Related Manuals for FormFactor PM8DSP-PHX
Summary of Contents for FormFactor PM8DSP-PHX
- Page 1 Service Guide Company Confidential PM8DSP-PHX Probe Station Probe System Installation #790-016-0502 – REV.1.0 [2024-January-16]...
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Page 2: Table Of Contents
PM8DSP-PHX Probe Station - Service Guide Probe System Installation Table of Contents 1 Introduction 1.1 Required tools ..................4 1.2 Probe station overview ................5 1.3 Probe station configurations ..............6 1.4 Chuck selection ..................6 1.4.1 Non-thermal chucks (double side) ............6 1.4.2 Thermal chucks .................. - Page 3 PM8DSP-PHX Probe Station - Service Guide Probe System Installation 6.2 Determining height differences ............35 6.3 Eliminating height differences .............. 36 Document History Company Confidential REV.1.0 [2024-January-16]...
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Page 4: Introduction
Hamamatsu Photonics K.K. The station is intended to be operated with HPK C10565-71 and/or C10565-73 thermal lock-in units. The PM8DSP-PHX is not intended as a standalone machine outside the HPK system (as the HPK system provides e.g. safety features). 1.1 Required tools... -
Page 5: Probe Station Overview
Load stroke lever adjustment knob scope and camera for microscope Wafer vacuum switch Separation/Contact Theta Chuck vacuum lever adjustment switch Figure 1: Probe station overview (PM8DSP-PHX-SQ with bottom side chuck and bottom side microscope) Company Confidential REV.1.0 [2024-January-16] 5 of 38... -
Page 6: Probe Station Configurations
This Service Guide describes the installation for the following machine types: ‒ PM8DSP-PHX-SQ ‒ PM8DSP-PHX-HV-SQ (High Voltage) 1.4 Chuck selection The PM8DSP-PHX(-HV) probe station can be equipped with a non-thermal double side chuck or a thermal chuck. 1.4.1 Non-thermal chucks (double side) Ordering Number... -
Page 7: Installation Overview And Checklist
PM8DSP-PHX Probe Station - Probe System Installation 2 Installation Overview and Checklist 2 Installation Overview and Checklist A) General Done 1. All transport locks removed ☐ Chuck stage Platen ☐ ☐ 2. All components and accessories installed ☐... -
Page 8: Unpacking
PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking 3 Unpacking Unpacking is identical for both base machines. Upon arrival of the shipment, inspect the containers for evidence of damage or mishandling. NOTE Before unpacking, review the packing slip and any special instructions. - Page 9 PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Unwrap the probe station to access the transport locks. Unbolt the system from the crate base at the 4 corner positions. Remove the 4 corner brackets. corner brackets ...
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Page 10: Removing Transport Locks
PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking 3.2 Removing transport locks All movable station components are secured by transport locks, which must be removed prior to operation. NOTE Wear nitril gloves to avoid grease stains on the appliance. - Page 11 PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Loosen crosswise the 4 platen transport lock screws (M4) located in each corner of the platen. Use a 3.0 mm hex key. The transport locks are marked clearly with a black arrow on a yellow background.
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Page 12: Removing Transport Locks Of The Stage
PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking 3.2.2 Removing transport locks of the stage Raise the platen to the top position by turning the platen height adjustment knob counterclockwise. Remove the wooden bar. Wooden bar Remove the chuck stage and place it on a clean and level surface. - Page 13 PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Loosen the 4 M6 hexagon socket screws of the transport lock. Use a 5.0 mm hex key. Turn the chuck stage upside down. Remove the plastic transport disks (4 red bolts) that protect the roller bearings from damage during shipment.
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Page 14: Removing Transport Locks Of The Granite Base
PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Clean the rubber lips with a clean, lint-free cloth. NOTE Do not use any solvents for cleaning. Place and position the rubber lips. Mount the vacuum brake covers. Tighten the screws only gently. - Page 15 PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Loosen the 4 upright bolts securing the granite base. Use a 4.0 mm hex key and an open- end wrench 13 mm. Do NOT remove the nuts. Remove all 8 M8 hexagon socket screws securing the transport locks to the base frame.
- Page 16 PM8DSP-PHX Probe Station - Probe System Installation 3 Unpacking Store the locks and hardware in a safe place in case they need to be used again for transport. Company Confidential REV.1.0 [2024-January-16] 16 of 38...
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Page 17: Assembly
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly 4 Assembly Required tools ‒ Nitril gloves ‒ 3.0, 4.0, 5.0 mm hex key 4.1 Chuck stage assembly The chuck stage assembly is identical for both base machines. NOTE Wear nitril gloves to avoid grease stains on the appliance. - Page 18 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly X-axis brake cable Y-brake Y-axis bracket Stage X-axis bar Attach the stage X-axis bar to the Y-axis bracket using the 3 M6 hexagon socket screws provided. Use a 5.0 mm hex key.
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Page 19: Installing Double Side Chuck Base
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Vacuum hose for chuck Vacuum hose for chuck stage Verify that the chuck stage movement over the granite surface is completely smooth. 4.2 Installing double side chuck base The non-thermal double side chuck assembly has a U-shaped chuck base (see section 1.2), which is mounted on the chuck stage. - Page 20 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Lift the chuck base under the stiffening rods and onto the chuck stage. Align the pins on the bottom side of the chuck base to holes of the bayonet adapter on the chuck stage.
