Related Manuals for Gatan Solarus 950
Summary of Contents for Gatan Solarus 950
- Page 1 Solarus 950 Gatan Advanced Plasma System Owner’s Manual and User’s Guide Part Number: 950.82001 July 2011 Revision 5 Gatan, Inc. 5794 W. Las Positas Blvd. Tel. (925) 463-0200 Pleasanton, CA 94588 Fax. (925) 463-0204...
- Page 2 Solarus 950 Owner’s Manual and User’s Guide...
- Page 3 Copyright and Trademarks © 2007 Gatan, Inc. The Gatan logo is a registered trademark of Gatan, Inc. The product names AutoFilter, BioScan, Clipring, DigiPEELS, DigiScan, Digi- talMicrograph, DigitalMontage, Duo Mill, DuoPost, Gatan LowDose, GIF, Hexlok, Hexring, HotHinge, MSC, PECS, PIPS, Toggle Tilt, and Whisperlok are trademarks belonging to Gatan, Inc.
- Page 4 Returns If there is a need to return equipment to the factory, please call Gatan to obtain a Returned Merchandise Authorization Number (RMA #). This RMA number must appear on your shipping document, to help in tracking and to ensure that proper actions will be taken to repair or replace your equipment.
- Page 5 Division de ROPER Scientific SAS 8, rue du Forez ZI petite montagne Sud - CE 1702 91017 EVRY Cedex Tel: + 33 1 69 11 03 69 Fax: + 33 1 64 97 19 67 Contact: dmonville@gatan.com APS Solarus 950 Owner’s Manual...
- Page 6 APS Solarus 950 Owner’s Manual...
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Page 7: Table Of Contents
Loading SEM Samples ..........22 Solarus 950 Owner’s Manual and User’s Guide... - Page 8 Battery Considerations ..........48 viii Solarus 950 Owner’s Manual and User’s Guide...
- Page 9 Gatan Advanced Plasma System, rear panel ....7 Figure 4 Solarus 950 rear panel gas connection detail....12 Figure 5 Gas line to filter connection .
- Page 10 Solarus 950 Owner’s Manual and User’s Guide...
- Page 11 The pump package enables pump and vent cycles of less than two minutes. With cleaning times of 1-2 minutes, the full Solarus 950 cleaning cycle takes less than four minutes. Solarus 950 Owner’s Manual and User’s Guide...
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Page 12: Gatan Advanced Plasma System, Model Model 950
ƒigure 1 Gatan Advanced Plasma System, model Model 950 Solarus 950 Owner’s Manual and User’s Guide... -
Page 13: Features
Features The Solarus 950 is unique in automatically managing all critical plasma parame- ters, offering a reliable one-touch cleaning solution. With this system, every user can obtain consistent, high quality results. The Gatan Advanced Plasma System consists of four main elements:... -
Page 14: Hardware
RF Source The Solarus 950 contains a 65 Watt RF power supply (13.56 MHz) with an auto- tuning network to assure effective plasma coupling to the generator and chamber. The RF supply is CE certified to comply with FCC guidelines. -
Page 15: Touch Screen User Interface
Mass flow controllers accurately gauge gas levels to achieve superior and repeat- able cleaning results. Touch Screen User Interface A touch screen interface to the Solarus 950 software offers one touch operation through user-programmable recipes, providing greater flexibility and repeatability than competitive products. -
Page 16: Description And Specifications
Description and Specifications The Solarus 950 consists of a single self-contained unit as shown in the following photos. ƒigure 2 Gatan Advanced Plasma System, front-accessible components The front of the unit contains a touch screen for executing all actions, two TEM holder ports, and a viewing port. -
Page 17: Physical Specifications
Be sure to use a properly grounded AC outlet. Maximum Ambient 35 degrees Celsius Temperature Although the instrument is a compact bench-top system, it is relatively heavy and should not be lifted by a single individual. Solarus 950 Owner’s Manual and User’s Guide... -
Page 18: Gas Requirements
For example, a 2 cubic foot (~57 liter) lecture bottle of H will last for ~147 hours of continuous use. An 80 cubic foot (~2265 liter) bottle of O will last for ~1373 hours of continuous use. Solarus 950 Owner’s Manual and User’s Guide... -
Page 19: Safety And Serviceability
