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Plasma Dry Cleaner
Instruction Manual
Thank you for your selecting Yamato Scientific's
"plasma dry cleaner".
To ensure proper handling of the machine, please read
this instruction manual and the warranty thoroughly.
After reading the manual, please keep it together with
the warranty in a safe place where it is available any
time necessary.
WARNING: Prior to using the product, carefully read all
warning instructions contained in the man-
ual and understand them fully.
YAMATO SCIENTIFIC CO., LTD.
PDC510
Version 1
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Table of Contents
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Summary of Contents for Yamato PDC510
- Page 1 Plasma Dry Cleaner PDC510 Instruction Manual Version 1 Thank you for your selecting Yamato Scientific’s “plasma dry cleaner”. To ensure proper handling of the machine, please read this instruction manual and the warranty thoroughly. After reading the manual, please keep it together with the warranty in a safe place where it is available any time necessary.
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Page 3: Table Of Contents
Table of Contents 1. SAFETY PRECAUTION 1. SAFETY PRECAUTIONS S S S ........ 1. SAFETY PRECAUTION 1. SAFETY PRECAUTION ............................................................................1 1 1 1 Description of Warning Symbols ................1 A List of Symbols ...................... -
Page 4: Safety Precautions S S S
1. SAFETY PRECAUTIONS Description of Warning Symbols Warning Symbols Various warning symbols are contained in the manual and attached to the product to ensure safe use. Accidents which may result from mishandling are classified as follows. Understand them fully before reading the body. Indicates matters that may cause possible death or WARNING serious injury (Note 1). -
Page 5: A List Of Symbols
1. SAFETY PRECAUTIONS A List of Symbols WARNING General High Voltage High Temp. Drive Unit Explosion CAUTION General Electric Shock Burn PROHIBITED General No Disassembly No Contact COMPULSORY General Connect Ground Install Horizontally Unplug Power Periodic Inspection Wire... -
Page 6: Warning And Caution
1. SAFETY PRECAUTIONS Warning and Caution Warning 1. Never use the machine in atmosphere containing ignitable and explosive gases. Never use the machine in atmosphere containing ignitable and explosive gases. The ma- chine is not of explosion-proof construction. Turning on and off the switches and operating the machine will produce sparks, which may become a cause of a fire or explosion. -
Page 7: Prior To Use
2. PRIOR TO USE Precautions for Installation Warning 1. Be sure to connect the ground wire. ・ To prevent electric shock accidents due to fault current, be sure to connect the ground wire to the ground terminal on the building side. This machine falls in the category of Class D Ground Work. -
Page 8: Components And Functions
3. COMPONENTS AND FUNCTIONS Main Unit Front of the machine ① ① ① ① ② ② ② ② ③ ③ ③ ③ ④ ④ ④ ④ ⑤ ⑤ ⑤ ⑤ ⑥ ⑥ ⑥ ⑥ ① Door ：A manual door to be opened toward the front. ②... -
Page 9: Back Of The Main Unit
3. COMPONENTS AND FUNCTIONS Back of the Main Unit Back of the main unit ⑯ ⑯ ⑯ ⑯ ⑫ ⑫ ⑫ ⑫ ⑬ ⑬ ⑬ ⑬ ⑦ ⑦ ⑦ ⑦ - - - - 1 1 1 1 ⑦ ⑦ ⑦ ⑦ - - - - 2 2 2 2 ⑭... -
Page 10: Installation Method
4. INSTALLATION METHOD Required Equipment / Methods to Connect Cables and Tubes 1） Gas piping Gas piping up to the machine must be provided by the user. Connect piping to the gas supply ports on the back of the machine and supply gases at the specified pressures. Use the included 1/4-inch flare-less joints to connect the machine and the piping and tighten them as described below. -
Page 11: Processing Mode Changeover Method
4. INSTALLATION METHOD Processing Mode Changeover Method Prior to starting the work, be sure to turn off the earth leakage breaker. Handling of the processing mode changeover box When the left side face plate is removed, you will see the changeover box used to change over the processing mode between DP and RIE. - Page 12 4. INSTALLATION METHOD Auto- - - - Tuning adjustment procedure Auto Tuning adjustment procedure Auto Auto Tuning adjustment procedure Tuning adjustment procedure How to adjust the RF matching when conversion RIE and DP mode How to adjust the RF matching when conversion RIE and DP mode How to adjust the RF matching when conversion RIE and DP mode How to adjust the RF matching when conversion RIE and DP mode This Auto...
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Page 13: Operation In Auto Run
5. RUNNING PROCEDURE Operation in Auto Run The operation and the setting items in the auto run are outlined below. ① Turn on the breaker to power on the machine. ① Breaker ② When the operation power is turned on, the operation panel and the pump are turned on to ②... -
Page 14: Running Procedure
5. RUNNING PROCEDURE Running Procedure 1) How to start the machine Start the machine by the following procedure: Supply 3-phase, 220 VAC power to the machine. ① Turn on the circuit breaker on the machine. ② Turn on the operation power switch. ③... - Page 15 5. RUNNING PROCEDURE Running Procedure 3) Machine stopping procedure Stop the machine by the following procedure: ① Set the machine in the standby state. ② Turn off the operation power. ③ Turn off the circuit breaker. The power may be turned off in any state. The purpose of turning off the power in the standby state is to open the chamber to the atmospheric pressure to enable the door to be opened closed any time.
