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Kaufman & Robinson IOC1520-01 Manual

Ion optics controller
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ION OPTICS CONTROLLER MANUAL
Kaufman & Robinson, Inc.
1330 Blue Spruce Drive,
Fort Collins, Colorado 80524
Tel: 970-495-0187, Fax: 970-484-9350
Internet: www.ionsources.com
Copyright © 2014 by Kaufman & Robinson, Inc.
All rights reserved. No part of this publication
may be reproduced without written permission.
January 2016, Version D
Part Number: 9007-0007
Models: IOC1520-01
IOC1510-01
IOC1502-01

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  • Page 1 ION OPTICS CONTROLLER MANUAL Models: IOC1520-01 IOC1510-01 IOC1502-01 Kaufman & Robinson, Inc. 1330 Blue Spruce Drive, Fort Collins, Colorado 80524 Tel: 970-495-0187, Fax: 970-484-9350 Internet: www.ionsources.com Copyright © 2014 by Kaufman & Robinson, Inc. All rights reserved. No part of this publication may be reproduced without written permission.
  • Page 2 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 ® This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 3: Table Of Contents

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 CONTENTS Contents 1. SAFETY ......................1-1 1.1 Installation Category ................1-1 1.2 Grounding....................1-1 2. PRODUCT OVERVIEW ................2-1 2.1 General Description................. 2-1 3. SPECIFICATIONS ..................3-1 3.1 Physical/Mechanical Specs ..............3-1 3.2 Electrical Specs ..................
  • Page 4 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 CONTENTS 6.2.5.4 COM – Enable RS-232 Command or Status Query ....6-7 6.2.5.5 *IDN? ..................6-8 6.2.5.6 *RST ..................6-9 6.2.5.7 *TST – Self Test Query ............6-9 6.2.5.8 P – Program Value Read/Write Command ......6-10 6.2.5.9 OUT –...

  • Page 5: Legend Of Symbols

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 LEGEND OF SYMBOLS Warning: Danger of High Voltage Personal Injury Warning: Indicates death, serious injury, or property dam- age can result if proper precautions ar not taken. Caution: Indicates some injury or property damage ma y result if proper precautions are not taken.
  • Page 6 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 7: Safety

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 SAFETY 1. SAFETY Warning: Manual should be read before you install, operate, or maintain this product. Failure to follow instruc- tions can lead to personal injury and/or property damage. If the equipment is used in a manner not specified by KRI, the protection provided by the equipment may be impaired.
  • Page 8 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 9: Product Overview

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 PRODUCT OVERVIEW 2. PRODUCT OVERVIEW 2.1 General Description The Kaufman & Robinson, Inc. (KRI ) Ion Optics Controllers are intended to ® be used with gridded ion sources to power the optics for ion extraction from a plasma discharge.

  • Page 10: Figure 2-1. A Simplified Schematic Diagram Of An Rf Gridded Ion Source And The Kri Ion Optics Controller

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 PRODUCT OVERVIEW RF coil Ba e Discharge chamber Screen Accelerator grid grid Neut. Neut. Beam Accel cont. Ion optics controller Figure 2-1. A simplified schematic diagram of an RF gridded ion source and the Ion Optics Controller.

  • Page 11: Specifications

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 SPECIFICATIONS 3. SPECIFICATIONS 3.1 Physical/Mechanical Specs Table 3-1. Mechanical Specification Description Specification 3.5”(H) x 19”(W) x 20”(D) 8.9cm x 48.3cm x 50.8cm Size Note: These measurements do not include mating connectors, cables, or mounting brackets.

  • Page 12: Figure 3-1. Outline/Mounting Drawings

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 SPECIFICATIONS Figure 3-1. Outline/Mounting Drawings. _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 13: Electrical Specs

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 SPECIFICATIONS 3.2 Electrical Specs Table 3-2. Electrical Specification Description Specification Input Power IOC1520 = 1-phase 230Vac +20/-10% for 3000W Line Voltage *2500W max output at 200/208V line voltages. IOC1510/IOC1502 = 1-phase 200V - 240Vac...