Please see the individual operator manuals of these instruments (included in the shipping crate) for instructions. See the maintenance section in this manual for instructions to remove these pumps from the instrument. Solarus 950 Owner’s Manual and User’s Guide... -
Page 20: Installation Recommendations For Gatan Customers-Flammable And Oxidizing Gases
Ensure that the enclosure is Seismic Bracing and Mechanical Integrity: seismically braced in accordance with applicable Building Codes and that the distribution line is properly braced between the cabinet and the Solarus 950. Install listed and/or approved hydrogen gas monitoring for Gas Detection: the lecture bottle gas cabinet providing both local and remote alarm annunciation. - Page 21 Ensure that there is adequate clearance provided around the Clearance: Solarus so that the heat exhaust fans are not blocked. Gatan recommends that the effluent from the vacuum pump is con- Exhaust: nected to the customer’s house exhaust system so that small quantities of hydrogen and oxygen gas as well as plasma chamber contaminants are not introduced into the work area.
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Page 22: Installation And Setup
Rear Panel Gas Line Connections All gas line pressure regulator valves should remain closed until the Solarus 950’s internal purging process cycle has been completed. The clearly labeled gas inputs are located on the rear panel (Figure 4) and connect directly to the input of the mass flow controllers. -
Page 23: Gas Line To Filter Connection
Remove the Swagelok to NPT adapter on the other end of the line and install the NPT side to the gas regulator using Teflon tape (not supplied). Connect the second end of the gas line to the adapter, and tighten as above. Solarus 950 Owner’s Manual and User’s Guide... -
Page 24: Cleaning Configurations
Tighten the nut 3/4 turn clockwise using a wrench. Cleaning Configurations Plasma Cleaning Configuration For this (standard) configuration, two gas connections are required, H and O , as shown in the following diagram. ƒigure 6 Two-tank cleaning configuration Solarus 950 Owner’s Manual and User’s Guide... -
Page 25: Configuring Gas 3
40 sccm. The Gas 3 mass flow control- ler has been setup for Ar using the multiplier 1.412. The following conversion fac- tors (multipliers) can be used with Gas 3: Solarus 950 Owner’s Manual and User’s Guide... -
Page 26: Purging The Gas Lines
This process is controlled by system software. In most cases, this step will only need to be performed once, unless the gas lines are removed and reattached or otherwise opened to atmosphere. Solarus 950 Owner’s Manual and User’s Guide... -
Page 27: Two-Tank Purging Configuration
Touch Done to complete the purging process. Touch Done again on the next screen, when it appears, to return to the main menu. Solarus 950 Owner’s Manual and User’s Guide... -
Page 28: Connecting Exhaust Lines
The common by-products of plasma cleaning with H or Ar/O chemistries are unlikely to be harmful in small quantities, but Gatan recommends connecting the exhaust line to a vent connection that removes the processed gases from the room to the outside. The exhaust line connection is Swagelok. -
Page 29: Testing With Air As A Plasma Gas
This test uses air to ignite a pink colored plasma which is visible through the chamber viewing window.While this plasma is not recommended for cleaning samples, it does provide an easy method to confirm the operation of the system. Solarus 950 Owner’s Manual and User’s Guide... -
Page 30: Air Testing Configuration
Turn on the mains power by pressing the upper portion of the power switch located on the rear panel. Create a custom recipe. Set process gas 3 flowrate to 33.3 sccm, all other rates to 0. See “Creating Custom Recipes” for instructions. Solarus 950 Owner’s Manual and User’s Guide... - Page 31 At high elevations, the air pressure may not be sufficient to meet the required gas flow rate. A simple solution (if a gas cylinder is not available) is to pressurize a balloon with air and fit the end over the gas inlet con- nector. Solarus 950 Owner’s Manual and User’s Guide...
