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Granville-Phillips mks 352 Series Instruction Manual

Vacuum gauge controller with devicenet
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Granville-Phillips 352001
Vacuum Gauge Controller with DeviceNet
A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s .
• C r i t i c a l a n d e x p e d i t e d s e r v i c e s
• I n s t o c k / R e a d y - t o - s h i p
Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate, representative, or authorized distributor for any manufacturer listed herein.
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Used and in Excellent Condition
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https://www.artisantg.com/47807-1
• We b u y y o u r e x c e s s , u n d e r u t i l i z e d , a n d i d l e e q u i p me n t
• F u l l - s e r v i c e , i n d e p e n d e n t r e p a i r c e n t e r

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  • Page 1 Granville-Phillips 352001 Vacuum Gauge Controller with DeviceNet In Stock Used and in Excellent Condition Open Web Page https://www.artisantg.com/47807-1 A l l t r a d e m a r k s , b r a n d n a m e s , a n d b r a n d s a p p e a r i n g h e r e i n a r e t h e p r o p e r t y o f t h e i r r e s p e c t i v e o w n e r s .
  • Page 2 Series 352 ® Granville-Phillips Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual Instruction manual part number 352004 Revision A - January 2015...
  • Page 4 Series 352 ® Granville-Phillips Series 352 Vacuum Gauge Controller with DeviceNet This Instruction Manual is for use with Granville-Phillips Series 352 Vacuum Gauge Controllers with DeviceNet. A list of applicable catalog numbers is provided on the following page. Customer Service/Support...
  • Page 5 ® Granville-Phillips Series 352 Controller with DeviceNet Catalog numbers for Series 352 Controllers with DeviceNet This Instruction Manual is for use with the following catalog numbers: 352001 Controller calibrated for use with an Ultra High Vacuum Stabil-Ion Gauge 20352007 Controller calibrated for use with an Extended Range Stabil-Ion Gauge...

  • Page 6: Table Of Contents

    Table of Contents Chapter 1 Safety Instructions ..............7 1.1 Safety Introduction .
  • Page 7 Chapter 4 Operation ............... . 31 4.1 Module Status LEDs .

  • Page 8: Chapter 1 Safety Instructions

    Chapter 1 Safety Instructions 1.1 Safety Introduction BEGIN BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points in these instructions. Throughout this instruction manual, the word "product" refers to the Series 352 Module, the Stabil-Ion Gauge, or the Convectron Gauge(s).

  • Page 9: Equipment Grounding

    1 Safety Instructions Objects and Liquid Entry − Never push objects of any kind into this product through openings as they may touch dangerous voltage points or short out parts that could result in a fire or electric shock. Be careful not to spill liquid of any kind onto the products.
  • Page 10 1 Safety Instructions For example, danger of explosion in a vacuum system exists during backfilling from pressurized gas cylinders because many vacuum devices such as glass ionization gauges, glass windows, glass bell jars, etc., are not designed to be pressurized. Also, vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized.

  • Page 11: Damage Requiring Service

    1 Safety Instructions The fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can be dangerous to health if inhaled. Use only in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment. 1.4 Damage Requiring Service Disconnect the product from all power sources and refer servicing to Qualified Service Personnel under the following conditions:...

  • Page 12: Service Guidelines

    If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials document may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 13: Canadian Users

    1 Safety Instructions cause harmful interference to radio or television reception, which can be determined by turning the equipment off and on, the user is encouraged to try to correct the interference by one or more of the following measures: •...

  • Page 14: Chapter 2 Introduction

    Chapter 2 Introduction 2.1 The Series 352 Vacuum Gauge Controller The Series 352 Vacuum Gauge Controller can operate one Stabil-Ion Gauge and up to three Convectron Gauges simultaneously. Pressure readout is via the DeviceNet interface. Within this manual: • The term “Module” refers to the Series 352 Module. See Figure 2-1. •...

  • Page 15: Specifications

    2 Introduction 2.2 Specifications Table 2-2 Series 352 Controller Specifications Function Description Power required for module 11 Vdc to 26.5 Vdc at 0.3 A 5.5 W maximum Protected against reversals, transients, and over-voltages Power required for Stabil-Ion Gauge +24 Vdc at 0.8 A to 3.0 A, depending on the status of the Stabil-Ion Gauge Digital interface DeviceNet Baud rate...
  • Page 16 2 Introduction Table 2-3 Series 370 Stabil-Ion Gauge Specifications Function Description Measuring range for Air or N 2 X 10 to 2 X 10 Torr; 3 X 10 to 3 X 10 mbar; 3 X 10 to 3pascal UHV Gauge (1.0 mA emission) Extended Range Gauge 2 X 10 to 2 X 10...
  • Page 17 2 Introduction Table 2-4 Series 275 Convectron Gauge Specifications Function Description Measuring range for Air or N 1 x 10 to 1000 Torr (See Section 4.4.6 and Section 4.4.7 of Operation in the range of 1x10 to 1x10 Torr will require peri- this instruction manual for correction odic verification of the zero by reducing system pressure to below curves for other gases.)

