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Granville-Phillips Series 330 Instruction Manual

Vacuum gauge controller
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Series 330
Granville-Phillips
Vacuum Gauge Controller
Instruction Manual
Instruction manual part number 330004
Revision 02 - August 2008
®
Series 330

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Summary of Contents for Granville-Phillips Series 330

  • Page 1 Series 330 ® Granville-Phillips Series 330 Vacuum Gauge Controller Instruction Manual Instruction manual part number 330004 Revision 02 - August 2008...
  • Page 3 Series 330 Granville-Phillips Series 330 Vacuum Measurement Controller This Instruction Manual is for use with all Granville-Phillips Series 330 Vacuum Measurement Controllers. A list of applicable catalog numbers is provided on the following page. Customer Service/Support For customer service, 24 hours per day, 7 days per week,...

  • Page 4: United Kingdom 240 V

    Granville-Phillips Series 330 Vacuum Gauge Controller ® Catalog numbers for Series 330 Controllers Controller for one Ionization gauge, with one-line display, resistive degas, and remote input/output interface Half-rack mount: 330501 - # # Left mount for 19-inch rack: 330502 - # #...

  • Page 5: Table Of Contents

    2.2 The Series 330 Vacuum Gauge Controller ........
  • Page 6 5.8 Convectron Gauge Specifications ............58 Series 330 Vacuum Gauge Controller...
  • Page 7 Chapter 9 Index ................73 Series 330 Vacuum Gauge Controller...
  • Page 8 Table of Contents Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 9: Chapter 1 Safety Instructions

    − personal safety, property damage or danger from electric shock. Read these instructions carefully. Throughout this instruction manual the word “product” refers to the Series 330 Vacuum Gauge Controller and all of its approved parts and accessories. NOTE: These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product.
  • Page 10 A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential. This hazard is not unique to this product. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 11: Equipment Grounding

    Gas cylinder valve positions are correct on manual systems, and c. The automation is correct on automated gas delivery systems. d. Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 12 Use only in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 13: Damage Requiring Service

    If the module must be returned to the factory for service, request a Return Authorization (RA) from Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RA. In some cases a hazardous materials document may be required. The Brooks Automation / Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 14: Warranty Information

    Brooks Automation, Inc. provides an eighteen (18) month warranty from the date of shipment for new Granville-Phillips Products. The Brooks Automation, Inc. General Terms and Conditions of Sale provides the complete and exclusive warranty for Brooks Automation products. This document may be located on our web site at www.brooks.com, or may be obtained by contacting a Brooks...

  • Page 15: Chapter 2 Installation

    Customer Service Department, 6450 Dry Creek Parkway, Longmont, Colorado 80503, phone 303-652-4400, email csr-co@brooks.com. 2.2 The Series 330 Vacuum Gauge Controller The 330 Vacuum Gauge Controller (VGC) is provided with a single ionization gauge control. It can be used to measure pressures from less than 1 x 10 Torr (1.3 x 10...

  • Page 16: Available Options

    The VGC is capable of operating an ion gauge located up to 50 feet away from the controller by using standard cables. Cables are available for use with glass Bayard-Alpert gauges, and nude Bayard-Alpert gauges. See Section 2.5. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 17: Initial Vgc Setup And Installation

    Slide the cover to the right over fuse F2. 2.4.2 Mounting Configurations Figure 2-2 illustrates the various configurations available for mounting the Series 330 Vacuum Gauge Controller. NOTE: The 330 controller should be mounted in a location with free air flow...
  • Page 18 2 Installation Figure 2-2 330 VGC Mounting Configurations Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 19: Ionization Gauge Types And Installation

    2.5 Ionization Gauge Types and Installation The 330 VGC operates a Bayard-Alpert type or equivalent ionization gauge. It is ideally suited for a nude ionization gauge such as the Granville-Phillips 274022 or 274023 which have an X-ray limit in the low 10 Torr range.

