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Veeco MPS-3000 CE Technical Manual

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MPS-3000 CE

Power Supply

Technical Manual
425964

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Summary of Contents for Veeco MPS-3000 CE

  • Page 1: Power Supply

    MPS-3000 CE Power Supply Technical Manual 425964...
  • Page 2 MPS-3000 CE Power Supply Technical Manual...
  • Page 3 No warranties are granted or extended by this document. It is the policy of Veeco Instruments Inc. to improve products as new technology, components and materials become available. Veeco Instruments, Inc. therefore reserves the right to change specifications without prior notice.

  • Page 4: Table Of Contents

    Table of Contents Safety Overview Installation Controls Manual Operation Local Operation Other Modes of Operation Serial Communications Maintenance Troubleshooting/Error Code Definitions Service Support Specifications Tables Environmental Safety Drawings Filament Cathode with Filament Neutralizer or PBN Option Hollow Cathode and HCN - 7 pin or 2 x 4 pin feedthrough Hollow Cathode and Hollow Cathode Neut - 6 pin feedthrough 88 Filament Cathode with Filament Neutralizer or PBN Option 3cm Source Filament Cathode and Filament Neutralizer...

  • Page 5: Safety

    Chapter 1: Safety Understanding the correct installation, operation, and maintenance proce- dure is necessary for safe and successful operation. This safety alert symbol precedes safety messages in this manual, along with one of the three signal words explained below. Obey the messages that follow these words to avoid possible injury or death.
  • Page 6 Veeco Instruments Inc. WARNING The CE I/O Signal Isolation Sub-chassis, attached to the MPS-3000 CE power supply rear panel, incorporates the isolation circuitry for the user accessible EIA-232 and system interlock circuits. The integral I/O signal...
  • Page 7 isolation circuit incorporates optical transmitters and photo detectors, which are coupled together by fiber optic cables. This configuration ensures that the user accessible EIA-232 and system interlock circuits remain at Safety Extra Low Voltage (SELV) under normal and single fault conditions. The customer side supply (+5V DC) is generated from an integral isolating type DC/DC inverter that inverts the ELV +15V DC supply to the required SELV +5V DC supply.

  • Page 8: Overview

    Chapter 2: Overview The MPS-3000 CE power supply system is specifically designed and opti- mized to power and control Veeco ion beam sources. • The built-in microprocessor provides reliability and flexibility to the user. The microprocessor automatically checks each of the power supplies each time the system is turned on.

  • Page 9: Remote Mode

    Operating conditions may not be stored in the memory when operating in Local Restricted mode. NOTE Remote Mode No adjustments may be made to any parameter from the front panel. Operating conditions may not be stored from the front panel and condi- tions may not be recalled from the memory when operating in Remote mode.

  • Page 10: Installation

    WARNING Single Power Supply System Assembly The MPS-3000 CE power supply is designed for rack mount. It is shipped with the rack mount brackets attached. 1. Install the unit in the chosen location.
  • Page 11 The external interlock conditions are met when all series switches are closed. The number and type of interlock switches differ from system to sys- NOTE tem. Use only dry closure (relay) contacts in the interlock circuit.Interlock wir- ing should have a minimum insulation rating of 100V DC per lead; these leads should be shielded, with a drain wire attached to a metallic connector shell.

