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JEOL NeoScope JCM-7000 Quick Manual
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JEOL NeoScope JCM-7000 Quick Manual

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Quick Guide for JCM-7000, NeoScope™

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Summary of Contents for JEOL NeoScope JCM-7000

  • Page 1 Quick Guide for JCM-7000, NeoScope™...
  • Page 2 JEOL USA, Inc., except in the case of brief quotations embodied in critical reviews and certain other noncommercial uses permitted by copyright law.
  • Page 3 Introduction This training guide will take the user through a general overview of the instrument and the software interface highlighting the most commonly used features of the software.
  • Page 4 Instrument Overview Rotary Pump JCM-7000 Main Unit With EDS Option EDS Power Supply Digital Pulse Processor Fits in Power Supply Box Power Supply...
  • Page 5 Software Interface Overview Advanced Observation Settings Guided Workflow Functions Zeromag Manual Condition Setting Live EDS Spectrum Real Time...
  • Page 6 Start Up Turn on the Main Power Supply. When EDS is installed, turn on the EDS power supply and Digital Pulse Processor Push the Power button on the main unit (Blue LED will turn on) Operation Server Turn on the PC From the System Tray of PC, confirm the Operation Server is running.
  • Page 7 Shutdown Remove specimen and evacuate the chamber. Close the SEM control software by clicking on the ‘x’ button on the upper-right of the SEM software interface. An Exit SEM Control Software message box will appear, click on the Yes (Y) button. Shutdown PC Turn off the power to the main SEM unit by pushing on the Power button (blue LED will turn off)
  • Page 8 Software Start Up – Logon When the software starts, the User Management window is displayed. Click on your User name and then Click Logon. The Software will open to the Specimen Exchange window. There are 2 categories of User: Administrator and Standard.
  • Page 9 Account Manager - Creating A User Managing User accounts is through the AccountManager software (separate application). To add/delete a User account, select this icon before launching the SEM software (SEM Operation EZ) To add a User, Click on the Account Manager software then click on Add Next, type in a User name, select the …...
  • Page 10 Data Management Project Specimen 1 Specimen 2 Opens FOV 1 FOV 2 FOV 3 FOV 1 FOV 2 Images SNS, SEM Images, EDS Data and Locations are Linked EDS Data with Smile View™ Lab Data Management Software Location Images and EDS data are stored automatically in a Project file. Therefore, the first step in your workflow is to create a new Project or open an existing Project.
  • Page 11 Software Start Up – Specimen Exchange Input a Project name or open Once logged in, the an existing Specimen Exchange Project here. window is displayed. Follow the steps in this window to insert a specimen. When the specimen is inserted and the SEM chamber door is closed, the system will automatically evacuate.
  • Page 12 Save Settings In addition to the SEM image data saving to a Project file, it is possible to also automatically save the image data in a Windows directory in Tiff, BMP, JPEG or PNG format. From the Specimen Exchange window, select the Settings icon and make sure that Enable autosave is checked in PictureSaveSettings.
  • Page 13 Settings – Eco Mode In EcoSettings, the system can be set to Eco mode when the SEM shows no activity after 10 minutes. Ecomode is activated if checked. This will turn off the electron beam.
  • Page 14 Specimen Preparation 32 mm Holder – Included with the SEM Specimen Stub Fixing Screw Height adjust screw The standard holder that comes with the instrument holds a 32mm insert (stub). Mount the specimen to stub and insert in holder. Adjust the height using the height adjustment screw so that the specimen is flush with the top surface of the holder.
  • Page 15 Specimen Exchange Vent When changing specimens, vent the chamber by either clicking on the Specimen exch. button and then click Vent or alternatively push the Vent button on the main instrument. If vent is selected on the instrument panel, the software will automatically switch to the Specimen exch. window. Note: When the system is fully vented, the chamber door will open automatically.
  • Page 16 Specimen Exchange To take out a holder, turn counter clockwise 45˚ and lift out. notch To insert a holder, make sure the notch on the holder is facing the front and turn clockwise 45˚ to fix in place. Take care that the specimen can clear the height guard.
