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Veeco IBS 250 Technical Manual

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IBS 250
Power Supply
Technical Manual

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Summary of Contents for Veeco IBS 250

  • Page 1 IBS 250 Power Supply Technical Manual...
  • Page 2 IBS-250 Power Supply Power Supply Power Supply Power Supply Technical Manual Technical Manual Technical Manual Technical Manual...
  • Page 3 Veeco Instruments, Inc. therefore reserves the right to change specifications without prior notice. This manual is intended for qualified personnel who are responsible for servicing and or running Veeco Instruments, Inc. ion beam processing systems and equipment. The information contained in this manual is the sole property of Veeco Instruments, Inc. and may not be reproduced, distributed, or transmitted in any form without the written permission of Veeco Instruments, Inc.

  • Page 4: Table Of Contents

    Table of Contents Table of Contents Table of Contents Table of Contents Safety Safety 1 1 1 1 Safety Safety Introduction Introduction Introduction Introduction 3 3 3 3 Description Mode of Operation Installation Installation 4 4 4 4 Installation Installation Mounting Electrical Grounding...
  • Page 5 Troubleshooting and Diagnostics Troubleshooting and Diagnostics Troubleshooting and Diagnostics Troubleshooting and Diagnostics IBS Power Supply Error Alarms and Possible Causes Cathode Alarm Cathode Filament Fail Alarm Discharge Alarm Beam Alarm Accelerator Alarm Neutralizer Filament Alarm (N FIL) Neutralizer Balance Alarm (N BAL) Source Alarm Conversion to Different Line Voltages Conversion to Different Line Voltages...
  • Page 6 Keep all guards and panels in place during routine system operation. Keep all guards and panels in place during routine system operation. Complete ion beam systems from Veeco Instruments, Inc. are supplied with hardware interlocks and software safeguards at various points in the sys- tem.
  • Page 7 Operation involves high voltages within the enclosure and at the output of Operation involves high voltages within the enclosure and at the output of Operation involves high voltages within the enclosure and at the output of Operation involves high voltages within the enclosure and at the output of the power supply.

  • Page 8: Description

    Chapter 2: Introduction Description The IBS-250 Power Supply is a microprocessor-controlled switching power supply intended to drive gridded ion beam sources. It is compatible with Kaufman type permanent magnet ion sources, such as the 3cm and 8cm sources. It is designed for reliability and flexibility of operation. It is designed for production applications with the added capability of being suitable for a flexible research environment and provides up to 1500 eV ions in a 250 mA beam.

  • Page 9: Mounting

    FIGURE F.1. Connect the cable to its corresponding connector on the rear of the power supply. Interlock Control To prevent operation at high pressure, Veeco provides two pressure inter- locks on complete systems, i.e., vacuum chamber, pumps, stage, controls, etc.

  • Page 10: Electrical Description

    Chapter 4: Electrical Description This section provides a general description of the installation of an ion source and should be useful as background information. A schematic diagram of a typical installation of a 3 cm ion source in shown FIGURE 4.1.

  • Page 11: Cm Ion Source

    3 cm Ion Source: Avoid overheating of the 3cm ion source by limiting the discharge current to a maximum of 2.5A. • Limit the beam voltage, V , to a maximum of 1500 V. The maximum practical accelerator voltage, V , is in the range of 300-400 V (negative of ground).
  • Page 12 FIGURE 4.1 Permanent Magnet Ion Source Installation...

  • Page 13: Initial Startup And Manual Mode Operation

    Chapter 5: Initial Startup and Manual Mode Operation Start-up Notes The following procedure is intended to demonstrate the application of power to each component of the ion source in a manually controlled sequence. It will serve to provide familiarity with the controls and to verify that the ion source operates properly.
  • Page 14 4. Initiate each of the five internal supplies as sequenced below. The star- tup sequence is as follows: a. Discharge voltage b. Cathode filament current c. Accelerator voltage d. Beam voltage e. Neutralizer filament current Beam & Accelerator voltages g. Cathode filament current >> beam current h.
  • Page 15 9. Neutralization is required if the target is a dielectric. To manually acti- vate the neutralizer: a. Press the NEUT switch to enable the neutralizer. b. Repeatedly press the SELECT ITEM switch until NEUT FIL CURRENT appears on the main display screen (M1). c.

