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SevenStar PC100-D PC User Manual

Pressure controller
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REV.1.0
PC100-D PC
User's Manual
2 0 2 0. 0 9

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Summary of Contents for SevenStar PC100-D PC

  • Page 1 REV.1.0 PC100-D PC User’s Manual 2 0 2 0. 0 9...

  • Page 2: Table Of Contents

    5.1 Initial check ............. SECTION 2 INSTALLATION 5.2 Troubleshooting ..........2.1 General ............SECTION 6 WARRANTY AND SERVICES 2.2 Unpacking ............. 6.1 Guarantee of Sevenstar ........2.3 Mechanical Installation ....... 6.2 Product Warranty…………………………... 2.3.1 General ............6.3 Services ............2.3.2 Installation ..........

  • Page 3: Declaration

    The copy right of The user’s manual of pressure controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.

  • Page 4: Attention

    User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.

  • Page 5: General

    & matching gas system, capillary flow pressure control system, gas chromatograph and other analytical instruments. The PC100-D PC is a latest generation PC for use in semiconductor applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required.
  • Page 6 The PC100-D PC incorporate a dual interface, voltage (0~5V) and as well as RS-485 digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. PC100-D series have wide range of power supply(available for +15 ～...

  • Page 7: Specification

    Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar PC, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale;...

  • Page 8: Calibration Features

    1.6 Calibration Features Normally, the PC are calibrated close to customer’s requirement ( the requirement should be accorded with the specification). Without customer’s information, the PC are calibrated under standard conditions. 1.6.1 Standard conditions Without special conditions specified by the customer, the PC is calibrated under the following standard conditions: Pressure Outlet: Atmospheric.

  • Page 9: Section 2 Installation

    SECTION 2 INSTALLATION 2.1 General WARNING: Toxic, corrosive or explosive gases must be handled with extreme care. After installing the PC, the system should be thoroughly checked to ensure it is leak-free. Purge the PC with a dry inert gas for one hour before using corrosive gases. IMPORTANT: When installing the PC, ensure that the arrow on the back of the unit in the same direction as the gas flow.
  • Page 10 Figure 2-1 PC100-D 8 of 22...
  • Page 11 with Figure 2-2 Product Compression Fitting1/4 imensions 9 of 22...
  • Page 12 Figure 2-3 Product with VCR1/4 M dimensions Attention : The height (which is showing in figure 2-2 and figure 2-3) of 138.2 mm without electric connectors of cable. It should be added around 50mm more after adding the electric connector. 10 of 22...

  • Page 13: Installation

    2.3.2 Installation Place PC according to the flow direction. 2.3.2.1 1/4VCR Connection Refer to figure 2-4 and figure 2-5 Check the gland to gland space, including the gaskets. Remove the plastic gland protector caps. When using loose VCR original style gaskets, inserting the gasket into the female nut.

  • Page 14: Electrical Installation

    2.4 Electrical Installation 2.4.1 General With simple switching power supply, PC100-D PC is available for +15to +24 VDC (single-ending). Customer can choose as need. Customer can choose 9 pin male Sub-D. 9 pin male Sub-D connector is the SEMI Standard compatible, both 0-5V analog signal control and output and communicate with PC via RS485 available.
  • Page 15 2.4.2 Connections The 9 pin male Sub-D connector RB and RM are shown in figure2-7 Figure 2-7 9 pin male D-sub connector 13 of 22...

  • Page 16: Checking Before Operation

    Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 2.5 Checking Before Operation Before operating the PC the following checks should be completed: 2.5.1 Check that tubing is leak free.

  • Page 17: Section3 Functions

    SECTION3 FUNCTIONS 3.1 General Based on new sensor driver technology, PTS technology and AI technology, PC100-D presents high performance and reliability. 3.2 Control Mode PC100-D is available for digital，0-5V voltage control mode and output and RS485. The pressure output of the PC100-D will be available through the RS485 interface, even in the analog control mode.

  • Page 18: Section 4 Maintenance

    It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden...

  • Page 19: Section 5 Troubleshooting

    Address conflict Check address of PC Baud rate error Check baud rate of PC PCB problems *Contact Sevenstar Attention : * Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. 17 of 22...

  • Page 20: Section 6 Warranty And Services

    Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.

  • Page 21: Services

    Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar PC will void the warranty, and PC that have been damaged as a result of improper use will not be replaced by Sevenstar.

  • Page 22: Disclaimer

    6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance; 4. Usage of instrument beyond user’s manual;...
  • Page 23 PC100 [t] [h] [v] [f,f,f,f] [p,p,p,p,p] [e] [a, a] [f,f] [s] [d] Type – -[ D ] Metal type Pressure Type – -[ A ] Absolute – Type of Valve -[ C] Normally closed [f,f,f,f] – Orifice Full Scale - [ 002L] 2SLM - [ 003L] 3SLM...
  • Page 24 PC100 002L 1200M U RB CC M Model：PC100 Type: Metal type Pressure Type: absolute Type of Valve：Normally closed Orifice Full Scale：2SLM Pressure Full Scale：1200mbar Control Modes：up Electronic connector：DB9-B model（RS485+anolog） φ1/4" Compression Fitting Fittings： Seal Materials：Metal For example： Customized requirement: In Chinese. customized fittings, customized calibration temperature, 40℃. 22 of 22...
  • Page 25 Beijing Sevenstar Flow Co., Ltd. PC Series Pressure Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room 511, Building 29, No.368, Zhangjiang Road, Pudong New District, Shanghai Tel：...