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Troubleshooting
Related Manuals for SevenStar CS200-H MFC
Summary of Contents for SevenStar CS200-H MFC
- Page 1 REV.2.5 CS200-H MFC/MFM User’s Manual 2 0 17 . 03...
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Page 2: Table Of Contents
5.1 Initial check ............. 2.3.2.2 Installation ..........5.2 Troubleshooting ..........2.4 Electrical Installation ........SECTION 6 WARRANTY AND SERVICES 2.5 Checking Before Operation....... 6.1 Guarantee of Sevenstar ........6.2 Product Warranty…………………………... SECTION3 FUNCTIONS 6.3 Services ............3.1 General............6.4 Disclaimer ............ -
Page 3: Declaration
The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar. -
Page 4: Attention
User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual. -
Page 5: General
& matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200-H MFC/MFM is a digital MFC, using in the high temperature .The 3of32... - Page 6 CS200-H MFC/MFM incorporates a dual interface, voltage and current as well as RS-485 and DeviceNet digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS200-H has wide range of power supply(available for ±...
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Page 7: Specification
1.5 Specification CS200 Type CS200-H ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM Full scale range (N ( 0～1,2,3,5,10,20,30)SLM Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.) Linearity ±0.5% F.S. Repeatability ±0.2% F.S. Response ≤1sec Time Valve Rest Normally Closed No Valve Position 0.05～0.35MPa （Flow≤10slm） Differential ＜0.02MPa Pressure... -
Page 8: Calibration Features
Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features... -
Page 9: Section 2 Installation
The MFC is assembled in a class 100 clean room, packaged and controlled in class 1000 environment. The CS200-H MFC is calibrated in the oven at the temperature specified by the customer, which can be from 60 º C to 110 º C. -
Page 10: Mechanical Installation
It is recommended that you install an in-line filter upstream to the controller in order to prevent MFC from contamination. CS200-H MFC/MFM is composed of MFC/MFM、cable and electronic box. The pictures of the product are shown in figure2-1, put only the MFC/MFM in the high temperature, not the electronic box. - Page 11 Figure 2-1 CS200-H MFC/MFM 9of32...
- Page 12 Figure 2-2 MFC/MFM dimensions Figure 2-3 MFC/MFM dimensions 10of32...
- Page 13 electronics box Figure 2-4 dimensions 11of32...
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Page 14: Installation
Compression Fittingφ6; Fitting 1.5〞W-seal Compression Fittingφ3 VCR1/4〞 M Length 1.5〞C-seal Compression Fitting1/4; Swagelokφ10 L（mm） 112.8 105.2 Swagelok1/8; Swagelok3/8 Table 2-1 The length of the product with different fittings Attention : The height (which is showing in figure 2-4 ) of 114.3mm are height without electric connectors of cable. It should be added around 100mm more after adding the electric connector. -
Page 15: Installation
Figure 2-6 VCR retainer gasket 2.3.2.2 Two-ferrule ( Compression Fitting) Connection Refer to figure 2-7. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-7. -
Page 16: Electrical Installation
2-11 . Attention : Although sharing with the same appearance of CS200-H MFC, the 0~5V Setpoint Input or the 4~20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available. - Page 17 Figure 2-10 RS485 connector Figure 2-11 DeviceNet connector 2.4.3 Table of Selecting Type of Cable and its Illustration of Connection D08- To USB D08- 1/2/4 2F/3F/4F Input Input 2B/3B/4B Serial of D08-1F/1FM/1FS/8C/8CM/1G/1GM ± 15V +24V 2E/3E/4E Computer QCX-19/ QCX-17/QCX-P17 QCX-P19 QCX-41 QCX-43 QCX-34...
- Page 18 Figure 2-12 CS Product and Illustration of Connecting Power D08-1D/1F Figure 2-13 CS Product and Illustration of Connecting Power 16of32...
- Page 19 Figure 2-14 CS Product and Illustration of Connecting Power Figure 2-15 Illustration of Connecting CS Product 17of32...
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Page 20: Checking Before Operation
The analog output will be available at all times. The flow output of the CS200-H MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS200-H MFC/MFM can be provided to the MFC... -
Page 21: Zero
3.6 Valve Command Mode CS200-H MFC/MFM is available for valve-close or valve-open by input digital signal or analog voltage directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. Please refer to “Digital MFC Communication User Manual”... -
Page 22: Multi-Gas And Multi-Flow
CS200-H MFC/MFM has the type of valve about normally closed. When MFC do not have power supply, the valve is closed and gas can not flow through. 3.8 Multi-Gas and Multi-Flow The multi-gas and multi-range technology has been developed in the CS200-H MFC/MFM. -
Page 23: Led
Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS200-H MFC/MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED. -
Page 24: Caution
It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden The used gas should be purified without dust，liquid and oil stain. If necessary, the filter should be added to gas system for purification. -
Page 25: Troubleshooting
* Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material 23of32... -
Page 26: Product Warranty
Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by... - Page 27 MFC, in which case the warranty will be invalidated. D，Gas connections: The fittings must be handled carefully. Sevenstar guarantees that all fittings have been individually inspected and are scratch-free. E，Fitting procedure: The fitting procedure set out in the manual must be followed meticulously.
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Page 28: Services
6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;... - Page 29 Ⅰ CS200 Selection Guide Appendix CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [H] High temperature MFC [g,g,g] – Standard: SEMI52-0302（Note:029 NH available to type C,D only） For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve –...
- Page 30 Description – -[ - ]：Default Value The letters on cover and tag：In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) ＜ (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM FLOW≤30SLM ) CS200-H XXXN：＜0.02MPa (2.9psid) Max inlet pressure :3 MPa (435.1 psig) ±2 ℃...
- Page 31 Take CS200-H013C500CDGGVHS as the example CS200 - H 500C D GG V Model：CS200H Type: High temperature MFC Gas: Type of Valve: Normally closed Full range Electronic connector：DB15 Fittings： Compression Fittingφ6mm Seal material: Viton Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 29of32...
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Page 32: Appendixⅱ
APPENDIX II CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636... - Page 33 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...
- Page 34 Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...
- Page 35 Beijing Sevenstar Flow Co., Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China P.O.BOX 3#741, Beijing, China Post code： 100015 Tel： (+86)-10-64361831 ext. 8527 Fax： (+86)-10-64362923 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn...
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