  • Page 16: Recipe Use In Manual Mode Operation

    Recipe Use in Manual Mode Operation Manual mode operation is often chosen in troubleshooting situations. But it can become tedious to repeatedly insert the same “starting point” parame- ters from one test to the next. A “manual recipe” is the solution; that is, a recipe that can be entered in automatic mode, then used in manual mode.

  • Page 17: Use Manual Recipes

    Use Manual Recipes If the recipe has just been made, it is already entered in the “working mem- ory”. If not, select Auto Mode, press VIEW RECIPE and SELECT RECIPE, and use +/- to find the previously stored recipe. Press ENTER. 1.

  • Page 18: Automatic Operation

    Chapter 6: Automatic Operation Description Automatic mode operation makes use of predefined sets of operating parameters, called “recipes”. Recipes are stored in 99 memory locations, numbered 01 to 99. AUTOMATIC RESTRICTED mode allows the operator to preset parameters to be used but not modified in any way. AUTOMATIC UNRESTRICTED mode allows the preset parameters to be used but they may also be adjusted, appended, or deleted.

  • Page 19: Automatic Operation Procedure

    Automatic Operation Procedure 1. Evacuate the system to approximately 5x10 Torr. 2. Start gas flow and adjust for 2x10 Torr. 3. Turn on the AC power switch. The red indicator within the switch should illuminate and the meters should initialize with zeros. If the main display flashes “INTLK OPEN”, it is an indication that the system interlock con- nections in the ion source cable have not been closed.

  • Page 20: Cathode/Beam Relationships

    • If the recipe contains a timer value, the beam will remain on for the duration of the timer. It will then sequence down from the “beam” function and maintain a low, idling discharge. It will remain in this state until the SOURCE button is pressed or until another recipe is entered and started using the BEAM but- ton.

  • Page 21: Accelerator Relationships

    Accelerator Relationships In automatic mode, the user may select an accelerator voltage, an acceler- ator-to-beam (A/B) ratio, or an R-factor. The last setting adjusted will take priority. A/B ratio is the ratio of accelerator voltage to beam voltage. For example, if the A/B ratio is set to 0.200, the accelerator voltage will track itself to 20% of the beam voltage, even if the beam voltage is changed during a run.
  • Page 22 Select SCN by scrolling to the TBN/SCN option and using the +/- arrows to select SCN. Then scroll to NEUTRALIZER IMBALANCE to select a setting for zero or over neutralization. • Adjust the setting, even if just up and down, to signal SCN pri- ority.

  • Page 23: Handheld Terminal

    Chapter 7: Handheld Terminal Description The handheld terminal is an RS-232 remote terminal which performs con- trol and setup functions not normally accessed during production applica- tions. To use it, plug it into the REMOTE TERMINAL jack on the front panel. The LCD on the remote cover terminal will display a few diagnostic mes- sages, then it will display: SELECT FROM MENU (1-4) The Main Display Screen will display:...

  • Page 24: Functions

    Functions Each of the functions of the hand held unit will now be discussed in turn. Refer to the flow chart in FIGURE F.5 as the following discussion is read. Control Selection of the CONTROL menu provides: • SOURCE STATE: mimics front panel SOURCE switch •...

  • Page 25: Recipe Chaining

    Chapter 8: Recipe Chaining Description Recipe chaining allows the automatic operation of a group of recipes in a continuous series. As each recipe in the chain successively times out, the next set of parameters is automatically entered and run, without any opera- tor action.

  • Page 26: Troubleshooting And Diagnostics

    Sources”. It contains valuable information for the care, repair, and opera- tion of your ion source. If further assistance is necessary please contact Veeco Service Support. Before you call or fax, please have ready all voltages, currents, gas pres- sures and flows, and any other information that would be pertinent, such as type of mount, gas type, other ion or electron sources in the chamber, etc.

  • Page 27: Cathode Alarm

    Cathode Alarm The microprocessor has specified a cathode current and the power supply has not supplied it. This will sometimes happen when a cathode filament fails, although the cathode fail alarm will usually indicate this condition first. The cathode supply may have failed. Check to see if the HV light on the cathode board is illuminated.

  • Page 28: Beam Alarm

    Beam Alarm The microprocessor has specified a beam voltage or beam current which has not been provided. (This alarm can also occur when the beam meter is indicating a voltage when the microprocessor is specifying zero voltage.) The typical cause of beam alarms is the inability of the system (power sup- ply + ion source + gas) to produce the chosen beam current.

