BESTEM – D01R
⑤
REC exe button
Carry out chip recognition trace position. Check if the parameters are correct.
Others Command
⑥ OriFlat exe button
Execute orientation flat checking. Check if the parameters are correct.
※Wafer table has to move to orientation flat position.
⑦ Angle exe button
Check the slanting angle for wafer. Does not has any parameter needs to be set.
Additional Function --- When press Super User button, the following display will appear.
※Password is the same as main operation super mode。
①
Numeral key ... Input password.
②
BS key ... Clear last digit.
③
Cancel key ... Quit super user mode, return to normal user recognition edit.
④
Enter key ... If password is correct, enter into super user recognition edit display.
All manuals and user guides at all-guides.com
※Other recognition edit screen have the same function.
P.3