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Plasma Dry Cleaner
Instruction Manual
Thank you for your selecting Yamato Scientific's "plasma dry
cleaner".
To ensure proper handling of the machine, please read this
instruction manual and the warranty thoroughly. After
reading the manual, please keep it together with the warranty
in a safe place where it is available any time necessary.
WARNING: Prior to using the product, carefully read all
warning
instructions
understand them fully.
YAMATO SCIENTIFIC CO., LTD.
PDC610
First version
contained
in
This paper has been printed on recycled paper.
the manual
and
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Summary of Contents for Yamato PDC610
- Page 1 Plasma Dry Cleaner PDC610 Instruction Manual First version Thank you for your selecting Yamato Scientific’s “plasma dry cleaner”. To ensure proper handling of the machine, please read this instruction manual and the warranty thoroughly. After reading the manual, please keep it together with the warranty in a safe place where it is available any time necessary.
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Page 2: Table Of Contents
Contents 1. Safety precautions ............... 1 ................1 ESCRIPTION OF ARNING YMBOLS ....................2 IST OF YMBOLS ....................3 ARNING AND AUTION 2. Before operating the unit ............ 4 ................4 RECAUTIONS FOR NSTALLATION 3. MAIN APPLICATIONS ............5 ......................5 PPLICATIONS 4. - Page 3 12. SPECIFICATIONS ............. 36 SPECIFICATIONS ....................36 ...................... 36 CCESSORY LIST 13.WIRING DIAGRAM ............. 37 14.Piping Diagram ..............39 15.Parts List ................40 16. DISPOSAL ................. 41 ..................41 RECAUTIONS FOR ISPOSAL 17. LIST OF HAZARDOUS SUBSTANCES ......42...
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Page 4: Safety Precautions
1. Safety precautions Description of Warning Symbols About pictograms A variety of pictograms are indicated in this operating instruction and on products for safe operation. Possible results from improper operation ignoring them are as follows. Be sure to fully understand the descriptions below before proceeding to the text. -
Page 5: A List Of Symbols
1. Safety precautions A List of Symbols Warning Danger!: High Danger!: High Danger!: Moving Danger!: Hazard General warnings voltage temperature part of explosion Caution General cautions Electrical shock! Burning! Prohibitions Do not General bans Do not touch disassemble Compulsions General Connect ground Pull out the power Periodical... -
Page 6: Warning And Caution
1. Safety precautions Warning and Caution Warning 1. Never use the machine in atmosphere containing ignitable and explosive gases. Never use the machine in atmosphere containing ignitable and explosive gases. The ma- chine is not of explosion-proof construction. Turning on and off the switches and operating the machine will produce sparks, which may become a cause of a fire or explosion. -
Page 7: Before Operating The Unit
2. Before operating the unit Precautions for Installation Warning 1. Be sure to connect the ground wire. ・ To prevent electric shock accidents due to fault current, be sure to connect the ground wire to the ground terminal on the building side. This machine falls in the category of Class D Ground Work. -
Page 8: Main Applications
3. MAIN APPLICATIONS Applications Applications The unit is used to plasma-process work pieces to modify their surfaces or to clean them. The unit has two modes (RIE and DP) to support various applications. Application of the RIE mode This mode is used to clean objects whose soil contains inorganic matters as well as organic ones, or to modify surfaces. -
Page 9: Components And Functions
4. COMPONENTS AND FUNCTIONS Main Unit Front of the machine ① ⑦-1 ⑦-2 ③ ② ⑦-1 ： Use this during Test button periodic inspections to check earth leakage breaker functioning properly. ⑦-2 ： When leakage occurs, ④ ⑥ ⑤ ⑦ Leakage this button pops out. -
Page 10: Back Of The Main Unit
4. COMPONENTS AND FUNCTIONS Back of the Main Unit Back of the main unit ⑮ ⑪ ⑬ ⑭ ⑫ ⑧ ⑨ ⑩ ⑧ Connector for power cord ： Connect this to the distribution panel on the building side. (A 3-m cord is attached for connection.) ⑨... -
Page 11: Installation Method