  • Page 29: Neutralizer Balance Alarm (N Bal)

    Neutralizer Balance Alarm (N BAL) The microprocessor has specified a neutralizer emission current which has not been provided. • The neutralizer filament current limit may be set too low, which prevents adequate neutralizer emission. • The neutralizer filament may be too long. This would present the neutralizer supply with too high a load resistance.

  • Page 30: Conversion To Different Line Voltages

    Chapter 10: Conversion to Different Line Voltages Qualified personnel must perform this procedure following typical safety Qualified personnel must perform this procedure following typical safety Qualified personnel must perform this procedure following typical safety Qualified personnel must perform this procedure following typical safety precautions.

  • Page 31: Service Support

    Phone: 1.888.221.1892 Fax: 970.493.1439 petechsupport@veeco.com When contacting Veeco Instruments, Inc. for parts or service: Provide the ion source model number, serial number, and grid serial num- ber. The ion source model and serial number are engraved on the down- stream surface of the grid mount plate. The grid serial number is engraved on the upstream surface of the grid.

  • Page 32: Warranty Statement

    Chapter 12: Warranty Statement Seller warrants to the original Buyer that new equipment will be free of defects in material and workmanship for a period of one year commencing (x) on final acceptance or (y) 90 days from shipping, whichever occurs first. This warranty covers the cost of parts and labor (including, where applica- ble, field service labor and travel required to restore the equipment to nor- mal operation).
  • Page 33 Specifically excluded from this warranty is all stand-alone computer and data storage equipment not manufactured by Seller (such as computers, monitors, printers and printer buffers). Such equipment will carry only the original manufacturer’s warranty. Seller assumes no liability under the above warranties for equipment or sys- tem failures resulting from (1) abuse, misuse, modification or mishandling;...

  • Page 34: Specifications

    Appendix A: Specifications General Dimensions: 7" (H) x 19" (W) x 19.25" (D) [18 x 48 x 49 cm] Weight: 44 lbs [16.4 kg] Power: 208, 220, or 240 VAC, 50/60 Hz. (factory set for 208 VAC), 8 Amperes @ 208V Cooling: forced air Mounting: EIA-type rack Beam Supply...

  • Page 35: Cathode Filament Supply

    Cathode Filament Supply Output: 3 to 10 Amperes AC rms for 3 cm Ion Sources, 4 to 20 Amperes AC rms for 8cm ion sources Current regulated, with software safety limit Voltage compliance: up to 25 V AC rms Output frequency: 50 kHz, sinusoidal Softstart characteristic Neutralizer Filament Supply Output: 3 to 10 Amperes AC rms for 3 cm Ion Sources, 4 to 20...
  • Page 36 Select the chart that matches the optics in the source and start at the lowest setting. Table 1.1: 3CM Graphite Optics Table 1.1: 3CM Graphite Optics Table 1.1: 3CM Graphite Optics Table 1.1: 3CM Graphite Optics Beam (V) Beam (I) Accelerator Discharge Neutralizer...

  • Page 37: Recipes/Operating Parameters

    Appendix B: Recipes/Operating Parameters Factory Recipes The IBS-250 is pre-programmed with recipes in memory register locations 1 through 6, and 94 through 99. DO NOT MODIFY THESE RECIPES. These recipes are provided for use as reference recipes to facilitate installa- tion and troubleshooting, and as model recipes, which can be copied to other recipe locations and makes recipe building easier.

  • Page 38: Operating Parameters

    To copy a recipe: To copy a recipe: To copy a recipe: To copy a recipe: 1. Use the VIEW RECIPE, SELECT RECIPE, and +/- arrow buttons to select the chosen recipe. 2. Press ENTER. The recipe is now entered into the recipe “work space”. 3.
  • Page 39 Select the chosen beam voltage from the charts below according to the optics in use on the ion source. Start at one half the recommended beam current and increase the current to the chosen output level. Table 2.3: 3CM Graphite Optics Table 2.3: 3CM Graphite Optics Table 2.3: 3CM Graphite Optics Table 2.3: 3CM Graphite Optics...