  • Page 12: Controls

    Chapter 4: Controls The numbers in FIGURE 4.1 through FIGURE 4.3 will appear throughout to identify the power supply’s controls as their use and function is referenced. FIGURE 4.1 Front Panel: MPS-3000 CE FC FIGURE 4.2 Front Panel: MPS-3000 CE HC...
  • Page 13 FIGURE 4.3 Front Panel: MPS-3000 CE Table 4.1: MPS-3000 CE FC/HC/PBN Front Panel Keys and Switches Power On/Standby Beam Voltage Display Source On/Off Accelerator Current Display Beam On/Off Accelerator Voltage Display Neutralizer Emission Current Keylock Display Neutralizer Filament Current Mode...
  • Page 14 Power - On/Standby (1) The POWER switch controls the AC power to the unit and is controllable in all modes of operation. When the POWER switch is turned on, the following occurs: • Power is applied to the controller board and to all the displays on the display board.
  • Page 15 Keylock (4) The KEYLOCK switch enables or disables the MODE switch. • In the disable position, the MODE switch will not function, and the active mode will be locked in. • The KEYLOCK switch must be in the enable position to change the mode of operation.
  • Page 16 Remote Allows the unit to be controlled by a computer. The computer may select the Remote mode, recall conditions from either memory, and turn the SOURCE and BEAM switches on or off. • All adjustable parameters may be changed through the remote microprocessor.
  • Page 17 MPS-3000 CE HC: The discharge current may be selected and adjusted only in Manual mode. Cathode The Cathode power supply is part of the MPS-3000 CE FC and PBN. • The word CATHODE appears above the MODULE switch indi- cating that Cathode power supply has been selected.
  • Page 18 The HC power supply is part of the MPS-3000 CE HC. • The letters HC appear above the MODULE switch indicating that Hollow Cathode power supply has been selected. • The hollow cathode keeper voltage limit is the only adjustable parameter on the Hollow Cathode power supply.
  • Page 19 A/B Ratio has been selected. The A/B Ratio may also be adjusted through a computer. Limit MPS-3000 CE FC, HC, or PBN: The limit is adjustable, when the Cath- ode, Neutralizer or Discharge power supply has been selected. •...
  • Page 20 Adjust Knob (9) The Adjust knob is used to change the value of a selected parameter. • Turning the knob clockwise increases the parameter value. • Turning the knob counterclockwise decreases the parameter value. If the selected power supply is off, the target parameter will be changed by turning the Adjust knob, and changes may be viewed on the appropriate display.
  • Page 21 Accelerator Voltage Display (16) Indicates the amount of voltage (negative with respect to facility ground) applied to the accelerator (downstream) extraction grid. Neutralizer Emission Current Display (17) Indicates the amount of electron emission current being supplied by the neutralizer power supply into the ion beam. Neutralizer Filament Current Display (18) Indicates the amount of current being supplied by the neutralizer power supply for heating of the neutralizer filament.
  • Page 22 • The filament current display shows the amount of current being provided to heat the PBN filament. PBN Body Voltage Display (25) Indicates the voltage difference between the body and filament on a PBN. FIGURE 4.4 Rear Panel: MPS-3000 CE...
  • Page 23 Table 4.2: Power Supply Rear Panel Power Line Input Source/Beam Connector (P33) Neutralizer Connector (P32) Circuit Breaker (CB1) Body Fuse (F9) Cooling Fan EIA-232 Interface Connector (DB25) Interlock Connector (DB9) Emission Fuse (F8) Power Input (1) The cable provides power attachment between the power supply and the facility mains.
  • Page 24 Power supply identifier. Selects a number for identification of a power supply through the computer. When more than one power supply is part of a computer-controlled system, each power supply may be assigned a different identification number. ID # SW 1-2 SW 1-3 SW1-4: Neutralizer Fault Switch MPS-3000 CE FC...
  • Page 25 BEAM switches will be inoperative until the neutralizer fault has been corrected and the power has been cycled. MPS-3000 CE HC and PBN On - In the on position, the entire neutralizer supply is kept off. Off - In the off position, the requested emission current is com- pared to the beam current.
  • Page 26 On - In the on position, the emission current will track the beam cur- rent at 200%. Off - In the off position, the emission current will track the beam current at 125%. SW1-8: On - In the on position, the front panel will remain locked following a power cycle if it was locked with the serial communication command NK1.

