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Ulvac HELIOT 900 Operation Manual

Leak detector
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No.SK00-7991-BI-002-13
Operations Manual
Please read this manual before using the equipment.
Store it carefully in a readily accessible place.
The contents of this manual cover equipment with the
following serial numbers and software versions
Serial Number: 0101 or higher
Software Version: 1.69_383 or higher
ULVAC, Inc.
http://www.ulvac.co.jp/

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Summary of Contents for Ulvac HELIOT 900

  • Page 1 Please read this manual before using the equipment. Store it carefully in a readily accessible place. The contents of this manual cover equipment with the following serial numbers and software versions Serial Number: 0101 or higher Software Version: 1.69_383 or higher ULVAC, Inc. http://www.ulvac.co.jp/...

  • Page 2: Safety Symbols

    Prior to Use Thank you for purchasing our ULVAC equipment. On receipt of the equipment, please verify that the model ordered is correct and check for any damages caused during shipment. Read this manual before installing, operating, inspecting or maintenance of the equipment and fully understand the safety precautions, specifications, and operating procedures regarding the equipment.

  • Page 3: Safety Precautions

    Safety Precautions Safety Precautions Power Shutdown When installing the equipment and removing the external panels for inspection and replacement of parts, turn off the MAIN POWER switch and disconnect plug from the outlet before servicing. Possibilities of electric shock and damages to the equipment due to high voltage areas.

  • Page 4: Handling Precautions

    Safety Precautions Handling Precautions Contact to Vacuum Components The internal components in the unit’s pump system have undergone precision cleaning. Do not touch with bare hands during maintenance. Risk of reducing performance of the equipment. Assembling of TABLET and Main Unit The indicator and the main unit are to be used as assembled for its shipment.

  • Page 5: Table Of Contents

    Prior to Use ........................... I Safety Precautions ....................... II Handling Precautions ......................III NOTES ..........................III 1. HELIOT 900 Series Specifications and Configurations ............ 1 1-1 GENERAL SPECIFICATIONS ..................1 1-1-1 Common Specifications ..................1 1-2 COMMON SPECIFICATION ..................2 1-2-1 Base Type (901W1/901D2) ..................
  • Page 6 Table of Contents 2. Set Up ..........................22 2-1 UNPACKING ......................22 2-2 ASSEMBLING/MOVING/INSTALLATION ..............23 2-2-1 Assembling ......................23 2-2-2 Moving/Installation....................24 2-3 CONNECTION OF TEST PORT ................25 2-3-1 Vacuum Method ....................25 2-3-2 Sniffer Method ....................25 2-4 ELECTRICAL CONNECTIONS ................
  • Page 7 Table of Contents 7. Startup ........................... 59 7-1 STARTUP OF VACUUM METHOD ................59 7-2 STARTUP OF SNIFFER METHOD ................62 7-2-1 SNIFFER (FLOW RATE) ................... 62 7-2-2 SNIFFER (CONCENTRATION) ................. 63 8. Testing ........................... 65 8-1 TEST SCREEN (TABLET TYPE) ................65 8-1-1 Graph .........................
  • Page 8 Table of Contents 11. Input/Output Signals ....................106 11-1 EXT.I/O ......................... 106 11-1-1 List of Output Signals (standard mode: not in cycle test mode) ..... 107 11-1-2 List of Output Signals ( in Cycle test mode) ........... 108 11-1-3 List of Input Signals ..................110 11-2 LEAK RATE ......................
  • Page 9 Table of Contents 12. Guarantee ........................141 ULVAC Components / Certificate of Decontamination ............. 142 Declaration of Conformity ....................143 Declaration of Conformity ....................144 HELIOT 900 SERIES RECOMMENDED ABBREVIATIONS LIST: ........145...

  • Page 10: Heliot 900 Series Specifications And Configurations

    1. HELIOT 900 Series Specificatons and Configurations 1. HELIOT 900 Series Specifications and Configurations HELIOT 900 Series Leak Detector detects leakage of Helium He/H by using principles of magnetic deflection mass spectrometer. 1-1 General Specifications 1-1-1 Common Specifications Item Specifications...

  • Page 11: Common Specification

    1. HELIOT 900 Series Specificatons and Configurations 1-2 Common Specification 1-2-1 Base Type (901W1/901D2) Type which small fore pump is on board type. Also prepared a Low height cart as an option. Model 901W1 901D2 (*5) Vacuum exhaust system Rotary pump...
  • Page 12 1. HELIOT 900 Series Specificatons and Configurations (*1) In order to reduce He back ground residues in the main unit right after activation or depending on the customer’s conditions of use, it may need several hours of warm up operation.

  • Page 13: Heliot Configuration (Drawing)

    1. HELIOT 900 Series Specificatons and Configurations 1-4 HELIOT Configuration (drawing) 1-4-1 Base Type 901W1/901D2 ① ⑤ ④ ③ ② ※Use short screw (30 - 35 , M6) to avoid interference in side detector. Name Function Test port Connects to the test subject or sniffer unit. (NW25)

  • Page 14: External View Low Cart

    1. HELIOT 900 Series Specificatons and Configurations 1-4-2 External view Low cart. External view 901W1 and 901D2 low cart. (Optional) Front wheels are free, rear are with lock function ring. ① ② Name Function Tablet holder Holder to fix the tablet position.

  • Page 15: Mobile Type (904W2/904D3/904D4) High Cart

    1. HELIOT 900 Series Specificatons and Configurations 1-4-3 Mobile Type (904W2/904D3/904D4) High cart Fore pump equipped in the mobile cart. ① ③ ② ⑥ ⑤ ④ ⑦ ⑧ Name Function Test port Connects to the test subject or sniffer unit. (NW25)

  • Page 16: Display Unit

    1. HELIOT 900 Series Specificatons and Configurations 1-4-4 Display unit 1-4-4-1 Tablet type 1-4-4-1-1 Tablet type appearance ① ② ③ ④ ⑦ ⑤ ⑥ Name Function Turn ON/OFF the power switch of the tablet. To turn on the power supply of the tablet, press power supply button for 2 seconds.

  • Page 17: Tablet Stand

    1. HELIOT 900 Series Specificatons and Configurations 1-4-4-1-2 Tablet Stand All models operate with common tablet type computer. The screen allows automatic rotation of 180 degrees. Handle is fixed to the plate. Before fixing the tablet stand with screws, remove the handle and use the fixing hole.

  • Page 18: Panel Mount Type (-P)

    1. HELIOT 900 Series Specificatons and Configurations 1-4-4-2 Panel Mount type (-P) 1-4-4-2-1 Panel Mount type appearance 1-4-4-2-2 Panel cutout dimensions 112.5mm(+1/-0)mm 77.5mm(+1/-0)mm Max 3mm 1.5～6mm - 9 -...

  • Page 19: Appearance With Mounting Bracket

    1. HELIOT 900 Series Specificatons and Configurations 1-4-4-2-3 Appearance with mounting bracket 1-4-4-2-4 Communication cable 2.5m, 5m, 10m, 15m About300mm - 10 -...