5. INSTALLATION METHOD Required Equipment / Methods to Connect Cables and Tubes 1) Gas piping Gas piping up to the machine must be provided by the user. Connect piping to the gas supply ports on the back of the machine and supply gases at the specified pressures. Use the included 1/4-inch flare-less joints (attached in the coupling portion on rear side) the to connect the machine and the piping and tighten them as described below. -
Page 12: Installing Electrodes
6. INSTALLING ELECTRODES List of electrode related accessories ① Lower electrode x 1 ② Lower electrode fixing clamp ③ Upper electrode x 1 ④ Upper electrode fixing clamp ⑤ Shelf board electrode x 2 ⑥ Feed through connecting plate （used for three-stage configuration） ⑦... -
Page 13: Internal Structure And Of The Chamber And Parts Names
6. INSTALLING ELECTRODES Internal structure and of the chamber and parts names ③ Shelf board electrode slide pins 8 ④ Upper electrode slide rail 2 points pins included ① Feed through 2 points ② Shelf pegs 4 points ① Feed through ：... -
Page 14: When One-Stage Electrode Is Used
6. INSTALLING ELECTRODES When one-stage electrode is used Installing electrodes ⅰ) Insert the upper electrode into the slide rail. ⅱ) Install the lower electrode onto the bottom of the chamber. ≪RIE mode≫ Installation position of lower electrode fixing clamp Lower electrode fixing clamp ※... -
Page 15: When 2-Stage Electrode Is Used（Installation Of Electrodes
6. INSTALLING ELECTRODES When 2-stage electrode is used（installation of electrodes） ⅰ) Insert the upper electrode into the slide rail. ⅱ) Install the lower electrode onto the bottom of the chamber. ⅲ) Install shelf board electrode slide pins into the screw holes in the middle of each of shelf pegs. (CAP bolts M4×10) （Right/left Four points in total）... -
Page 16: When 2-Stage Electrode Is Used（Rie Mode
6. INSTALLING ELECTRODES When 2-stage electrode is used（RIE mode） ① Connect the feed through and the lower electrode with the lower electrode fixing clamp.（Flat head screws M4×5, truss screws M4×6） Installation position of lower electrode fixing clamp Lower electrode fixing clamp ②... -
Page 17: When 2-Stage Electrode Is Used（Dp Mode
6. INSTALLING ELECTRODES When 2-stage electrode is used（DP mode） ① Connect the feed through and the upper electrode with the upper electrode fixing clamp. (Truss screws M4×6) Installation position of upper electrode fixing clamp Upper electrode fixing clamp ② Install the DP fixing clamp for shelf board electrode at the point of the shelf board electrode shown in the diagram below. -
Page 18: When 3-Stage Electrode Is Used（Installation Of Electrodes
6. INSTALLING ELECTRODES When 3-stage electrode is used（installation of electrodes） ⅰ) Insert the upper electrode into the slide rail. ⅱ) Install the lower electrode onto the bottom of the chamber. ⅲ) Install shelf board electrode slide pins into upper and lower screw holes on each of shelf pegs.（CAP bolts M4×10）... -
Page 19: When 3-Stage Electrode Is Used（Rie Mode
6. INSTALLING ELECTRODES When 3-stage electrode is used（RIE mode） ≪RIE mode≫ ① Install the lower electrode fixing clamp to the lower electrode. (Flat head screws M4×5) ② Tighten the feed through connecting plate and the lower electrode fixing clamp altogether to the feed through. -
Page 20: When 3-Stage Electrode Is Used（Dp Mode
6. INSTALLING ELECTRODES When 3-stage electrode is used（DP mode） ≪DP mode≫ ① Install the upper electrode fixing clamp to the upper electrode. (Truss screws M4×6) ② Tighten the feed through connecting plate and the upper electrode fixing clamp altogether to the feed through.（Truss screws M4×8）... -
Page 21: Running Procedure
7. RUNNING PROCEDURE Operation in Auto Run The operation and the setting items in the auto run are outlined below. ① Turn on the breaker to power on the machine. ① ② When the operation power is turned on, the Breaker operation panel and the pump are turned on to set the machine ready to run. -
Page 22: Running Procedure
7. RUNNING PROCEDURE Running Procedure 1) How to start the machine Start the machine by the following procedure: ① Supply 3-phase, 200 -230V VAC power to the machine. First switch the power terminals Make sure that the switches on the control assembly and the ELB are OFF and securely connect the power cord to a power supply meeting the specified voltage and current. - Page 23 ④ To begin processing, follow the procedure in (1). 7. RUNNING PROCEDURE Running Procedure 3）Machine stopping procedure Stop the machine by the following procedure: ⑤ Set the machine in the standby state. ⑥ Turn off the operation power. ⑦ Turn off the circuit breaker. The power may be turned off in any state.