  • Page 27: Manual Operation

    Chapter 5: Manual Operation MPS-3000 CE FC Before beginning FC power supply operation, check the following: • The appropriate ion beam source has been properly installed in the vacuum system. • The vacuum system pressure is 4 x 10 Pa (3 x 10 Torr) or lower.
  • Page 28 4. Select the discharge voltage. For initial start-up and training purposes, select 55V. a. Select the Discharge power supply with the MODULE switch. The letters DISCHARG appear above the switch. b. Select Voltage with the FUNCTION switch. The word VOLTAGE appears above the switch.
  • Page 29 7. Select the cathode filament current. Refer to the “Tables” on page 83 for initial filament currents for various ion sources. The current values assume that 0.25mm (0.010 in.) tungsten wire is used for the cathode filament. If the actual filament is a different size and/or NOTE material, other filament currents could be required.
  • Page 30 10. Apply power to the source. To avoid electrical shock, keep clear of “live” circuits. WARNING Refer to the “Tables” on page 83 for current limits for various ion sources. a. Press the SOURCE ON/OFF switch. The word SOURCE appears above the switch.
  • Page 31 c. Increase the gas flow to the ion beam source by about 1sccm and repeat Step 10. • If necessary, repeat Steps a. and b. until either a flow rate of 10sccm or a chamber pressure of 6.7 x 10 Pa (5 x 10 Torr) is reached.
  • Page 32 15. Press the BEAM ON/OFF switch. The word BEAM appears above the switch. • A beam current value should appear on the Beam Current dis- play. • An accelerator current value should appear on the Accelerator Current display. The actual current values depend on other parameters, such as source size, cathode filament current request, gas flow, and beam and accelerator volt- NOTE age requests.
  • Page 33 110% to125% of the beam current (refer to Step 9. on page 25). • When the neutralizer current is satisfactory, the MPS-3000 CE FC power supply should be completely adjusted for Manual mode operation. • The user may continue operating in Manual mode or may select Local mode (refer to “Local Operation”...
  • Page 34 MPS-3000 CE HC Before beginning HC power supply operation, check the following: • The appropriate ion beam source has been properly installed in the vacuum system. • The vacuum system pressure is 4 x 10 Pa (3 x 10 Torr) or lower.
  • Page 35 4. Select the discharge current limit. For initial start-up and training pur- poses, select 1.00A. Refer to “Recommended Discharge Current Limits” on page 83 suggested discharge current limits for different source sizes. a. Select the Discharge power supply with the MODULE switch. The letters DISCHARG appear above the switch.
  • Page 36 b. Select Limit with the FUNCTION switch. The word LIMIT appears above the switch. c. Adjust the keeper voltage limit up or down as needed. The value appears on the Hollow Cathode Neutralizer Keeper Voltage dis- play. d. The final selected value is stored automatically in the memory, as indicated above the MEMORY switch.
  • Page 37 10. Select the beam voltage. For initial start-up purposes, use a value of 1000V. a. Select the Beam power supply with the MODULE switch. Voltage will automatically be selected in the Manual mode. The words BEAM and VOLTAGE appear above the appropriate switches. b.
  • Page 38 100% to 125% of the beam current (refer to Step 8. on page 32). • When the neutralizer current is satisfactory, the MPS-3000 CE HC should be completely adjusted for Manual mode opera- tion. • The user may continue operating in Manual mode or may select Local mode (refer to “Local Operation”...
  • Page 39 Selecting RCL with the MEMORY switch allows the user to view the operat- ing conditions stored in the unused memory location. After about four sec- onds, the original parameters will be displayed. MPS-3000 CE PBN Before beginning PBN power supply operation, check the following: •...
  • Page 40 3. Use the MEMORY switch to select the memory location the power sup- ply will use to store parameters; the selected memory location appears above the switch. 4. Select the discharge voltage. For initial start-up and training purposes, select 55V. a.
  • Page 41 7. Select the cathode filament current. Refer to the “Tables” on page 83 for initial filament currents for various ion sources. The current values assume that 0.25mm (0.010 in.) tungsten wire is used for the cathode filament. If the actual filament is a different size and/or NOTE material, other filament currents could be required.
  • Page 42 10. Apply power to the source. To avoid electrical shock, keep clear of “live” circuits. WARNING Refer to the “Tables” on page 83 for current limits for various ion sources. a. Press the SOURCE ON/OFF switch. The word SOURCE appears above the switch.
  • Page 43 d. Increase the gas flow to the ion beam source by about 1sccm and repeat Step c. • If necessary, repeat Steps c. through d. until a flow rate of 10sccm or a chamber pressure of 6.7 x 10 Pa (5 x 10 Torr) is reached.
  • Page 44 a. Press the BEAM ON/OFF switch. The word BEAM appears above the switch. • A beam current value should appear on the Beam Current dis- play. • An accelerator current value should appear on the Accelerator Current display. Actual current values depend on other parameters, such as source size, cathode filament current request, gas flow, and beam and accelerator volt- NOTE age requests.
  • Page 45 Do not select beam current while in Manual mode. NOTE 2. Adjust for a minimum accelerator current. a. Adjust the accelerator voltage to minimize the accelerator current (refer to Step 13. on page 39). Typically, the accelerator current should be no more than 10% of the beam current. •...

