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Ulvac CRTS-M6 Instruction Manual

Multi-sensor for crystal oscillation type deposition sensor
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No. SK00-8785-SI-010-03
20191015
Multi-Sensor for Crystal Oscillation type Deposition Sensor
CRTS-M6
Instruction Manual
Please read this manual before using this product, and keep it
carefully for immediate reference.
ULVAC, Inc.
Components Division.
2500
Hagisono, Chigasaki, Kanagawa, Japan 253-8543
URL
http://www.ulvac.co.jp/

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  • Page 1 No. SK00-8785-SI-010-03 20191015 Multi-Sensor for Crystal Oscillation type Deposition Sensor CRTS-M6 Instruction Manual Please read this manual before using this product, and keep it carefully for immediate reference. ULVAC, Inc. Components Division. 2500 Hagisono, Chigasaki, Kanagawa, Japan 253-8543 http://www.ulvac.co.jp/...

  • Page 2: Before Using This Product

    Before using this product Thank you very much for purchasing ULVAC products. When you receive this product, please make sure that it is the same product as your order and that there is no damage caused by transportation. WARNING In order to use this product for a long time, please be sure to read this...

  • Page 3: Precautions On Safety

    If continuing to use it, it may cause a fire or an electric shock. For your safety, contact vendors, the network party listed on our website or the Components division of ULVAC, Inc. for repairs.
  • Page 4 Precautions for entry of foreign matters CAUTION If foreign matters such as metals and combustible objects enter the inside from openings such as the ventilation hole of the controller for the multi-sensor, be sure to remove it. If continuing to use it, it may cause damage to the film thickness monitor.

  • Page 5: Table Of Contents

    2.2. Controller for Multi-sensor ..........................8 2.3. Equipment Configuration ..........................9 2.4. Option ................................9 3. External Appearance ............................9 3.1. CRTS-M6 Sensor Head ..........................9 3.2. OSM Connector ............................10 3.3. Controller MC-03 for Multi-sensor ......................10 3.4. 12P Hermetic Connector ..........................10 3.5.
  • Page 6 European RoHS ........................... 35 9.10.2 China RoHS ..35 Management Methods for Controlling Pollution by Electronic Information Products 11. Materials at the end of the manual ......................36 Multi-Sensor Exploded View ..........................36 ULVAC Components Certificate of Contamination ..................37...

  • Page 7: Overview

    For CRTM-6000G, a crystal rotates from 1 to 2 when the power supply of CAUTION CRTS-M6 is turned on. Return the crystal to 1 by the initialization function before using the sensor. The dedicated controller for CRTS-12NS cannot be used for CRTS-M6.

  • Page 8: Specification

    Specification 2.1. Sensor Head Equipped crystal number Capacity of crystal ※1 4MHz・5MHz or 6MHz AT-cut crystal Pressure Atmosphere to 10 [Pa] Heat resistance temperature (film 350℃ surface temperature）※2 Water-cooled pipe φ1/4、VCO joint Cooling water volume More than 1L/min（at 1kg/cm ） Maximum cooling water pressure 4 kg/cm Cooling temperature...

  • Page 9: Equipment Configuration

    2.3. Equipment Configuration Item name Quantity Note Multi-Sensor for Quartz Crystal Oscillation Type Deposition Controller CRTS-M6 Include vacuum internal cable, vacuum internal motor cable, CRTS-M6 Sensor head insulated connector. Equipped with 6 quartz crystal plates(select from 4MHz／5MHz／ Crystal holder Mounted on the sensor head.

  • Page 10: Osm Connector

    3.2. OSM Connector Fig. 3-2 External Appearance of OSM Connector 3.3. Controller MC-03 for Multi-Sensor Fig. 3-3. External appearance of Controller MC-03 for Multi-sensor 3.4. 12P Hermetic Connector Atmosphere side has pins on the outer circumference Atmosphere side has pins on the outer circumference Vacuum side Vacuum side Atmosphere side...

  • Page 11: Motor Cable

    3.5. Motor Cable Fig. 3-5 External appearance of Motor Cable 3.6. Dsub15 Pin Connector Fig.3-6 External appearance of Dsub15 Pin Connector 3.7. Oscillator OSC-12DG Fig. 3-7 External appearance of Oscillator OSC-12DG 3.8. Auxiliary cable 0.15m Fig. 3-8 External appearance of Auxiliary Cable 0.15m...

  • Page 12: External Cable

    3.9. External Cable Fig. 3-9 External appearance of External Cable 3.10. Oscillator Control Cable Fig. 3-10 External appearance of Oscillator Control Cable 3.11. Introduced flange UFC070 set.（Cooling water feedthrough flange, Electrode feedthrough flange） Electrode feedthrough flange Cooling water feedthrough flange Fig.

