MKS elite 600 Operation Manual

WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCED BY
THIS UNIT. A thorough understanding of this manual is required before
attempting to install this unit into a system.
DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE MAINTENANCE OF THIS
PRODUCT. In recognition of our responsibility to protect the environment, this product has
been manufactured without the use of CFCs. The no‐clean flux now used in all soldering
CFC's
operations may leave a small inert residue that will not affect the performance of the
product. The use of CFCs for cleaning or maintenance may result in partial liquification of the
no‐clean flux residue, which will damage the unit and void the warranty.
QUALITY
This product is manufactured at an MKS Instruments' ISO‐9001‐Quality‐System‐compliant
ISO 9001
facility.
SYSTEM
The material contained in this manual is subject to change without notice. No part of this manual may be reproduced
or utilized in any form or by any means, electronic or mechanical, including photocopying or electronic transmission or
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
specifications and other technical information contained in this manual are the property of MKS, ENI Products and shall
not be copied, reproduced or used in any way, in whole or in part, as the basis of manufacture or sale of similar items
without the prior written consent of MKS, ENI Products.
Manual Order Number: 1036315
Revision Level: 00A
OPERATION MANUAL
elite
RF Plasma Generator
elite 300 / 600 / 750
Notice
Copyright © 2009 MKS Instruments, Inc. All rights reserved.
®
MATCHWORK
TM
is a registered trademark of MKS Instruments, Inc.