  • Page 20: Sniffer Probe For As/Bs (Optional)

    1. HELIOT 900 Series Specificatons and Configurations 1-4-5 Sniffer Probe for AS/BS (Optional) ② ① Name Function Sintered filter Filter to prevent contamination of dirt. Grip The probe grip. 1-4-6 Sniffer Unit AS (Optional) ① ② Name Function Probe connection port Used for installing Sniffer probe of Section 1-4-5.

  • Page 21: Sniffer Unit Bs (Optional)

    1. HELIOT 900 Series Specificatons and Configurations 1-4-7 Sniffer Unit BS (Optional) ③ ① ② ⑤ ④ 1-4-8 Sniffer Unit BT (Optional) ③ ① ② ⑤ ④ Name Function Cable Cable to connect the main leak detector and sniffer unit.

  • Page 22: Main Power Cable

    1. HELIOT 900 Series Specificatons and Configurations 1-4-9 Main power Cable 90***-*1A ① ② 90***-*2B VCTF 3x1.25mm ① ② 90***-*2C ① ② 90***-*2D / 90***-*2E ② ① Applicable Rated voltage/ Safety Standard / Nation * Model Rated current 90***-*1A JIS/Japan (PSE), UL/America, CSA/Canada...

  • Page 23: Vacuum System Diagram

    1. HELIOT 900 Series Specificatons and Configurations 1-5 Vacuum System Diagram Sniffer Unit AS9 Orifice Test port Sniffer Unit BS9/BT9 Test port Symbol Name Function Test port Connects to the test subject or sniffer unit. (NW25) Calibration leak of 10 [Pa･m...

  • Page 24: Turbo Molecular Pump Unit

    1. HELIOT 900 Series Specificatons and Configurations 1-6 Turbo Molecular Pump Unit 1-6-1 901W1/901D2/904W2/904D3 ⑯ ⑮ ① ⑤ ④ ⑤ ① ⑧ ③ ⑬ ⑨ ⑪ ⑫ ② ⑦ ⑥ ③ ⑭ ⑩ Name Function Test port Connects to the test subject or sniffer unit. (NW25) Collector assy Employs circuit to amplify the detected ion current.

  • Page 25: 904D4

    1. HELIOT 900 Series Specificatons and Configurations ⑰ ⑯ 1-6-2 904D4 ① ⑤ ④ ⑤ ⑪ ① ⑧ ③ ⑭ ⑨ ⑫ ⑬ ② ⑦⑥③ ⑮ ⑩ Name Function Test port Connects to the test subject or sniffer unit. (NW25) Collector assy Employs circuit to amplify the detected ion current.

  • Page 26: Connector Panel

    1. HELIOT 900 Series Specificatons and Configurations 1-7 Connector Panel ⑥ ⑦ ⑧ ⑨ ⑩ ⑪ ⑫ ④ ⑬ ⑤ ③ ⑭ ② ① ⑮ Name Function AC INPUT connector Connect the power supply cable to the main unit body.
  • Page 27 1. HELIOT 900 Series Specificatons and Configurations Name Function Please connect the cable of panel mount type. DISPLAY/RS485 Use to connect by RS485comunication. (D-sub9 male, Inch screw #4-40) DISPLAY/DC-OUT Please connect when tablet specification is wired. External Pirani vacuum Unused.

  • Page 28: Measurement Principle

    1. HELIOT 900 Series Specificatons and Configurations 1-8 Measurement principle 1-8-1 Ion Current HELIOT is a leak detector which detects ion current of helium or hydrogen by using principles of magnetic deflection mass spectrometer. Ion current is measured by the analyzer part of HELIOT.

  • Page 29: Sensitivity Calibration (Leak Rate)

    1. HELIOT 900 Series Specificatons and Configurations 1-8-2 Sensitivity Calibration (Leak Rate) To measure leak rate, it is necessary to associate the detected ion current [A] with the leak rate [Pa･m /s]. HELIOT performs this operation by using a known calibrated leak. The process is called sensitivity calibration.

  • Page 30: Sensitivity Calibration (Concentration)

    1. HELIOT 900 Series Specificatons and Configurations 1-8-3 Sensitivity Calibration (Concentration) Sensitivity calibration, which is executed when setting Sniffer concentration, is a measurement of helium concentration. Sensitivity calibration is the relationship between the ion current value and concentration, and is shown by a line connecting the ion current value ε (ε,δ) when intake of standard gas δ[ppm] is executed, and the origin of a graph (0, 0).

  • Page 31: Set Up

    2. Set Up 2. Set Up 2-1 Unpacking 1) Check for any damages to each equipment or outside damage made to the package as soon as you receive the unit even if the equipment is not used right away. 2) Check the quantity of components. (The table below corresponds to the standard specification and optional components.) Tablet type specification list Name...

  • Page 32: Assembling/Moving/Installation

    2. Set Up 2-2 Assembling/Moving/Installation 2-2-1 Assembling 1) Low cart with handled fixed. 2) High cart with handle fixed. 1) Push in the handle from the top. 2) Secure the handle at 4 places with attaching bolts (M6x16) - 23 -...

  • Page 33: Moving/Installation

    2. Set Up 2-2-2 Moving/Installation 1) Hold the base of the unit when lifting up the portable type. Risk of damage to resin panel when excessive force is applied. Use a platform truck when moving portable type (901W1/901D2). Install the main equipment on a flat and smooth horizontal surface. Make sure not to expose the equipment to vibrations or impacts from the surrounding area.

  • Page 34: Connection Of Test Port

    2. Set Up 2-3 Connection of Test Port 2-3-1 Vacuum Method 1) Connect the attached blank flange (NW25) to the test port. 2) Fix firmly with the clamp. (attached when shipped) 2-3-2 Sniffer Method 1) Connect the attached Sniffer unit to the test port. When connecting the Sniffer unit BS9/BT9 to the test port, connect with the microseparator.

  • Page 35: Electrical Connections

    2. Set Up 2-4 Electrical Connections 1) Make sure the MAIN POWER switch on the main unit is OFF 2) Connect the power supply cable to the AC INPUT connector on the main unit’s connector panel. 3) Plug in the power cable to the correct source. In order to prevent earth leakage, always ground the equipment with class 1 equipment.

  • Page 36: Installing The Display With Panel Mount Specification

    2. Set Up 2-5 Installing the display with panel mount specification Power Shutdown When installing the equipment and removing the external panels for inspection and replacement of parts, turn off the MAIN POWER switch and disconnect plug from the outlet before servicing. Possibilities of electric shock and damages to the equipment due to high voltage areas.

  • Page 37: Panel Mounting Procedure

    2. Set Up When installing this product in a slanted position with an incline more than 30°, the ambient temperature must not exceed 40℃. You may need to use forced air cooling (fan, A/C) to ensure the ambient operating temperature is 40℃ or less. For easier maintenance, operation and improved ventilation, install this product at least 100mm away from adjacent structures and other equipment as shown in the following illustration:...