  • Page 40: Controls And Indicators

    Appendix C: Controls and Indicators Please refer to FIGURE 4.1 or the power supply front panel. Power: Applies line power to IBS-250. Source: Initiates the source sequence. The discharge and cath- ode supplies are enabled to establish a plasma dis- charge.
  • Page 41 Silence: Turns off the audible alarm during an error condition. The switch must be pressed each time a new alarm occurs. The LED flashes while the alarm is sounding and goes continuous when an alarm has been silenced but is still present.
  • Page 42 • To save time in building a recipe which is similar to an existing recipe, use SELECT RECIPE to locate the similar recipe. ENTER it. Use SELECT RECIPE and the +/- switches to move to the new storage location. Modify the recipe items as desired; STORE the new recipe in the new memory register.
  • Page 43 Accelerator Displays the accelerator grid current (or the Meter: ground-to-accelerator grid voltage if selected by the VIEW VOLTAGE switch). Neutralizer Displays amount of electron current emitted from the Meter: neutralizer filament (or the amount of AC current applied to heat the neutralizer filament if selected by the VIEW CURRENT switch).

  • Page 44: Ibs Serial Communications - Version

    Appendix D: IBS Serial Communications - Version 2 IBS Serial Communications May 4, 1994 IBS Power Supply: “Version Two” Communications Protocol Communications Parameters Baud Rate: 1200 Parity: 0 (none) Data Bits: Stop bit: Communications will be character-based terminated with a termination character, followed by a checksum.
  • Page 45 Parameter 6: Accelerator Current / 10 Parameter 7: Cathode Voltage / 100 Parameter 8: Cathode Current / 100 Parameter 9: Neutralizer Voltage / 100 Parameter 10: Neutralizer Current / 100 Parameter 11: Neutralizer Emission Current / 10 Parameter 12: Current Recipe. Parameter 13: Current Time.
  • Page 46 Example: PC to IBS: I 02<TER><CHECKSUM> IBS to PC: 0 0 0 0 0 0<TER><CHECKSUM> Parameter 2: 03 - Limits Input Information Parameter 1: Get Cathode Maximum Parameter 2: Get Neutralizer Maximum Example: PC to IBS: I 03 <TER><CHECKSUM> IBS to PC: 0000 0000<TER><CHECKSUM> Parameter 2: 04 - Error Flags (On (1) / Off (0)) Input Information Parameter 1: Discharge...
  • Page 47 Type Parameter Neutralizer Emission/ 10 Total Beam Neutralization/ 100 Neutralizer Filament/ 100 Parameter 5: Cathode Current Type Parameter Beam Current/ 10 Cathode Current/ 100 Parameter 6: Timer/ 10 Parameter 7: Magnet 1On/Off Parameter 8: Magnet 2On/Off Parameter 9: Accelerator Type/ 1 Parameter 10: Neutralizer Type/ 1 Parameter 11: Cathode/Beam Type / 1 Example:...

  • Page 48: Action

    Example: PC to IBS: I 06<TER><CHECKSUM> IBS to PC: 0 1 0 400<TER><CHECKSUM> Action Parameter 2: 01 - Beam Action 1 - ON 0 - OFF. Parameter 2: 02 - Source Action 1 - ON 0 - OFF. Parameter 2: 03 - Reset errors Example: PC to IBS: A 1 1<TER><CHECKSUM>...
  • Page 49 Parameter 6: Neutralization Equipment Constant Parameter Neutralizer Emission Current* 10 Total Beam Neutralization* 1 Stage Current Neutralization* 1 Neutralizer Filament Current* 100 Parameter 7: Cathode Equipment Constant Parameter Beam Current* 10 Cathode Current* 100 Parameter 8: Timer * 10 Parameter 9: Magnet 1(On) /0 (Off) Parameter 10: Magnet 2(On) /0 (Off) Parameter 2: 03 - Set Discharge Volts Default (0 - 75.0) * 100 Example:...

  • Page 50: Basic Program Sample

    Parameter 2: 16 - Neutralizer Filament Current -(0 - 99.99) * 100 - Manual mode only. Parameter 2: 17 - Neutralizer Emission Current -(0 - 99.9) * 10 - Auto mode only. Parameter 2: 18 - Neutralizer Imbalance Current -(0 - 999.9) * 10 - Auto mode only.
  • Page 51 1130 CHKSUM=CHKSUM+ASC(MID$(A$,I,1)) 1140 NEXT I 1150 C$=CHR$((CHKSUM+13) MOD 256) 1160 PRINT #1,A$;CHR$(13);C$; 1170 X=0:CHKSUM=0 1190 LOCATE 2,1 1200 PRINT “SENT”; 1210 FOR I=5 TO 80:PRINT ““;:NEXT I 1220 GOTO 2000 2000 Y=LOC(1) 2010 IF Y=0 THEN 1000 2020 IF Z<100 THEN LOCATE 10,Z+1 ELSE LOCATE 11,Z-100 2025 IF Z=0 THEN FOR J=1 TO 80:PRINT ““;:NEXT J:LOCATE 11,1 2027 IF Z=0 THEN FOR J=1 TO 80:PRINT ““;:NEXT J:LOCATE 10,1 2030 A2$=INPUT$(1,#1)

  • Page 52: Ibs Accessory Port Specifications

    Appendix E: IBS Accessory Port Specifications Specification for the IBS Accessory Port, J3. The IBS Accessory Port, J3, is a 9-pin D-subminiature connector with female pins located on the rear of the power supply. The pin-out is as fol- lows: Description 1 &...