  • Page 17 Software Start Up – Specimen Exchange Once the SEM chamber door is closed. The system will automatically evacuate the chamber and the following window will be displayed on the software interface. Evacuation time is ~3 minutes. Once the evacuation is completed, the filament will turn on and the auto functions will activate to display a low magnification SEM image.
  • Page 18 Turning On/Off Electron Beam Once the evacuation is completed, the filament will turn on and the auto functions will activate to display a low magnification SEM image. For turning the beam on/off within the SEM Observation screen, click on Quickly eco...
  • Page 19 Main Observation Screen Automatic condition setting based on Advanced Functions application: low mag, high mag, EDS analysis Live EDS Spectrum Manual Condition Setting Real Time...
  • Page 20 Automatic SEM Condition Setting Purpose1 sets the observation purpose where Purpose2 sets the observation conditions Photo = Save Image Select for Fast/Slow Scan Speed Auto = Full auto AF/AS/ACB Right click to access individual functions Typical condition for low magnification imaging Typical condition for observing surface morphology Typical condition for collecting a BSE image Typical condition for imaging in LV mode...
  • Page 21 Photo - Collecting an Image Clicking on the gear icon allows you to change scan settings. Right click to access the Settings window. Scan speeds and image pixel resolution choices for the Photo scan...
  • Page 22 Manual SEM Condition Setting Current viewing conditions are displayed on the bottom of the display. Click in the area to manually change these conditions. To change detectors click on the marker by Signal: to open the Signal window. This allows you to change detectors or modes of the BSE detector. Change magnification clicking on the marker by Magnification: to display the Low/Middle/High window.
  • Page 23 Manual SEM Condition Setting To change the accelerating voltage click on the marker by Landing voltage: and select from 5kV, 10kV or 15kV. Low-PC. Optimized for high To change the probe current click magnification imaging on the marker by Probe Std.-PC Optimized for general imaging current: and select from the choices in the Probe current...
  • Page 24 Sample Navigation With Zeromag, click anywhere on the color image (with SNS option) or holder graphic to move to that location Other ways to move include: click-to-center • drag-and-drop • Hold cursor down at edge of live image display • (slow, fast and user defined frame step) •...
  • Page 25 Manual Image Adjustment Selecting Manual adjustment provides access to manual adjustment window. Highlight function to manually adjust then scroll with mouse or click on arrows to make adjustments. Selecting Multi View lets you display the live image from 2 detectors simultaneously (SE and BSE). Both images will be saved.
  • Page 26 Live 3D Imaging To observe a live 3D image, select the Manual adjustment button and then select the Live 3D button. This activates the quadrants of the BSE detector, sets ACB and displays the live 3D image. The 3D image is interactive in that you can change the view angle and zoom in/out by drag and drop and scrolling with mouse wheel in the Live 3D display.
  • Page 27 Live 3D Imaging Collecting a Photo will save 5 images. The signal on the left-side of the dual live image display along with images from the 4 quadrants of the BSE detector. Filename nomenclature is: Filename_signal_1_count.extension Filename_BED-A1_count.extension Filename_BED-A2_count.extension Filename_BED-B1_count.extension Filename_BED-B1_count.extension Note: To create a 3D surface reconstruction and analyze the reconstructed image, Smile View™...
  • Page 28 Smile View™ Map - Option Default Template Digital Surf, Inc. State-of-the Art Surface Metrology Software from Digital Surf, Inc. Mountains Map7 for SEM. With this option: Automatically construct a 3D model and • display from SEM images Numerous surface metrology functions •...
  • Page 29 Measurement with Ruler Value [unit] 18.17 µm 10.25 µm 9.891 µm 15.25 µm 12.12 µm Basic measurement functions are built in – Data is displayed on the image and also output as CSV file. Additional measurement features as well as changing font/color can be accessed through the data management software.
  • Page 30 Summary of Imaging Workflow Start the NeoScope Prepare Specimen By selecting the Photo button, the image is captured and automatically stored to the Specimen Exchange selected Project. Access and reporting is through Data mgmt. Set Condition through ‘Purpose’ In addition, the image can be saved to a automatic condition setting Windows directory by selecting the File or Manually...