  • Page 38: Wiring Principles

    2. Set Up 2-5-3 Wiring Principles 2-5-3-1 Connecting the DC Power Cord Confirm the power cord is not connected to the power supply. Check the rated voltage and remove the “DC24V” sticker on the DC power supply connector. Strip the membrane of the power cord, and connect them to the power connector. Use a flat-blade screwdriver (Size 0.4 x 2.5) to tighten the terminal screws.

  • Page 39: Storage

    2. Set Up 2-6 Storage Be aware of the following items when storing HELiOT 900. ・ Store in an ambient temperature between 10 C to 40 C, ambient humidity between 35 to 85 %. There are components that may cause malfunction within the equipment.

  • Page 40: Connection Of Main Unit And Tablet

    3. Connection of Main Unit and Tablet 3. Connection of Main Unit and Tablet 3-1 Wire Connection ② ① 1) Connect the accompanying cable to DISPLAY and DC-OUT of the main unit connector panel. 2) Connect the accompanying cable to Mini USB connector and DC input jack of the tablet. 3) Turn ON the MAIN POWER of main unit connector panel (Section 1-7) and power switch (Section 1-4-4-1-1 1)) of tablet.

  • Page 41: Wireless Connection

    3. Connection of Main Unit and Tablet 3-2 Wireless Connection 2.4GHz Band Wireless Equipment This equipment is installed with 2.4GHz band wireless function compatible to standard IEEE 802.11b/g/n. Refer to nation/local laws for use. 1) When using the tablet while charging, connect to DC input jack through optional controller charging unit.

  • Page 42: When Resetting Connection Point

    3. Connection of Main Unit and Tablet 3-2-2 When Resetting Connection Point 3) In case of failure in modifying equipment’s connection point connection using RETRY button, press SEARCH button and check if there are any equipment available for connection. 4) When SEARCH is executed “Searching Connection Point”...

  • Page 43: Operation Overview

    4. Operation Overview 4. Operation Overview 4-1 Power Supply ON – Testing – Stopping / End test HELiOT can be divided into 5 modes of “Preliminary mode”, “During activation”, “Standby/Test” “Under Stop” and “Error”. The explanations of the operation are given as follows. 4-1-1 Power Activation Turn on the MAIN POWER of main unit connector panel (section 1-7) and tablet power supply (Section1-4-4-1-1_1)).

  • Page 44: During Activation

    4. Operation Overview 4-1-3 During Activation Tablet type screen Panel mount type screen To ensure the equipment has no abnormality, the following sequence is followed. Verification of internal temperature of the equipment – exhaust system (roughing) – exhaust system – (TMP) – adjustment of analyzers –...

  • Page 45: Stop

    4. Operation Overview 4-1-5 Stop Tablet type screen Panel mount type screen By pressing [MENU] – [SHUTDOWN] and YES, Turbomolecular pump showing its rotation speed displays on the stop screen. In about 1 minute, the stop mode completes to change to preliminary screen.

  • Page 46: Window Screen Operations

    4. Operation Overview 4-2 Window Screen Operations Window screen operation is required in modification of setting screen. The following illustrates a few basic examples. ① ① Example 1. Window type selection buttons Tablet type screen Panel mount type screen The screen above shows AUTO MODE as an example. To start, press the button and the window screen (Lower screen) displays.
  • Page 47 4. Operation Overview Example 3. Window type numeric keypad buttons (panel mount specification) ③ Numeric input items such as ③ shown above are entered on the window type numeric keypad screen. First, press the display, then the numeric keypad appears as per the photos right above. Enter numeric values using the keypad, then press ENT (the numeric keypad will close.) After changing all setpoints, press OK shown on the left screen to complete the numeric value input.

  • Page 48: Menu Screen

    4. Operation Overview 4-3 MENU Screen Switch ON the MAIN POWER of main unit connector panel (Section 1-6). Then the MENU screen will be accessible during the following modes: initial screen, startup, after completion of startup, testing. Depending on the condition of the equipment valid buttons will vary 1) Preliminary mode screen Long press MENU for 3 seconds.
  • Page 49 4. Operation Overview 3) Password Input password using numeric keypad. (Initial value of password is 0000) Press ENT after entering numeric value. Pressing × before pressing ENT will return to a screen before pressing MENU. If password is correct, the screen changes to setting modification screen.

  • Page 50: Settings

    5. SETTINGS 5. SETTINGS This Section explains various setting that can be changed according to your work conditions. The set value entered are recorded in the main unit of the equipment, therefore, once the equipment is set, it will also operate under the same conditions each time it is used. Input Switch Press the tablet screen with pad of your finger.
  • Page 51 5. SETTINGS 2) [TEST MODE] Select the test mode used for measurement. Refer to Section 8-3 for difference of test flow. 3) [TEST MODE / CYCLE TEST] Test 1 cycle (roughing, B.G. monitor, He spray signal/HeV output/up to judgment of acceptance) can be automatically performed.
  • Page 52 5. SETTINGS 8) [CALIBRATION / ION VOLT ADJ.] Accelerated voltage adjustment condition is set. When in AT START-UP ONLY mode, the accelerated voltage adjustment is limited to execution period of sensitivity calibration only. When in AT EVERY CAL. mode, accelerated voltage adjustment is executed during startup/sensitivity re-calibration and during all sensitivity calibration 9) [CALIBRATION / CHECK] When in NOT CHECK mode, startup is completed...
  • Page 53 5. SETTINGS 12) [SETTING MEMORY / RECIPE. NO. / RECIPE CHANGE] Executes Memory/Setting of setting details. Maximum of 5 setting patterns can be controlled under RECIPE No. from 1 to 5. It would be useful when different settings are required for inspection line. To store setting details, install recipe number under RECIPE No.

  • Page 54: Indication/Message

    5. SETTINGS 5-2 INDICATION/MESSAGE Tablet type screen Panel mount type screen 1) [TEST SCREEN] Select test screen. Tablet specification has 4 types of test screens, graph, meter, vac. diagram and value. Panel mount specification has 2 types of test screen, graph and value. Choose your preferred test screen.
  • Page 55 6) [LEAK RATE FILTER] Filter setting against the leak rate display of test screen. This filter uses ULVAC’s unique algorithm for filtering. By using this filter, steady display of background is maintained under a reduced He condition. However, its response will be delayed.
  • Page 56 5. SETTINGS 9) [Android / Date & time] This sets the date and time stored in the tablet. Date and time are used for preparing data history and calculation of secular change correction of calibration leak. Selecting date & time switches to setting screen of Android.
  • Page 57 5. SETTINGS 12) [Android / Wi-Fi] This sets ON/OFF of Wi-Fi. When ON is set, Wi-Fi is turned off for wiring connection and Wi-Fi will be automatically on for wireless connection. When OFF is set, Wi-Fi will not be turned on. Select OFF if radio waves shall not be emitted from the tablet (non-wireless model option).