  • Page 20: Ion Gauge Cables

    Ionization gauges are safe for use only if all exposed conductors on the gauge and on controller and on vacuum system are grounded. 2.5.1 Ion Gauge Cables Figure 2-4 Ion Gauge Cable for Granville-Phillips Glass Gauges Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 21 2 Installation Figure 2-5 Ion Gauge Cable for Granville-Phillips Nude Gauges Figure 2-6 Ion Gauge Cable for Granville-Phillips Nude Gauges Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 22: System Grounding Procedure

    Vent the vacuum chamber to atmospheric pressure and shut OFF power to the controller before you touch the pins on the gauge. Figure 2-7 System Grounding Diagram Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 23 O-ring must be connected to ground if a Micro-Ion gauge is to be used or if other high voltage sources are present in the vacuum system. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 24: System Ground Test Procedure

    The commonality of the grounds may be satisfactory and the coupling poor, or the commonality could be poor. Be sure to check the electrical continuity between these two ground systems. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 25: Chapter 3 Operation

    A description of the controls and indicators found on a basic 330 VGC is given in this section. For detailed instructions pertaining to particular functions, consult the chapter for that function. Figure 3-1 Series 330 Vacuum Gauge Controller Front Panel Series 330 Vacuum Gauge Controller Rear Panel Figure 3-2...

  • Page 26: Electrometer Module Units Of Measure

    3 Operation Series 330 Vacuum Gauge Controller Rear Panel Figure 3-3 (with Ionization Gauge Electrometer and Process Control Modules) Series 330 Vacuum Gauge Controller Rear Panel Figure 3-4 (with Ionization Gauge Electrometer and Convectron Gauge or Thermocouple Modules) 3.1.1 Electrometer Module Units of Measure The Units of Measure Display (Figure 3-1) is selectable via a switch on the Electrometer Module.

  • Page 27: Power On/Off

    These inputs have passive pull-ups. A single-pole, double-throw relay is provided to indicate filament status (the normally open contact is open when the filament is OFF). Refer to Table 3-1. Table 3-1 Series 330 Remote Input/Output Connector for the Ion Gauge Pin Number Function...

  • Page 28: Theory Of Operation

    R degas, a large current is passed through the grid structure, raising its temperature and driving off contaminants. NOTE: Some ionization gauge designs do not allow I R degas. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 29: Convectron Gauge Theory Of Operation

    Inter-processor communication is accomplished via the display bus. These lines carry BCD-format pressure data which is used to generate the 330 display. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 30: Specifications

    3 Operation 3.3 Specifications 3.3.1 330 VGC Specifications Table 3-2 Series 330 VGC Physical Specifications Parameter Specification Width 241 mm (9.5 in.) with 1/2 rack mounting brackets Height 89 mm (3.5 in.) Depth 356 mm (14 in.) includes 76 mm (3 in.) for connectors and cables Weight 4.8 kg (10.5 lb.)

  • Page 31: Convectron Gauge Specifications

    G-P 270006, or Teledyne-Hastings DV-6M, DV-6R, DV-20, or equivalent Pressure Range Torr to 1 Torr Nitrogen or air equivalent Gas Type or Air Analog Output Voltage 0-10 Vdc nonlinear Maximum Current 5 mA Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 32: Remote Input/Output

    Contact Rating 5A @ 120 VAC, 4A @ 240 VAC resistive, or 5A @ 30 Vdc Channels 2 maximum Hysteresis Setpoint Adjustment Digital, 2 significant digits plus exponent Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 33: Chapter 4 Electrometer Module

    4.2 Installation 4.2.1 Units of Measure The Series 330 Vacuum Gauge Controller (VGC) is shipped from the factory preset to display the unit of measure - Torr, millibar, or pascal - that you requested. To change the units, proceed as follows: Turn OFF power to the control unit.

  • Page 34: Display Update Rate Switch

    NOTE: If the CAL switch is not in the center position, the display will blink at a two second rate in this mode to warn the user that pressure is not being displayed. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 35: Emission Range Switch

    The 330 VGC is shipped from the factory set for a gauge sensitivity of 10/Torr, which is typical for glass Bayard-Alpert gauges. UHV nude gauges, such as the Granville-Phillips 274022, 274023 and 274028, typically have a sensitivity of about 25/Torr for N .