- Page 24 ③ After the corrective actions, press the RESET key. The vacuum pump will run and the process screen will appear. ④ Follow the normal procedure. 6）Emergency stop Use the emergency stop switch to stop the machine immediately when an emergency situation occurs.
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Page 25: Touch Panel Operations
7. RUNNING PROCEDURE Touch Panel Operations 1）Configuration of screens The operating screens are configured as follows. The arrow → indicates the lower-level screens. ①Initial Screen （1） Initial screen This screen will appear automatically when the power is turned on. While this screen is being shown, the controller performs initial setting. - Page 26 7. RUNNING PROCEDURE Touch Panel Operations （2） SELECT Screen The SELECT screen is used to display the SETUP screen for the START and PROCESS SETUP. ① AUTO （MEAS screen） Displays selected recipe conditions. ②When you enter the secret number in the SECRET NO INQUIRY screen, ①...
- Page 27 7. RUNNING PROCEDURE Touch Panel Operations （4） ALARM screen If an alarm occurs, the following screen will show the contents of the alarm.. ① Shows the cause of the alarm. ② When this key is pressed after removing the cause of the ①...
- Page 28 7. RUNNING PROCEDURE Touch Panel Operation （6） ALARM HISTORY ① Returns to the ALARM screen. ② Clears alarm history. （7） RECIPE SELECT Touching the RECIPE. No displays the ten keyboard. After entering a value using １～１０ numbers, press the READ key. The data will not loaded unless you press the READ key.
- Page 29 7. RUNNING PROCEDURE Touch Panel Operation （8）Alarm condition setting screen ① Using the numeric keys, enter a value to a place where the cursor is Set conditions to issue alarms on this screen. blinking. ② After entering a value, press the ENT key.
- Page 30 7. RUNNING PROCEDURE Touch Panel Operation （10）AUTO screen This screen shows the time that has elapsed after the start of processing, gas flow rates, RF power, degree of vacuum, etc. Use this screen to check these conditions during processing. ① Returns to the SELECT screen. ②...
- Page 31 7. RUNNING PROCEDURE Touch Panel Operation （12） Leak test Use this screen to check leak of the vacuum system and verify the performance of the vacuum pump during the periodic maintenance, etc. ① Shows the time to reach the required vacuum.
- Page 32 7. RUNNING PROCEDURE Touch Panel Operation (13) SECRET NO INQUIRY This is a screen for inquiry of the secret number. After entering secret number, press the ENT key. (14) SECRET NO REGISTER The screen is used to register a secret number. Enter four-digit secret...