  • Page 58: Serial Comm. / Ext I/O

    5. SETTINGS 5-3 SERIAL COMM. / EXT I/O Tablet type screen Panel mount type screen 1) [CONTROL] This sets the control method of equipment. In case of TABLET setting, input signals except EXT. I/O clean up (PIN 30), IND.HOLD (PIN 29), auto zero (PIN 26), Peak Hold (PIN 31) and PRINT (PIN 27) will be invalid.
  • Page 59 5. SETTINGS 4) [SERIAL COMM.] This sets various setting for communication. When communication setting part of RS232C, RS485 are selected, popup displays as on the left screen. <RS232C/RS485 BAUD RATE> Set the baud rate. Baud rate allows settings of 9600bps, 1920bps, 38400bps. <RS485 CHECK SUM>...
  • Page 60 5. SETTINGS 6) [EXT.I/O] Execute setting/output of EXT.I/O. When SETTING/MONITORING is selected on the screen, a pop up to check Input/output is indicated as in the left screen <EXT.I/O INPUT HELIOT←> When input signal is received from sequencers, etc. the assigned lamp lights up.
  • Page 61 5. SETTINGS 8) [SETPOINT SP1/SP2/SP3] Set the set point by touching numerical parts. The output signal from connector panel EXT.I/O connector (Section 11-1) will be turned on (contact switches from OPEN to CLOSE) when it is set at “Normally Open”. It is used for decision to pass or fail of leak test using external lamps, buzzers, etc.

  • Page 62: Calibration Standard

    5. SETTINGS 5-4 CALIBRATION STANDARD Tablet type screen Panel mount type screen 1)-1 1)-1 1)-2 1)-2 1)-3 1)-3 2)-1 2)-1 2)-2 2)-2 3)-1 3)-1 4)-1 4)-1 1) [INTERNAL CALIBRATION LEAK] 1)-1 [LEAK VALUE] Built-in calibration leak rate is set at the time of shipment. If the built-in calibration leak rate is changed by recalibration of the built-in calibration leak, press numerical area on the screen and re-enter suitable calibration lead value.

  • Page 63: List Of Settings For Shipment From Manufacturer (Factory Default)

    5. SETTINGS 5-5 List of Settings for Shipment from Manufacturer (Factory default) Each setting values at the time of shipment from manufacturer is as listed below. Make necessary changes if required. Setting Item Description Shipment Default Setting HELIUM, HYDROGEN TEST MODE AUTO MODE, ULTRA FLOW FIX, FINE FLOW FIX, GROSS FLOW FIX, SNIFFER (FLOW RATE),...
  • Page 64 5. SETTINGS Setting Item Description Shipment Default Setting CONTROL TABLET, EXT.I/O, SERIAL COMM. COMPATIBILITY NONE, MODEL 710/700, MODEL 300, MODEL ZERO BUZZER SELECT INTERVAL, CONTINUE SERIAL COMM. RS232C, RS485 RS232C RS232C Baud Rate 9600, 19200, 38400 RS485 RS485 Baud Rate 9600, 19200, 38400 CHECK SUM ON, OFF...

  • Page 65: Information

    6. Information 6. INFORMATION 6-1 SERVICE Tablet type screen Panel mount type screen Displays servicing bases of ULVAC group. Displays the telephone numbers of servicing bases when a country is selected. 6-2 START-UP DATA Tablet type screen Panel mount type screen Allows to check sensitivity data, etc.

  • Page 66: Maintenance (901W1/904W2)

    6. Information 6-3 MAINTENANCE (901W1/904W2) Tablet type screen Panel mount type screen 1)-1 1)-1 Allows you to check on information of the items requiring periodical maintenance. Verification of maintenance record by the manufacturer and recording of the maintenance date are made possible.

  • Page 67: Maintenance (901D2/904D3)

    6. Information 6-4 MAINTENANCE (901D2/904D3) Tablet type screen Panel mount type screen 1)-1 1)-1 Allows you to check necessary items that require periodical maintenance. Enables you to check manufacturer’s maintenance record and record the date of the maintenance user has conducted. Available for preventive maintenance.

  • Page 68: Startup

    7. Startup 7. Startup The startup method depends on vacuum method or Sniffer method. 7-1 Startup of Vacuum Method Use of Blank Flange Install blank flange to the test port when using under vacuum method. Starting the equipment by connecting pipings and testing unit may result in abnormal operation Startup/Sensitivity Calibration (Vacuum Method) When executing sensitivity calibration, install blank flange to the test port first.
  • Page 69 7. Startup Display Description Valve for open/close of calibration leak. Illuminates blue with the valve opened. Indicates Pirani gauge head. Valve to inject atmosphere to the test port. Illuminates blue with the valve opened. Indicates built-in calibration leak. PRESSURE Indicates the pressure of test port measured by PG. VENT PORT Port to inject atmosphere to the test port.
  • Page 70 7. Startup 5) [SENSITIVITY] SENSITIVITY CALIBRATION is executed under selected test mode to verify that the sensitivity is within the suitable range. The sensitivity of GROSS FLOW FIX will be a value with a certain factor processing when AUTO MODE and GROSS FLOW FIX is selected at [GENERAL]-[TEST MODE](5-1_2)), and when INT.

  • Page 71: Startup Of Sniffer Method

    7. Startup 7-2 Startup of Sniffer Method Sensitivity Calibration (Sniffer Method) Sniffer unit must be connected to test port without fail when executing Sensitivity Calibration. If used without connecting to the Sniffer unit, correct sensitivity value may not be calibrated and may cause adverse effect to the measurement value. Prohibition of Intake Do no intake water, water vapor, oil mist and powders using Sniffer probe.

  • Page 72: Sniffer (Concentration)

    7. Startup 5) [SENSITIVITY] 5)-1 Calibration Leak setting: Set at Internal Calibration Leak (Section 5-1_7)) Built-in Calibration Leak is used for startup of the equipment’s Sensitivity Calibration. After completion of the startup, it switches to test screen automatically. Calibration sensitivity by INT. CAL. LEAK is a value made of coefficient processing. Therefore, Measurement INT.
  • Page 73 7. Startup 5) [SENSITIVITY] 5)-1 During Calibration Startup: Set at ATM (Section 5-1_7)) Atmosphere is used for startup of sensitivity calibration of the equipment. After completion of the startup, it switches to test screen automatically. 5)-2 During Calibration Startup: Set at STD. GAS (Section 5-1_7)) Standard gas concentration is used for sensitivity calibration of the equipment.

  • Page 74: Testing

    8. Testing 8. Testing 8-1 Test Screen (Tablet type) 8-1-1 Graph 8-1-2 Meter - 65 -...

  • Page 75: Vac. Diagram

    8. Testing 8-1-3 Vac. DIAGRAM 8-1-4 VALUE Name Function Start/End/Vent Slide when executing start/end/vent of the testing. Buttons for Testing Changes the indicator to zero during testing. Refer to description Auto Zero Button (Section 8-4) of setting screen for details. Status Display Real-time display of status.
  • Page 76 8. Testing Name Function Sets measurement range width of leak rate. With this setting the voltage value (Section 11-2-2-5) of LOG Indication Range recorder output is determined. When using the test screen as a graph, set the other test screen with the width of measurement range.