  • Page 13: Installation To Equipment

    Installation to Equipment 4.1. Wiring of power supply Supply DC24V to the controller. Be sure to do the GND wiring. 4.2. Connection of sensor main body, controller for sensor, oscillator, and deposition controller See Fig.4-1 below for connection. However, please note that the following parts are not included in the standard product. ＊CRTM ＊Electrode feedthrough flange ＊Cooling Water feedthrough flange...

  • Page 14: Type And Connection Of Deposition Controller

    4.4. Type and connection of deposition controller 4.4.1. CRTM-6000G Connect the external cable and the oscillator control cable that are connected to the oscillator to the coaxial connector (RF1) and the CONT connector on the backside of CRTM-6000G. （See Fig.4-2） External cable connector (RF2 is not used) Oscillator control cable connector...

  • Page 15: Installation Of Sensor And Wiring

    4.5. Installation of Sensor and Wiring 4.5.1. Welding 12 pin hermetic connector to flange Prepare the electrode feedthrough flange and cooling water flange. Weld the 12 Pin hermetic connector to the flange when the electrode feedthrough flange is made. １） Weld the 12pin hermetic connector to the flange. Be careful not to mistake the vacuum side and the atmosphere side.

  • Page 16: Install Sensor Head To Chamber

    4.5.3. Install sensor head to chamber The installation position of the sensor head significantly affects the reproducibility of the correlation between the monitor film thickness and the substrate film thickness. Since the distribution of the evaporation source varies depending on the amount of evaporation material, install the sensor head within 30 degrees from directly above the evaporation source.

  • Page 17: Operation Method

    For CRTM-6000G, a crystal rotates from 1 to 2 when the power supply of CAUTION CRTS-M6 is turned on. Return the crystal to 1 by the initialization function. 5.1.2. Switching of Crystal（count：CNT） The crystal fail is detected on the deposition controller side, and a request signal to rotate the sensor is output.

  • Page 18: Setting Of Multi-Sensor Types In Crtm

    2:ABORT SYSTEM PARAMETER (10) Set SENSOR CHANGE：02 or more. 1. WHEN XTAL FAIL. BAUD RATE TEST MODE MONITOR MODE COMMUNICATION MODE SENSOR CHANGE 02 ENTER(0-99) (11) Wire the I/O cable between CRTM and CRTS-M6 dedicated Controller (CRTS-MC-03). (see Section 6.4)

  • Page 19: Crtm-9200

    OUTPUT PORT (12) Select STATUS=START Sn for an unconfigured port. NO| EVENT VALUE ＊n= SS card number to use. EVENT 1| STATUS=START S1| (13) Connect the I/O cable between CRTM-9200 and CRTS-M6 dedicated controller (CRTS-MC-03). (see 6.4 Connection Example to CRTM)

  • Page 20: Operation Of Multi-Sensor In Crtm

    Retry End signal is input, the operation moves to the one (ABORT) set in WHEN XTAL FAIL without switching. Besides, an interlock signal is output to the CRTS-M6 controller at the same time as the deposition program starts. The interlock is released when the deposition program ends.

  • Page 21: Crtm-9200

    5.3.2. CRTM-9200 When the frequency falls below XTAL FAIL or SENSOR CHANGE FREQ during measurement, the sensor switch signal is output. During the MULTI SENSOR DELAY set in the SYSTEM PARAMETER, the operation enters the TIME POWER. After that, the sensor is checked, and if the frequency is within the normal range, normal measurement is resumed.

  • Page 22: I/O

    6. I/O 6.1. Wiring (Dsub15 Pin Female) This connector is used to Input/ Output with external devices. INPUT1 COMMON INPUT2 COMMON INPUT3 COMMON INPUT4 OUTPUT4 COMMON OUTPUT3 OUTPUT7 OUTPUT2 OUTPUT6 OUTPUT1 OUTPUT5 connector pin arrangement Fig. 6-1 Dsub15 pin female Use the multi-conductor cable with a shield for wiring.

  • Page 23: Signal Specification

    6.2. Signal Specification Connector Signal Table 6-1 I/O Dsub15 Pin Female Pin # Signal Description name INPUT1 maxDC12V 7mA INPUT2 maxDC12V 7mA INPUT3 maxDC12V 7mA INPUT4 maxDC12V 7mA COMMON Common GND OUTPUT7 No voltage contact output Normal open MaxDC50V 0.5A OUTPUT6 No voltage contact output Normal open MaxDC50V 0.5A...

  • Page 24: Output Of The Sensor Number

    ※ Relay 500mA DC50V common controller コントローラ When using an inductive load such as a relay, be sure to install a ※ CAUTION diode. Fig. 6-2 Logic output circuit +12V SW SPST Max 7mA common controller コントローラ Relay SPST Fig.6-3 Logic input circuit 6.3.

