G DWL 200 USER SERVICE GUIDE Table of Contents Preface........................1 Related Documentation ..................1 Contact ........................2 Chapter 1: Safety Precautions................3 Conventions Used ....................3 General Precautions....................4 Laser Safety ......................4 Electrical Safety ....................6 Labels ......................... 7 Chapter 2: Preventive Maintenance ...............
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G DWL 200 USER SERVICE GUIDE (15) Check XY-Stage..................15 (16) Stage Bearings:..................16 (17) Flow Unit Pre-Filters: ................16 (18) Backup: ....................16 (19) Cooling Units: ..................16 (20) Flowbox Filters: ..................17 (21) Stage Spindles: ..................17 Chapter 3: Troubleshooting Guide ...............
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G DWL 200 USER SERVICE GUIDE Problems With The System.................. 29 OS9 System is not starting................29 User PC is not starting ..................29 Menu is not starting................... 29 Menu is not connecting to main system ............29 Menu “freezes”....................29 Interferometer system is not initializing .............
DWL 200 system. Keeping a record of the servicing related to a DWL 200 will save a factory service engineer time with their research. Most problems are easily traceable and can be solved rapidly with the aid of our customer support organization.
G DWL 200 USER SERVICE GUIDE Contact Should you need assistance, please call during normal business hours (CET) Phone: +49-6221-3430-0 Fax: +49-6221-3430-30 or contact your local service office: China: Japan: Heidelberg Instruments China Heidelberg Instruments Japan Rm.2320-21, Block A, Qun Xing Plaza Germany Center for Industry &...
G DWL 200 USER SERVICE GUIDE Chapter 1: Safety Precautions DWL 200 is a complex system and utilizes several components that may pose danger to equipment or to personal health if handled incorrectly, like laseres and high voltage electronics. Therefore, it is...
• To reduce the risk of electrical shock, always plug the DWL 200 into an approved outlet with correct ground. Power requirements are described in the DWL 200 "Preinstallation Guide".
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G DWL 200 USER SERVICE GUIDE If conditions require the opening of the flowbox cover, such as for servicing or troubleshooting by trained service personnel, then personnel should observe all normal electrical and mechanical safety precautions as well as those applicable to the lasers.
A CEE type 400 V, 32 A three-phase female cable connector supplies operating power in the DWL 200. It is also possible to attach a local-type cable to a local-type wall connector. An additional connection for 208 V 60 A three-phase, or 400 V 64 A three-phase (if a transformer is included) is required for the laser.
Please follow all instructions received from HIMT customer support personnel carefully. DWL 200 systems are designed as to keep maintenance effort down to a minimum. Therefore, redoing calibrations that were set when the DWL 200 system was installed is not required as long as the system remains in a stable environment.
G DWL 200 USER SERVICE GUIDE Maintenance Schedule The following Preventive Maintenance (PM) Checklists provide a maintenance task list in combination with a schedule for these tasks. Maintenance check results as well as any abnormal behavior relating to the system should be recorded and, if problems occur, reported.
G DWL 200 USER SERVICE GUIDE MONTHLY PM CHECKLIST: Task Procedure Number (If Required) Restart OS9-system Check Pre-cooling Unit - Level of coolant between min and max? Check Motor Cooling Unit - Level of coolant between min and max? Focus Exposure...
G DWL 200 USER SERVICE GUIDE Maintenance Procedures (1) TEMPERATURE CONTROLLERS: The flowbox temperature controller is located at the backside of the system, in the top compartment of the flowbox. Deviations from the set temperature should be less than 0.1º. The actual temperature inside the flowbox can be...
G DWL 200 USER SERVICE GUIDE (4) RESET OF OS9 SYSTEM CONTROLLER Occasional rebooting of the OS9 system prevents exposure stops due to lack of memory, hung up data 1. PG-handler reset pipes and the like. As a preventive measure, this can be done by switching off the OS9 system controller with 2.
G DWL 200 USER SERVICE GUIDE (7) ND:YAG / HECD / DIODE POWER CHECK: • Place a calibrated power meter as close to the laser as possible. • Record power. • If power has dropped to 60% of the original value, contact local Service Office.
(12) OPTICS ELEMENTS: If the DWL 200 system is located in a clean room environment, there should be no dust accumulation on the optics. However, if a sudden increase in laser stray light or an unexplainable decrease in laser power shows up on a plate, visually check optics elements on contaminations or obstructions.
(18) BACKUP: • OS-9: Create a backup directory on the User PC. Wait for all processes on the DWL 200 system (exposures, movements etc.) to finish. Using Total Commander or a similar FTP program, connect to the OS9 system controller. The standard IP address is 170.168.10.<system serial number-200>...
G DWL 200 USER SERVICE GUIDE (20) FLOWBOX FILTERS: Request for Service Engineer to replace all flowbox filters. • Using the wrong filters may damage the flow units. (21) STAGE SPINDLES: Request for a Service Engineer to grease the stage spindles.