  • Page 77: Test Screen (Panel Mount Type)

    8. Testing 8-2 Test Screen (Panel mount type) 8-2-1 Graph 8-2-2 VALUE Name Function Start/End/Vent Slide when executing start/end/vent of the testing. Buttons for Testing Changes the indicator to zero during testing. Refer to description Auto Zero Button (Section 8-4) of setting screen for details. Status Display Real-time display of status.

  • Page 78: Test Mode

    8. Testing 8-3 Test Mode Load on Test Port When connecting pipe fitting to the test port, do not place loads over 50N, 5kg's, 10lbs. Risk of damaging the equipment. Selected (Section 5-1_2)) from AUTO MODE, ULTRA FLOW, FINE FLOW, GROSS FLOW, SNIFFER (FLOW RATE), SNIFFER (CONCENTRATION).
  • Page 79 8. Testing Test Mode Oz/a %×R Amp. 0.01×10 0.01×10 He Ultra Flow ～10 ～10 0.01×10 0.01×10 He Fine Flow ～10 ～10 0.01×10 0.01×10 He Gross Flow ～10 ～10 0.01×10 0.01×10 0.01×10 0.01×10 He Auto Flow ～ ～ ～10 ～10 9.99×10 9.99×10 0.01×10 0.01×10...
  • Page 80 8. Testing 1) Gross Flow Sliding the Start test button ▶ of the test screen opens TV3,RV(904D4), executes roughing and changes to testing when the pressure of test port becomes 1200Pa or less. Due to low detection sensitivity, it is not suitable for high sensitivity test but is capable of testing under high pressure.

  • Page 81: Cycle Test

    8. Testing 8-3-1 Cycle Test (It is a function of tablet specification. Panel mount specification does not have the function.) (1) Overview A single test cycle (Roughing/Back ground Monitoring/He spray signal/HeV output/up to acceptance evaluation) can be performed automatically. Cycle test ON can be set when Ultra Flow, Fine Flow or Gross Flow are selected in the test mode setting.
  • Page 82 8. Testing (3) Settings 3-1) [Roughing Timer] Specify roughing time. Selecting CONSTANT 3-1) PRESSURE starts the testing 3-2) when the pressure reaches to the connection pressure within the 3-3) specified time. Selecting TIME does not start the 3-4) testing unless the specified time 3-5) elapses.
  • Page 83 8. Testing AUTOMATIC JUDGEMENT PASS SCREEN AUTOMATIC JUDGMENT FAIL SCREEN (4) Recommended Settings Spray test / Hood test Bell jar test / Bombing test Roughing Timer TIME CONSTANT PRESSURE BACKGROUND Timer BELOW SP.2 SKIP Test Timer TEST END AT FAIL TIME He Spray Timer TIME...

  • Page 84: 0- Zero Button And Functions

    8. Testing 8-4 -0- ZERO Button and Functions After being measured as an initial value at sensitivity calibration (refer to Section 1-8-2), zero point changes after startup in cold start up. Zero point during measurement will be as follows. 8-4-1 -0-ZERO Button Condition Display (1) When -0-ZERO button lights (blue) When -0-ZERO button lights, Auto Zero is active.

  • Page 85: Difference Of Settings Of Auto Zero Function And Example Of Use

    8. Testing ※ Note when auto zero function is turned off. The amount of residual helium in the analyzer tube changes right after the startup or when gross leak is measured. During testing with auto zero function turned off right after startup, the display value of leak rate may become negative (lower value) as the amount of residual helium decreases.
  • Page 86 8. Testing (3) ALTERNATE It changes every time when -0-ZERO button of ON/OFF (blue / white) of auto zero update function is long pressed for 3 seconds. It is automatically turned off when the test is completed. When Auto Zero is active, the minimum ion current is updated to zero point (Section 8-4-1(1)). When at OFF, zero point at sensitivity calibration is used (Section 8-4-1(2)).

  • Page 87: How To Use Clean Up

    8. Testing (4) INACTIVE Operation of zero point button becomes inactive (remain off). Zero point is not changed from the zero point at sensitivity calibration. The leak rate display always results in a negative value when detecting the ion current lower than zero point at sensitivity calibration. Set after reading the note of Section 8-4-1(2).

  • Page 88: How To Use Cal.check

    8. Testing 8-7 How to Use CAL.CHECK Function to execute measurement of calibration leak from Test Standby. By measuring leak rate of calibration leak known, it is possible to check if suitable measurement value is attained. (1) Long press MENU button for 3 seconds. The menu window displays. (2) Press CAL.

  • Page 89: Error Modes

    9. Error Mode 9. Error Modes Errors In the event of an error, release the error mode press × after checking the state of error described in the error message. See the troubleshooting section and service/repair as necessary. Release of Error Mode In the event of an error, release the error mode press ×...

  • Page 90: Caution Errors

    9. Error Mode 9-2 Caution Errors Caution errors do not have serious impact to startup or testing of the equipment. However, it may have serious impact to the equipment in the future 1) Error occurs during operation. During startup of the equipment, errors do not display immediately.

  • Page 91: List Of Error Messages

    9. Error Mode 9-3 List of Error Messages 9-3-1 Warning Errors Following is the list of all the error messages displayed in this equipment. Warning messages are shown with W OR C at the head of the numbers + state occurred and caution messages are shown with N at the head of the numbers + state occurred.
  • Page 92 9. Error Mode － － ROUGHING ERROR AT START- 1) Connect the blank flange to the Test Port and execute Startup. 2) Check power supply voltage. A state where Test Port is unable to 3) If supplying power with cord reel, achieve 100Pa or below (within 180 remove the cord reel and check seconds) at Startup.
  • Page 93 9. Error Mode － － PEAK POSITION OVER RANGE 1) Check to see that the ground terminal of power supply of the HELIOT is When accelerated voltage is outside connected. If it is not connected, of proper voltage value. connect and verify at startup. 2) Possibility of dirty analyzer tube.
  • Page 94 9. Error Mode － － SENSITIVITY HIGH 1) Is the pressure of He cylinder at (SNIFFER) normal? External calibration leak is calibrated at 0.1MPa. Verification of Outside range of the sensitivity supplied pressure is necessary. calibration. 2) Is the maintenance of Fore Pump being executed? Check...

  • Page 95: Caution Errors

    9. Error Mode 9-3-2 Caution Errors Key modes: A: Startup/sensitivity calibration, B: Standby, C: Testing Error Code Error Message/Abnormal Condition Remarks TEMPERATURE WARNING 1) Check the ambient temperature 2) Air filter of air cooling fan may be When the temperature within the dirty.
  • Page 96 9. Error Mode － － SENSITIVITY HIGH 1) Did the large amount of He being absorbed during last (VACUUM） measurement? The concentration of He within the equipment is rising. When better than resulting Several operations of start/stop are sensitivity range of the sensitivity needed.
  • Page 97 9. Error Mode － － BACKGROUND 1) Did He being used before startup of the equipment? The concentration of ERROR(SNIFFER） He within the environment rising. Find place where When the Background is high at the concentration. Is stable and execute time of Startup.
  • Page 98 9. Error Mode － － t PRESSURE INCREASE 1) The fixed Ultra Flow turns to error when it becomes 3Pa and over. In When the pressure rose during such a case, test with Fine Flow or testing. Auto Flow. 2) The fixed Fine Flow turns to error when it becomes 150Pa and over.