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Page 33: Precautions For Handling
Yamato Scientific sales office for inspection. If the machine is left as it is, a fire or electric shock may occur. Never try to repair the machine by yourself. It is a very dangerous practice. -
Page 34: Maintenance
9. MAINTENANCE Daily Inspection Conduct the daily inspection at least once a day according to the following table. Daily Inspection Table Place Item Criteria Result Remarks Cooling fan Noise Smooth rotation with no abnormal noise. Vibration No abnormal vibration. Odor No offensive odor. -
Page 35: Periodic Inspection
◆ The recommended intervals of parts replacement as a result of the inspections are for reference. Parts may be replaced earlier depending on the frequency of use. ◆ If you have any questions, please contact the dealer or Yamato Scientific. -
Page 36: Alarms And Corrective Actions
(Even if one process is finished temperatur plasma radiation. within the limit time, if operation intervals are e high short, the limit value may be exceeded.) If any problem not listed above has occurred, please contact the dealer or Yamato Scientific. -
Page 37: Operating Procedures For Auto Tuning Adjusting Switch
10. WHEN ALARM OCCURS Operating Procedures for Auto Tuning Adjusting Switch This operation is used when proper matching cannot be obtained or load in the chamber will not go into the matching range after switch the plasma mode （ＲＩＥ⇔Ｄ Ｐ）. High frequency wave output must be matched with load. -
Page 38: After-Sale Service And Warranty
When the service staff arrives at your factory, please present the warranty. Warranty (Delivered separately) ● The warranty is delivered by the dealer or Yamato Scientific. Please confirm that the name of the dealer, date of purchase and other information are described correctly and keep the warranty in a safe place. -
Page 39: Specifications
Ar gas Mass flow controller 100 SCCM 1/4-inch flare-less joint Reaction gas gas Mass flow controller 100 SC 1/4-inch flare-less joint Accessory list Part name Part name Main unit(PDC610) Lower electrode 1SET Operation manual（plain paper） 1 copy Upper electrode 1SET Operation manual（dust-free paper）... -
Page 40: Wiring Diagram
13.WIRING DIAGRAM... - Page 41 13. WIRING DIAGRAM...
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Page 42: Piping Diagram
14.Piping Diagram Vacuum pump TOUCH VP 1 SEQUENCER PANEL DOOR OPEN SENSOR COOLING FAN OIL MIST FILTER FAN1 MS 1 CAPACITANCE MANOMETER VACUUM SW THERMOSTAT CHAMBER FILTER FILTER MATCHING RF POWER MASS FLOW MASS FLOW CONTROLLER CONTROLLER FC 2 FC 1 Ｖ... -
Page 43: Parts List
15.Parts List Part name Parts code Material Manufacturer Fixed electrode（RIE） LT00028332 Aluminum YAMATO Fixed electrode LT00028334 Ceramics YAMATO insulating plate (RIE) Fixed electrode（DP） LT00028331 Aluminum YAMATO Fixed electrode LT00028333 Ceramics YAMATO insulating plate (DP) Shelf board LT00028363 Aluminum YAMATO electrode(RIE) -
Page 44: Disposal
16. DISPOSAL Precautions for Disposal For protection of the global environment: In order to protect the environment, it is requested that when disposing of the machine, break down the machine to as smallest pieces as possible and dispose of them by materials or recycle them wherever possible. -
Page 45: List Of Hazardous Substances
17. LIST OF HAZARDOUS SUBSTANCES Never use explosive substances, flammable substances and other substances containing these substances with this machine. ①Nitroglycol, nitroglycerine, nitrocellulose, and other explosive nitric esters ②Trinitrobenzen, trinitrotoluene, picric acid, and other explosive nitro compounds ③Peracetic acid, methyl ethyl ketone peroxide, benzoyl peroxide, and other organic peroxides Metal “litium”, metal “potassium”, metal “sodium”, yellow phosphorous, phosphorus sul-fide, red phosphorous, celluloid, calcium carbide (alias, carbide), lime phosphide,... - Page 46 Be sure to comply with the handling instructions described in this manual when using the machine. Yamato Scientific shall not be liable whatsoever for accidents or failures which may result from using the machine in manners not authorized in this manual.
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