  • Page 18: Theory Of Operation

    2 Introduction 2.3 Theory of Operation 2.3.1 Stabil-Ion Gauge Theory of Operation Ion collector Precision-wound, stress-relieved grid Grid support, 3 places Tensioned filaments Stabil-Ion Gauge illustration Stabil-Ion Gauge shown with the Principle of Operation: Electrons shown with part of the stainless stainless steel cover removed for are created by a hot filament and steel cover and heat shield...

  • Page 19: Ray Limit Of Bayard-Alpert Gauges

    2 Introduction The development of the Stabil-Ion Gauge brought the accuracy of B-A technology to the 4% to 6% range. Although prior B-A style vacuum gauges were usually inaccurate as much as 20% to 50%, they were still the best, commonly available vacuum gauge in the 1 x 10 to 2 x 10 Torr range.

  • Page 20: Degassing Bayard-Alpert Gauges

    2 Introduction 2.3.4 Degassing Bayard-Alpert Gauges The deposition of elements or compounds on exposed gauge surfaces can result from some processes, such as sputtering or coating operations. Water vapor is another compound that can collect inside the gauge when a vacuum chamber is exposed to atmosphere. During normal operation these materials will slowly come off the gauge surfaces, increasing the local pressure in the gauge.

  • Page 21: Convectron Gauge Construction

    2 Introduction 2.3.5.1 Convectron Gauge Construction All materials have been chosen for ultra high vacuum service, corrosion resistance and bakeability to 150 ºC. The gauge tube envelope is type 304 stainless steel. All metallic joints in the envelope are TIG welded. No solder is used within the envelope. The following materials are exposed to the vacuum: •...

  • Page 22: Chapter 3 Installation

    Chapter 3 Installation 3.1 Receiving Inspection Inspect all material received for shipping damage. Confirm that your shipment includes all of the products and options you ordered. If materials are missing or damaged, the carrier that made the delivery must be notified within 15 days of delivery in accordance with Interstate Commerce regulations in order to file a valid claim with the carrier.

  • Page 23: Devicenet Cables

    3 Installation Table 3-1 Controller and DeviceNet Power Requirements Connector Surge Current Operating Current Input Voltage Pin Connection Power 0.8 A @ Low 24 Vdc +V : A1, 1, 3 -V : A2, 2, 5 Power 1.0 A @ High 24 Vdc +V : A1, 1, 3 -V : A2, 2, 5...

  • Page 24: Emc Compliance

    Granville-Phillips or not, be installed in accordance with the safety requirements of NEC/NFPA 70. Cables provided by Granville-Phillips for connection to sensors or transducers is, at a minimum, designed for use as Appliance Wiring Material (UL category AVLV2), and is constructed of appropriate material and dimensions for the voltages and currents provided by the Stabil-Ion Gauge Controller unit.
  • Page 25 3 Installation To minimize temperature effects, locate the Stabil-Ion Gauge away from internal and external heat sources in a region where the ambient temperature is reasonably constant. Avoid mounting the gauge near strong magnetic fields. To minimize the possibility of leaks with Conflat flanges, use high strength stainless steel bolts and a new, clean OFHC copper gasket.

  • Page 26: Convectron Gauge Installation

    3 Installation 3.4 Convectron Gauge Installation Cleanliness pays. Keep the port cover in place until moments before installation. For proper operation above about 1 Torr, install Convectron gauges with the gauge axis horizontal. See Section 3.4.1 and Figure 3-3. Although the gauge will read correctly below 1 Torr when mounted in any position, erroneous readings will result at pressures above 1 Torr if the gauge axis is not horizontal.

  • Page 27: Convectron Gauge Mounting Locations

    3 Installation 3.4.2 Convectron Gauge Mounting Locations Where you mount the gauge is critical to obtaining reliable pressure measurements. To minimize temperature effects, locate pressure gauges away from internal and external heat sources in an area where the ambient temperature is reasonably constant. Long tubing or other constrictions can cause large errors in pressure readings.

  • Page 28: Gauge Mounts

    3 Installation Table 3-2 Convectron Gauge Fittings Fitting Description Dimension H 1/8 NPT pipe thread 1/8 NPT pipe thread 2.5 cm (1.0 in.) 1/2 inch compression fitting 1/2 inch quick connect/weld VCR-type female fitting 1/4 inch VCR-type female fitting 3.0 cm (1.2 in.) 1/2 inch VCR-type female fitting 3.9 cm (1.4 in.) ConFlat-type flange...

