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Gatan PIPS II 695 Owner's Manual And User's Manual

Precision ion polishing system
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Pre ecisio
n Ion
Own
ner's M
Gatan, I
G
5794 W. Las
5
Pleasanton, C
P
n Polis
shing
Manual a
and Use
Part Nu
Inc.
s Positas Blv
vd.
CA 94588
PIPS
II
Syste
em
er's Gu
uide
umber 695.8
82001
Revisio
on 4.0
3/15/
/2014
Tel. (
(925)463-02
200
Fax.
(925)463-02
204

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  • Page 1 Polis shing Syste ner’s M Manual a and Use er’s Gu uide Part Nu umber 695.8 82001 Revisio on 4.0 3/15/ /2014 Gatan, I Inc. 5794 W. Las s Positas Blv Tel. ( (925)463-02 Pleasanton, C CA 94588 Fax. (925)463-02...
  • Page 2 PIPS II Owners Manual and Users Guide...

  • Page 3: Safety Information

    Inform mation his chapter presents a summary o of the safe ty symbols throughout t this anual. Gatan n, Inc., reco mmends fol llowing all s safety preca autions to pr revent arm to yours self or the eq quipment. P...

  • Page 4: Product Safety Information

    Protective IEC 60417 -5019 (2006 6-08) Conductor Terminal Frame or cha assis IEC 60417 -5020 (2002 2-10) ERMINAL IEC 60417 -5007 (2009 9-02) On (Power) IEC 60417 -5008 (2009 9-02) Off (Power) Caution, ossibility of lectric shock Caution, IEC 60417 -5041 (2002 2-10) urface...
  • Page 5 scribed on th he equipmen nt's electrica al rating labe el. Never pu ush objects o of any nd through the openin gs in the e equipment. D Dangerous v voltages ma ay be resent. Cond ductive forei ign objects c could produ uce a short c circuit that c...

  • Page 6: Preface

    Preface Copyright and Trademarks © 2007 Gatan, Inc. The Gatan logo is a registered trademark of Gatan, Inc. The product names AutoFilter, BioScan, Clipring, DigiPEELS, DigiScan, DigitalMicrograph, DigitalMontage, Duo Mill, DuoPost, Gatan LowDose, GIF, Hexlok, Hexring, HotHinge, MSC, PECS, PIPS, Toggle Tilt, and Whisperlok are trademarks belonging to Gatan, Inc.
  • Page 7 10 Eunos Road 8 #12-06 Singapore Post Centre Singapore 408600 Tel: (65) 6293 3160 Fax: (65) 6293 3307 Contact: wchuang@gatan.com Europe Gatan GmbH, München Germany Ingolstadterstr. 12 D-80807 München Germany Tel. +49 89 358084-0 Fax. +49 89 358084-77 Contact: mfelsmann@gatan.com Gatan UK...

  • Page 8: Returns

    Returns If there is a need to return equipment to the factory, please call Gatan to obtain a Returned Merchandise Authorization Number (RMA #). This RMA number must appear on your shipping document, to help in tracking and to ensure that proper action will be taken to repair or replace your equipment.

  • Page 9: Table Of Contents

    Table of Contents Safety Information ........................3 Symbols and Attention Symbols ..................... 3 Product Safety Information ..................... 4 Preface ............................6 Copyright and Trademarks ...................... 6 Disclaimer ..........................6 Support............................. 6 Returns ............................. 8 Table of Contents ........................9 List of Figures ........................... 12 List of Tables ..........................
  • Page 10 3.10. Aligning the Beam ..................71 3.11. Ion-beam Modulation ..................75 3.12. Manual Shutdown Procedure ................78 Specimen Preparation ..................79 4.1. Disk Preparation....................79 4.2. Specimen Mounting ..................88 4.3. Ion-beam Milling .................... 95 Routine Maintenance and Servicing ............... 98 5.1.
  • Page 11 7.1. Cold Stage Option ..................148 7.2. End-point Detection ..................160 7.3. Digital Zoom Microscope Option ..............163 7.4. Motorized Gun Tilt ..................183 Gatan Hardware Product Warranty ............... 187 PIPS II Owners Manual and Users Guide...

  • Page 12: List Of Figures

    List of Figures Figure 1-1 PIPS II, basic system, front view..........17 Figure 1-2 Work chamber, top view............... 20 Figure 1-3 Work chamber, cross-section view..........21 Figure 1-4 Vacuum system................22 Figure 1-5 Gas-control system..............23 Figure 2-1 View of connections on rear of cabinet.
  • Page 13 Figure 3-51 Modulation modes............... 77 Figure 3-52 Beam modulation................ 77 Figure 4-1 Gatan model 601 ultrasonic cutting tool........79 Figure 4-2 Gatan model 659.00001 disk punch..........80 Figure 4-3 Gatan model 623 disk grinder............81 Figure 4-4 Disk grinding: initial and final.
  • Page 14 Figure 5-11 Cover removal................118 Figure 5-12 Molecular drag pump removal..........120 Figure 5-13 Shutter servicing................ 123 Figure 5-14 Motor Drive Removal............... 124 Figure 5-15 Replacing the encoder.............. 126 Figure 5-16 Sample mount removal............127 Figure 5-17 Whisperlok assembly.
  • Page 15 Figure 7-26 Gun tilt settings................. 184 Figure 7-27 Motorized gun assemblies............185 Figure 7-28 Gun tilt maintenance screen............. 186 Figure 7-29 Gun tilt calibration screen............186 PIPS II Owners Manual and Users Guide...

  • Page 16: List Of Tables

    List of Tables Table 1 Polishing wheel diameter versus dimple depth ........82 Table 2 Optimum initial specimen disc thickness .......... 83 Table 3 Typical Milling rates ................96 Table 4 Bulk/rim thickness vs. minimum milling angle ........ 96 Table 5 PIPS II milling parameters ..............97 Table 6 Maintenance Operations ..............

  • Page 17: Overview

    Overv rview he Model 69 95 Precision n Ion Polish hing System m (PIPS II ™ ™) is a com mpact, ench-top sys stem design ned to produ uce high-qu uality TEM specimens with xceptionally large, clean, , electron-tra ansparent ar eas.
  • Page 18 1.1.6. Versatile Sample Holders The Gatan specimen post, for single-sided milling, and the DuoPost, for double-sided milling, eliminate transfer of material onto the specimen by secondary sputtering from the specimen platform and provide excellent thermal contact with the specimen to prevent specimen overheating.
  • Page 19 Whisperlok Stage Quick specimen exchange (<30 sec) is achieved using a miniaturized version of Gatan’s pneumatically controlled Whisperlok™. The specimen can be easily transferred and viewed at frequent intervals during the final moments of the thinning process. PIPS II Owners Manual and Users Guide...

  • Page 20: Main Work Chamber

    1.2. Main Work Chamber Figure 1-2 is a top view of the PIPS II main Work Chamber. The figure shows the right and left PIGs. The Airlock cover is removed to reveal the main Airlock O-ring and a top view of the specimen mount. Figure 1-2 Work chamber, top view.

  • Page 21: Vacuum System

    Figure 1-3 Work chamber, cross-section view. 1.3. Vacuum System PIPS II has a compact, oil-free vacuum system consisting of a molecular drag pump (MDP) backed by a 2-stage diaphragm pump (DP). The vacuum system is designed to hold vacuum when the power is turned off. The working vacuum can be reached very quickly when the power is resumed.