  • Page 99: Maintenance

    10. Maintenance 10. Maintenance There are some equipment/parts used in this equipment require periodical maintenance and replacement. Some parts deteriorate after prolonged use and must be replaced in the event of failure. The maintenance and replacement procedures are described below. Power Shutdown When installing the equipment and removing the external panels for inspection and replacement of parts, turn off the MAIN POWER switch and disconnect plug...

  • Page 100: List Of Maintenance Items

    10. Maintenance 10-1 List of Maintenance Items The following components require periodical maintenance. Refer to maintenance procedure for each component for operation. Component Name Task Frequency Type （model installed） W1(GHD-031):R-2 Rotary Pump Replacement of oil 1 per 6 month W2(GLD-137):SMR-100 (901W1､904W2) Overhaul 1 per year...

  • Page 101: Maintenance Procedures

    10. Maintenance 10-2 Maintenance Procedures 10-2-1 How to Install/Remove External Panels For maintenance, first the external panels need to be removed according to a given order. The following describes the method of removing each panel. Power Shutdown When installing the equipment and removing the external panels for inspection and replacement of parts, turn off the MAIN POWER switch and disconnect plug from the outlet before servicing.

  • Page 102: Rotary Pump

    10. Maintenance 10-2-2 Rotary Pump (1) Areas of inspection 1) Oil level: Fill with oil between 50 to 80 % of the view port. 2) Oil wear: Check for discoloration and dust interfusion. (2) Inspection Procedures - For model 901W1 - A view port is located at the lower area of the left panel.
  • Page 103 10. Maintenance - For model 904W2 - 1) Remove oil drain cap and connect hoses. Remove the oil intake cap. Place an oil drain pan at the end of the hose and drain the oil by turning the drain faucet. (Approximately 1 liter of oil is drained) When the oil has finished draining, close the drain faucet.

  • Page 104: Pirani Gauge Head

    10. Maintenance 10-2-3 Pirani Gauge Head (1) Areas of Inspection 1) Check for disconnection of Pirani Gauge Head There should be an electrical continuity between one pin of group A and one pin of group B of the following diagram. (Approximately 13 within the atmosphere) Over Voltage to Filament Risk of disconnection if 2mA or more overload current is applied to the filament.
  • Page 105 10. Maintenance (3) Replacement Procedure 1) Turn OFF the main power supply switch and make sure to remove the power supply cable from the main unit. 2) Remove the top and rear panels. Refer to the procedure for removing external panels (Section 10-2-1) for removal method.

  • Page 106: Ion Source

    10. Maintenance 10-2-4 Ion Source (1) Areas of Inspection 1) In case of disconnection error of filament. 2) In case of sensitivity error. 3) 2 Filaments of Filaments 1 and 2 are installed. Only when Filament 1 is disconnected, it automatically switches to Filament 2.

  • Page 107: Calibration Leak

    10. Maintenance 10-2-5 Calibration Leak (1) Replacement Procedure 1) Turn OFF the main power supply switch and make sure to remove the power supply cable from the main unit. 2) Remove the top and rear panels. Refer to the procedure for removing external panels (Section 10-2-1) for removal method.

  • Page 108: Sintered Metal Element Of Sniffer Probe Tip

    10. Maintenance 10-2-6 Sintered Metal Element of Sniffer Probe Tip (1) Areas of Inspection 1) The Sintered Filter should be free from dirt or clogs. (2) Inspection Procedure 1) Replacement is necessary if caution error (decrease in injection pressure or increase in injection pressure) (decrease and increase in flow rate of Sniffer Unit BS) occurs frequently during Sniffer test.

  • Page 109: Dust Filter (Sniffer Bs Unit Only)

    10. Maintenance 10-2-8 Dust Filter (Sniffer BS Unit only) (1) Areas for Inspection 1) Replace it when caution error (decrease in injection pressure or decrease in flow rate) is indicated. (2) Replacement Procedure 1) After removing the NW25 clamp of Sniffer Unit BS Unit connected to the test port, remove the cover of Sniffer Unit BS.

  • Page 110: Dust Filter (Sniffer Unit Bt Only)

    10. Maintenance 10-2-9 Dust Filter (Sniffer Unit BT only) (1) Areas for Inspection 1) Replace it when caution error (decrease in injection pressure or decrease in flow rate) is indicated. (2) Replacement Procedure 1) Remove the NW25 clamp of Sniffer Unit BT connected to the Test Port. Filter Bowl 2) Replace with a new filter by turning the clear bowl of filter area to clockwise...

  • Page 111: Fan Filter Inside The Equipment

    10. Maintenance 10-2-10 Fan Filter Inside the Equipment (1) Areas for Inspection 1) Replace when filter is dirty. (2) Replacement Procedure 1) Turn OFF the main power supply switch and make sure to remove the power supply cable from the main unit. 2) Remove the top and rear panels.

  • Page 112: Oil Mist Filter

    10. Maintenance 10-2-12 Oil Mist Filter (1) Areas for Inspection 1) Replace when the element becomes dirty. 2) If oil is already accumulated inside the bowl, the inside must be cleaned. Bowl (2) Replacement Procedure 1) Turn OFF the main power supply switch and make sure to remove the power supply cable from the main unit.

  • Page 113: Vent Filter

    10. Maintenance 10-2-13 Vent Filter (1) Areas for Inspection 1) Replace when the element becomes dirty. (2) Replacement Procedure 1) Turn OFF the main power supply switch and make sure to remove the power supply cable from the main unit. 2) Remove the top and rear panels.

  • Page 114: Replacement Of Panel Mount Specification Rtc Battery Set

    10. Maintenance 10-2-14 Replacement of panel mount specification RTC Battery set (1) Areas for Inspection 1) Replace the RTC Battery set regularly, every 5 years. (2) Replacement Procedure 1) Turn off the main power switch and disconnect the power cable from the main unit certainly.

  • Page 115: Input/Output Signals

    11. Input/Output Signals 11. Input/Output Signals Input/output signals are operated with 4 types of connectors; EXT.I/O (external control), LEAK RATE (Leak Rate output), RS-232C (Printer connection and RS232C communication), and display/RS485 (RS-485 communication). The following list describes each of these functions and their usage procedure.

  • Page 116: List Of Output Signals (Standard Mode: Not In Cycle Test Mode)

    11. Input/Output Signals 11-1-1 List of Output Signals (standard mode: not in cycle test mode) Description（Set at Normally Open） № Signal Name 1 SETPOINT1 Outputs this signal when leak rate exceeds set point 1 – 3. Maintains the output 2 SETPOINT2 until the next TEST START signal is entered.

