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SK00-8785-SI-002-07
20201127
Multi-Sensor for Crystal Oscillation type Deposition Sensor
CRTS-12NS
Instruction Manual
Please read this manual before using this product, and keep it
carefully for immediate reference.
ULVAC, Inc.
Components Division.
2500
Hagisono, Chigasaki, Kanagawa, Japan 253-8543
URL
http://www.ulvac.co.jp/
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Summary of Contents for Ulvac CRTS-12NS
- Page 1 SK00-8785-SI-002-07 20201127 Multi-Sensor for Crystal Oscillation type Deposition Sensor CRTS-12NS Instruction Manual Please read this manual before using this product, and keep it carefully for immediate reference. ULVAC, Inc. Components Division. 2500 Hagisono, Chigasaki, Kanagawa, Japan 253-8543 http://www.ulvac.co.jp/...
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Page 2: Before Using This Product
Before using this product Thank you very much for purchasing ULVAC products. When you receive this product, please make sure that it is the same product as your order and that there is no damage caused by transportation. In order to use this product for a long time, please be sure to read this instruction... -
Page 3: Precautions On Safety
If continuing to use it, it may cause a fire or an electric shock. For your safety, please contact the vendors, the network party listed on this instruction manual or the Components division of ULVAC, Inc. for repairs. Power Shutdown CAUTION Be sure to turn off the switch and remove the power supply plug when replacing the fuse. -
Page 4: Ventilation Hole
Precautions for entry of foreign matters CAUTION If foreign matters such as metals and combustible objects enter the inside from openings such as the ventilation hole of the controller for the multi-sensor, be sure to remove it. If continuing to use it, it may cause damage to the film thickness monitor. Precaution for packing when transporting CAUTION When transporting the film thickness monitor, return it to a condition of factory shipment. -
Page 5: Table Of Contents
ONTROLLER SECTION FOR ENSOR ............................. 3 2.3. E QUIPMENT ONFIGURATION 2.4. O ....................................3 PTION 3. EXTERNAL APPEARANCE ............................3 ............................. 3 3.1. CRTS-12NS S ENSOR ................................4 3.2. OSM C ONNECTOR ........................4 3.3. C MC-03 ONTROLLER ULTI ENSOR ............................. - Page 6 6. 4. C CRTM ..............................20 ONNECTION TO 6.4.1. CRTM-6000G ................................. 20 CRTM-9200 ................................. 20 6.4.2 7. MAINTENANCE ................................21 ..................... 21 7.1. A TTACHING AND DETACCHING OF CRYSTAL HOLDER 7.2. R ............................. 22 EPLACEMENT OF CRYSTAL 7.3. P ..............25 ROCEDURE OF FINE ADJUSTMENT OF CRYSTAL HOLDER STARTING POINT ............................
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Page 7: Overview
(CRTM). Deposition can continue until all 12 crystals reach the end of its life. For CRTM-6000G, a crystal rotates from 1 to 2 when the power supply of CRTS-12NS is turned on. Return the crystal to 1 by the initialization function CAUTION before using the sensor. -
Page 8: Specification
Specification 2.1. Sensor Head Equipped crystal number Capacity of crystal ※1 4MHz・5MHz or 6MHz AT-cut crystal Pressure Atmosphere to 10 [Pa] Heat resistance temperature (film surface 350℃ temperature）※2 Water-cooled pipe φ1/4、VCO joint Cooling water volume More than 1L/min（at 1kg/cm2） Maximum cooling water pressure 4 kg/cm2 Cooling temperature 10～30℃(without condensation) -
Page 9: Equipment Configuration
2.3. Equipment Configuration Item name Quantity Note Multi-Sensor for Quartz Crystal Oscillation Type Deposition Controller CRTS-12NS Include vacuum internal cable, vacuum internal motor cable, insulated CRTS-12NS Sensor head connector. Equipped with 12 crystal plates (select from 4MHz／5MHz／6MHz） Crystal holder Mounted on the sensor head. -
Page 10: Osm Connector
3.2. OSM Connector Fig. 3-2 External Appearance of OSM Connector 3.3. Controller MC-03 for Multi-Sensor Fig. 3-3. External appearance of Controller MC-03 for Multi-sensor 3.4. 12P Hermetic Connector Atmosphere side has pins on the outer circumference. Atmosphere side has pins on the outer circumference. Vacuum side Vacuum side Atmosphere side... -
Page 11: Motor Cable
3.5. Motor Cable Fig. 3-5 External appearance of Motor Cable 3.6. Dsub15 Pin Connector Fig.3-6 External appearance of Dsub15P Pin Connector 3.7. Oscillator OSC-12DG Fig. 3-7 External appearance of Oscillator OSC-12DG... -
Page 12: Auxiliary Cable 0.15M
3.8. Auxiliary cable 0.15m Fig. 3-8 External appearance of Auxiliary Cable 0.15m 3.9. External Cable Fig. 3-9 External appearance of External Cable 3.10. Oscillator Control Cable Fig. 3-10 External appearance of Oscillator Control Cable... -
