FormFactor PM8DSP-PHX Manuals

Manuals and User Guides for FormFactor PM8DSP-PHX. We have 1 FormFactor PM8DSP-PHX manual available for free PDF download: Installation Manual

FormFactor PM8DSP-PHX Installation Manual

FormFactor PM8DSP-PHX Installation Manual (38 pages)

Probe Station

Brand: FormFactor | Category: Measuring Instruments | Size: 4 MB

Table of Contents

Table of Contents
2
Introduction
4
Required Tools
4
Probe Station Overview
5
Probe Station Configurations
6
Chuck Selection
6
Non-Thermal Chucks (Double Side)
6
Thermal Chucks
6
Installation Overview and Checklist
7
Unpacking
8
Removing the Station from the Crate
8
Removing Transport Locks
10
Removing Transport Locks of the Platen
10
Removing Transport Locks of the Stage
12
Removing Transport Locks of the Granite Base
14
Assembly
17
Installing Double Side Chuck Base
19
Pm8Dsp-Phx-Sq
19
Pm8Dsp-Phx-Hv-Sq
22
Installing Chuck
23
Installing Non-Thermal Chuck (Top Side and Bottom Side)
23
Installing Thermal Chuck
25
Installing Bottom Side Microscope
28
Mounting
28
Grounding (PM8DSP-PHX-HV-SQ)
31
Connecting Facilities and Grounding
32
Connecting and Grounding Probe System
32
Connecting and Grounding Accessories
33
Chuck Stage Leveling
34
Preparation
35
Document History
37

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