  • Page 29: System Grounding

    3 Installation 3.5 System Grounding When high voltage is present, all exposed conductors of a vacuum system must be maintained at earth ground. Under certain conditions, dangerously high voltage can be conducted through a gas directly to an ungrounded conductor almost as effectively as through a copper wire. The ability of an electric current to flow through a gas under certain circumstances poses a serious risk.

  • Page 30: System Ground Test Procedure

    3 Installation WARNING − The placement of a second ground wire (dashed line in Figure 3−5) between the vacuum chamber and the 330 Vacuum Gauge Controller chassis is NOT safe − large currents could flow through it. WARNING − After each maintenance/service procedure and before operating the controller and vacuum system, make sure that your vacuum system and controller are grounded as shown in Figure 3−5.

  • Page 31: Setpoint Connector Wiring

    3 Installation Examine the grounding of both the 352 Vacuum Gauge Controller and the vacuum chamber. Make sure there is a heavy duty ground connection to all exposed conductors on the chamber and to all exposed conductors on the vacuum chamber. With the 352 VGC turned OFF, test for both DC and AC voltages between the metal parts of the vacuum chamber and the power supply chassis.

  • Page 32: Chapter 4 Operation

    Chapter 4 Operation Figure 4-1 Series 352 Controller with DeviceNet Interface 4.1 Module Status LEDs Two LEDs – Module Status and Network Status – on the front panel of the Controller indicate the current status of the Controller. 4.1.1 Module Status LED Table 4-1 Module Status LED Status...

  • Page 33: Network Status Led

    4 Operation 4.1.2 Network Status LED Table 4-2 Network Status LED Status No power to the Controller. The Controller is not online. The Controller has not yet completed the Dup_MAC_ID test. Green The Controller is on-line with connections in the established state. The Controller is allocated to a Master.

  • Page 34: Setpoint Adjust Potentiometer

    4 Operation Table 4-3 Baud Rate Switch Settings Maximum Cable Length Baud Rate Setting 500 meters 125 K 250 meters 250 K 100 meters 500 K 4.2.3 Setpoint Adjust Potentiometer Adjusts the pressure setpoint value from Zero to Atmosphere for Convectron Gauge 1 (CG1). See Section 4.4.3 for adjustment procedures.

  • Page 35: Example

    Table 4-4 Stabil-Ion Gauge Sensitivity Ratios (r) 0.18 0.30 0.35 0.46 1.00 1.00 1.01 1.05 1.12 1.16 1.29 1.42 1.94 2.50 2.87 3.64 4.3.3 Example Pressure measurement for air or nitrogen indicates a pressure of 5 x 10 Torr. If the gas type in the system is known to be neon, then 5 x 10 Torr...

  • Page 36: Pressure Indication During Degas

    4 Operation The Series 352 Vacuum Gauge Controller employs electron bombardment (EB) degassing of gauge electrodes, which is the most direct and efficient means to remove contaminants. High energy electrons strike the anode, and heat the anode to remove any foreign materials while the increased filament power effectively cleans the filament surface.

  • Page 37: Convectron Gauge Operation

    4 Operation 4.4 Convectron Gauge Operation 4.4.1 Preparing for Pressure Measurement The steps in this chapter assume: • The 275 Convectron Gauge was properly set up and installed per the instructions in Chapter 3. • The gas in your vacuum system is Air or N .
  • Page 38 4 Operation Slowly adjust the Setpoint potentiometer on the front panel of the 352 Controller clockwise until the relay energizes. You can see when the relay trips by monitoring the voltage across pins 8 and 9 of the 9-pin D connector on the Controller, or by noticing when the setpoint signal goes to the device being controlled by the setpoint relay.

  • Page 39: Reading Pressure

    4 Operation 4.4.4 Reading Pressure Pressure for the Convectron gauges is read only from the DeviceNet interface. A network POLL returns data as A/D counts. See Chapter 5 for the protocol. The response from the Convectron Gauge can be converted to pressure as indicated in Table 4-6. The count value is equivalent to 410 counts/volt on a scale of 0 to 9 Volts.

  • Page 40: Special Considerations For Use Below 10-3 Torr

    4 Operation 4.4.5 Special Considerations For Use Below 10 Torr During a fast pumpdown from atmosphere, thermal effects will prevent the Convectron from tracking pressure rapidly below 10 Torr. After about 15 minutes, readings in the 10 range will be valid and response will be rapid.
  • Page 41 4 Operation A useful interpretation of these curves is: at a true pressure of 2 x 10 Torr of CH the heat loss from the sensor is the same as at a pressure of 3 x 10 Torr of N (refer to Figure 4-4).
  • Page 42 4 Operation Figure 4-3 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 100 mTorr Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...
  • Page 43 4 Operation Figure 4-4 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...
  • Page 44 4 Operation Figure 4-5 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...
  • Page 45 4 Operation Figure 4-6 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 0.1 mbar Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...
  • Page 46 4 Operation Figure 4-7 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mTorr Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...
  • Page 47 4 Operation Figure 4-8 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mbar Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...