  • Page 31 Saving Images The image must be saved from the File icon in order to have the data bar. From Data mgmt., the image information is stored and can be listed on reports but will not be on the image.
  • Page 32 Automated Montage Automated montage is built-in, including the ability to collect and stitch EDS maps. Maximum is a 15 x 15 tile array. To collect a montage, set the desired magnification and click on the Montage button. A box will pop up on the live image display.
  • Page 33 Automated Montage When clicking on the Start button, a Montage window will pop up. Select Yes (Y). If Luminance correction is checked the brightness will be corrected for each image. You can Stop, Pause, and Restart Montage collection at anytime. Editing or access to the Montage results is through the Data Management software.
  • Page 34 Automated Montage Example Mon_Ca_K_001 Mon_BED-S_001 500 µm 500 µm Items Value Signal BED-S measurement conditions Landing Voltage 15.0 kV Acceleration voltage 15.00 kV Probe current FOV 8.533 x 3.328 mm Magnification x 75 Probe Current Mode Map-PC Process time Vacuum Mode Low Vac. Resolution 256 x 192 Number of Fields 6 x 3...
  • Page 35 SEM Settings for EDS A typical SEM starting condition for EDS analysis is as follows: Accelerating Voltage – Set to 15kV • Probe Current – Set to Analysis Mode or Live Analysis Mode (for optimum EDS count rate) • The analytical working distance (AWD) is 12mm. Adjust the specimen height to be flush with •...
  • Page 36 SEM Settings for EDS The EDS count rate is shown on the lower right section of the Manual tool bar. Note the effect of the probe current on the EDS count rate. It is good to have at least a few thousand counts to provide efficient collection of EDS data.
  • Page 37 EDS Analysis To Perform EDS analysis, set Purpose1 to Element Analysis. Purpose2 can be set to Quant. When Element Analysis is selected, it is possible to select Point analysis, Line scan, partial Area analysis or select an area based on grey scale value (Particle).
  • Page 38 EDS Analysis Particle Point Area Set up your analysis conditions from the Conditions window. Select the area(s) of interest then click on Start.
  • Page 39 EDS Analysis With Show list checked, it is possible to delete selections, change order of analysis and even modify analysis conditions.
  • Page 40 EDS Analysis When data is being acquired, it is possible to work interactively on the spectrum and qualitative results.
  • Page 41 EDS Analysis Once an the EDS analysis is completed, select Cancel button to bring you back to the main observation screen.
  • Page 42 EDS Map – Live Map Uncheck an element map to remove it from the overlay in live image display. From the Quick scan button, the options are Quick (fast scan), Slow (slow scan) or Live Map. The Live Map will show a real time elemental map where the element maps are superimposed on the live SEM image.
  • Page 43 EDS Map – Live Map and Live 3D With Live 3D imaging activated, select Live Map to superimpose the Live Map overlay signal on the Live 3D image.
  • Page 44 EDS Map – Collect and Save Click on Purpose1 and select Map Analysis. You can click on Purpose2 and select Map to automatically set up SEM conditions appropriate for most map collection or set conditions manually. You will see the addition of Analysis Conditions: on the manual condition setting tool bar.
  • Page 45 EDS Map – Collect and Save You can interactively work with a map data set while it is collecting such as: add/remove elements, change scale view Count Map versus Net Map etc. Auto scales the X-ray Maps within the map window Brings you back to SEM Observation mode Sets map overlays on...
  • Page 46 Data Management - Smile View™ Lab To access the SEM and EDS data, click on the Data Management button. This will launch the Smile View™ Lab software. Sample Project window window Data window showing data for Project Selected...
  • Page 47 Data Management - Smile View™ Lab From the Project window, you can search, arrange, edit, import/export, Project Window delete and otherwise work with the Project and data within that Project. Projects are indicated by the file folder icon. Within the Project folder are the Specimen, FOVs for the Specimen and data within that field of view Sample icon...
  • Page 48 Data Management - Smile View™ Lab By selecting a specimen or FOV within a specimen, the specimen image (SNS color image or holder graphic) along with analysis locations are displayed in the Specimen window. This example shows montage data which includes images and maps. Search by data category by clicking on icon From the data window, search, open, export and...
