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ONTRAK Manuals
Industrial Equipment
II CE Series
Installation manual
ONTRAK II CE Series Installation Manual
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Contents
Table of Contents
Bookmarks
Table of Contents
Reorder & Revision History
Table of Contents
Table of Contents
Introduction
How to Use the Installation Manual
Safety
Introduction
Safety Notations
General Safety Provisions
Safety Precautions
Electrical Safety
Dss-200 Type 3 and Type 4 Task Hazards
Safety Interlocks
Emergency Machine off
Maintenance Issues
General Operational Safety
Ergonomic Issues
Chemical Safety Using Ammonium Hydroxide
Material Safety Data Sheet (Msds)
Health Effects and First Aid
Storage and Disposal
Spill and Leak Procedures
Protective Equipment
Site Preparation
Facility Requirements
Process Supply Quality Requirements
Facility Connections
Plumbing Facility Hookup
Electrical Facility Hookup
Unpacking
Packaging and Inspection
Warning Devices
Removing the Crate
Power Cords
Lockout and Door Keys
Installation Procedure
Removing the Component Restraints
Installation Sequence
Customer (Installation) Engineer
Facility Confirmation Report - Series II Ce
Installation Start-Up
Prerequisites
Materials
Equipment
Installation Start-Up Checklist
Reliability Testing Terms
Detail Installation Procedure
Appendix
Forms Contents
Procedures Contents
Facility Confirmation Report-Series II Ce
Installation Report
Installation Deficiency Log Sheet
Parts Requirements for this Installation
System Offsets - Series II
Smooth Wafer Travel Checklist
Process of Record
Particle Neutrality Data Collection Form
Environmental Data Collection Form
Water Test
Megasonic Test
Chemical Data Collection Form
Nh4Oh
Megasonic Test
Environmental Data Collection Form
Air Test
Station-1 Brush Matrix Data Form
Station-2 Brush Matrix Data Form
Dss-200 Process Installation Data Table
Installation Start up Procedure Checklist
System Warranty Activation
DI Water Line Purge
Equipment and Material Requirements
Purge Setup
Purge Procedure
Using Hydrogen Peroxide
Using Ammonium Hydroxide
Nh4Oh Usage Guidelines
Brush Height Optimization
System Baseline DI Water
Megasonic Station Baseline
System Baseline Ammonium Hydroxide
Acceptance Procedure
Post Cmp Ild Oxide Cleaning Evaluation
Slurry Dip Test
Technical Bulletins
Facilities Drawings
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Quick Links
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Reorder & Revision History
2
Maintenance Issues
3
Facilities Drawings
Download this manual
OnTrak DSS-200
TM
Series II CE
Installation
Document 20-0200-017-004 (Clean Room), Revision C
Document 20-0200-018-004 (Paper), Revision C
Software Version 2.0.1a
Revision C
Go Back to Main Menu
February 1999
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Dss-200
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