Gatan Solarus 950 Manuals

Manuals and User Guides for Gatan Solarus 950. We have 1 Gatan Solarus 950 manual available for free PDF download: Owner's Manual And User's Manual

Gatan Solarus 950 Owner's Manual And User's Manual

Gatan Solarus 950 Owner's Manual And User's Manual (61 pages)

Advanced Plasma System

Brand: Gatan | Category: Ultrasonic Jewelry Cleaner | Size: 2.79 MB

Table of Contents

Table of Contents
7
Gatan Advanced Plasma System, Model Model 950
12
Features
13
Plasma Recipes
13
Hardware
14
Electronics
14
Touch Screen User Interface
15
Description and Specifications
16
Gatan Advanced Plasma System, Front-Accessible Components
16
Physical Specifications
17
Gatan Advanced Plasma System, Rear Panel
17
Gas Requirements
18
Safety and Serviceability
19
Cautionary Notes
19
Servicing
19
Installation Recommendations for Gatan Customers-Flammable and Oxidizing Gases
20
Installation and Setup
22
Unpacking and Inspection
22
Connections
22
Solarus 950 Rear Panel Gas Connection Detail
22
Gas Line to Filter Connection
23
Cleaning Configurations
24
Two-Tank Cleaning Configuration
24
Configuring Gas 3
25
Three-Tank Cleaning Configuration
25
Purging the Gas Lines
26
Two-Tank Purging Configuration
27
Connecting Exhaust Lines
28
Connecting Vent Gas Line
28
Testing with Air as a Plasma Gas
29
Air Testing Configuration
30
Loading Samples in the Solarus 950
32
Loading TEM Samples
32
Loading SEM Samples
32
Loading TEM Holder, Holder Adapter, and Plug
32
TEM Holder and Adapter in Place
32
Top-Loading SEM Chamber, Side View
33
Sample Loaded in SEM Chamber
33
Removing the Ion Shield
34
TEM Holder-Adapter with Ion Shield Removed
34
Operating the Gatan Advanced Plasma System
35
Theory of Operation
35
Operating Instructions
36
System in Idle State
37
System Initiating Vacuum State
39
System Introducing Gases
40
Applying RF Power to the Unit
40
Cleaning in Process
41
Plasma Cleaning Complete
42
Venting the Chamber
43
System Ready for Next Sample
43
Creating Custom Recipes
44
Recipe Options
46
Maintenance
48
Access to Pirani Gauge Calibration Button
55
Maintenance Report
56
Example Maintenance Report
56
Troubleshooting
57
Spares and Consumables
58
Battery Considerations
58
Battery Location
59

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