  • Page 49 Working with Automated Montage Data Layouts The Grp icon indicates Montage data Open data to adjust image, make measurements or send to a report. Report layouts shown are based on data type, in this instance – image layouts. Choose/change a layout and the data will automatically update to the chosen layout.
  • Page 50 Working with Automated Montage Data From Edit montage, adjust images, move to and reanalyze. With EDS, can toggle between image and map views.
  • Page 51 Data Management - Smile View™ Lab Click on data for a quick view. Right click on data to open and work with data as well as send to a report.
  • Page 52 Data Management - Smile View™ Lab Click on Send to Report to open the Print Preview window where you can select the report layout, print, save, export the report to PDF, Word or Power Point… The report layouts shown are based on the data type chosen.
  • Page 53 Working with EDS Spectrum Data Toggle between Periodic Table view and Quantitative Result. From Periodic table, add/remove elements Shows quantitative results Scale Functions VID – Synthetic Opens periodic table Spectrum based on Qualitative elements identified Analysis Quantitative Analysis Left click on element label to select style...
  • Page 54 Working with EDS Map Data Toggle between Composition/Legend and Periodic Table view. From Periodic Table view, add or remove elements. Switch X- ray lines for element map (example ‘L’ vs ‘K’ line). Shows quantitative results Scale Functions VID – Synthetic Opens periodic table Spectrum based on Qualitative...
  • Page 55 Working with EDS Map Data Auto scales maps in map window Maps that are checked will be included on the overlay in the Composition/Legend window. To change map color, click on color square in Composition/Legend window...
  • Page 56 Accessory – Tilt Rotation Motor Drive Holder MP-01330TRMH Tilt Rotation Motor Drive Holder has the following specifications: Tilt range: -10° to +45°, 1° step • Rotation: 360° continuous • Motor control through software interface • Maximum specimen size: 20mm (d) x 7mm (h) •...
  • Page 57 Accessory – Tilt Rotation Motor Drive Holder To install the TRMH, select Specimen exchange and select the TRMH option for the holder selection. Vent the SEM chamber and once the stage door opens turn the power off to the SEM. With the TRMH cable-side facing front, the TRMH can be installed by setting it and turning clockwise to fix...
  • Page 58 Accessory – Tilt Rotation Motor Drive Holder Connect the TRMH cable to the front chamber door. Match the mark on the connector with the mark of the tip connector-cable and insert the connector. Turn on Power to the main unit (Blue LED will turn on) Mount a specimen on a 20mm (d) x 7mm (h) stub.
  • Page 59 Accessory – Tilt Rotation Motor Drive Holder Use the Height Limit Plate to make sure the specimen is mounted in such a way to be within a safe limit of the stage tilt range. Place the Height Limit Plate on the TRMH with flat side up. From the Specimen Exchange window on the SEM software, click on the Height confirm button in Step 3.
  • Page 60 Accessory – Tilt Rotation Motor Drive Holder From the SEM Observation window select the Stage button to access the tilt and rotation motor control. Rotation control Tilt control Can also numerically input a tilt angle.
  • Page 61 Maintenance – Filament Exchange When the tungsten filament burns out, a message will appear on the screen prompting for filament exchange. Three Grids (Wehnelt-Filament) are included with the JCM-7000. The user can swap out the Grid or clean the Wehnelt and replace the filament.
  • Page 62 Maintenance – Filament Exchange Click on Maintenance button to access the maintenance screen. From the Maintenance screen click on the Filament Exchange button and follow the steps as shown in this Filament Exchange Navigation Screen.
  • Page 63 Maintenance – Filament Exchange Changing the Grid Guide pin Guide groove Vent system and open With Grid removal tool, Align Guide groove of new Grid with the cover and electron gun pull out to remove Grid Guide pin on electron gun and push Grid in. Grid Removal Tool Close and Evacuate...
  • Page 64 Maintenance – Filament Exchange The Wehnelt can be cleaned and the filaments replaced. The filaments come pre-centered for easy exchange with no user alignment required to the Wehnelt. The filament assembly is threaded. To remove, turn Wehnelt counter clockwise. Clean the Wehnelt thoroughly and replace with new filament.