  • Page 46: Local Operation

    Chapter 6: Local Operation Operating conditions may need to be maintained over time without user attention. The MPS-3000 CE power supply incorporates a Local or Auto- matic mode of operation. The internal microprocessor monitors and con- trols several parameters including the accelerator-current-to-beam-current ratio (A/B Ratio).
  • Page 47 NOTE or function. MPS-3000 CE FC The cathode filament current will ramp to the programmed value. The neutralizer filament current will ramp to the value from memory.
  • Page 48 In Local mode, the emission current must be greater than the beam current to prevent an E24 error condition. MPS-3000 CE PBN The cathode filament current will ramp to the programmed value. The plasma bridge neutralizer filament current will ramp up until the body voltage drops to between 20 and 25V or until the filament current limit is reached.

  • Page 49: Other Modes Of Operation

    3. Turn the KEYLOCK switch to the disable position and remove the key. 4. The user may turn the SOURCE or BEAM switches on or off and change from one memory location to another. 5. The MPS-3000 CE power supply will function as if it were in Local mode. Remote Operation The MPS-3000 CE power supply must be controlled remotely, by a com- puter, through an EIA-232 interface.

  • Page 50: Serial Communications

    The following information for the MPS-3000 CE power supply will be needed for successful connection and communication with the computing device: •...
  • Page 51 A command is executed when a carriage return <cr> is received. All char- acters are echoed by the unit. Two commands per second will be accepted; commands received at a faster rate are placed in a 250 character buffer. When this buffer is filled, additional characters will be lost. The RS-232 communications is active in all modes.
  • Page 52 Command Summary Table Table 8.2: Command Summary Table Command Description Attention Set A/B Ratio Enable/Disable Auto Cathode Mode Enable/Disable Auto Data Logging Enable/Disable Auto Error Logging Turn Beam Supplies On/Off Set Beam Current Tolerance Set Beam Current Set Beam Voltage Set Cathode Current Set Cathode Limit Set Discharge Current...
  • Page 53 Cathode (AC) mode, which is active only when the power supply is in Remote mode. However, the command will be accepted in any mode. MPS-3000 CE FC/PBN: When the AC mode is active, the cathode filament current increases automatically until the cathode filament current has reached its limit, or the discharge current has exceeded the discharge current threshold.
  • Page 54 Command Name: AUTOMATIC DATA LOGGING Syntax: AD[N]<cr> Units: N/A Range: n = 0 or 1 Description: This command is used to enable (AD1) or disable (AD0) auto- matic data logging. When enabled, the power supply will transmit its actual running condi- tions at the time interval specified by the T<n>...
  • Page 55 Command Name: BEAM ON/OFF Syntax: B[n]<cr> Units: N/S Range: n = 1 or 0 Description: Used to turn the beam supply on (B1) or off (B0). Turn the beam supply on using the following command: B1<cr> EXAMPLE 8.6 Turn the Beam Supply On Command Name: SET BEAM CURRENT TOLERANCE LIMIT Syntax: BE[n]<cr>...
  • Page 56 MPS-3000 CE HC: Command is not valid. Set the MPS-3000 CE FC/PBN cathode filament current target to 4.50A using the following command: CI4.50<cr> EXAMPLE 8.10 Set the Cathode Filament...
  • Page 57 MPS-3000 CE HC: Used to set the hollow cathode keeper voltage limit. Set the MPS-3000 CE FC/PBN cathode filament limit to 5.50A using the following command: CL5.50<cr> EXAMPLE 8.11 Set the Cathode Filament Limit Set the MPS-3000 CE HC hollow cathode keeper voltage limit to 25V using the following command: CL25<cr>...
