Veeco IBS 250 Manuals

Manuals and User Guides for Veeco IBS 250. We have 1 Veeco IBS 250 manual available for free PDF download: Technical Manual

Veeco IBS 250 Technical Manual

Veeco IBS 250 Technical Manual (67 pages)

Brand: Veeco | Category: Power Supply | Size: 2.66 MB

Table of Contents

Table of Contents
4
Description
8
Mode of Operation
8
Mounting
9
Electrical
9
Grounding
9
Ion Source Connections
9
Interlock Control
9
Electrical Description

10
- CM Ion Source
  11
Initial Startup and Manual Mode Operation

13
- Start-Up Notes
  13
- Manual Mode Operation
  13
- Recipe Use in Manual Mode Operation
  16
  - Create Manual Recipes
    16
  - Use Manual Recipes
    17
Automatic Operation

18
- Description
  18
- Automatic Operation Procedure
  19
- Cathode/Beam Relationships
  20
- Accelerator Relationships
  21
- Neutralizer Relationships
  21
Handheld Terminal

23
- Description
  23
- Functions
  24
  - Control
    24
  - Recipe Setup
    24
  - Shutdown
    24
Recipe Chaining

25
- Description
  25
- Chaining Operation
  25
Troubleshooting and Diagnostics

26
- IBS Power Supply Error Alarms and Possible Causes
  26
  - Cathode Alarm
    27
  - Cathode Filament Fail Alarm
    27
  - Discharge Alarm
    27
  - Beam Alarm
    28
  - Accelerator Alarm
    28
  - Neutralizer Filament Alarm (N FIL)
    28
  - Neutralizer Balance Alarm (N BAL)
    29
  - Source Alarm
    29
Conversion to Different Line Voltages

30
- Procedure
  30
Service Support

31
Warranty Statement

32
Specifications

34
- General
  34
- Beam Supply
  34
- Accelerator Supply
  34
- Discharge Supply
  34
- Cathode Filament Supply
  35
- Neutralizer Filament Supply
  35
- Probe Supply
  35
- Operating Parameters
  35
Recipes/Operating Parameters

37
- Factory Recipes
  37
- Operating Parameters
  38
Controls and Indicators

40
IBS Serial Communications - Version

44
- Action
  48
- Basic Program Sample
  50
IBS Accessory Port Specifications

52
- SOURCE and BEAM Input Operation
  53
Figures

57
Drawings

65
- Block Diagram IBS-250
  65
- Electrical Schematic Interconnect IBS-250 (Pg 1-2)
  66

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