  • Page 22: Figure 1-4 Vacuum System

    falling into the pump. Pressure is monitored by the cold-cathode gauge tube, which will not turn on unless the MDP is close to its normal running speed. 1.3.3. Airlock Vacuum The Airlock vacuum is controlled by three solenoid valves (see Figure 1-4). The VAC valve in conjunction with the LL (loadlock) valve evacuates the Airlock.

  • Page 23: Figure 1-5 Gas-Control System

    Energy Isolation Prior to service, remove the AC line cord and attach a suitable lockout/tagout device, such as RS Hughes Co. part number 65674 or the like. Gas-control System The Gas-Control system controls the Argon gas supply to the ion guns, an alternate gas input for the guns, the Whisperlok piston, and the pneumatic shutter.

  • Page 24: Electrical System

    switched off, the gas pressure is cut and the piston is raised. This means that in the event of a power failure, the specimen will automatically be raised into the Airlock. In addition, the LL and the VAC valves are configured so that the DP evacuates the bellows.

  • Page 25: The Standard Operating Mode

    1.5. The Standard Operating Mode Gatan recommends the PIPS II be left running continuously 24 hr a day, seven days a week. This will insure optimum performance of the vacuum system and the ion guns and purge time will be minimized.

  • Page 26: Installation

    Installation Although the PIPS II is a small, bench-top system, it is relatively heavy (38 kg) and should not be lifted by a single person. It can be lifted safely by two people who are experienced in the techniques of lifting heavy objects. Alternatively, proper laboratory lifting equipment should be used.

  • Page 27: Unpacking

    7. Verify accessory items. Inspect the contents of the accessory boxes against the items ordered and those listed on the packing list. If there are any discrepancies, inform your local Gatan Sales Office immediately. PIPS II Owners Manual and Users Guide...

  • Page 28: Installation

    2.3. Installation Place the PIPS II on an appropriate work bench, close to a suitable power outlet and a cylinder of compressed argon. Then proceed with the setup. Figure 2-1 View of connections on rear of cabinet. 2.3.1. Setup of the Diaphragm Pump (DP) 1.

  • Page 29: Figure 2-2 Camera System Mount Onto The Pips Ii

    3. Purge the gas-supply hose. Crack open the main valve on the cylinder to purge the gas-supply hose. 4. Connect hose to the console. With the argon flowing, connect the hose to the gas-inlet port on the rear panel of the PIPS II. Do not over tighten the fitting as this may fracture the hose.
  • Page 30 2. Place the plastic washer onto the vertical post on the Manifold. 3. Engage the hole in the bottom of the rack and pinion mount into the vertical post on the Manifold. 4. Lower the camera system to its working position. 5.
  • Page 31 4. Plug the PIPS II into the main power socket. Do not load a specimen post just yet. 5. Rotate the microscope objective turret to the 2x position. Adjust the focus knob to clearly view the hex shape at the top of the piston. 2.3.6.

  • Page 32: Figure 2-3 Microscope Front To Back Alignment

    Figure 2-3 Microscope front to back alignment. Left-to-right alignment 1. Loosen the socket-set screw on the pivoting slide. Use the 1.5 mm hex wrench to loosen the socket-set screw (facing the rear on the pivoting slide itself). 2. Position the microscope. Look between the microscope slide and the pivoting slide to find a brass cam.

  • Page 33: Figure 2-4 Microscope Left To Right Alignment

    Figure 2-4 Microscope left to right alignment. PIPS II Owners Manual and Users Guide...

  • Page 34: Operation

    Opera ation he PIPS II is relatively y simple to operate. Th he ability of f the operat tor to btain good T TEM specim mens depen nds more on n the quality y of the sta arting pecimen disk ks than on any other factor.

  • Page 35: Figure 3-2 Setting The Milling Duration

    imer: Use to o define the milling dura ation. For th his, touch the e Timer and enter e milling du uration in th he window shown belo ow (Figure 3-2), then t touch pply. When the syst tem is millin ng and the ti imer times o out, the volt...

  • Page 36: Figure 3-3 Setting The Modulation Mode

    old condu uctor tem mperature: Shows the e temperatu ure at the cold onductor. Th his is an inte ermediate bl lock betwee en the dewar r and the sa ample ount. This i s not the sam mple tempe rature, but i is proportion nal to the sa...

  • Page 37: Figure 3-4 Setting The Language

    tage tab: U Used for rais sing/lowerin ng the stage, for venting the airlock w when e sample is i in raised pos sition, and fo for opening t the shutter an nd turning o on the luminators w when the stag ge is in the lo owered posit tion.

  • Page 38: Figure 3-5 Recipes Page

    gure 3-5 Rec cipes page. unning a r recipe: To r run an existi ing recipe, se elect the rec cipe you wan nt and uch Run. As s a recipe ru uns, the rem maining time and the cur rrent step nu umber e shown on...

  • Page 39: Figure 3-7 Status Bar, Showing A Recipe Is Completed Successfully

    gure 3-7 Stat tus bar, show wing a recipe e is complete ed successfull diting a re ecipe: To ed dit a recipe, select the re ecipe and to ouch Edit Re ecipe. his opens th he Recipe Ed dit page, wh here you can n edit the pa arameters in...

  • Page 40: Figure 3-8 Edit Recipe Page

    gure 3-8 Edi it recipe page n order to ch hange each p parameter in n recipe step ps, touch it. A A window o opens here you ca an enter the e new value e/setting and d apply. An n up arrow entry eans that the...

  • Page 41: Figure 3-9 Adding A Recipe Step

    gure 3-9 Add ding a recipe e step. gure 3-10. D Deleting a rec ipe step. fter done edi iting, touch Save and the en Close to g go back to th he recipes pa age. reating a n new recipe e: This is don ne by copyin ng an existin...

  • Page 42: Figure 3-11 Copying A Recipe

    gure 3-11 Co opying a reci ipe. gure 3-12 Cr reating a new w recipe: ente er the name. .1.3. The A Alignment Page se this page to perform the beam a alignment an nd x-y stage alignments . The quence shou uld be: Insert the...

  • Page 43: Figure 3-13 Alignment Page

    gure 3-13 Al lignment pag Whenever “Al lign” is touc ched in this p page, the sta age will rotat te to the spec cified osition and w will stay ther re until “Rota ate” is touch hed again. Th he green col lor on otate, shows...

  • Page 44: Figure 3-14 Camera Page

    gure 3-14 Ca amera page. amera pag Is visi ible when t the Digital Z Zoom Micr oscope opti on is stalled. It i s used to s set the ima aging mode in DM an d to contro ol the luminators.

  • Page 45: Figure 3-15. Viewing Page

    iewing pag ge: Is visib ble when the e Digital Zoo om Microsc ope option i is not stalled. It is used to cont trol the illum minators and d open the sh hutter. gure 3-15. V Viewing page. hutter tab: : The View w button is u used to open...

  • Page 46: Figure 3-16 General Settings Page

    .1.5. The S Settings Pa eneral: gure 3-16 Ge eneral Settin ngs page. luminator timeout: T This timer s starts when the user to ouches the V View utton. When it times out, , the shutter closes and th he illuminat tion is turned d off.