  • Page 65 Maintenance – Filament Exchange Metal Polish Cleaning Procedure POL and WENOL and PIKAL are metal polishes which are widely used to clean a Wehnelt 1. Carefully polish the Wehnelt with metal polish until the accumulated deposits are completely removed. A toothpick and cotton are good to reach all surfaces. 2.
  • Page 66 Maintenance – Filament Exchange MICRO-90 Cleaning Procedure for Stainless Steel Only 1. Mix MICRO-90 with water (~50%/50%) in a beaker. Be Careful --- it's Strong! Read warnings. MICRO-90 is a concentrated aqueous cleaning solution usually used at 2% concentration for cleaning glassware. It is available from Laboratory suppliers and EM suppliers.
  • Page 67 Maintenance – Beam Axis Alignment After a filament exchange, it is recommended to adjust the beam axis. This alignment can be done automatically via the Maintenance screen. Manual adjustment is also possible. Click on the Maintenance button to access the Maintenance screen then click on Beam Axis Adjustment Click on Tilt or Shift and Select ‘A’...
  • Page 68 Maintenance - EDS Performance Periodic checks of the EDS performance by examining a standard specimen is a good lab practice. If the peak position of the elements present have shifted, qualitative and quantitative analysis may not be determined correctly. If the EDS is used daily, it is recommended to check once per week. It is recommended to perform an Energy Calibration once per month.
  • Page 69 EDS Energy Calibration Cu/Al std A Cu/Al standard or Cu tape on an Al holder work well for the energy calibration check. The position of the Cu Kα X- ray line should register at around 8.04 keV. If the peak position deviates by more than 5 eV, then an energy calibration should be...
  • Page 70 EDS Energy Calibration The Notifications tab indicates when the last calibration was done and when it is recommended to perform the next calibration.
  • Page 71 EDS Energy Calibration From the Energy Calibration tab, choose AlCu for the Sample then select Process time T1 and T2 and then click on Start.
  • Page 72 EDS Energy Calibration Once the calibration routine has completed, click on OK. Click on the Back button to return to the main Maintenance screen and Back again to return to the SEM observation screen.
  • Page 73 1.25in (d) Adjustable Height Holder JU2016716 (31.75mm) 1.5in (d) Adjustable Height Holder JU2016715 (38.10mm) 14mm (d) Adjustable Height Insert Holder JU2016728 Compatible with 14mm (d) Inserts JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 74 Compatible with 25mm (d) x 6mm (h) Sample Mounts MP-01350TRMH2 Tilt Range: -5° to +50° (1° step) Note: Holder designs may change slightly from images that appear in this brochure. JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 75 For 32mm Diameter Holders 10-Stub Insert 10mm (d) x 10mm (h) 613203 For 51mm Diameter Holders 6-Stub Insert 12.5mm (d) x 10mm 613200 For 51mm Diameter Holders JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 76 14mm (d) Adjustable Height Insert Holder JU2016728 Note: Inserts in the table above fit the 14mm (d) Adjustable Height Insert Holder (P/N: JU2016728) purchased separately. JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 77 780117107 32 x 5 Duracon 780117077 10 x 10 Duracon 780117085 10 x 5 Duracon 780171268 12.5 x 10 Duracon 780171250 12.5 x 5 Duracon JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 78 Tweezer, 3c type 420066 Tweezer, no. 2A 420074 Tweezer, no. 7 asa type, SS, T, SEM bend JU2001074 Precision (Jeweler’s) Screwdriver Kit – Part Number: JU2013957 JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 79 Brass, 10mm (d) x 10mm (h) Adaptor for 25mm Mounts JU2016539 to fit 32mm Holder Note: To hold 25mm mounts in 32mm Holder requires the Adapter 25mm to 32mm (JU2016539) JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...
  • Page 80 Wehnelt W Filaments sold separately 804448400 (Requires W Filament – Type V) W Filament (Type V), Box of 6 813980968 RP Oil, 1L Bottle JU2010428 JEOL USA, Inc. ● 11 Dearborn Road ● Peabody, MA 01960 ● 978.535.5900 ● www.jeolusa.com...