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Page 32: Loading Samples In The Solarus 950
When working with SEM samples, open the top of the unit by lifting up on the lid to reveal the top-loading chamber. Insert the specimen table and specimen as shown in the following photos. Solarus 950 Owner’s Manual and User’s Guide... -
Page 33: Top-Loading Sem Chamber, Side View
No part of the sample should extend higher than 1 cm below the chamber ceiling. Never allow any part of the sample to enter the antenna chamber. ƒigure 13 Sample loaded in SEM chamber Solarus 950 Owner’s Manual and User’s Guide... -
Page 34: Removing The Ion Shield
This should not be done if a sample is installed or the sample may experience ion damage. To remove, unscrew the ion shield (counter clock wise). ƒigure 14 TEM holder-adapter with ion shield removed Solarus 950 Owner’s Manual and User’s Guide... -
Page 35: Operating The Gatan Advanced Plasma System
STEM. For FEG STEM, more time may be recommended. Carbon films can be cleaned in the Gatan Advanced Plasma Cleaner. Please note that not all carbon films are equivalent. Carbon films are volatilized and removed during plasma cleaning, however, pure carbon films will be removed at a slower and consistent rate. -
Page 36: Operating Instructions
5:40-10:40 Operating Instructions The operation of the Solarus 950 consists of the following basic steps. Each step is described in more detail in the remainder of this section. Turn on the mains power by pressing the upper portion of the power switch located on the rear panel. -
Page 37: System In Idle State
System in idle state Place a sample in the chamber using the appropriate SEM stand or TEM holder. See the previous section “Loading Samples in the Solarus 950” on page 22 for more information. Select the appropriate recipe for your sample type and available gas setup. - Page 38 This is most likely due to a leak in the chamber caused by the chamber lid not seating properly, or by not inserting the blanking plugs in the front chamber ports. Solarus 950 Owner’s Manual and User’s Guide...
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Page 39: System Initiating Vacuum State
When the cleaning chamber reaches a pressure less than 70 mTorr, the system turns ON the mass flow controllers (MFC) to fix the preset flow rate for the Stabilization State specified recipe. The rate should stabilize within about 5 seconds. Solarus 950 Owner’s Manual and User’s Guide... -
Page 40: System Introducing Gases
When the gas flow has been stabilized, the system enters the plasma cleaning state, which delivers RF power (13.56 MHz) to the RF generator chamber, State igniting the plasma. ƒigure 18 Applying RF power to the unit Solarus 950 Owner’s Manual and User’s Guide... -
Page 41: Cleaning In Process
Cleaning Cycle At completion of the cleaning cycle, the gas flow and RF power are automati- cally switched off. Completion Solarus 950 Owner’s Manual and User’s Guide... -
Page 42: Plasma Cleaning Complete
The system will automatically abort the cycle if any error conditions exist. The user should notify the lab manager to correct the cause of the error. Any uncorrectable issues should be reported to Gatan. Removing the Sample Touch VENT to vent the chamber to atmospheric pressure for removal of the sample. -
Page 43: Venting The Chamber
It is important that this valve not remain open indefinitely, since a vent gas cylinder could be emptied in this state. The chamber will now remain in the idle state, ready for insertion of another sam- ple. ƒigure 22 System ready for next sample Solarus 950 Owner’s Manual and User’s Guide... -
Page 44: Creating Custom Recipes
Pumping Most users should not adjust this value. This sets the vacuum level at Switchpoint which the turbo pump begins a deeper evacuation of the sample cham- ber. Solarus 950 Owner’s Manual and User’s Guide... - Page 45 Reflected RF) can fall outside the selected range before the RF process is shut off. RF Tuning This function allows the system to retry if a match is not found during Attempts the first attempt. The default is 3 attempts. Solarus 950 Owner’s Manual and User’s Guide...