  • Page 47: Figure 3-18 Choosing The Calibration Table Used For The Argon Gas Inlet

    When Argon i is chosen, th he button jus st below is h highlighted i in blue. You u may en choose b between 3 c calibration m modes: Ca alibrated, Fa actory, and Safe. alibrated m mode uses the latest calibration values.

  • Page 48: Figure 3-19. Milling Sectors

    illing Sect ors: gure 3-19. M Milling sector ector millin ng range: Sector Mill l Range sets the angle th hrough whic ch the ctor milling is on. Defau ult is 60 deg grees. Value es can be cha anged from 90 to 0 degrees.

  • Page 49: Figure 3-20 Heaters Settings Page

    old stage heater: Tu urns the heat ter on and of ff. If the hea ater is on an nd the mperature d drops below the heater se et point, the e heater is tu urned on unt til the mperature is s above the s set point.

  • Page 50: Figure 3-22 Gas Flow Calibration

    ight intens sity: Sets th e intensity o of the bottom m illuminato or while a rea ading being made Measure eve ery: Tells th he system ho ow often to t take a measu urement. It c can be very X rotati on or every X seconds.

  • Page 51: Figure 3-23 Motorized Guns Calibration

    Th his is not nor rmally neede ed unless req quested by G Gatan service un angles: his is only av vailable for s systems with h motorized guns: Touch M Maintenance –...

  • Page 52: Figure 3-24 Properly Aligned Stage In The Home Position

    Go to the e Maintenan nce | Calibr rate | Stage e screen. N ote the Cur rrent Encoder P Poition. Pre ess the Ind dex button. Enter the c current enc coder position n noted above. Go to Alig gnment scre een, press R Rotate, then...

  • Page 53: Figure 3-26 Temperature Sensor Calibration

    Gatan serv ice. If gauge es need to b be calibrated d in the field d, it is best t to set em to the de efault calibra ation.

  • Page 54: Figure 3-28 Foreline Gauge Calibration

    gure 3-28 Fo oreline gauge e calibration. s gauge me asures the w work chamb ber pressure. . It is old cathode gauge: rned on whe en the MDP speed is abo ove 1250 rpm m. This shou uld not need to be alibrated in th he field.

  • Page 55: Figure 3-30. Vacuum Page

    acuum his screen is used to cont trol and mon nitor the vac cuum pumps and gauges gure 3-30. V Vacuum page Raise e is used to raise the sta age into the airlock. Ven nt is used to o vent rlock: e airlock.

  • Page 56: Figure 3-31 Gun Readings

    ccelerating V Voltage is t the voltage on the anod de. This is t the beam en nergy. ischarge Vo oltage is the e voltage be etween the anode and t the cathode , this oltage sustai ins the plas sma.

  • Page 57: Figure 3-32 Gun Tilt Page

    spectively. T The position n reads the c current gun a angle positio on in degree s and ac values. Th he remainder r of the read dings are for r service pers sonnel diagn nostic urposes. gure 3-32 Gu un Tilt page.

  • Page 58: Figure 3-34 Software Maintenance Page

    \public\softw ware\Specim menPrep wnload the z zip file and u unzip to the root o of a USB flas sh drive. ot all flash d drives are su upported.

  • Page 59: Start-Up Procedure

    gure 3-35. So oftware conf figuration pa age. lock: et the date and time on n this page e. Note that the system m clock doe s not utomatically adjust for da aylight savin ngs time. gure 3-36 Cl lock page. 3.2.

  • Page 60: Figure 3-37 Milling Page

    gure 3-37 M Milling page. .2.1. Ion-g gun Purgin he PIGs are v very efficien nt and operat te with an ex xtremely low w gas throug ghput. owever, eve en when the e argon gas s flow to th he guns is t turned off, small...

  • Page 61: Specimen Loading And Unloading

    3.3. Specimen Loading and Unloading Specimens are mounted either on a Gatan DuoPost or a regular specimen post. The specimen post is inserted into a specimen mount located at the top of the Whisperlok piston. The following procedure assumes the piston/specimen mount is in the Work Chamber.

  • Page 62: Figure 3-38 Lowering The Stage

    gure 3-38 Lo owering the s stage. gure 3-39 Sp pecimen mou unt in raised and working g positions. PIPS II O Owners Man nual and Use ers Guide...

  • Page 63: Specimen Viewing

    3.4. ecimen V Viewing he PIPS II ha as been desig gned so that t the specime en is clearly visible both h with e naked eye e or with the e stereo mic croscope or camera eith her raised (i in the irlock) or in n the lowere...

  • Page 64: Shutter Control

    gure 3-41 V Viewing page. 3.5. utter Con ntrol he Shutter protects the e specimen n Viewing P Port from sputter dep posits, perates autom matically, a and is keyed d to the Sta art and View w buttons in n the Milling and Recipe tab...

  • Page 65: Centering The X-Y Stage

    calibrated in the Maintenance section of the GUI. The stage advances to the home position prior to raising the stage into the airlock. Figure 3-42 Specimen mount raised and in the Home position. 3.7. Centering the x-y Stage The x-y stage should be centered with respect to the center of rotation before beam alignment is performed.

  • Page 66: Centering The Point Of Interest

    2. Find the center of rotation by looking through the microscope or at the camera live view. 3. Verify that the hole in the alignment screen does not move by more than about 125 um. This is sufficient for aligning the guns, since it is significantly smaller than the beam diameter.

  • Page 67: Figure 3-43 X-Y Alignment, Steps 7 (Left) And 8 (Right)

    the PIPS II has a came era system, D Digital Micr rograph (DM M) can be us sed to d this proces 1. In nsert the sam mple, with t the front of f the specim men post fac cing the fro ont of he system an nd the two...

  • Page 68: Figure 3-44 X-Y Alignment, Steps 10 (Left) And 11 (Right)

    11. To ouch the Al lign Rear R Right Beam m Sector but tton on the e Alignment t tab. he stage will l rotate and s stop when th he rear of th he specimen post is facin ng the ght gun.

  • Page 69: Gun Gas-Flow Adjustment

    NOTE: The gun current readings displayed on the Milling tab is not a Faraday cup reading, as was used in previous versions of Gatan PIPS. This reading is now a measure of the current leaving the anode in the gun, as measured at the high voltage power supply.

  • Page 70: Figure 3-47 Operating Characteristics Of The Pig

    Figure 3-47 Operating characteristics of the PIG. The gas flow can be adjusted either automatic or manually. For consistent and best performance, Gatan recommends setting the gas flow to automatic. 3.9.1. To Adjust the Gas Flow Automatically 1. On the Milling page, select Automatic for the Gas Mode.

  • Page 71: Aligning The Beam

    3.10. Aligning the Beam The ion beams produced by the PIGs contain both ions and fast neutrals. Electrostatic beam alignment does not work with the fast neutrals and the ion guns in the PIPS II must be aligned mechanically. This is done with the aid of the Beam Alignment Screen.

  • Page 72: Figure 3-48 X And Z-Alignment Device Screws

    Rotate th e gun to 10 ° Top. This s is done by manually tu urning the gu uns to 0° Top posit tion or settin ng the Gun t tilts to + 10 0° on the Mi illing page, w when otorized gun ns are availab...

