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Related Manuals for BRONKHORST VDM Series
Summary of Contents for BRONKHORST VDM Series
- Page 1 Instruction Manual Vapor Delivery Module Doc. no.: 9.17.079D Date: 06-02-2018 ATTENTION Please read this Instruction Manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this document.
- Page 3 Bronkhorst® Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage.
- Page 4 Bronkhorst® Instruction Manual Vapor Delivery Module 9.17.079D...
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Page 5: Table Of Contents
Bronkhorst® Table of contents Introduction ......................7 . - Page 6 Bronkhorst® ......................19 Powering up .
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Page 7: Introduction
Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and corrosion resistance of the used materials against the metered media lies solely with the end user. Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper use or use for other than the intended purpose. - Page 8 Bronkhorst® Manuals and software tooling can be found at http://www.bronkhorst.com/en/downloads Instruction Manual Vapor Delivery Module 9.17.079D...
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Page 9: Starting Up
· Power consumption Rated pressure test inspection Bronkhorst® instruments are pressure tested to at least 1.5 times the specified working process conditions and outboard leak tested to at least 2 * 10 mbar l/s Helium. The tested pressure is specified on the instrument with a red sticker. -
Page 10: Technical Specifications
Technical specifications Physical dimensions For overall dimensions please consult supplied dimensional drawing 7.05.901. This document is available on http://www.bronkhorst.com/en/downloads or can be obtained by contacting our local sales & service representatives Ambient conditions · Ambient temperature : 5°C - 40°C. -
Page 11: Pressure Rating
Tracing Optionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with a tracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is not supplied. -
Page 12: Pt100 Tracing Sensor
Pt100 tracing sensor Optionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with a Pt100 inlet 4-pin M12 A-coded male connector. This connector is intended for connecting a two, three or four-wire Pt100. -
Page 13: Connectors (Hook-Up Diagram)
Bronkhorst® Connectors (hook-up diagram) 9.17.079D Instruction Manual Vapor Delivery Module... -
Page 14: Installation
Check the system for leaks before applying pressure, especially if toxic, explosive or other dangerous fluids are used. Seals Bronkhorst has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is a general guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there is no liability for damages accruing from the use of this guide. -
Page 15: Purging And Filling
Bronkhorst® Purging and filling 4.6.1 Starting up without using vacuum 4.6.1.1 Filling system Procedure Actions Purge all lines · Close V2, V3 and V7 · Open V1, V4, V5 and V6 · Give setpoint 100% to MFC · Give setpoint 0% to LFC ·... -
Page 16: Starting Process
Bronkhorst® 4.6.1.2 Starting process Procedure Actions Set the heater at right temperature · Give set point to the heater; wait until the temperature is stabilized Start gas flow · Give setpoint to MFC Make sure that the carrier gas is always flowing when the liquid flow is on. -
Page 17: Starting Up Using Vacuum
Bronkhorst® 4.6.2 Starting up using vacuum 4.6.2.1 Filling system Procedure Actions Evacuate the lines “Vacuum” · Start pumps Evacuate all lines · Close: V1, V2, V3, V4, and V6 · Make sure that “waste” and “process” are vacuum · Connect inert gas on carrier gas inle. -
Page 18: Stopping Process
Bronkhorst® 4.6.2.3 Stopping process Procedure Actions Disconnect process · Open V6, close V7 Stop liquid flow · Give setpoint = 0 to LFC Optional: Stop gas flow · Give setpoint = 0 to MFC Make sure that the carrier gas is always flowing when the liquid flow is on. -
Page 19: Operation
Bronkhorst® Operation Powering up Before switching on the power, be sure that: · System is checked for leakage of gases and liquids · All connections have been made · Flow-set points are zero · No liquid has been spilled into the equipment Switch on and then: ·... -
Page 20: Select Instrument
Bronkhorst® 5.2.3 Select instrument The Vapor Delivery Modules contains liquid and gas flow controllers. Also a temperature controller for evaporation and optional trace heating is provided. These integrated instruments have unique node addresses. Factory default node addresses are: Node address... -
Page 21: Temperature And Flow Setpoints
This chapter explains the most important user interface options. For more information please check the E-8000 manual (document no 9.17.076) at http://www.bronkhorst.com/en/downloads Operational settings Make sure that the tracing and heating temperatures are well above the dew point of the desired vapor flow at the process conditions. -
Page 22: Operation Example
/min Air has to be moistened. Which water flow is needed for a r.h. of 50%. The vapor pressure of water at 80°C is 473.3 mbar according to FLUIDAT®. FLUIDAT® on the Net: Bronkhorst's interactive Flow Calculations and routines generating Physical Properties. Visit www.fluidat.com Assumptions: ·... -
Page 23: Vapor Pressure Of Water
Bronkhorst® 5.3.2 Vapor pressure of water 9.17.079D Instruction Manual Vapor Delivery Module... -
Page 24: Troubleshooting And Service
Bronkhorst® Troubleshooting and service Common issues Symptom Possible cause Action No heating of heater, everything else 1. Mains switch turned off Turn on mains switch works 2. Fuse may be blown Replace fuse (no ready heater LED after 10 minutes) (check mains and heater fuse) 3. -
Page 25: Maintenance
Cleaning For cleaning the exterior use a soft damp cloth. Service For current information on Bronkhorst® and service addresses, please visit our website: http://www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. -
Page 26: Removal And Return Instructions
Service & Support section of the Bronkhorst website (www.bronkhorst.com). Important: Clearly note, on top of the package, the customs clearance number of Bronkhorst High-Tech B.V., namely: NL801989978B01 (only if applicable, otherwise contact your distributor for local arrangements.) Instruction Manual Vapor Delivery Module 9.17.079D...