  • Page 58 Description: Sets the target value for the discharge voltage. When the source is on, this is the value the discharge voltage will ramp to. This command is only valid for an MPS-3000 CE FC power supply. Set the discharge voltage to 55.0V using the following command: DV55.0<cr>...
  • Page 59 Command Name: SET MODE Syntax: M[n]<cr> Units: N/A Range: n = 0, 1, 2, or 3 Description: Used to set the operating mode of the power supply. Mode Manual Local Local Restricted Remote Place the power supply in Local mode using the following command: M1<cr>...
  • Page 60 MPS-3000 CE FC: Used to set the neutralizer filament current target. The filament current will ramp to this value when the MPS-3000 CE FC power supply is in Manual mode. In all other modes, this command has no effect, but is still accepted.
  • Page 61 Set the MPS-3000 CE FC/PBN neutralizer limit to 5.50A using the follow- ing command: NL5.50<cr> EXAMPLE 8.22 Set the Neutralizer Limit Set the MPS-3000 CE HCN keeper voltage limit to 25V using the following command: NL25<cr> EXAMPLE 8.23 Set the Keeper Voltage Limit Command Name: RECALL TARGETS FROM MEMORY Syntax: R[n]<cr>...
  • Page 62 Syntax: RC<cr> Units: N/A Range: N/A Response: <lf><cr> AA.AA,BB.BB,CCC.C,^DDDD,^EEEE,^FFFF ,^GGGG,^HHHH,II.II ,^JJJJ,^KKKK,^LLLL,M, <lf><cr><eot> Where: Parameter Model Units Cathode Current MPS-3000 CE FC Amps AA.AA HC Heater Current MPS-3000 CE HC Amps BB>BB Discharge Current Amps CCC.C Discharge Voltage Volts DDDD Beam Current...
  • Page 63 <lf><cr><eot> Where: Parameter Model Units Hours/ Time since source was AA.BB.CC Minutes/ turned on Seconds Cathode Filament Cur- MPS-3000 CE FC Amps DD.DD rent MPS-3000 CE HC Amps HC Heater Current E.EE Discharge Current Amps FFF.F Discharge Voltage Beam Current...
  • Page 64 Command Name: REQUEST TARGET PARAMETERS WITH HEADER Syntax: RP[n]<cr> Units: N/A Range: n = 1, 2 Response: MPS-3000 CE FC/PBN: <lf><cr>MEM^1^PARAMETERS: <lf><cr>BEAM^V^^^^BEAM^I^^^^ACCEL^V^^^^A /B^RATIO ^^^^CATH^LIM^^^^NEUT^LIM^^^^DISCH^V <lf><cr>XXXX^V^^^^XXX^mA^^^^XXXX^V^^^^^^ ^^XX^% ^^^^^^XX.XX^A^^^^^XX.XX^A^^^^^XXX.X^V <lf><cr><eot> MPS-3000 CE HC: <lf><cr>MEM^1^PARAMETERS: <lf><cr>BEAM^V^^^^BEAM^I^^^^ACCEL^V^^^^A /B^RATIO ^^^^CATH^LIM^^^^NEUT^LIM <lf><cr>XXXX^V^^^^XXX^mA^^^^XXXX^V^^^^^^ ^^XX^% ^^^^^^^^XXX^V^^^^^^^XXX^V <lf><cr><eot> ^ = ASCII BLANK SPACE (32) Description: This command is used to request the above target values, with header information, for the selected memory.
  • Page 65 Beam Voltage Volts BBBBB Beam Current CCCCC Accelerator Voltage Volts DDDDD A/B Ratio Cathode Filament Limit MPS-3000 CE FC Amps EEEEE HC Keeper Voltage Limit MSP-3000 CE HC Volts Neutralizer Filament Limit MPS-3000 CE FC Amps FFFFF HCN Keeper Voltage Limit...
  • Page 66 DDDD = blank spaces (32). ^ = ASCII BLANK SPACE (32) Description: This command is used to request data logging parameters. It is only valid when automatic data logging is disabled. Command Name: RESET MPS-3000 CE Syntax: RST<cr> Units: N/A Range: N/A...
  • Page 67 Command Name: SOURCE ON/OFF Syntax: S[n]<cr> Units: N/A Range: n = 1 or 0 Description: Used to turn the source supplies on (S1) or off (S0). Turn the source supplies on using the following command: S1<cr> EXAMPLE 8.27 Turn On the Source Supplies Command Name: SET AUTOMATIC DATA LOG TIME INTERVAL Syntax: T[n]<CR>...
  • Page 68 Range: N/A Response: <lf><cr>ABCDEF<lf><cr><eot> Where: A - Power Supply Model:1 = MPS-3000 CE B - Cathode Type: 0 = FC1 = HC C - Beam Type: 0 = NORMAL D - Neutralizer Type: 0 = FN1 = HCN2 = PBN...