  • Page 36: Relative Gas Sensitivities

    Torr at 10 mA emission current. Emission range setting affects the scaling of the analog output, refer to Figure 4-4. When the ion gauge is turned OFF, the output will switch to slightly over +10 V. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 37 For 10 mA emission, PRESSURE = 10 (volts-11) For 1 mA emission, PRESSURE = 10 (volts-10) For 0.1 mA emission, PRESSURE = 10 Figure 4-4 Analog Output (in Vdc) Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 38: Electrometer Calibration

    Rotate the adjustment potentiometer clockwise slowly until the ion gauge turns OFF. 4.4.4 A/D Calibration This is a factory calibration point and should not be changed by the user. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 39: Chapter 5 Convectron Gauge Module

    5.1.1 Units of Measure for a Convectron Gauge The Series 330 Controller is shipped from the factory preset to display the units of measure, Torr, mbar, or pascal, that you requested. To change the units of measure for the Convectron Gauge: Turn OFF power to the Controller.

  • Page 40: Convectron Gauge Tube Installation

    5.2 Convectron Gauge Tube Installation 5.2.1 Important Precautions for Gauge Tube Installation Convectron gauges should not be used above 999 Torr true pressure. The Series 330 Vacuum Gauge Controller is calibrated for Air/N Do not attempt to use a Convectron gauge calibrated for N...
  • Page 41 Do not install the gauge where high amplitudes of vibration are present. Excessive vibration will cause forced convection at high pressure giving erroneous readings. Do not bake the gauge to temperatures above 150 ºC. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 42: Gauge Orientation

    Mounting clearance dimensions are shown in Figure 5-3. Figure 5-3 Convectron Gauge Mounting Configurations Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 43: Compression Mount (Quick Connect)

    -1 fittings, 2-3/4 inch rotatable and non-rotatable CuSeal flanges, 1-5/16 inch non-rotatable CuSeal flange, and welded NW16 and NW25 SST flanges. 5.2.7 Convectron Gauge Cables Connect the provided cable(s) to the Controller and Convectron Gauge(s). Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 44: Convectron Operation

    See Section 5.3.6 on page 54 for vacuum and atmosphere calibration procedures. For accurate use in the 10 Torr range, zeroing should be repeated frequently. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 45: Use With Gases Other Than N2 And Air

    If you must measure the pressure of gases other than N or Air, use Figures 5-5 through 5-10 to determine the maximum safe indicated pressure for the other gas as explained below. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 46 Torr on the left hand scale, travel horizontally to the right to attempt to intersect the He curve. Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 47 5 Convectron Gauge Module Figure 5-5 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 100 mTorr Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 48 5 Convectron Gauge Module Figure 5-6 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 49 5 Convectron Gauge Module Figure 5-7 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 Torr Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 50 5 Convectron Gauge Module Figure 5-8 Convectron Gauge Indicated vs. True Pressure Curve; 10 to 0.1 mbar Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 51 5 Convectron Gauge Module Figure 5-9 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mTorr Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 52 5 Convectron Gauge Module Figure 5-10 Convectron Gauge Indicated vs. True Pressure Curve; 0.1 to 1000 mbar Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 53: Convectron Gauge Analog Output Signal

    1 x 10 Torr between –7 V and +1 V. See Figure 5-12. Figure 5-11 Convectron Gauge Analog Output Signal Offset Adjustment Potentiometers Figure 5-12 Convectron Gauge Pressure Analog Output Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 54: Gauge Zero And Atmospheric Pressure Adjustments

    For example, if the offset has been adjusted so that the output voltage is –7 V at 1 x 10 Torr, the equation wuold be Pi = V Torr/mbar. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 55: Analog Output Full Scale Adjustment

    Allow gauge tube to dry overnight with the port vertically downward and uncapped. Be certain no solvent odor remains before reinstalling gauge tube on the system. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 56: Convectron Gauge Theory Of Operation

    • Kovar • Kapton gold plated tungsten • Borosilicate glass • Dow-Corning 9015 glass The blue trim cover is molded of polysulfone thermoplastic suitable for service to 150 ºC. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 57: Convectron Troubleshooting

    (e.g., by reactive gas), gauge very dirty, extremes of temperature or mechanical vibration. * Refer to Figure 5-1 for component locations. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 58: Convectron Gauge Specifications

    Logarithmic, 1Vdc/decade, Factory set to 0-7 V Adjustable offset +1 V to -7 V, . 5 mA maximum current Maximum Gauge Temperature +150 Gauge Operating Temperature C to +50 Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 59: Chapter 6 Thermocouple Gauge Module

    1/8 inch miniature phone jacks. 6.1.1 Units of Measure The Series 330 Controller is shipped from the factory preset to display the units of measure, Torr, mbar, or pascal, that you requested. To change the units of measure for the thermocouple gauge: Turn OFF power to the Controller.