  • Page 73: Figure 3-49 Alignment Ellipse Observed In The Beam

    Figure 3-49 Alignment ellipse observed in the beam. 8. Start rotating the stage (touch Rotate) and watch the center of the alignment screen. Make sure the center is not wiggling too much (>~125 um). If it does, align the beam to center of the movement. 9.
  • Page 74 6. Adjust the x-alignment drive screw (horizontal adjust). Adjust the drive screw to center the beam over the center point of the glass slide. 7. Go to Alignment page and bring the stage to the Rear Beam Sector of this gun. Adjust the beam alignment if necessary and make sure the beam is centered as this position as well (repeat 6 and 7).

  • Page 75: Ion-Beam Modulation

    ome systems s include gun n alignment knobs as pa art of the acc cessory kit. They ay also be o rdered as a k kit: 695.098 16 Kit, Alig gnment Knob b; which inc cludes of each. gure 3-50 G Gun knob wit th gun alignm ment knobs in...
  • Page 76 NOTE: When loading a cross-sectional specimen, it is important to insert the specimen such that the cross-sectional interface (glue line) is parallel to the front panel (home position). This procedure ensures that the polishing sectors will be ±30° normal to the glue line during operation of the Beam Modulator. It is also important to note that the specimen will automatically rotate to this home position before the piston will rise into the Airlock.

  • Page 77: Figure 3-51 Modulation Modes

    gure 3-51 M Modulation m odes. 3mm TEM Sample w when it is loaded in th he PIPS: Rotatio Interface Left gun Right gun 30° 30° Gun off 60° Sect Gun on Single Beam Modulation Double Beam m Modulation gure 3-52 Be eam modulat tion. PIPS II O Owners Man nual and Use ers Guide...

  • Page 78: Manual Shutdown Procedure

    3.12. Manual Shutdown Procedure Main power to the PIPS II (power consumption of less than 100 W) should be left on at all times to provide for more efficient trouble-free operation. The vacuum will be continuously maintained resulting in a cleaner system with shorter pump downs and minimum purging requirements of the PIGs.

  • Page 79: Specimen Preparation

    Specim men P Prepar ration 4.1. Disk k Prepar ration ll TEMs ma anufactured t today requir re samples th hat are 3.05 mm in diam meter. he following g methods a are suggested d to prepare e plan view 3mm discs from ulk material:...

  • Page 80: Figure 4-2 Gatan Model 659.00001 Disk Punch

    gure 4-2 Gat tan model 65 59.00001 disk k punch. .1.1. Mech hanical Pre e-thinning he importa ance of pr re-thinning prior to ion polish hing canno t be veremphasiz ed. Pre-thin nning is usu ually done b by mechanic cal grinding g and olishing but...

  • Page 81: Figure 4-3 Gatan Model 623 Disk Grinder

    Gatan M Model 601.0 07000 ross-section kit. Follow these basic s steps, descri ibed in detai l in the follo owing ctions, to pr repare cross- -sectional sam...

  • Page 82: Figure 4-6 Gatan Model 656 Dimple Grinder

    gure 4-6 Gat tan model 65 56 dimple gri inder. imple diam meter and d depth ince the beam m angle for i ion polishing g may be ve ry small, on ne must be ca areful at the rim a around a di impled spec cimen does...

  • Page 83: Table 2 Optimum Initial Specimen Disc Thickness

    Optimum initial specimen disc thickness Table 2 uses the above data to estimate the optimum initial specimen disc thickness for specimens dimpled from one side. As a rule-of-thumb, for a 2.2 mm dimple diameter, the initial disc thickness equals dimple depth plus 4 times the thickness of the damaged layer.

  • Page 84: Figure 4-7 Specimen Disc Geometry

    Refer to the Gatan Mod del 656 Dim mple Grinde er User's Gu uide for det tailed perating instr ructions.) After disc c grinding t to 40-70 µm...
  • Page 85 The glass slide is secured to the specimen table of the Gatan Ultrasonic Disc Cutter with mounting wax. The disc cutter is fitted with a 4 × 5 mm cutting tool to cut out rectangular wafers (Figure 4-8, Step 1).

  • Page 86: Figure 4-8 Cross Section Specimen Preparation

    ummy and sp pecimen wa afers are coa ated with a t thin layer of f G-1 epoxy y. G-1 as character istics that a are similar to M-Bond d 610 epoxy y but offer s the llowing adv vantages: Fa st curing tim me (5-10 mi in at 130 °C...

  • Page 87: Figure 4-9 Cross Section Specimen Preparation

    80 µm m using the G Gatan recision Disc c Grinder an nd dimpled according to o the proced dure describ bed in ection 4.2.

  • Page 88: Specimen Mounting

    gure 4-10 Cr ross section s specimen pre eparation. impling is g generally per rformed on only one si ide of the sp pecimen and d that de of the di sc is mecha anically poli ished using felt polishin ng wheels o on the mple grinde...

  • Page 89: Figure 4-11 Duoposts, Glue Type And Clamp Type

    gure 4-11 Du uoPosts, glue e type and cla amp type. n important aspect of th he DuoPost is its use in n conjunction n with the b beam- odulation fe eature of the e PIPS II. W When mount ting cross-se ections, the main...
  • Page 90 To mount a sample on a clamp-type DuoPost: 1. Slide the tray back completely. 2. Place the clamp-type DuoPost into the recess of the loading dock. Use the grooves provided on the post to hold with tweezers. 3. Rotate the knob to open up the gap in the clamp. 4.

  • Page 91: Figure 4-13 Mounting A Sample, Steps 1 And 2

    gure 4-13 M Mounting a sa mple, steps 1 1 and 2. lace the sam mple post in the carrier provided a and use a too oth pick to p place thin layer o of the diluted d wax aroun nd the reces ss edge of th he post.

  • Page 92: Figure 4-15 Mounting A Sample, Step 8

    Carefully y center the e sample ove er the dry w wax. Bond th he sample t to the sample p post. Transfer r the compl ete assembl ly to a hot plate to m melt the wax x and bond the e sample to t the sample p...

  • Page 93: Figure 4-16 Graphite Holder

    .2.2. Grap phite Holde he graphite h holder offer rs quick and d easy samp le loading/u unloading (F Figure 16). The sa ample is sec cured betwee en two inde ependent sli des that gri p the ample at edg ge.
  • Page 94 NOTE: The transmitted light comes on and stays on for 3 minutes each time the knob is rotated. 4.2.3. Molybdenum Specimen Post For specimens mounted without wax, Gatan has the molybdenum specimen post with a raised rim within which the specimen is placed. However there are heat transfer considerations with this post.

  • Page 95: Ion-Beam Milling

    temperature rise in the specimen can be considerable. Cooling the specimen post to liquid nitrogen temperatures has very little effect on the specimen temperature since heat flow is dominated by the large thermal resistance at the minute points of contact between the specimen and its support. In order to improve heat flow, a specimen must either be clamped mechanically to a support platform or attached to a single-sided post using a thin layer of mounting wax.

  • Page 96: Table 3 Typical Milling Rates

    4.3.1. Milling Rates Milling rates depend on the relative masses of the ion and sample atom, ion energy, atomic density and crystalline structure of the sample and the angle of incidence of the ion beam. The higher the beam energy and the beam angle, the faster the milling rate.