  • Page 48: Adjustment Of Convectron Gauge Zero And Atmospheric Pressure Indications

    4 Operation 4.5 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system. See Section 4.4.6 on page 39 and Section 4.4.7 on page 39 before using with other gases.
  • Page 49 4 Operation Table 4-8 Data Values for Atmosphere Calibration Altitude in Pressure in Torr Decimal Count Hex Count Value Feet - Above for N2 or Air Value Sea Level 57440 E060 1000 57272 DFB8 2000 57110 DF15 3000 56932 DE63 4000 56755 DDB2...

  • Page 50: Chapter 5 Devicenet Operation

    Chapter 5 DeviceNet Operation 5.1 DeviceNet Protocol for the Series 352 Controller The Series 352 Vacuum Gauge Controller is based on the Open DeviceNet Vendors Association (ODVA) standard. The command set includes public and vendor-specific classes, services, and attributes. DeviceNet communication requires identifier fields for the data. The use of identifier fields provides the means for multiple priority levels, efficient transfer of I/O data, and multiple consumers.

  • Page 51: Devicenet Object

    5 DeviceNet Operation None None None Reset module to power-up state Open 5.1.1.2 DeviceNet Object There is a single instance of the DeviceNet Object for the Mini-Convectron Module. No class attributes are supported. Table 5-4 Explicit Message Summary - DeviceNet Object Service Class Instance...

  • Page 52: Parameter Object

    5 DeviceNet Operation Table 5-6 Explicit Message Summary - DeviceNet Object Service Class Instance Attribute Master data Device data Data type Description Type None USINT Get state of the object, range 0–5 Open None USINT Get instance type, explicit Open None BYTE Get transport class trigger...
  • Page 53 5 DeviceNet Operation Table 5-8 Explicit Message Summary - Parameter Object Service Class Instance Attribute Master data Device data Data type Description Type None 00 00 UINT Indicate data used with last "set" Vendor specific 00 00 None UINT Ion gauge offset calibration Vendor specific None 60 E0...

  • Page 54: Polled Data

    5 DeviceNet Operation 5.1.1.6 Polled Data A network POLL will return Convectron data as A/D counts. This response can be converted to pressure as indicated in Table 5-9. The maximum value is 0FFF or 2^12 counts. Table 5-9 Polled Data to Pressure Conversion Pressure (Torr) A/D Counts Hex Counts...
  • Page 55 5 DeviceNet Operation Notes Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...

  • Page 56: Chapter 6 Service And Maintenance

    Chapter 6 Service and Maintenance 6.1 Service Guidelines If a Qualified Service Person makes repairs at the component level, repairs properly made with equivalent electronic parts and rosin core solder do not void the warranty. The Series 352 Vacuum Gauge Controller contains static-sensitive electronic parts. The following precautions must be followed when troubleshooting: •...

  • Page 57: Damage Requiring Service

    If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials document may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 58: Troubleshooting

    6 Service and Maintenance 6.4 Troubleshooting 6.4.1 Stabil-Ion Module Troubleshooting Procedures Table 6-1 presents problems along with possible causes and corrective actions. Table 6-1 General Symptoms/Possible Causes Problem Possible Cause Corrective Action Unit will not power-up: No power supplied to the module. Check for +11 Vdc to +24 Vdc power across pins 2 and 3 of the DeviceNet connector.

  • Page 59: Convectron Gauge Test Procedure

    6 Service and Maintenance Problem Possible Cause Corrective Action The Stabil-Ion Gauge shuts OFF 1. The pressure has increased above 1. Repeat degas procedure until the during degas: 5 x 10 Torr. pressure remains below 5 x 10 Torr for the entire cycle.

  • Page 60: Convectron Gauge Symptoms And Possible Causes

    6 Service and Maintenance Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45 degrees. Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to the point where it touches the screen.
  • Page 61 6 Service and Maintenance Notes Series 352 Vacuum Gauge Controller with DeviceNet Instruction Manual - 352004 - Rev. A...

  • Page 62: Chapter 7 Index

    Index Overpressure Conditions Overpressure Shutdown Calibration Convectron Gauge Cleaning Contaminated Gauges Process Control Relay Settings Controller Specifications Convectron Gauge Adjusting Atmospheric Pressure Indications Replacement Parts Calibration Returning a Module for Service Cleaning Contaminated Gauges Indicated vs. True Pressure Curves Installation Safety Instructions Operation Service...
  • Page 65 For Customer Service or Technical Support 24 hours per day, 7 days per week, every day of the year including holidays: Phone: +1-800-227-8766 or +1-303-652-4691 MKS, Granville-Phillips Division 6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: 1-303-652-4691 or 1-800-776-6543...

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