  • Page 69: Maintenance

    Chapter 9: Maintenance General There are no user serviceable parts inside, except fuses. Refer servicing to qualified personnel at Veeco. To avoid electrical shock, keep clear of “live” circuits. Follow all local lock- out/tag-out procedures, before repairing components or replacing fuses.
  • Page 70 1/16A, Slo-Blo A spare parts kit, containing extra fuses, is included with the power supply. Use Veeco part number 6290-002 to reorder this spare parts kit. Replacing the Fuses To avoid electrical shock, keep clear of “live” circuits. Follow all local lock- out/tag-out procedures, before replacing any power supply fuses.

  • Page 71: Updating The Software

    To avoid electrical shock, keep clear of “live” circuits. Follow all local lock- out/tag-out procedures, before continuing. WARNING To update software on the MPS-3000 CE power supply, a single PROM must be changed. Updated PROM versions are sent in static-protected bags.
  • Page 72 • If the problem persists, contact “Service Support” on page Returning an MPS-3000 CE Power Supply 1. Seal the power supply in a plastic bag. 2. Pack the unit using the original packing material and shipping box. If the original packing material is not available, surround and cover the power supply with foam and ship in a double-walled box.

  • Page 73: Troubleshooting/Error Code Definitions

    To avoid electrical shock, keep clear of “live” circuits. Follow all local lock-out/ tag-out procedures, before repairing or replacing any electrical devices. Disconnect the unit’s main power before replacing any fuse or troubleshooting any electrical connection. WARNING Table 10.1: MPS-3000 CE Power Supply Troubleshooting Problem Possible Cause Remedy The power cord is not plugged in.
  • Page 74 The keeper voltage does not drop below the The keeper voltage limit is set too low. Raise the keeper voltage limit. keeper voltage limit (MPS-3000 CE HC unit). Insufficient gas flow. Raise the gas flow. The discharge current has reached the pro- grammed discharge current limit.
  • Page 75 NOTE on page 72). Power plug is wired incorrectly. Rewire power plug. Cathode filament. Fatal error (refer to the Broken cathode filament. Replace filament. NOTE on page 72); MPS-3000 CE FC or Cable is disconnected. Connect cable. PBN power supplies only.
  • Page 76 Code Neutralizer filament. SW 1-4 is on (controller Broken neutralizer filament. Replace filament. board); MPS-3000 CE FC or PBN units only. Cable is disconnected. Connect cable. Fatal error (refer to the NOTE below). Low neutralizer filament current is causing the emission...

  • Page 77: Service Support

    Phone: 1.888.221.1892 Fax: 970.493.1439 ftcsupport@veeco.com When contacting Veeco Instruments Inc. for parts or service: Provide the ion source model number, serial number, and grid serial num- ber. The model and serial number are engraved on the downstream surface of the grid mount plate. The grid serial number is engraved on the upstream surface of the grid.