  • Page 14: Environmental Specs

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 SPECIFICATIONS 3.3 Environmental Specs Table 3-3. Environmental Specification Description Specification Operating Ambient Temperature 5C to +40C Storage Temperature -25C to +55C Operating Humidity 5% to 85% (non condensing) Storage Humidity...

  • Page 15: Installation

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSTALLATION 4. INSTALLATION This section describes how to install the Kaufman & Robinson, Inc. (KRI ) Ion ® Optics Controller. A typical use of this controller is with a gridded radio frequency (rf) ion source, and is the use assumed in this section.

  • Page 16: Inspection And Installation

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSPECTION AND INSTALLATION Figure 4-1. Back Panel View Table 4-1. Back Panel Descriptions Item # Description Beam Output Connector (HN female) Accel Output Connector (HN female) Molex Interlock Connector...

  • Page 17: Output Power Connections

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSTALLATION 4.3.2 Output Power Connections The product has two power outputs for the Beam and Accelerator. Warning: Lethal voltages can exist at the power supply out- puts. AC power must be disconnected before dis- connection or connecting the output connectors.

  • Page 18: Rs-485 Autocontroller Communication Connection

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSPECTION AND INSTALLATION 4.3.5 RS-485 Autocontroller Communication Connection The Ion Optics Controller has a RS-485 communication port on the rear of the unit. This RS-485 connection is not for general use by the user. See Figure 4-1.

  • Page 19: Ac Input Power

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSTALLATION two turns of the wires should be wrapped around the supplied suppression ferrite as shown below to meet radiated emissions requirements. 4.3.7 AC Input Power Warning: Connection of AC power should be made by quali- fied personal.
  • Page 20 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSPECTION AND INSTALLATION Initial setup sequence: 1. Start with power (far left rocker switch) in OFF position. 2. Press and hold the Local/Remote button in, while turning power ON.
  • Page 21 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSTALLATION 4. The display should show the message SEt rCh 15. This is for future ex- pansion options only and currently should always be set to 15. The de- fault value is 15.
  • Page 22 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSPECTION AND INSTALLATION 5. The display should show the message 1500 SEt with the 1500 being in the Beam Volts display. You are setting the maximum permissible beam voltage by turning the knob. Set it to the maximum value you expect to use.
  • Page 23 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 INSTALLATION 8. The display should show the message SEt 1000 or whatever the maxi- mum current for you model is with the 1000 being in the Accel mAmps display. You are setting the maximum permissible accel current by turning the knob.
  • Page 24 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 10. The display should show the message Set Hbt. This is to set the RS-232 heartbeat timeout value. This setting requires valid RS-232 commands to be continually received within this timeout value after receiving the COM:1 command when the unit is in RS-232 remote.

  • Page 25: Local Operation

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 LOCAL OPERATION 5. LOCAL OPERATION The Ion Optics controller has a full set of front panel controls and indicators that allow the user to easily setup and operator the unit. To operate the unit in local control mode press the Local/Remote button until the Local LED is lit.

  • Page 26: Front Panel Controls And Indicators

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 5.1 Front Panel Controls and Indicators Table 5-1. Front Panel Descriptions Item # Description AC on/off switch Beam Voltage Display Beam Current Display Accel Voltage Display Accel Current Display...

  • Page 27: Remote Control

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6. REMOTE CONTROL The Ion Optics controller can be controlled remotely by analog control, RS-232 control, or via a KRI only port for communication with an autocontroller. To remotely control the unit you must first place the unit into remote mode by pressing the Lo- cal/Remote button until the Remote LED is lit.
  • Page 28 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL Name Type Description Beam current readback. Scaled 0 to 5V = 0 to max current. Except as noted below . Referenced to BMI Readback Output pins 3,6,11,12,16,17.
  • Page 29 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL Name Type Description +5V reference for analog signals. 10mA max output current from all +5v reference Output +5V pins 13,15, and 25. Refer- enced to pins 3,6,11,12,16,17.

  • Page 30: Rs232 Control

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6.2 RS232 Control The Ion Optics Controller can be fully controlled remotely using the RS-232 se- rial port. 6.2.1 RS-232 Interface Cable The interface cable for the controller must be a straight through type and must have a male DB-9 connector to connect to the female connector on the rear panel of the Controller.

