing a subframe if used for wafer flow height adjustment.
Level System
Procedure for leveling the system using retractable leveling feet.
Installation Procedure (Continued)
Seismic Tie-Down Locations
Instructions for fastening the system to the floor for seismic security.
Connect All Drains
Procedure for connecting system drains to facility drains.
Installation Procedure (Continued)
Connect Exhaust Lines
Instructions for connecting various system exhaust lines.
Installation Procedure (Continued)
Connect DI Water
Procedure for connecting the DI water line to the facility bulkhead.
Connect Pneumatic Pressure Line
Procedure for connecting the pneumatic pressure line to System Air.
Ozone Destruction Lamp (Option)
Instructions for installing the ozone destruction lamp.
Leak Test
Procedure for performing system leak tests using DI water.
Installation Procedure (Continued)
Process Solution Line
Procedure for connecting and testing the process solution line.
Installation Procedure (Continued)
Connect Remote Console (Option)
Instructions for connecting the cleaning unit to the Electrical Enclosure.
GEM Cable Option
Instructions for connecting the GEM Interface cable.
Inspection
OnTrak Installation Engineer's inspection of electrical components.
Installation Start-up
Prerequisites
Gathering required system documents, drawings, and materials.
Installation Start-up (Continued)
Customer Documents
Collection of customer-specific documents before installation.
Installation Start-up (Continued)
Appendix Documents
List of documents and forms found in the Appendix.
Technical Service Bulletins (TSB)
Obtaining applicable TSBs for the DSS-200.
DSS-200 Facilities Drawings
Facility drawings for system installation.
Installation Start-up (Continued)
POR Files (Appendix)
OnTrak process of record (POR) files for system recipes.
Installation Start-up (Continued)
Materials
Equipment and support documents required for installation.
Installation Start-up (Continued)
Equipment
Analysis equipment and tools for DSS-200 installation.
Installation Start-up (Continued)
Torque Requirements
Table specifying torque settings for fasteners.
Installation Start-up (Continued)
Installation Start-up Checklist
Checklist to verify installation steps are completed correctly.
Installation Start-up Checklist (Day 1)
Day 1 – Electrical Setup
Checklist items for initial electrical setup.
Installation Start-up Checklist (Day 1 Continued)
Day 1 – Electrical Setup (Continued)
Further electrical setup checklist items.
Installation Start-up Checklist (Day 2)
Day 2 – Mechanical Adjustment
Checklist items for mechanical adjustments and purging.
Installation Start-up Checklist (Day 2 Continued)
Day 2 – Mechanical Adjustment (Continued)
Further mechanical adjustments and purging checklist items.
Installation Start-up Checklist (Day 3)
Day 3 – Reliability Testing
Steps for conducting DSS-200 reliability testing.
Installation Start-up Checklist (Day 4)
Day 4 – Process Acceptance Qualification
Steps for DSS-200 process acceptance qualification.
Installation Start-up Checklist (Baselines)
System Baseline (DI-H2O)
Procedure for determining particle neutrality using DI water.
Installation Start-up Checklist (Baselines Continued)
Megasonic Station Baseline
Test for determining particle neutrality with Megasonic option.
Installation Start-up Checklist (Baselines Continued)
System Baseline Ammonium Hydroxide
Test for determining particle neutrality using Ammonium Hydroxide.
Installation Start-up Checklist (Purge)
DI Water Purge Procedure
Procedure for sterilizing and flushing DI water lines.
Installation Start-up Checklist (Purge Continued)
Purge Setup
Steps for preparing and setting up the purge solution.
Installation Start-up Checklist (Purge Continued)
Purge Procedure Using Hydrogen Peroxide
Procedure for purging using Hydrogen Peroxide.
Installation Start-up Checklist (Purge Continued)
Purge Procedure Using Ammonium Hydroxide
Procedure for purging using Ammonium Hydroxide.
Installation Start-up Checklist (Purge Continued)
Valve Flow Settings and Open Solenoids
Checklist for valve flow settings and open solenoids.
Installation Start-up Checklist (Purge Continued)
Valve Flow Settings and Open Solenoids (Continued)
Further details on valve flow settings and solenoids.
Installation Start-up Checklist (Purge Continued)
Reset System
Procedure for resetting the system to power off and then on.
NH4OH Usage Guidelines
General Guidelines for NH4OH Use
Guidelines for using NH4OH to ensure consistent, reproducible results.
Backside Particles
Acceptable Backside Particle Counts
Table of acceptable backside particle counts for different wafer types.
Backside Particles (Continued)
Measuring Backside Particle Levels
Steps for measuring and calculating backside particle levels.
Post CMP Process Problems
Troubleshooting Approach
Four-step approach to determine the source of process problems.
Wafer Slipping During Rotation
Conditions Causing Wafer Slippage
Identifies conditions that can cause wafer slippage during rotation.
Correcting Wafer Slippage
Detailed steps to correct wafer slippage problems.
Wafer Slipping During Rotation (Continued)
Correcting Wafer Slippage (Continued)
Further steps to correct wafer slippage issues.
Wafer Slipping During Rotation (Continued)
Correcting Wafer Slippage (Continued)
Final steps for addressing wafer slippage, including brush parallelism.
Brush Height Optimization
Required Materials
Materials needed for brush height optimization procedure.
Brush Height Optimization (Continued)
Brush Matrix Data Forms
Forms for recording brush matrix test results.
Brush Height Optimization (Continued)
System Baseline DI Water
Test to determine particle neutrality using DI water.
Brush Height Optimization (Continued)
Megasonic Station Baseline
Test for particle neutrality with Megasonic option.
Brush Height Optimization (Continued)
System Baseline Ammonium Hydroxide
Test for particle neutrality using Ammonium Hydroxide.
Acceptance Procedure
General Requirements
Facilities and environmental requirements for acceptance testing.
Test Wafer Preparation
Procedure for preparing test wafers for acceptance testing.
Acceptance Procedures (Post CMP)
Process of Record (POR)
Requirement to use OnTrak POR or customer process for acceptance.
Acceptance Procedures (Slurry Dip)
Test Wafer Requirements
Requirements for test wafers used in the Slurry Dip Test.
Technical Bulletins
TSB Receipt Log
Log for recording received Technical Service Bulletins.
Facilities Drawings
Drawing Descriptions and P/N
List of facilities drawings and their corresponding part numbers.
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