  • Page 53: Source And Beam Input Operation

    Do not connect these pins to anything else. Keep the connections to these contacts less than 10 feet long. Improper connections to pins 7, 8, and 9 can cause significant damage to Improper connections to pins 7, 8, and 9 can cause significant damage to Improper connections to pins 7, 8, and 9 can cause significant damage to Improper connections to pins 7, 8, and 9 can cause significant damage to the CPU board, especially if they are connected to external voltage...
  • Page 54 The following parameters are displayed, in order, in the SELECT ITEM scroll: Discharge V: The power supply set point for discharge voltage. The voltage of the anode with respect to the cath- ode. Beam Voltage: The power supply set point for beam voltage. The voltage of the anode with respect to ground.
  • Page 55 Current Timer: Indication of the elapsed beam time in minutes. This is an indication of how long the ion beam has been running. If a time has been set, the current timer will count down from the set time to zero, then the beam will shut down.
  • Page 56 Notes: There are two modes for magnet supply operation. When operation is via the front panel adjustments, and not via recipes, the manual selection of MAG- NET 1 or MAGNET 2 will remain as set. If a recipe is selected, the recipe's magnet setting will override the manual selection.

  • Page 57: Figures

    Appendix F: Figures FIGURE F.1 Connections to Ion Source...
  • Page 58 FIGURE F.2 Rear Panel Accessory Connector FEMALE CONNECTOR MALE PINS RS232 MALE CONNECTOR FEMALE PINS STAGE SENSE (-) "SOURCE GOOD" CONTACTS "SOURCE" "BEAM GOOD" CONTACTS "BEAM" STAGE SENSE (+) ACCESSORY...
  • Page 59 FIGURE F.3 Front Panel CATHODE DISCHARGE BEAM CURRENT BEAM VOLTAGE ACCELERATOR NEUTRALIZER Layout VIEW VIEW VIEW VIEW CURRENT CURRENT VOLTAGE VOLTAGE VOLTAGE CURRENT VOLTAGE VOLTAGE VOLTAGE EMISSION REMOTE STORE SOURCE BEAM POWER TERMINAL ENTER PROBE NEUT RESTRICTED MANUAL AUTO UNRESTRICTED SELECT VIEW SELECT...
  • Page 60 FIGURE F.4 Manual and Automatic Operation IBS -250 O P E R A TIO N A L FLO W C H A R T E X TER N AL C H A M BE R P R E S S U R E S H O U LD TO IB S B E ~ 2 x 10-4 Torr S TA R T G A S FLO W...
  • Page 61 FIGURE F.5 Handheld Terminal Operation...
  • Page 62 FIGURE F.6 Trouble- shooting Chart...
  • Page 63 FIGURE F.7 Control Transformer Connec- tions...
  • Page 64 LITTELFUSE LITTELFUSE TYPE 314002 TYPE 314003 TYPE 314005 TYPE 314002 TYPE 314003 IBS 250 1 BUSSMAN ABC-SERIES MAY ALSO BE USED. Table 1: Filament Table 1: Filament Table 1: Filament Table 1: Filament Table 1: Filament Current Limits Current Limits...

  • Page 65: Drawings

    PROBE METERING POWER CONDITIONER BOARD BOOST CONVERTER MAINS CONTROL BOOST STEP-UP BIAS VOLTAGES LOW VOLTAGE DRIVE SWITCHER TO ALL POWER SUPPLY BOARDS BLOCK DIAGRAM IBS 250 Power Supply PROBE OUTPUT/INPUT C25457B 208/ 220/ LINE FILTER/ MAINS CONTROL/ RECTIFICATION 240 VAC...

  • Page 66: Electrical Schematic Interconnect Ibs-250 (Pg 1-2)

    Electrical Schematic Interconnect IBS-250 (Pg 1-2)

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