- Page 21 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Turn chuck base clockwise Secure the chuck base with 4 M5 hexagon socket screws. Use a 4.0 mm hex key. Connect the chuck-lock vacuum hose at the rear of the chuck base.
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Page 22: Pm8Dsp-Phx-Hv-Sq
Follow the instructions in section 4.2.1 PM8DSP-PHX-SQ to install the chuck base, using the HV isolated sidewalls. Ground the base frame, chuck stage and both platens (left and right) to the PE bar at the rear of the station. -
Page 23: Installing Chuck
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly 4.3 Installing chuck The high-voltage chuck and standard chuck are installed using the same procedure. NOTE Wear nitril gloves to avoid grease stains on the appliance. Standard chuck: The chuck base must have been installed as described in section 4.2.1. - Page 24 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Turn on the chuck vacuum to secure the chuck in place. Chuck vacuum switch If the present configuration uses only the top side chuck, it can be secured NOTE using 4 M5 hexagon socket screws, rather than vacuum.
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Page 25: Installing Thermal Chuck
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly 4.3.2 Installing thermal chuck Chuck stage and chuck base are installed. (see section 4.1 and 4.2) The stiffening rods are NOT fastened. Move the chuck stage to the front center position. - Page 26 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Tighten thumbscrew Connect the chuck vacuum line to the chuck. If possible, route the vacuum line through one of the cable ties on the service loop. Chuck vacuum line Chuck vacuum...
- Page 27 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Connect the chuck thermal controller air and cables. The thermal controller connections plate can be mounted to the rear of the station if your configuration is permanent and allows space for it.
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Page 28: Installing Bottom Side Microscope
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Install the stiffening rods in the rear position(s). Stiffening rods in rear position Put a wafer on the chuck and verify that it is attached with vacuum. 4.4 Installing bottom side microscope A microscope for bottom side observation and alignment is arranged underneath the bottom side chuck. - Page 29 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly RPP305 positioner Light cable (from light source) Positioner plate Camera arm Bottom side camera Mount the positionier plate with 3 M4 hexagon socket screws at the front right of the station.
- Page 30 PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly Place the positioner on the plate. Lock the positioner in place by turning the lever of the magnetic base to ”ON”. Lever for magnetic fixation Mount the bottom side camera to the camera arm with 4 M4 hexagon socket screws. Use a 3 mm hex key.
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Page 31: Grounding (Pm8Dsp-Phx-Hv-Sq)
PM8DSP-PHX Probe Station - Probe System Installation 4 Assembly 4.4.2 Grounding (PM8DSP-PHX-HV-SQ) CAUTION High voltage! The camera assembly must be grounded in case of a high voltage probe system. Ground the camera assembly using the ring terminal and a M4x12 hexagon socket screw. -
Page 32: Connecting Facilities And Grounding
PM8DSP-PHX Probe Station - Probe System Installation 5 Connecting Facilities and Grounding 5 Connecting Facilities and Grounding This section applies to standard and high-voltage probe systems. 5.1 Connecting and grounding probe system Connect the probe station to the facility power supply. -
Page 33: Connecting And Grounding Accessories
PM8DSP-PHX Probe Station - Probe System Installation 5 Connecting Facilities and Grounding 5.2 Connecting and grounding accessories ATTENTION Do not use extra jump cables for any other purpose. In order to make safe connections, the device must not be connected to the mains. The probe system can be equipped with a wide range of accessories and options, each with its own electrical interconnects. -
Page 34: Chuck Stage Leveling
PM8DSP-PHX Probe Station - Probe System Installation 6 Chuck Stage Leveling 6 Chuck Stage Leveling Chuck stage leveling ensures equal probe contact force from tip-to-tip of probe cards and throughout the chuck range of travel. The chuck stage is leveled at the factory, but adjustment may be required at installation. -
Page 35: Preparation
Move the chuck in upper position (Z-axis). Move the chuck theta to center position. Mount the digital gauge on the PM8DSP-PHX platen by using the dial gauge holder (#168-540) or a magnetic stand. Adjust the gauge to touch the chuck surface slightly (NOT on a vacuum line) ... - Page 36 PM8DSP-PHX Probe Station - Probe System Installation 6 Chuck Stage Leveling Figure 8: Measuring points on the chuck Separate gauge sensor from chuck surface (using platen drive). Move the chuck in XY-direction to get a leveling point close to the rear leveling screw underneath the gauge sensor.
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Page 37: Document History
PM8DSP-PHX Probe Station - Service Guide Probe System Installation Document History Rev. Date Comment 2024-JAN-16 Document released Company Confidential REV.1.0 [2024-January-16] 37 of 38... - Page 38 PM8DSP-PHX Probe Station - Service Guide Probe System Installation #790-016-0502 – REV.1.0 [2024-January-16] Corporate Headquarters FormFactor GmbH 7005 Southfort Road Suess Straße 1 Livermore, CA 94551 01561Thiendorf, Germany Phone: (+1) 925-290-4000 Phone: (+49) 35240 73 -0 Copyright 2024 FormFactor, Inc. All rights www.formfactor.com...
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