  • Page 78: Specifications

    Appendix A: Specifications General The MPS-3000 CE consists of a chassis containing these power supplies: • beam voltage • accelerator voltage Each chassis contains one current supply from each of the following two groups, depending on the end use: 1. cathode •...
  • Page 79 Manufacture Date: Month -YYYY Manufactured for Veeco by: TDP Inc. 4015 S. Lincoln Loveland, CO 80537 USA The Veeco CE representative in Europe is: Vice President of International Sales and Marketing Veeco Instruments S.A. 11, Rue Marie Poussepin Zi De La Gaudree...
  • Page 80 the power source’s ground, an additional 12 AWG safety ground wire with green/yellow colored insulation must also be connected between the ground stud located on the rear of the unit and the power source’s safety ground. The power cord feeding the unit must be permanently attached to the power source.
  • Page 81 Power Output Some values may not be attainable due to individual source limitations. NOTE MPS-3000 CE FC Cathode Current Supply: • 0-20A AC • 875W • Programmable current limit. • Sensing of open filament, causing shutdown of outputs. • Soft start filament.
  • Page 82 • Soft start filament. • Current limit protection. • Filament current and emission current readouts. • Thermal protection. MPS-3000 CE HC Hollow Cathode Current Supply: • 0-7.25A AC heater supply. • Programmable keeper voltage limit. • Soft start. •...
  • Page 83 • Over-voltage protection. • Under no-load condition, output rises to 150V. • Current limit protection. • Voltage and current readouts. • Thermal protection. Beam Voltage Supply: • 0-1200V DC • 300mA • 300W maximum. • Current select for automatic operation. •...
  • Page 84 MPS-3000 CE PBN Cathode Current Supply: • 0-20A AC • 875W • Programmable current limit. • Sensing of open filament, causing shutdown of outputs. • Soft start filament. • Current limit protection. • Filament current readout. • Thermal protection. Discharge Voltage Supply: •...
  • Page 85 • 100mA maximum. • Over-voltage protection. • Current limit protection. • Programmable accelerator-current-to-beam-current ratio limit. • Voltage and current readouts. • Thermal protection. Plasma Bridge Neutralizer Current Supply: • 0-10A AC Filament Supply. • 0-600mA DC Emission Supply. • 200mA DC Body Supply. •...
  • Page 86 34, or “PBN Storing Operating Conditions” on page 41). For the MPS-3000 CE power supply, the recommended cathode filament limit (using 0.25mm/0.010 in. tungsten wire) for ion sources 5cm or NOTE smaller is 6.5A. Check that both of the nonvolatile memories have the cor-...

  • Page 87: Tables

    6.5A 6.5A 6.5A 6.5A 6.5A 6.5A 6.5A 6.5A Discharge current limit is selectable only on the MPS-3000 CE HC power supply. NOTE Recommended Discharge Current Limits Table B.3: Recommended Discharge Current Limits Circular Ion Source Discharge Current Size (in cm) Limit 2.5 HP or LP...

  • Page 88: Environmental Safety

    Appendix C: Environmental Safety The equipment that you bought has required the extraction and use of nat- ural resources for its production. It may contain hazardous substances that could impact health and the environment. In order to avoid the dissemina- tion of those substances in our environment and to diminish the pressure on the natural resources, we encourage you to use the appropriate take-back systems.

  • Page 89: Drawings

    Appendix D: Drawings One of the following drawings applies to your system: “Filament Cathode with Filament Neutralizer or PBN Option” “Hollow Cathode and HCN - 7 pin or 2 x 4 pin feedthrough” “Hollow Cathode and Hollow Cathode Neut - 6 pin feedthrough” “Filament Cathode with Filament Neutralizer or PBN Option”...

  • Page 90: Filament Cathode With Filament Neutralizer Or Pbn Option

    Filament Cathode with Filament Neutralizer or PBN Option...

  • Page 91: Hollow Cathode And Hcn - 7 Pin Or 2 X 4 Pin Feedthrough

    Hollow Cathode and HCN - 7 pin or 2 x 4 pin feedthrough...

  • Page 92: Hollow Cathode And Hollow Cathode Neut - 6 Pin Feedthrough

    Hollow Cathode and Hollow Cathode Neut - 6 pin feedthrough...
  • Page 93 Filament Cathode with Filament Neutralizer or PBN Option...

  • Page 94: Cm Source Filament Cathode And Filament Neutralizer

    3cm Source Filament Cathode and Filament Neutralizer...

  • Page 95: Cm Source Hollow Cathode And Hollow Cathode Neutralizer

    3cm Source Hollow Cathode and Hollow Cathode Neutralizer...

  • Page 96: Cm Source Plasma Bridge Neutralizer

    3cm Source Plasma Bridge Neutralizer...

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