  • Page 60: Thermocouple Gauge Tube Installation

    Thermocouple Module Front and Rear Panels 6.1.2 Thermocouple Gauge Tube Installation The 330 VGC thermocouple gauge module is designed to operate with Granville-Phillips 270006 or comparable transducers. (See Section 6.4 Thermocouple Gauge Specifications on page 62 for other compatible transducers).

  • Page 61: Thermocouple Gauge Operation

    330 VGC. See Figure 6-2. The voltage output signal is 0 to 10 Vdc, nonlinear. See Figure 6-4. Figure 6-4 Thermocouple Gauge Pressure / Analog Output Chart Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 62: Thermocouple Gauge Calibration

    G-P 270006, or Teledyne-Hastings DV-6M, DV-6R, DV-20, or equivalent Pressure Range Torr to 1 Torr Nitrogen or air equivalent Gas Type or Air Analog Output Voltage 0-10 Vdc nonlinear Maximum Current 5 mA Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 63: Chapter 7 Process Control Module

    Prior to connecting the process controls to the system, it is recommended that the following steps be followed. If application assistance is desired, contact a Brooks Automation, Inc. / Granville-Phillips Customer Service Representative. Contact information is provided on the front and back covers, and in the Service and Maintenance chapter.

  • Page 64: Process Control Operation

    If it is desired that a process control be held in one state, the manual override switch should be used. If the setpoint is adjusted below 1 x 10 to 0, it will always be deactivated (unless polarity is reversed). Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 65: To Display A Setpoint

    6.3 Torr, the relay will activate when the display reaches 6.2 Torr (for falling pressure) and will deactivate when the pressure rises to one significant digit above the setpoint Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 66: Relay Polarity Setting

    This is the factory setting. Refer to the numbers on the printed circuit board, not on the switch body itself, for the channel number. Figure 7-3 Process Control Module - Top View (Controller Cover Removed) Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 67: Manual Override

    If a setpoint in the non-volatile memory is found to contain data which is not a valid setpoint, the setpoint will be set to 0. If the Microprocessor LED (Figure 7-3) is illuminated or flashing, there is a circuit failure. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 68: Process Control Specifications

    Contact Rating 5A @ 120 VAC, 4A @ 240 VAC resistive, or 5A @ 30 Vdc Channels 2 maximum Hysteresis Setpoint Adjustment Digital, 2 significant digits plus exponent Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 69: Chapter 8 Service And Maintenance

    If the product must be returned for service, request a Return Authorization (RA) from Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RA. In some cases a hazardous materials document may be required. The Brooks Automation / Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 70: Damage Requiring Service

    8.3.1 Power Input Problems High voltages are present within the power supply, capable of causing injury or death. Use extreme care while troubleshooting while power is applied. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 71: Power Supply Problems

    Test points are located near the top edge of the power supply module as shown in Figure 8-1. NOTE: It is permissible to remove the 34 pin bus cable to eliminate the electrometer or display module as a source of the problem. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 72: Ionization Gauge Filament Turn On And Emission Problems

    5. Grid bias supply shorted by either 5. Troubleshoot and repair. the gauge or the gauge cable. 6. Degraded filament emissive 6. Replace the ion gauge. coating not providing required emission. Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...

  • Page 73: Chapter 9 Index

    Calibration Replacement Parts Emission Adjustment Installation Introduction Safety Operation Alert Symbols Relative Gas Sensitivities Instructions Sensitivity Adjustment 13, 69 Service Guidelines Specifications System Grounding Procedure Units of Measure Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 74 Operation Reading Pressure 31, 62 Specifications Theory of Operation Thermocouple Module Analog Output Introduction Units of Measure Troubleshooting Ionization Gauge Problems Power Input Problems Power Supply Problems Warranty Series 330 Vacuum Gauge Controller Instruction Manual - 330004 - Rev. 02...
  • Page 76 Series 330 ® Granville-Phillips Series 330 Vacuum Gauge Controller 6450 Dry Creek Parkway Longmont, CO 80503 USA Phone: 1-303-652-4400 15 Elizabeth Drive Chelmsford, MA 01824 USA Phone: 1-978-262-2400 Worldwide Customer Service/Support - 24/7 Phone: 1-800-367-4887 To obtain a copy of this instruction manual online, visit our website at www.brooks.com...

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