  • Page 97: Table 5 Pips Ii Milling Parameters

    60 µm top side dimpled to 5 µm with a 15 mm wheel. Note that because the milling rates have increased dramatically at low energy compared to the original PIPS, Gatan recommends obtaining a perforation at low energy (e.g. 0.5 keV) for samples that exhibit interference fringes.

  • Page 98: Routine Maintenance And Servicing

    Routine e Main ntenan nce an nd Se rvicin he maintenan nce operatio ons listed in Table below w should be e carried out t on a utine basis. able 6 Maint enance Oper rations peration Frequency mptom Clea an Viewing Port Weekly Spec cimen viewing b...

  • Page 99: Cleaning The Airlock Vacuum Seals

    4. Clean the window. Use a nonabrasive cleaner or a 2-4 µm diamond polishing compound. Replace the window if deposits are too difficult to remove. 5. Replace the window into the capsule O-rings. 6. Replace the Viewing Port capsule. 7. Evacuate Airlock chamber. Slide down the slider on the Stage panel, while pushing down on the window to properly seat it.
  • Page 100 1. Raise the Stage and vent the airlock chamber. This allows the airlock cover to be removed after system power is off. 2. Shut down the power to the PIPS II. Wait at least 10 min to allow the MDP to come to a complete stop. Then vent the work chamber by opening the Vent valve.

  • Page 101: Cleaning The Specimen-Mount Assembly

    5.3. Clea aning th he Speci men-mo ount Ass sembly Milling the bo ottom surfac e of specime ens will sput tter material l directly ont to the indow shiel ld of the sp pecimen-mo ount assemb bly, and ont to the XY stage sembly.
  • Page 102 8. If necessary, clean the XY stage parts. This should be performed if the stage parts are covered with excessive sputtered material or if the stage does not move freely. 1. Remove the screw from the top of the specimen mount assembly and lift off the clamp plate.

  • Page 103: Figure 5-2 Specimen Mount Removal

    gure 5-2 Spe ecimen moun nt removal. gure 5-3 Spe ecimen-moun nt and windo ow assembly. Cautio n: Cold Sta age version: do not re emove the o o-ring from the specime rotate shaft unles ss absolutely y necessary y. The mat terial below w this o-rin scratch...

  • Page 104: Cleaning The Cold-Cathode Gauge Tube

    5.4. eaning th he Cold- -cathode e Gauge e Tube Cautio on: The cold d cathode ga uge contains s a very pow werful perma anent magne Pacem aker wearers s should not clean this g gauge. ontamination n of the m measuring ch hamber with hin the tube...

  • Page 105: Figure 5-4 Cold-Cathode Gauge Tube

    Remove t the locking ring and t the pole in nsert from t the front o of the measuring ch hamber of th he anode as ssembly. gure 5-4 Col ld-cathode ga auge tube. .4.2. To Cl lean Gaug e Tube Par Clean th e inside o f the tube...
  • Page 106 OTE: Visua ally check th hat the anod de pin is cen ntered within n the hole o of the ole insert. Mount th e magnet o nto the ano ode assembl ly. Lock it w with the hex- -head rew and clam Carefully push on th...

  • Page 107: Cleaning The Shutter

    3. Lift off the Viewing Port. 4. Press the Airlock piston down into the Work Chamber. 5. Remove the Top Cover plate with the Removal tool. 6. Pull out the Shutter Guide. Grasp the Shutter Guide at the front of the chamber and pull it straight out.

  • Page 108: Care Of Penning Ion Guns

    Cautio on: The Shu utter will not t operate if th he blade or shaft is bent t by imprope handlin ng during cle eaning. 5.6. Care e of Pen nning Io n Guns Cautio on: The Pe enning guns s contain v very powerf ful permane...

  • Page 109: Figure 5-6. Removal And Disassembly Of Ion Guns

    To Remove the Gun: 1. Shut down the power to the PIPS II. Wait at least 10 min to allow the MDP to come to a complete stop. Unplug the power cable from the back of the system. Then vent the Work Chamber by opening the Vent valve. There is no need to unplug the HV cables nor remove any of the side covers from the PIPS II.

  • Page 110: Figure 5-7 Ion Source And Magnet Assembly

    assembly. The disassembly and subsequent assembly should be done with the aid of a x10 stereo microscope. Toggle Stick Figure 5-7 Ion source and magnet assembly. To Disassemble the Gun: 1. Lift the magnet assembly off the rear polepiece. Hold the ion source with one hand and grasp the magnet assembly with the other hand.

  • Page 111: Figure 5-8 Removal Of Anode Assembly And Anode Cup Insulator

    gure 5-8 Re moval of ano ode assembly y and anode cup insulato gure 5-9 Re moving anod de cup assem mbly/front po ole piece. o Inspect a and Clean the Gun: Carefully examine th he inside fac ce of the fro ont polepiec ce and the t op of...
  • Page 112 2. Clean the anode cup. Clean the anode cup by wiping with a clean dry tissue and dusting it with dry nitrogen or clean compressed air. Clean all the loose sputtered material on the inside surface and the face of the cup using an abrasive pad such as Scotchbrite.
  • Page 113 This assembly should be aligned relatively square with the chamber. Guide the knob over the toggle stick until it is firmly in place and screw in the two retaining screws. Repeat this procedure on the second gun if necessary. 5.6.2. Wet Cleaning the Penning Ion Guns As stated earlier, the dry method of cleaning the guns is preferred.
  • Page 114 Hold the ion source with one hand and grasp the magnet assembly with the other hand. Lift the magnet assembly off the rear polepiece by tilting it to one side. NOTE: The rear polepiece can be cleaned directly on the HV connector by dusting it off with dry nitrogen or clean compressed air.
  • Page 115 4. Clean and lubricate the O-ring and the bearing surface on the outside of the ion-source assembly. Dust parts off using clean compressed air or nitrogen gas to remove any dust, lint or metallic whiskers that are the primary cause of shorting in the gun. Squeeze and push up from both sides with thumb and index finger to remove the O-ring from the ion source.
  • Page 116 Align ion source so that the moulded assembly is aligned to the screw hole in the housing. 8. Insert the screw into the molded connector assembly and tighten. This assembly should be aligned squarely with the Chamber. 9. Test the gun before inserting into the Work Chamber. Use an ohmmeter and test the gun to ensure that a short does not exist across the HV contacts.

  • Page 117: Figure 5-10 Focus Electrode Assembly

    Rotate the electrode counter clock-wise using a spanner wrench. 5. Clean the ground electrode if necessary. 6. Remove the focus electrode insulator from the housing. Gently pry the insulator from the housing. Be careful not to damage the flex cable or the gasket material. 7.

  • Page 118: Removing The Cover

    5.7. Removing the Cover To remove the cover: 1. Shut down the power to the PIPS II. Unplug the power cable from the power entry module. 2. Remove the 4 M3 screws from the outside edges of the rear panel. 3.

  • Page 119: Replacing The Mdp Oil Cartridge

    5.8. Replacing the MDP Oil Cartridge The MDP requires the oil cartridge to be changed at least once a year. However, if a high- pitched squeal begins, the oil cartridge should be changed immediately. The oil cartridge consists of a stack of felt discs saturated with oil and is replaced as a unit.