  • Page 25: Connection Example To Crtm

    Common ――― Common ※ Crystal switch signal and oscillator control signal are output from CRTM to CRTS-M6 when XTAL FAIL occurs. ※ Interlock signal is output from CRTM to CRTS-M6 when starting the deposition program. Fig. 6-5 Connection example between CRTM-9200 and CRTS-M6...

  • Page 26: Maintenance

    7. Maintenance 7.1. Installation (replacement) of Crystal (1) Turn off the power of CRTM and the multi-sensor controller. (2) Remove the cap by rotating it counterclockwise. Fig. 7-1 Removing the cap (3) Remove the crystal holder Assy by rotating the holder fixing knob in the center of the crystal holder. Do not remove the holder fixing knob from the crystal holder Assy.
  • Page 27 (4) Remove the insulation plate fixing screw (M2 countersunk Screw) on the back of the crystal holder Assy, and remove the insulation plate (white). Fig.7-3 Separation of Crystal Holder and Insulation Plate Do not bend the feather electrode installed to the insulation plate. CAUTION When placing the insulation plate, do not place it with the feather electrode side down.
  • Page 28 (7) Attach the insulation plate to the crystal holder by following the procedure below. ① Set the insulation plate to the holder. ② Tighten the insulation plate fixing screw while pressing the insulation plate by hand. 0.1 [N・ｍ] tightening torque is recommended. The insulation plate is made of ceramic and may be damaged if it is CAUTION tightened unevenly or excessively.

  • Page 29: Procedure Of Fine Adjustment Of Crystal Holder Starting Point

    (12) Turn on the power of the controller. The crystal holder is automatically initialized, and then the crystal number moves to the number before the power is turned off. Press the INIT button of the controller to initialize the crystal number. (13) Turn on the power of CRTM.

  • Page 30: Screw Tightening Torque

    7.3. Screw Tightening Torque Crystal holder Insulator fixing screw M2 Countersunk screw 3 places Tightening torque ： 0.1 N･m (1kgf･cm) Insulator Oscillation Electrode 2 fixing screw M2 round head screw 6 places Tightening torque ： 0.15~0.2 N･m (1.5~2.0kgf･cm) Holder fixing knurling knob 1 place Tightening torque ：...

  • Page 31: Serial Number

    The serial number of the controller MC-03 is on the back of the left side. CRTS-Multicontroller-03 A－M6－B Date WEIGHT 1.0kg Rev.4.01 MADE IN JAPAN ULVAC.Inc, A: Controller MC-03 serial number B: Sensor head serial number Fig. 8-2 Serial number of controller MC-03 for multi-sensor...

  • Page 32: Troubleshooting

    When any problems occur, please read this chapter first. If the cause is still not found, please contact us. Please understand that we will not provide repair or maintenance if the CAUTION details of the hazardous substances that you use are not disclosed. CRTS-M6 Troubleshooting Troubles Solutions If the trouble is not solved.

  • Page 33: Warranty

    This product is strictly inspected in-house before it is shipped. However, should any failure that is our responsible occur, such as defects in manufacturing or accidents during transportation, please contact the Components division of ULVAC, Inc. or the nearest sales office or distributor. We will repair and replace it free of charge.

  • Page 34: Items And Matters That Are Not Covered By Warranty

    ④ Defects and damages caused by the combination with products (CRTM, quartz crystal plates) that are not manufactured by ULVAC. ⑤ Failures and defects caused by natural disasters such as fires, storms, floods, earthquakes, and lightning strikes, and force majeure disasters such as wars.

  • Page 35: Rohs Support

    10.8. RoHS Support 9.10.1 European RoHS List of parts that do not comply with the European RoHS. Parts name Toxic and hazardous substances or elements PBDE Motor driver (inside the controller) ○ ○ ○ ○ ○ ○ Oscillator OSC-12DG ○ ○...

  • Page 36: Materials At The End Of The Manual

    Electrode for CRTS (Round Hole/for Water cooling case cover 5 MHz) Electrode for CRTS (Round Hole/for Adapter 6 MHz) Insulation plate Motor for CRTS-M6 Crystal Oscillation Electrode 2 Crystal holder Assy (for 5MHz) Starting point stopper Crystal holder Assy (for 6MHz)

  • Page 37: Ulvac Components Certificate Of Contamination

    ULVAC Components / Certificate of Contamination This paper is a certificate of contamination required when returning ULVAC components. Before sending the equipment that you currently own, please fill this form and submit it to the service provider or a sales office. For components that used toxic gases, or are adhered with reactive products or substances, please contact the service provider or sales office in advance.

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