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BRONKHORST VDM Instruction Manual

Vapor delivery module
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Instruction Manual
Vapor Delivery Module
Doc. no.: 9.17.079 rev. F Date: 09-09-2024
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.
Keep this document for future reference.

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  • Page 1 Instruction Manual Vapor Delivery Module Doc. no.: 9.17.079 rev. F Date: 09-09-2024 ATTENTION Please read this document carefully before installing and operating the product. Not following the guidelines could result in personal injury and/or damage to the equipment. Keep this document for future reference.

  • Page 2: Symbols In This Document

    Bronkhorst representative. · If the product is damaged, it should not be put into service. In that case, contact your Bronkhorst representative for service. · Check the packing list to ensure that you received all items included in the scope of delivery.

  • Page 3: Warranty

    Selected parts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsure about the suitability of a replacement component, contact your Bronkhorst representative for information.
  • Page 4 Bronkhorst® Instruction Manual Vapor Delivery Module 9.17.079F...

  • Page 5: Table Of Contents

    Bronkhorst® Table of contents Introduction ..................... . . 7 Scope of this manual .
  • Page 6 Bronkhorst® 4.6.2.3 Stopping process ......................19 4.6.2.4...

  • Page 7: Introduction

    Intended use The VDM is a compact integrated system to realize mass flow control of a vapor. The VDM is intended to generate a predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately controlled carrier gas flow with subsequent evaporation inside a temperature controlled chamber.

  • Page 8: Declaration Of Conformity

    Instruction manual E-8000 Readout and Control System (document nr. 9.17.076) · Instruction manual PROFINET interface (document nr. 9.17.095) For RS232 or FLOW-BUS operation the following (free) Bronkhorst® software is available: · Interface between digital instruments and Windows software FlowDDE ·...

  • Page 9: Starting Up

    Power supply · Power consumption Rated pressure test inspection Bronkhorst® instruments are pressure tested to at least 1.5 times the specified operating pressure and outboard leak tested to at least 2 * 10 mbar l/s Helium. · The test pressure is stated on a red label on the device; if this label is missing or if the test pressure is insufficient, the device must not be used and should be returned to the factory.

  • Page 10: Technical Specifications Physical Dimensions

    The VDM gas and liquid supply are equipped with compression type or face-seal-fittings. Normally these fittings are BSP parallel threads types which have to be used in combination with elastomeric O-rings to seal to the VDM. Occasionally fittings are orbital welded to the VDM.

  • Page 11: Pressure Rating

    Tracing Optionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with a tracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is not supplied. The voltage at this tracing output is equal to the supply voltage of the VDM.

  • Page 12: Pt100 Tracing Sensor

    Pt100 tracing sensor Optionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with a Pt100 inlet 4-pin M12 A-coded male connector. This connector is intended for connecting a two, three or four-wire Pt100.

  • Page 13: Connectors (Hook-Up Diagram)

    Bronkhorst® Connectors (hook-up diagram) 9.17.079F Instruction Manual Vapor Delivery Module...
  • Page 14 Bronkhorst® Instruction Manual Vapor Delivery Module 9.17.079F...

  • Page 15: Installation Mounting

    (e.g. toxic or flammable). Seals Bronkhorst has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is a general guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there is no liability for damages accruing from the use of this guide.

  • Page 16: Purging And Filling

    · Fill the system with liquid. Close V1 · Open V2 briefly; allow mixing valve VDM to fill. Make sure that the carrier gas is always flowing · Wait until all gas bubbles left the system via Purge out when the liquid flow is on. It is preferred to always and V5, then close V5.

  • Page 17: Starting Process

    If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully (preferably with inert liquid, E3, E4, E5) before opening the system. · In case of non-pure liquids, place a filter upstream the liquid flow controller. · Mount the VDM upright. 9.17.079F Instruction Manual Vapor Delivery Module...

  • Page 18: Starting Up Using Vacuum

    · Fill the system with liquid Close V1 · Open B2 briefly; allow mixing valve VDM to fill Make sure that the carrier gas is always flowing · Close V5 when the liquid flow is on. Preferably, let always gas flow in the carrier gas line when the system is filled with liquid.

  • Page 19: Stopping Process

    If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully (preferably with inert liquid, E3, E4, E5) before opening the system. · In case of non-pure liquids, place a filter upstream the liquid flow controller. · Mount the VDM upright. 9.17.079F Instruction Manual Vapor Delivery Module...

  • Page 20: Operation

    Bronkhorst® Operation Powering up Before switching on the power, be sure that: · System is checked for leakage of gases and liquids · All connections have been made · Flow-set points are zero · No liquid has been spilled into the equipment Switch on and then: ·...

  • Page 21: Select Instrument

    When an active node address is found, the VDM will show the corresponding USERTAG or Serial Number in the 'Top line'. It will also show the actual measure and, if applicable, the actual setpoint.

  • Page 22: Temperature And Flow Setpoints

    This chapter explains the most important user interface options. For more information please check the E-8000 manual (document no 9.17.076) at www.bronkhorst.com/downloads Operational settings Make sure that the tracing and heating temperatures are well above the dew point of the desired vapor flow at the process conditions.

  • Page 23: Operation Example

    Application The VDM can be used for generating certain humidity in a gas stream. Carrier gas and liquid (water) are controlled to regulate the humidity. The water is mixed with the gas and consequently evaporated. The humidity at a certain temperature corresponds with a certain ratio of gas and water, this ratio can be set by the flow controllers which are part of the VDM.

  • Page 24: Vapor Pressure Of Water

    Bronkhorst® 5.3.2 Vapor pressure of water Instruction Manual Vapor Delivery Module 9.17.079F...

  • Page 25: Troubleshooting And Service Common Issues

    Bronkhorst® Troubleshooting and service Common issues Symptom Possible cause Action No heating of heater, everything else 1. Mains switch turned off Turn on mains switch works 2. Fuse may be blown Replace fuse (no ready heater LED after 10 minutes) (check mains and heater fuse) 3.

  • Page 26: Maintenance

    For cleaning the exterior use a soft damp cloth. Service  For current information about Bronkhorst® and worldwide service addresses, please visit our website: www.bronkhorst.com Do you have any questions about our products? Our Sales department will gladly assist you selecting the right product for your ...

  • Page 27: Returns Returns

    Disposal (end of lifetime) If you are a customer within the European Union and wish to dispose of Bronkhorst® equipment bearing the symbol of a crossed out waste disposal bin, you can return it in accordance with the removal and return instructions.
  • Page 28 Service Contact Downloads Bronkhorst High-Tech B.V. +31 573 45 88 00 Nijverheidsstraat 1a info@bronkhorst.com NL-7261 AK Ruurlo, The Netherlands www.bronkhorst.com...

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