  • Page 120: Diaphragm Pump Maintenance

    Figure 5-12 Molecular drag pump removal. The oil cartridge can be replaced upon removal of the MDP from the cabinet. 5.8.2. To Replace the Oil Cartridge Follow the directions in the Pfeiffer HiPace 80 TurboDrag Pump Operating Instructions manual (shipped with PIPS II). After the MDP is reconnected to the PIPS, and the system is powered on, the guns must be purged for 4-5 hours before milling samples.

  • Page 121: Cleaning The Work Chamber

    Wait at least 10 min to allow the MDP to come to a complete stop. Then vent the Work Chamber by opening the Vent valve. 2. Unplug the power cord from the power entry module (rear panel). 3. Unplug the two electrical connectors on the DP. 4.

  • Page 122: Cleaning The Shutter Piston

    5.11. Cleaning the Shutter Piston The shutter piston is controlled by two valves, SI and SO. The SI valve is on and the SO valve is off when the shutter is closed (covering the window). The SI valve is off and the SO valve is on when the shutter is open. Sputtered material can build up on the shutter piston shaft, and need to be cleaned off.

  • Page 123: Motor Drive Replacement

    Figure 5-13 Shutter servicing. 5.12. Motor Drive Replacement The specimen motor drive is located under the specimen chamber. It does not need to be replaced unless it fails, which typically does not happen during the lifetime of the instrument. It can usually be replaced without removing the stage assembly, but if this proves too difficult the Whisperlok assembly can be removed from the work chamber prior to motor replacement.

  • Page 124: Replacing The Stage Encoder

    7. Tighten the set screws to the timing pulley. 8. Plug the motor into the motor drive cable. 9. Install the cover. 10. Turn on power to the PIPS II. Figure 5-14 Motor Drive Removal. 5.13. Replacing the Stage Encoder The stage encoder is located under the specimen chamber.
  • Page 125 Mark the fiber cable e with a piec ce of tape s so you can r reinstall it a at the xact same pl lace. Loosen th he 2 set screw ws that con nnect the enc coder to the e drive shaft Loosen th he 2 screws o...

  • Page 126: Replacing The Sample Mount

    Figure 5-15 Replacing the encoder. 5.14. Replacing the Sample Mount The Sample Mount is located under at the top of the rotate shaft. It does not need to be replaced unless it fails or is damaged, which typically does not happen during the lifetime of the instrument.

  • Page 127: Figure 5-16 Sample Mount Removal

    5. Remove the Specimen Mount. While holding the rotate shaft, rotate the Specimen Mount counter-clockwise until it is completely free of the rotate shaft. NOTE: If the specimen mount only rotates but does not unscrew, remove the cover from the PIPS II cabinet and manually restrain the timing pulley at the bottom of the Whisperlok to prevent it from rotating while the specimen mount is being unscrewed.

  • Page 128: Replacing The Bellows Assembly

    5.15 placing t the Bello ows Ass sembly he Bellows A Assembly is part of the W Whisperlok assembly . It does not t need be replaced d unless it fai ils. .15.1. To Remo ove the Wh hisperlok Assembly Raise the Stage and vent the ai...

  • Page 129: Figure 5-17 Whisperlok Assembly

    c) Gently lower the Whisperlok assembly and remove it, being careful not to disturb the vacuum and pneumatic tubing. Figure 5-17 Whisperlok assembly. 5.15.2. To Dis-assemble the Whisperlok Assembly 1. Remove the 3 screws in the top of the assembly. 2.
  • Page 130 6. Remove the window shield from the rotate shaft, if it did not remain with the specimen Mount. 7. Remove the 4 screws and the clamping plate at the bottom of the Whisperlok assembly. 8. Remove the rotate shaft from the bellows assembly. This can be accomplished by pulling on the large bearing at the bottom of the assembly, or by pushing slightly on the top of the rotate shaft.

  • Page 131: Cleaning The Rotate-Shaft Quad-Seal

    12. Install the Whisperlok assembly onto the work chamber. The motor assembly must be to the right when viewed from the front of the system. 13. Replace the Top Cover plate and Viewing Port. 14. Close the Vent valve and turn on the power. 15.

  • Page 132: Figure 5-18 Checking The Specimen Height

    the specime en is not held d at the euce entric height t of the guns s, the ellipses s will ove toward or away from m the guns a as the tilt is a adjusted. Th his will resul lt in a wer milling rate from be...

  • Page 133: Figure 5-19 Correct Beam Angle Setting

    gure 5-19 Co orrect beam angle setting Mount a 3 mm diam meter glass s screen onto o a glue-typ pe Duo- Pos st. Be ure the scree en is flush a against the r recessed are ea of the po st.

  • Page 134: Replacing The Gas Manifold

    djust the he eight until th he centers o of the beam ms are halfw ay between their arting positio on and the c enter of the glass screen Cautio on: We recom mmend that you turn of ff the power to the system m and unplu the pow...

  • Page 135: Figure 5-21 Gas Manifold Assembly

    Figure 5-21 Gas manifold assembly. 5.18.1. Removing the Gas Manifold 1. Raise the Stage and vent the airlock chamber. This allows the airlock cover to be removed after system power is off. 2. Shut down the power to the PIPS II. Wait at least 10 min to allow the MDP to come to a complete stop.
  • Page 136 Disconnec ct the tubin ng between the gas ma anifold and the Ar and d Alt nputs. This s hould be don ne at the cab binet feed thr hrough side. Disconnec ct the tubi ing betwee en the gas manifold and Vac-v valve...

  • Page 137: Replacing A Mass Flow Controller (Mfc)

    5.19. Replacing a Mass Flow Controller (MFC) This is a difficult operation due to space limitations. Gatan recommends that the MFC be replaced without removing the Gas Manifold, because this method is less likely to cause a problem with any of the tubing or fittings. If this cannot be accomplished, then remove the Gas Manifold prior to replacing the MFC.

  • Page 138: Figure 5-22 Mfc Removal. Unplugging The Power/Signal Cable From The

    8. Clean and inspect the 2 O-rings. Replace the O-rings in the pockets in the Gas Manifold. 9. Install the replacement MFC. Note that there is a pin in the top of the Gas Manifold that mates to a hole in the MFC. 10.

  • Page 139: Replacing The Touchscreen

    5.20. Replacing the Touchscreen 1. Shut down the power to the PIPS II. Unplug the power cable from the back of the system. 2. Remove the system cover. 3. Unplug the touchscreen flex cable from the touchscreen adapter PCA. Using a small screwdriver, lift the back of the black hinged clamp up and toward the front of the system.

  • Page 140: Figure 5-24 Touch Display Assembly

    Figure 5-24 Touch display assembly. Figure 5-25 Connections for touch display. Left image shows cable connections made prior to attaching the touch display. Right image shows the clamp for the touchscreen cable in the open position. After the touchscreen cable is inserted into this connector, press down on this clamp.

  • Page 141: Replacing The High Voltage Power Supply

    5.21 placing t the High h Voltage e Power r Supply Shut dow wn the powe er to the PIP PS II. Unpl lug the powe er cable from m the ack of the sy stem. Remove th he system c over.