Page 13: Introduced Flange Ufc070 Set
3.11. Introduced flange UFC070 set (cooling water feedthrough flange, electrode feedthrough flange） Electrode feedthrough Flange Cooling Water feedthrough flange Fig. 3-11 Introduced flange UFC070 set.（Cooling water feedthrough flange, Electrode feedthrough flange） For the cooling pipe, the vacuum internal length can be designated up to CAUTION 800mm maximum. -
Page 14: Installation To Equipment
Installation to Equipment 4.1. Wiring of power supply Supply DC24V to the controller. Be sure to do the GND wiring. 4.2. Connection of sensor main body, controller for sensor, oscillator, and deposition controller See Fig.4-1 below for connection. However, please note that the following parts are not included in the standard product. ＊CRTM ＊Electrode feedthrough flange ＊Cooling Water feedthrough flange... -
Page 15: Type And Connection Of Deposition Controller
4.4. Type and connection of deposition controller 4.4.1. CRTM-6000G Connect the external cable and the oscillator control cable that are connected to the oscillator to the coaxial connector (RF1) and the CONT connector on the backside of CRTM-6000G. External cable connector (RF2 is not used) Oscillator control cable connector CRTM-6000G Backside... -
Page 16: Installation Of Sensor And Wiring
4.5. Installation of sensor and wiring 4.5.1. Welding 12 pin hermetic connector to flange Prepare the electrode feedthrough flange and cooling water flange. Weld the 12 Pin hermetic connector to the flange when the electrode feedthrough flange is made. Weld the 12 pin hermetic connector to the flange. Be careful not to mistake the vacuum side and the atmosphere side. -
Page 17: Install Sensor Head To Chamber
4.5.3. Install sensor head to chamber The installation position of the sensor head significantly affects the reproducibility of the correlation between the monitor film thickness and the substrate film thickness. Since the distribution of the evaporation source varies depending on the amount of evaporation material, install the sensor head within 30 degrees from directly above the evaporation source. -
Page 18: Operation Method
For CRTM-6000G, a crystal rotates from 1 to 2 when the power supply of CAUTION CRTS-12NS is turned on. Return the crystal to 1 by the initialization function. 5.1.2. Switching of Crystal (count : CNT) The crystal fail is detected on the deposition controller side, and a request signal to rotate the sensor is output. -
Page 19: Setting Of Multi-Sensor Types In Crtm
SYSTEM PARAMETER (10) Set SENSOR CHANGE：02 or more. 1. WHEN XTAL FAIL. BAUD RATE TEST MODE (11) Wire the I/O cable between CRTM and CRTS-12NS dedicated MONITOR MODE COMMUNICATION MODE Controller (CRTS-MC-03). (see Section 6.4) SENSOR CHANGE 02 EN ER(0-99) -
Page 20: Crtm-9200
(10) Select 5.OUTPUT PORT PROGRAM. NO| EVENT VALUE (11) Select EVENT STATUS=START Sn 1| STATUS=START S1| for an unconfigured port. ＊n= SS card number to use. (12) Connect the I/O cable between CRTM-9200 and CRTS-12NS dedicated controller (CRTS-MC-03). (see 6.4 Connection Example to CRTM) -
Page 21: Operation Of Multi-Sensor In Crtm
(ABORT) set in WHEN XTAL FAIL without switching. Besides, an interlock signal is output to the CRTS-12NS controller at the same time as the deposition program starts. The interlock is released when the deposition program ends. -
Page 22: Crtm-9200
5.3.1. CRTM-9200 When the frequency falls below XTAL FAIL or SENSOR CHANGE FREQ during measurement, the sensor switch signal is output. During the MULTI SENSOR DELAY set in the SYSTEM PARAMETER, the operation enters the TIME POWER. After that, the sensor is checked, and if the frequency is within the normal range, normal measurement is resumed. -
Page 23: I/O
6. I/O 6.1 Wiring (Dsub15 pin female) This connector is used to Input/output with external devices. INPUT1 COMMON INPUT2 COMMON INPUT3 COMMON INPUT4 OUTPUT4 COMMON OUTPUT3 OUTPUT7 OUTPUT2 OUTPUT6 OUTPUT1 OUTPUT5 connector pin arrangement Fig. 0-1 Dsub15 pin female Use the multi-conductor cable with a shield for wiring. Use the metal CAUTION connector shell of this controller for the shield, and do not connect the opposite side shield wire. -
Page 24: Signal Specification
6.2. Signal specification connector signal Table 0-1 I/O Dsub15 Pin Female Pin # Signal name Description INPUT1 maxDC12V 7mA INPUT2 maxDC12V 7mA INPUT3 maxDC12V 7mA INPUT4 maxDC12V 7mA COMMON Common GND OUTPUT7 No voltage contact output Normal open MaxDC50V 0.5A OUTPUT6 No voltage contact output Normal open MaxDC50V 0.5A OUTPUT5... -
Page 25: Output Of The Sensor Number
※ When using an inductive load such as a relay, be sure to install a diode. CAUTION Fig. 0-2 Logic output circuit Fig.0-3 Logic input circuit 6.3. Output of the sensor number Table 0-2 Sensor number and output bit correspondence Sensor number Bit1 Bit2... -
Page 26: Connection To Crtm