  • Page 117: List Of Output Signals ( In Cycle Test Mode)

    11. Input/Output Signals 11-1-2 List of Output Signals ( in Cycle test mode) Description（Set at Normally Open） № Signal Name Outputs when PASS is ON at Cycle test screen. 1 PASS Output signal is kept until next TEST START signal is input. Outputs when FAIL is ON at Cycle test screen.
  • Page 118 11. Input/Output Signals (1) Output signals 1) Output signal outputs on a steady basis. 2) Output is an open collector output of emitter common. The emitter common is 34, and 35 pin (-COM). 3) The output rating is [DC + 20 to 30 V (+24V recommended) 50mA saturated voltage] 4) Place a load between each pin and power supply.

  • Page 119: List Of Input Signals

    11. Input/Output Signals 11-1-3 List of Input Signals № Signal Name Description 18 EXT.POWER OUT Power supply output of DC 24V maximum current 2A DC24V Start and stop input signal of the equipment SYSTEM Activates when changed from high to low. START/STOP Stops when changed from low to high Start and stop input signal of test.
  • Page 120 11. Input/Output Signals (1) Input Signals 1) Input voltage of Pin +COM 32､33 is DC＋20 to 30V (＋24 V recommended) 2) Place a junction or open collector between input signal and GND. Input the signal by operation of the junction. 3) Pulse input of not less than 1 second per pulse is to be entered.

  • Page 121: Leak Rate

    11. Input/Output Signals 11-2 LEAK RATE Voltage output of leak rate and test port pressure. The voltage output is DC 0 V to 10 V. Use this voltage by connecting to PLCs and pen recorders. 11-2-1 Output Pin Number Terminal Description Signal Leak rate mantissa portion output＋...

  • Page 122: Leak Rate Exponent Portion Output Table (When Other Than None Is Selected For Compatibility)

    11. Input/Output Signals Output Voltage Oz/a %×R Amp. 10.00 E+00 E+01 E-07 E+06 9.00 E-01 E+00 E-08 E+05 8.00 E-02 E-01 E-09 E+04 7.00 E-03 E-02 E-10 E+03 ６ 6.00 E-04 E-03 E-11 E+02 ５ 5.00 E-05 E-04 E-12 E+01 ４...

  • Page 123: Quasi Log Output Table Of Test Port Pressure

    11. Input/Output Signals 11-2-2-4 Quasi LOG Output Table of Test Port Pressure The relational expression between test port pressure and output voltage of REC OUT is as below. -(S-E) P=10(V-E)×10 ： Pressure value ： REC.OUT Output voltage ： Value rounded off decimal points form REC.OUT Output voltage ：...

  • Page 124: Leak Rate Log Output Table (When Other Than None Is Selected For Compatibility)

    11. Input/Output Signals 11-2-2-6 Leak Rate LOG Output Table (When other than NONE is selected for COMPATIBILITY) Leak rate with log output voltage depends on the unit of leak rate. LR = 10 ( V − E ) × 10 The relation between leak rate and output voltage is as below.

  • Page 125: Recorder Output Graph (Leak Rate Mantissa / Exponent Portion Output)

    11. Input/Output Signals 11-2-2-7 Recorder Output Graph (Leak Rate Mantissa / exponent portion output) LEAK RATE 11-2-2-8 Recorder Output Graph (Test port pressure quasi LOG output) 1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 PRESSURE 【Pa】 - 116 -...

  • Page 126: Recorder Output Graph (Leak Rate Log Output)

    11. Input/Output Signals 11-2-2-9 Recorder Output Graph (Leak Rate LOG Output) Example) A＝-3 ,B= -12 Set time 1.E-14 1.E-12 1.E-10 1.E-08 1.E-06 1.E-04 1.E-02 LEAK RATE - 117 -...

  • Page 127: Rs232C

    11. Input/Output Signals 11-3 RS232C Connection of either Printer or RS-232C communication connector is possible. If RS232C communication is employed, turn the printer setting (Section 5-3_5)) to OFF. 11-3-1 Connection of Printer The printer prints the startup sensitivity (minimum detection sensitivity) of each flow and measurement value (leak rate) for test.
  • Page 128 11. Input/Output Signals (3) Connection of Printer Connect the printer to the main unit RS232C connector using D-Sub9Pin cross cable. HELIOT side PIN No. Wire connection Printer PIN No. N.C. N.C. connected Request for sending Data receiving XON/XOFF output N.C. －...
  • Page 129 11. Input/Output Signals (5) Printing Startup date/time Sensitivity of each flow Set point value being set Prints out leak rate when print out signal is received Startup date/time Prints out the date and time of startup Sensitivity of each flow Displays sensitivity of ULTRA, FINE and GROSS Set point 1-3 Displays setting value of each set point.

  • Page 130: Rs-232C Communication

    11. Input/Output Signals 11-3-2 RS-232C Communication RS-232C communication is made possible by using cable (D-Sub9Pin) commercially available. Connection of Connector MAIN POWER must always be turned OFF before connecting the connector to the main unit. Risk of damage to the equipment. 11-3-2-1 Communication Protocol Communication protocol Signal format...

  • Page 131: Commands

    11. Input/Output Signals (2) Communication cable change, which used for HELIOT700/710 and HELIOT300 It was D-sub 25 female connector in the case of previous models. Prepare for wiring of D-sub 25 female, D-sub9 female and inch screw #4-40 at HELIOT side. 7 Pin (RTS) and 8 Pin (CTS) are short-circuited at HELIOT main unit side.
  • Page 132 11. Input/Output Signals Command Parameter Response Data Description Verification execution Except verification screen of request for re-sniffing by sniffer method Release error Test mode, temperature read out **±**.* Test mode code 2 digits, temperature 5 digits HELIOT condition read out ****** Condition code 2 digits, error code 4 digits (refer to the error catalog list)
  • Page 133 11. Input/Output Signals Command Parameter Response Data Description Background timer read out ***.*,*,* Timer setting 5 digits, Unit 1 digit (0=sec), Setting 1 digit (0=BELOW SP.2, 1=Time priority, 2=SKIP) Background timer setting Timer setting 5 digits, Unit 1 digit (0=sec), Setting 1 digit (0=BELOW SP.2, 1=Time priority, 2=SKIP) ***.*,*,* During startup...
  • Page 134 11. Input/Output Signals Command Parameter Response Data Description Read out during calibration startup (Except Sniffer (concentration) setting) digit 1=With calibration, 0=Without calibration digits 0=INT. CAL. LEAK, 1= EXT. CAL. LEAK) Setting during calibration startup (Except Sniffer (concentration) setting) digit 1=With calibration, 0=Without calibration digits 0=INT.
  • Page 135 11. Input/Output Signals Command Parameter Response Data Description Unit pressure read out (0=Pa,1=mbar,2=atm,3=Torr) Unit pressure setting (0=Pa,1=mbar,2=atm,3=Torr) Setting error Command byte count is different Leak rate correction (coefficient) read out **.** Setting value 5 digits Leak rate correction (coefficient) setting Setting value 5 digits **.** Setting error...
  • Page 136 11. Input/Output Signals Command Parameter Response Data Description REC. OUT voltage read out (0=Linear, 1=Logarithm) REC. OUT voltage setting (0=Linear, 1= Logarithm) During error Command byte count is different Set point 1 read out n.nnE±nn* Setting value 8 digits, set point 1 ON/OFF (1=ON, 0=OFF) Set point 1 setting Setting value 8 digits...
  • Page 137 11. Input/Output Signals Command Parameter Response Data Description Calibration date of Internal calibration leak value ******** (vacuum method) read out Year 4 digits, month 2 digits, day 2 digits Calibration date of Internal calibration leak value (vacuum method) setting ******** Year 4 digits, month 2 digits, day 2 digits After completion of startup Command byte count is different...