  • Page 142: Replacing The Control Pcas (Cpu, I/O)

    5.22. Replacing the Control PCAs (CPU, I/O) 1. Shut down the power to the PIPS II. Unplug the power cable from the back of the system. 2. Remove the system cover. 3. Remove the cover of the electronics enclosure. 4. Unplug the gun high voltage cables, if necessary, from the high voltage power supply.

  • Page 143: Figure 5-28 Pca Assembly

    11. Remove the 4 screws that secure the I/O PCA. 12. Remove the nuts from the CC Gauge and Dewar connectors on the back of the system. 13. Remove the jack screws from the RS-232 connector on the back of the system.

  • Page 144: Figure 5-29 Pca Connector Locations And Associated Cable Part Numbers

    gure 5-29 PC CA connecto o r locations a a nd associate e d cable part t numbers. PIPS II O Owners Man nual and Use ers Guide...

  • Page 145: List Of O-Rings

    5.23. List of O-Rings Description Size Quantity Location Diaphragm Pump Assembly DP fitting M4.5x1.4mm DP fitting Chamber Assembly Airlock window Airlock window Airlock/chamber top Chamber top Q4116 airlock Shutter piston Shutter piston Front plate Front plate Shutter guide Beam Stop Beam stop Whisperlok Assembly 004 GLV...

  • Page 146: List Of Cables

    5.24. List of Cables Description Part # Connector # Whisperlok motor 695.04200 Power 695.04201 Whisperlok encoder 695.04202 Cold Cathode gauge 695.04203 Cold Stage dewar 695.04204 DP, internal 695.04205 DP, external 695.04206 Back panel Valves, manifold 695.04207 Vacuum valve 695.04208 Gun motor, internal 695.04210 J6(left), J7(right) HVPS, communications...

  • Page 147: Trouble Shooting

    Trouble Shooting Symptom Problem cause Solution MDP not up to speed. Chamber pressure display 0 on Turn off gas flow. Verify MDP speed Manual vent valve open. Milling screen. (Maintenance > Vacuum) . Vacuum leak. MDP failure. DP failure. Clean viewport o-rings. Viewing port or window not seated Piston will not lower.

  • Page 148: Pips Ii Options

    PIPS II Options 7.1. Cold Stage Option Certain PIPS II models include a cold stage. This option must be installed at the factory on a new PIPS II. The PIPS II Cold Stage upgrade components replace existing PIPS II components as follows: ...

  • Page 149: Figure 7-1 System With Cold Stage Installed

    Figure 7-1 System with Cold Stage installed. 7.1.1. Operation Fill the dewar with liquid nitrogen prior to loading a sample into the PIPS II. Once the stage is cold, you may insert and remove samples from the airlock as required. It is important when removing a cold sample that you allow enough time (at least 20 minutes) for the sample to warm up after raising the stage and before venting the Air- lock.
  • Page 150 Do not overfill; the starting level should be just below the bottom of the dewar neck. 3. The liquid nitrogen will boil off in a few minutes. Continue refilling the dewar for about ten minutes to replenish the liquid nitrogen. NOTE: It may take more than one “top off”...
  • Page 151 11. Use the hex key and move the point of interest to the center of rotation. 12. Repeat 1-5, for fine adjustments. 13. After point of interest is centered, go back to Settings - Heaters page and disable the cold stage heater. 14.

  • Page 152: Figure 7-2 Settings Page

    emperature e Control he cold stage e is controlle ed by the GU UI (Settings > Heaters). gure 7-2 Sett tings Page. old Finger r reading: D Displays the temperature e of the cold finger old stage heater: Tu urns the heat ter on and of ff.
  • Page 153  Gatan reco ommends m method 1 for r removing s samples. Me ethod 2 doe es not result in a active pumpi...

  • Page 154: Figure 7-3 Sample And Cold Conductor Temperature Over Time

    With the ion guns on at 5 kV, 5 degrees, and dual beam modulation a bulk sample (e.g., Ta) mounted in a clamp-type DuoPost will increase in temperature by about 25-50 °C. The temperature of a thin specimen will increase more, depending on the thermal conductivity of the sample, the thickness of the sample, and the power density of the ion beam.

  • Page 155: Figure 7-4 Sample And Cold Conductor Temperature Over Time

    They are expected to last several years, but should be inspected every six months. The Cold Conductor Assembly brushes can be replaced only with Gatan provided parts, which are designed to meet specific requirements of thermal conductivity, electrical conductivity, and lubricity in vacuum.
  • Page 156 b. No ote that the ere is a me echanical st top which p prevents th he brushes from earing too t thin. c. If the two sid des of the mechanical l stop are i n contact w with each o other, hen the cold conductor...
  • Page 157 Loosen th he M2 screw w that hold ds the cold conductor assembly to o the ellows assem mbly. Carefully lift the cold d conductor r assembly o out of the ch hamber, ma aking ure not to da amage the b brushes.

  • Page 158: Figure 7-5 Interior Chamber Showing The Cold Conductor With New Brushes. 156 Figure 7-6 Open Chamber Showing Access To Cold Stage

    gure 7-6 Ope en chamber showing acce ess to cold st tage. eplacing th he Dewar A Assembly o Remove the Dewar r Assembly Raise the Stage and vent the ai irlock cham mber. This a allows the ai irlock cover to be e removed a after system p...

  • Page 159: Figure 7-7. Dewar Assembly Installed In Manifold

    Figure 7-7. Dewar Assembly installed in manifold. 6. Remove the Dewar assembly. a) Unplug the cable from the back of the dewar. b) Remove the 4 M3 screws that secure the dewar to the manifold. See Figure 7-7. c) Lift the dewar assembly upward until it is free from the manifold. Then tilt the top of the dewar forward and move the dewar backward so that the Copper bar clears the manifold.

  • Page 160: End-Point Detection

    7.2. End-point Detection The PIPS II may be equipped with a Reflection Illuminator, a stereo light microscope or a digital camera, and a Transmission Illuminator. Employing the latter two, one can use the interference-fringes technique to monitor specimen thickness of semiconductors and insulators to aid in end-point detection.

  • Page 161: Figure 7-8 Autoterminator Sensor Top View

    NOTE: Maximum sensitivity setting and highest light intensity should be used for metals. Lower sensitivities and lower light levels may be preferred for semiconductors and ceramics. For best results, make sure the specimen Viewing Port is clean before using the Autoterminator. The Autoterminator is mounted on the Airlock cover and plugs into a socket located to the right of the Pumping Manifold.

  • Page 162: Figure 7-9 Autoterminator Shown In Working Position

    Figure 7-9 Autoterminator shown in working position. 7.2.2. Installation and Checkout of the Autoterminator 1. The PIPS II must be powered on, under vacuum, and with a specimen post (but no specimen) in place. 2. Set up the Autoterminator. Place the Autoterminator onto the Airlock cover.

  • Page 163: Digital Zoom Microscope Option

    .2.3. Oper ration he Autoterm minator can b be configure ed using fro om the Setti ings page o on the gure 7-10 Au utoterminato or page. eading: Di splays the la ast signal rea ad by the aut toterminator ensitivity: This contro ol enables th...