※ Crystal switch signal and oscillator control signal are output from CRTM to CRTS-12 NS when XTAL FAIL occurs. ※ Interlock signal is output from CRTM to CRTS-12NS when starting the deposition program. Fig. 0-5 Connection example between CRTM-9200 and CRTS-12NS... -
Page 27: Maintenance
7. Maintenance 7.1. Attaching and detacching of crystal holder (1) Turn off the power of the sensor controller. (2) Loosen the knurling knob for fixing the mask, and rotate the mask counterclockwise to remove it. (3) Loosen and remove the knurling knob in the center of the crystal holder. If the control driver is turned off, the crystal holder rotates easily. -
Page 28: Replacement Of Crystal
(3) Clean the "crystal installation part" of the crystal holder with alcohol. If there are film deposition deposits or dust, oscillation failure may occur. (4) Set new crystals in the holder. （For ULVAC products, the film deposition side has the island-shaped electrode, and the backside is entirely deposited.） Crystal deposited side If the crystal installation part is dirty, oscillation failure may occur. - Page 29 Set the insulator to the holder. (6) The insulator floats a little due to the spring of the feather electrode. Press it lightly and fasten the "M3 countersunk screw x 4". In order to prevent uneven tightening, tighten screws in the following order. ①...
- Page 30 (8) Hold the knurling knob and rotate the holder clockwise (CW) manually until the starting point detection pin contacts the electrode. (9) After the pin contacts the electrode and stops turning clockwise, turn the holder back counterclockwise (CCW) about 30 degrees from there (The angle to the next crystal is about 30 degrees.). If the controller is turned on with the starting point detection pin contacting CAUTION the electrode, it may cause a malfunction.
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Page 31: Procedure Of Fine Adjustment Of Crystal Holder Starting Point
7.3. Procedure of fine adjustment of crystal holder starting point When the initialization of a crystal holder is completed, if the center of the opening of the mask(lid) of the sensor head and the center of the crystal is shifted by 1mm or more, perform fine adjustment of the starting point by following the procedure below. -
Page 32: Screw Tightening Torque
7.4. Screw Tightening Torque Crystal holder Insulator fixing screw M3 Countersunk screw 4 places Tightening torque ： 0.5 N･m (5kgf･cm) Insulator Oscillation Electrode 2 fixing screw M2 round head screw 12 places Tightening torque ： 0.15～0.2 N･m (1.5~2.0kgf･cm) Sensor head body Oscillation Electrode 1 fixing screw M3 round head screw... -
Page 33: Consumables
The serial number of the controller MC-03 is on the back of the left side. CRTS-Multicontroller-03 A－12NS－B Date WEIGHT 1.0kg Rev.4.01 MADE IN JAPAN ULVAC.Inc, A: Controller MC-03 serial number B: Sensor head serial number Fig. 0-1 Serial number of controller MC-03 for multi-sensor... -
Page 34: Troubleshooting
9. Troubleshooting When any problems occur, please read this chapter first. If the cause is still not found, please contact us. Please understand that we will not provide repair or maintenance if the details CAUTION of the hazardous substances that you use are not disclosed. If the trouble Troubles Solutions... -
Page 35: Warranty
This product is strictly inspected in-house before it is shipped. However, should any failure that is our responsible occur, such as defects in manufacturing or accidents during transportation, please contact the Components division of ULVAC, Inc. or the nearest sales office or distributor. We will repair and replace it free of charge. 10.1. Covered Items... -
Page 36: Items And Matters That Are Not Covered By Warranty
If you have any questions or need consults about this product, please check the model number and the serial number of the product and contact your local sales office, distributor, or the Components Division of ULVAC, Inc. Please note that this instruction manual and product specifications are subject to change without... -
Page 37: Rohs Support
10.8. RoHS Support 10.8.1. European RoHS List of parts that do not comply with the European RoHS Parts name Toxic and hazardous substances or elements PBDE Motor driver (inside the controller) × ○ ○ × ○ ○ OSC-12D × ○ ×... -
Page 38: Multi-Sensor Exploded View
Materials at the end of the manual Multi-sensor exploded view The parts listed in the table below can be ordered separately. Vacuum internal cable “signal” Vacuum internal cable “ground” Vacuum internal cable “connector” Fig. 0-1 Exploded view Parts name list of consumables and spare parts Parts name Parts name Feather Electrode for 5MHz/6MHz... - Page 39 ULVAC Components / Certificate of Contamination This paper is a certificate of contamination required when returning ULVAC components. Before sending the equipment that you currently own, please fill this form and submit it to the service provider or a sales office.
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