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Page 46: Recipe Options
(process gas 3) with a flow rate of 45.0. After creating this recipe, you should make the preset recipes for Ar/O not visible, so users will not use the wrong ones. Do this for all the preset Ar/O recipes. Solarus 950 Owner’s Manual and User’s Guide... - Page 47 Touch Cleaning Time, set the desired time, touch Apply. Touch Save. Touch Done. To make a recipe not visible from the main screen: Select the recipe. Touch Options. Touch Visible. Touch No. Touch Apply. Touch Done. Solarus 950 Owner’s Manual and User’s Guide...
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Page 48: Maintenance
Shut off the power to the system and unplug the power cord. The power switch is located on the rear of the cabinet near the right side. Remove any plugs or holder-adapters from the front-entry ports. Solarus 950 Owner’s Manual and User’s Guide... - Page 49 The two screws on each side closest to the front release the bezel, the other releases the covers. Tilt the bottom of the bezel upward, making sure that the cut-out does not scrape against the edge of the right side-entry port. Solarus 950 Owner’s Manual and User’s Guide...
- Page 50 (to the right). This disengages two locking tabs at the far left of the cover-piece. If the bottom catches on the frame, push it slightly down and out to clear. Solarus 950 Owner’s Manual and User’s Guide...
- Page 51 Remove the front bezel and the right cover. (see instructions above) Remove the locking screw that holds the pump base-plate to the frame. Remove the exhaust line from the pump by pulling on it. The pump and the Solarus 950 Owner’s Manual and User’s Guide...
- Page 52 Disconnect the vacuum line from the left side of the pump by unscrewing the knurled knob (not the hex nut). Solarus 950 Owner’s Manual and User’s Guide...
- Page 53 Unscrew the rubber foot and remove the thermistor. Unscrew the bolts on the three KF clamps that hold the pump to the manifold. Hold the pump as this is done to ensure that it does not fall. Solarus 950 Owner’s Manual and User’s Guide...
- Page 54 Lift the lid to the specimen chamber. Remove the four screws that hold the cover to the specimen chamber lid and remove the cover. Solarus 950 Owner’s Manual and User’s Guide...
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Page 55: Access To Pirani Gauge Calibration Button
Touch Display. The display will change so that the pressure will be shown. Wait for the pressure reading to stabilize at a minimum value. 10 minutes should be fine. Solarus 950 Owner’s Manual and User’s Guide... -
Page 56: Maintenance Report
ƒigure 25 Example maintenance report Viewing the Maintenance Report Touch Options. Touch Service. Touch Maintenance Report. Clearing the Maintenance Report History Touch Options. Touch Service. Touch Reset History. Touch Yes to confirm. Solarus 950 Owner’s Manual and User’s Guide... -
Page 57: Troubleshooting
Check for a leaking gas inlet line. The easiest way to test this is to purge the gas lines, as described in the installation section. Solarus 950 Owner’s Manual and User’s Guide... -
Page 58: Spares And Consumables
Information in this section is provided in accordance with the European Union Battery Directive, 2006/66/EC. A "button" type battery is contained within the Graphics ClientM card (Gatan part # 100699) used in the 950 Solarus Advanced Plasma System. The battery is located as shown in Figure 26 below. -
Page 59: Battery Location
Each customer must evaluate their operating conditions to determine if a battery maintenance program is required as part of a regular maintenance cycle for their product. In the event the battery must be replaced, contact Gatan Customer Ser- vice Department at www.gatan.com and follow the link to Customer Service. - Page 60 Used batteries must be disposed of according to the battery manufacturer's instructions. Information on the battery specifications, including handling and disposal are pro- vided by Rayovac via their webpage at: http://ca.rayovac.com/technical/msds.htm Solarus 950 Owner’s Manual and User’s Guide...
- Page 61 Order (PO) for the repair. If the item is under warranty and the customer is requesting an expedited exchange, as may be the case for a printed cir- cuit board, a PO will be required. A credit against this PO will be issued by Gatan upon receipt of the item as returned in accordance with the RMA instructions.