  • Page 164: Figure 7-11 System With Digital Zoom Microscope

     Digital camera, with USB cable to the imaging PC and trigger cable to the PIPS II.  Imaging PC. This PC has an Ethernet cable connected to the PIPS II, and a USB cable connected to the camera.  DigitalMicrograph software installed on the imaging PC which controls the camera and certain functions in PIPS II.

  • Page 165: Figure 7-12 Dm Environment

    ocument win ndows. You cannot open n, save, or p print palettes s. Palettes ca an be cognized by y their small title bar. ext documen nt windows contain tex xt. Text docu ument wind dows do not hold ny other gra aphical obje cts.
  • Page 166 Key areas Menu bar At the top is the menu bar containing the File, Edit, Display, Process, Analysis, Window, Microscope and Help menus. In these menus are all the controls for operating the application. Tool bar Under the menu bar is a toolbar. Floating Windows On the left hand side several Floating Windows are displayed.

  • Page 167: Figure 7-13 Dm Open Image Series

    viewing all the images taken during a Record Milling session. The images may be conveniently viewed in series with the slice player. Figure 7-13 DM open image series. Using Image Windows DigitalMicrograph provides several ways to customize an image window. Among other things, you can magnify your view of the document, change the page size, and move the image and page around within the window.

  • Page 168: Figure 7-14 Dm Standard Tools

    o change p printed pag ge size or o orientation ou can chang ge the size o or orientation n of the page e. Select Pag ge Setup from m the ile menu. E Enter the d esired size and orient tation in th e dialog th hat is...

  • Page 169: Figure 7-15 Dm Main Menu

    Gatan file e format is th he only form mat that can save all info ormation pro operly all times, a...
  • Page 170 as separate objects. So you are given a choice to burn the annotation into the image data, or to ignore the annotation. Touch the OK button. Now DigitalMicrograph gives you a choice to convert to 16 bit unsigned so that you can more readily interpret the data in Adobe PhotoShop.
  • Page 171 "Image Series.2." Batch Convert Using the Batch Convert... menu item images saved in Gatan Format can be converted to different data formats. This procedure will always save the data or display at the resolution of the source data, and it will include the annotations in the result.
  • Page 172 Using Floating Windows Floating windows are used to display information about and directly manipulate images and other objects within image documents. You can arrange floating windows in a configuration that most suits your requirements. You can group sets of the floating windows together and you can "roll-up"...
  • Page 173 To roll up or roll down a floating window DigitalMicrograph allows you to roll up and roll down floating windows to save screen space and get unused controls out of your way. Click on the Twist Down control to roll up or roll down a floating window. To close a floating window You can close floating palettes completely.
  • Page 174 DigitalMicrograph maps an image's original data values to a color or gray- scale value through a sequence of steps. 1. Determine the contrast limits of the image's data DigitalMicrograph uses two parameters, the low- and high-contrast limits, to map the image's original data into a range suitable for display of the image. Pixels in the original image below the low-contrast limit are treated as if they were at the low-contrast limit and those above the high-contrast limit are treated as it they were at the high-contrast limit.

  • Page 175: Figure 7-16 Dm Histogram Window

    gure 7-16 DM M Histogram m Window. sing Image e Regions of Interest Many times, i n order to pr rocess or an nalyze an ima age, you wil ll need to se lect a gion of inter rest (ROI) o on an image.
  • Page 176 Line of interest You can make a line of interest on an image displayed with the Raster or RGB image display type using the Line ROI tool to make a line of interest. Making a line of interest will erase all previous regions of interests. To extend an existing set of regions of interest, hold down the Shift key while making the new region of interest.
  • Page 177 The region of interest will appear as a red-dashed line. To adjust a region of interest on an image with a Raster or RGB display Regions of interest are just additional objects attached to images. You can move them around as desired. You can also select, deselect, copy, drag, and delete them.

  • Page 178: Figure 7-18 Dm Slice Tool

    Using the Slice Tool Some applications, require the use of a three-dimensional image, rather than the standard two-dimensional image. DigitalMicrograph gives you a control to choose which layer (slice) of the three-dimensional dataset to display as the image. Select Floating Windows:Slice under the Window menu. This will open the Slice floating window.

  • Page 179: Figure 7-20 Dm Video Compression

    It is also possible to save a .avi file, by depressing the Disk button on this window. Brows to the location you like to save this file and touch Save, a dialog box will show up as shown below. Select Full frame (uncompressed) and touch ok.

  • Page 180: Figure 7-22 Dm Ion Polish Camera Control Window

    The shutter will be opened and the illuminators turned on just prior to image capture. Gatan recommends using this mode during milling, and using Live View for setting exposure levels. PIPS II Owners Manual and Users Guide...

  • Page 181: Figure 7-23 Dm Pips Ii Record Options Window

    The frequency at which you want these images to be saved can be set using the toolbox menu. Clicking the toolbox brings up the PIPS Record Options window: Figure 7-23 DM PIPS II record options window. Defines the size of the stack that is displayed. This is limited History buffer size: by the amount of available memory on the computer.

  • Page 182: Figure 7-24 Camera Page

    OTE: Recor rding can be e stopped at a any time by selecting Of ve View his is used t o watch the milling pro ocess live. T The shutter i s opened an nd the luminators ar re turned on n when this m mode is selec cted.

  • Page 183: Motorized Gun Tilt

    7.4. Motorized Gun Tilt Certain PIPS II models include motorized guns. In these models, the gun tilt angles are set by the GUI or by a recipe. This option must be installed at the factory on a new PIPS II. Figure 7-25 PIPS II with motorized gun tilt.
  • Page 184 gure 7-26 Gu un tilt setting .4.2. Main tenance ach motorize ed gun assem mbly include es the follow wing: large g gear connect ted to e gun knob b by 3 pins s, motor con nnected to a small gea ar, potentiom meter onnected to a...
  • Page 185 9. Calibrate the motorized gun assembly. Figure 7-27 Motorized gun assemblies. Calibrating the Motorized Gun Assembly Motorized gun assemblies are calibrated at the factory and normally do not require re-calibration. In the event that a motorized gun assembly is replaced, it will need to be calibrated.
  • Page 186 Enter the d dac readings s for the appr ropriate setti ings. 0. Touch Mai intenance > G Guns > Gun Tilt 1. Verify that t both guns c can be set wit thin the full range of -10 to +10 deg. gure 7-28 G Gun tilt maint tenance scree...

  • Page 187: Gatan Hardware Product Warranty

    Inc. (“Gatan”) circuit board, a PO will also be required. A credit warrants to the purchaser (“Customer”) that products against this PO will be issued by Gatan upon receipt components manufactured Gatan of the Product returned in accordance with the RGA (collectively, “Products”) shall be free of defects in...
  • Page 188 PRODUC OBSOLE ESCENCE. Upon expir ration of the W Warranty Period d, Gatan will p rovide Operation othe r than in acc cordance with servi ice support for r Gatan manu factured Produ ucts at...
  • Page 189 SOFTWARE WARRANTY. set forth herein) single user license to use and install Gatan warrants for a period of one (1) year from the the Software, as appropriate, on a single computer date of shipment (“Warranty Period”) that the that supports a single microscope. A separate license...
  • Page 190 Agreement t are terminate ed, and the Sof ftware, and any copies of t the Software, s shall be return ed to Gatan or destroyed. MISCELLANE OUS. The law ws of the state of Californ nia (excluding conflict of la...

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