G DWL 200 USER SERVICE GUIDE Chapter 3: Troubleshooting Guide In many cases problems arise due to an incorrect handling of the DWL 200 system. Therefore, it is always recommendable to backtrace all steps and find out wether something was done in a wrong way or a wrong order. If error messages appear in the user menu, these sometimes also contain recommendations on how to proceed.
G DWL 200 USER SERVICE GUIDE Warnings and Error Messages Most error messages come with explicit explanations on what has to be corrected (e.g., if entries in exposure map or job files are missing or wrong). For some of the more general error messages, explanations and corrective measures are given here.
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G DWL 200 USER SERVICE GUIDE Message Cause Action Interferometer error - Interferometer beam was - reinitialise stage please press Init Stage interrupted, is blocked or - check interferometer off. beam path for block Fatal Error Write Head is Write head / Z stage...
G DWL 200 USER SERVICE GUIDE Message Cause Action err=805 / err=807 Movement blocked by - check wether probe is up; Can't start with Probe signal from probe if not, reboot OS9 system. Active or Down! Probe controller or probe end Switches = <#>...
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G DWL 200 USER SERVICE GUIDE Message Cause Action Focus At the start of a Find Center Check start position successful, function function (detection with (should be approximately interrupted. / Autofocus), the focus value in the center) You must Focus on...
G DWL 200 USER SERVICE GUIDE Message Cause Action Alignment no good, during an automatic optical - check focus quality function aborted alignment (field alignment or - improve contrast with global alignment), a structure lamp, offset and gain could not be recognized, or...
G DWL 200 USER SERVICE GUIDE Message Cause Action Error 317 occured The data file is too - reconvert with borders complex, which causes shifted such that complex the MBCIII to be selected structures are divided without being READY. between stripes...
G DWL 200 USER SERVICE GUIDE Problems With Exposure Results Once a DWL 200 system has finished exposing substrates and the plates are removed, developed and fixed, or etched, the results are then inspected using a microscope, or a light box in conjunction with a microscope.
G DWL 200 USER SERVICE GUIDE Stripes do not connect or overlap but data is complete • Wrong decimal symbol chosen in Windows regional setting (must be”.”) • Wrongs lens installed • Wrong TIC size in menu configuration Data in stripes is cut off or narrow •...
G DWL 200 USER SERVICE GUIDE Over-exposed results • Wrong energy set / intensity file loaded • Wrong density filter used • Wrong write head installed • LED light source was running during emulsion exposure o Reduce lamp level to 0 Exposure shows uneven intensity fluctuations •...
G DWL 200 USER SERVICE GUIDE • Shutter closes too late Exposure not complete, system always stops at the same stripe • Data too complex (see Conversion Software Manual for possible remedies) • Interferometer system has problem at this position (contamination on mirror, strong flow e.g., due to a heat source)
G DWL 200 USER SERVICE GUIDE Problems With The System The DWL 200 is a complex machine designed for a wide range of applications. Consequently, there are many ways to make errors in the handling of a DWL 200 system. Although the User Menu already checks many operations on their validity, its high flexibility leaves open possibilities e.g., for incorrect combinations of...
G DWL 200 USER SERVICE GUIDE Interferometer system is not initializing • Interferometer is not yet ready (Power LED on Renishaw main unit / all LEDs on interferometer Zygo laser head must show green; needs warm-up time of 10 – 15 minutes) •...
G DWL 200 USER SERVICE GUIDE • Pressure sensor disconnected, or broken (Hi LED burning even when write head is in upper position) • Analog offset in sensor too large • DETC-card broken, or loose Focus is unstable • Oil in compressed air •...
G DWL 200 USER SERVICE GUIDE • Interferometer beam was blocked temporarily o Enter “hpinit” in mini terminal. o Init stage. • IFI-card broken, or loose • Incorrect tic-size Nozzle crashed • Incorrect use of auto-focus (i.e., focusing outside the plate, during stage movement, or without compressed-air running) •...
G DWL 200 USER SERVICE GUIDE Kr+ / Ar+ laser tube does not start • Operator did not wait long enough (allow 5 – 10 minutes warm up time) • Power connection OK? • Water OK? • Mirrors misaligned o Try tapping lightly on rear end mirror holder for immediate remedy;...
G DWL 200 USER SERVICE GUIDE • Camera power supply broken Macro-camera image field remains dark • White-light Illumination is off, or lamp level is set to 0 • Out of focus • Gain and Offset are incorrect • Camera cables broken / disconnected •...
G DWL 200 USER SERVICE GUIDE • Systems with precooling: Cooling unit set temperature too high (has to be >3º below flowbox set temperature) Temperature in flowbox is too high • Temperature controller is not in working range (has to be >3° C above temperature of incoming air) •...
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G DWL 200 USER SERVICE GUIDE Notes DOCUMENT TITLE DOC. REV. DOC. NO. Page DWL 200 User Service Guide DWL-HI-29...
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G DWL 200 USER SERVICE GUIDE Notes DOCUMENT TITLE DOC. REV. DOC. NO. Page DWL 200 User Service Guide DWL-HI-29...
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