  • Page 138: Status Codes

    11. Input/Output Signals 11-3-2-4 Status Codes ① When B3 command is used Code Description Stop Start-up at Auto mode Start-up at Ultra flow Start-up at Fine flow Start-up at Gross flow Start-up at Sniffer/A Start-up at Sniffer/B Standby at Auto mode Standby at Ultra flow Standby at Fine flow Standby at Gross flow...
  • Page 139 11. Input/Output Signals ② When MW command is used Code Description Stop Pumping ANALYZER PUMPING DOWN Undergoing accelerating voltage adjustment Undergoing ion focus voltage adjustment Undergoing sensitivity calibration Under sensitivity recalibration by vacuum method (until sensitivity check) Under sensitivity recalibration by sniffer method (until sensitivity check) Standby at Auto mode Standby at Ultra flow...

  • Page 140: Test Mode Codes

    11. Input/Output Signals 11-3-2-5 Test Mode Codes Code Description Auto mode Ultra flow Fine flow Gross flow Sniffer concentration: Atm Sniffer flow rate Sniffer concentration: Std. gas 11-3-2-6 Unit Codes Code Description Pa･m3/s mbar･L/s atm・cc/s Torr・l/s luck sccm Mol/s %×R oz/a Amp.

  • Page 141: Communication

    11. Input/Output Signals 11-3-3 RS-485 Communication 11-3-3-1 Communication Specification Signal format ：RS-485 ：2-wire system ：half duplex Rotation method ：Start stop synchronization Data configuration ：ASCII code Transmission distance ：500m Max. No. of connection ：32 (includes host) Transfer speed ：9600,19200,38400bps (changeable by setting) Bit configuration Start bit ：1bit...

  • Page 142: Checksum

    11. Input/Output Signals 11-3-3-3 Checksum Checksum is used for checking data sent is received properly. The calculation of the checksum will be up to a letter XOR (the exclusive theory sum) before checksum from the address. When calculating checksum manually, it is useful to use a standard “calculator” in WINDOWS. Select scientific for calculator type and calculate the checksum in hexadecimal.

  • Page 143: Wiring Method

    11. Input/Output Signals 11-3-3-5 Wiring Method RS-485 enables multi-drop connection. (Multi-drop connects equipment (nodes) in sequence on 1 channel path) The following diagrams show both proper and bad examples of connection. It operates in any short distances, however, caution is needed when wiring long distances. When laying communication channel line on to a device, avoid access to or parallel wiring of, power lines, high voltage cables and high frequency cables.

  • Page 144: Basic Data Format

    11. Input/Output Signals 11-3-3-6 Basic Data Format ･･････ CHKH CHKL : Colon : Equipment address/higher 4 bit (capital letters 0 – 9) : Equipment address/lower 4 bit (capital letters 0 – 9) : Various commands (capital letters/caution to lower case letters) : Data <4 bit>...

  • Page 145: Communication Time Chart

    11. Input/Output Signals 11-3-3-8 Communication Time Chart Host Requirement To Add01 To Add02 Data Transmission change Add01 Response Data Transmission change Add02 Response Data Transmission change To Add01 ：Request of data from host to address No. 01 equipment Add01_900 Response ：900 of address No.

  • Page 146: List Of Ascii Codes

    11. Input/Output Signals 11-3-3-9 List of ASCII Codes TC7(DLE) (SP) TC1(SOH) TC2(STX) “ TC3(ETX) TC4(EOT) TC5(ENQ) TC8(NAK) TC6(ACK) TC9(SYN) & TC10(ETB) ‘ FE0(BS) FE1(HT) FE2(LF) ＊ FE3(VT) FE4(FF) IS4(FS) < FE5(CR) IS3(GS) IS2(RS) > IS1(US) (del) ？ - 137 -...

  • Page 147: Each Data

    11. Input/Output Signals 11-4 Each Data Each data will be saved on micro SD card installed in to the TABLET. 11-4-1 Description (Explanation) of each data Files inside the micro SD card are composed by few folders. Do not touch the files that are not described below as it is used to move the system. And do not add or change file name of folders which are as below.

  • Page 148: Gauge Log Print Record Example

    11. Input/Output Signals 11-4-3 Gauge Log Print Record Example [DateTime] [No.] [Valve] [LeakRate] [OK/NG] [InnerPirani] [Temperature] 14:42:37 FINE 1.00E-12 2.53E+00 26.1 15:23:21 ULTRA 6.35E-10 4.00E-01 26.1 15:32:07 ULTRA 5.57E-10 4.00E-01 26.1 15:50:13 1.00E-10 4.90E+03 26.4 16:02:03 FINE 1.77E-09 2.77E+00 28.7 16:15:20 FINE 1.46E-09...

  • Page 149: Loading Method Of The Data

    11. Input/Output Signals 11-6 Loading method of the data There are 2ways to load the data from the micro SD card. 11-6-1 micro SD After switching off the TABLET, Remove the micro SD card from the TABLET. Insert the micro SD card to an exchange adaptor such as right picture type and check the data file inside of PC.

  • Page 150: Guarantee

    ULVAC, by accidents caused by natural disasters and acts of God, or by consumable parts, are not guaranteed under this warranty.

  • Page 151: Ulvac Components / Certificate Of Decontamination

    ULVAC service center or sales office prior to shipment. Please consult with your closest local ULVAC service center or sales office if our components are used with toxic gases or contaminated with reactive products or substances produced by reaction.

  • Page 152: Declaration Of Conformity

    Person authorized to compile the technical file: Chris Goebel ( Name and address) ULVAC GmbH Klausnerring 4 85551 Kirchheim b. München, Germany 18.Juiy, 2023 Toyoaki Nakajima Chigasaki,Japan Senior Manager of Components Business HQ (date &...

  • Page 153: Declaration Of Conformity

    Person authorized to compile the technical file: Chris Goebel ( Name and address) ULVAC GmbH Klausnerring 4 85551 Kirchheim b. München, Germany 18.Juiy, 2023 Toyoaki Nakajima Chigasaki,Japan Senior Manager of Components Business HQ (date &...

  • Page 154: Heliot 900 Series Recommended Abbreviations List

    HELIOT 900 SERIES RECOMMENDED ABBREVIATIONS LIST: B.G. =BACK GROUND S.D.=STORAGE DEVICE AS= “A” TYPE SNIFFER BS=”B” TYPE SNIFFER BT=”B” TYPE SNIFFER WITH TUBE CONNECTION I/O= INPUT/OUTPUT Pa m3/sec= PASCAL CUBIC METERS PER SECOND l/min= LITERS PER MINUTE He= HELIUM V= VOLTS...

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