  • Page 31: Command, Queries, And Responses

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6.2.3 Command, Queries, and Responses The following conventions are used for the command and query descriptions in the following subsections: " " - Text or numerical values inside double quotation marks indicate the exact response from the Controller.

  • Page 32: Rs232 Command List

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6.2.5 RS232 Command List Below are the RS-232 commands for the product. The command list can be displayed at any time using a terminal program and simply press <cr>. To display the help definitions use the command HELP followed by a <cr>.

  • Page 33: Help

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6.2.5.2 HELP The HELP command will report out all the help/error code definitions. Example: HELP<cr> Response: HLP/Error # Definitions Thermal Fault (broken Thermistor) Unit Not Ready (Low Line Voltage)

  • Page 34: Idn

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL The default power-up state is 'Disabled'. The unit must be in the 'Standby' state to 'Enable' the RS-232 remote mode. Once 'Enabled', the RS-232 remote control locks out all front panel controls. Once the RS-232 is 'Enabled' the unit must be in 'Standby' in order to return control to the front panel 'Local' or rear analog 'Remote'.

  • Page 35: Rst

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6.2.5.6 *RST The *RST command will turn ECHO mode off and set the COM remote mode back to 0. This is also used to clear HELP 23 error messages due to a RS-232 heartbeat timer fault.

  • Page 36: P - Program Value Read/Write Command

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 6-10 REMOTE CONTROL 6.2.5.8 P – Program Value Read/Write Command The P command is used to set or query the values for individual parameters or for a string of parameters depending on the format of the command.

  • Page 37: Out - Enable Outputs Command

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6-11 NOTE: In the following examples, the comma-delimited strings are shown with their mnemonic equivalents listed above. In real use, these abbreviations would be actual numerical values.

  • Page 38: R - Report Actual Values Command

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 6-12 REMOTE CONTROL Example: OUT:00 <cr> - Put both Beam and Discharge in 'Standby'. Response: “OK” Example: OUT:10 <cr><lf> - Put Beam in 'enable' and Accel in 'Standby'. Response: “OK”...

  • Page 39: Automated Control Via Autocontroller - Rs-485

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 REMOTE CONTROL 6-13 6.3 Automated Control Via Autocontroller – RS-485 The Ion Optics Controller can be automatically controlled with a KRI controller via the RS-485 port on the back of the unit. This port is only be used with a KRI autocontroller.
  • Page 40 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 41: Arc Handling

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 ARC HANDLING 7. ARC HANDLING The Ion Optics Controller has basic arc handling which shuts the output off for ~400us after an arc has occurred which decreases the output volage by >50% of the operating voltage.
  • Page 42 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 43: Troubleshooting

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 TROUBLESHOOTING 8. TROUBLESHOOTING The following table provides a guide to troubleshoot problems and help determine the cause of the problem. Table 8-1. Troubleshooting Symptom Description/ Resolution Thermal Fault (broken Thermistor).
  • Page 44 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 TROUBLESHOOTING Symptom Description/ Resolution Beam Supply Current Fault. Primary current trip for the beam supply. Display shows HELP 104 Product needs sent back to KRI for repair. Accel Supply Current Fault. Primary current trip for the accel supply.

  • Page 45: Maintenance

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 MAINTENANCE 9. MAINTENANCE No routine maintenance of the power supply is required except for periodic clean- ing. To clean, disconnect the unit from the AC supply and allow 30sec. for discharg- ing internal voltage.
  • Page 46 ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 This Page Is Intentionally Blank _______________________________________________________________________ Copyright © 2014 by Kaufman & Robinson, Inc., 1330 Blue Spruce Drive, Fort Collins, CO 80524 Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com...

  • Page 47: Warranty

    ION OPTICS CONTROLLER MANUAL 9007-0007 Version D Models: IOC1520-01 IOC1510-01 IOC1502-01 WARRANTY 10-1 10. WARRANTY The Kaufman & Robinson, Inc., KRI , Ion Optics Controller is warranted for one ® years against manufacturer defects in materials or workmanship. The one years...

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