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Page 16: Touch Panel Operation
5. RUNNING PROCEDURE Touch Panel Operation 1) Configuration of screens The operating screens are configured as follows. The arrow → indicates the lower-level screens. ④Process parameter ⑤Alarm condition ①Initial screen ②Process screen setting screen setting screen ③Alarm screen ⑥Parameter setting screen ⑦Status screen ⑧Maintenance screen ⑨Leak test screen... - Page 17 5. RUNNING PROCEDURE Touch Panel Operation (2) Process screen This screen is used to start processing and show the process parameter setting screen. ① Shows standby, processing or end of processing according to the current status of the machine. ① ① ① ① ⑦...
- Page 18 5. RUNNING PROCEDURE Touch Panel Operation (4) Process parameter setting screen Set process parameters on this screen. ① Using the numeric keys, enter a value to a place where the cursor is blinking. ② After entering a value, press the ENT key.
- Page 19 5. RUNNING PROCEDURE Touch Panel Operation (6) Parameter setting screen Set the maximum flow rates of the mass flow controller, ultimate vacuum when filling gas, time to add N2 gas after operation of the pressure switch for purge (an operation to ensure that the chamber is returned to atmospheric pressure which may be under negative pressure when the pressure switch operates) and processing gas stability time.
- Page 20 5. RUNNING PROCEDURE Touch Panel Operation (8) Maintenance screen Use this screen to operate the units independently during maintenance. ① Using the numeric keys, enter a ① ① ① ① value to a place where the cursor is blinking. ② After entering a value, press the ④...
- Page 21 5. RUNNING PROCEDURE Touch Panel Operation (9) Leak test Use this screen to check leak of the vacuum system and verify the performance of the vacuum pump during the periodic maintenance, etc. ① Shows the time to reach the required vacuum.
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Page 22: Precautions For Handling
Yamato Scientific sales office for inspection. If the machine is left as it is, a fire or electric shock may occur. Never try to repair the machine by yourself. -
Page 23: Maintenance
7. MAINTENANCE Daily Inspection Conduct the daily inspection at least once a day according to the following table. Daily Inspection Table Place Item Criteria Result Remarks 1 Cooling fan Noise Smooth rotation with no abnormal noise. Vibration No abnormal vibration. Odor No offensive odor. -
Page 24: Periodic Inspection
◆The recommended intervals of parts replacement as a result of the inspections are for reference. Parts may be replaced earlier depending on the frequency of use. ◆If you have any questions, please contact the dealer or Yamato Scientific. -
Page 25: Alarms And Corrective Actions
The door is open. Close the door firmly. Door open If any problem not listed above has occurred, please contact the dealer or Yamato Scientific. -
Page 26: After
Request for repair If any problem occurs, stop the machine immediately and turn off the circuit breaker on the machine and the circuit breaker on the distribution panel. Then contact the dealer or Yamato Scientific. Required information: ● Model of the product ●... -
Page 27: Specifications
10. SPECIFICATIONS Specifications Model PDC510 Power supply 220 VAC 16A 50/60 Hz Internal dimensions of (Width) 500 × (depth) 300 × (height) 200 mm chamber Electrode structure Parallel flat type Electrode dimensions (Width) 410 ×(depth) 210 mm Plasma method RIE／DP... -
Page 28: Wiring Diagram
11. WIRING DIAGRAM... -
Page 29: Very Module
Ｖ６ Ｖ６ Ｖ６ Ｖ６ Plasma cleaner Plasma cleaner Plasma cleaner Plasma cleaner for pump purge for pump purge for pump purge for pump purge PDC510 PDC510 PDC510 PDC510 Ｖ７ Ｖ７ Ｖ７ Ｖ７ Manual valve Manual valve Manual valve Manual valve... -
Page 30: Parts List
13. PARTS LIST Part name Specification Maker Electrode ＰＤＣ５１－３０７５０ Aluminum YAMATO SCIENTIFIC CO.,LTD Insulation plate for electrode ＰＤＣ５１－３０７４２ Ceramics YAMATO SCIENTIFIC CO.,LTD Insulating collar ３ ＰＤＣ２１－４００１０ Ceramics YAMATO SCIENTIFIC CO.,LTD Insulating collar ２ ＰＤＣ２１－４０８００ Teflon YAMATO SCIENTIFIC CO.,LTD ＰＤＣ２１－３０７８０ Aluminum YAMATO SCIENTIFIC CO.,LTD... -
Page 31: Disposal
14. DISPOSAL Precautions for Disposal For protection of the global environment: In order to protect the environment, it is requested that when disposing of the machine, break down the machine to as smallest pieces as possible and dispose of them by materials or recy- cle them wherever possible. -
Page 32: List Of Hazardous Subs
15. LIST OF HAZARDOUS SUBSTANCES Never use explosive substances, flammable substances and other substances con- taining these substances with this machine. ①Nitroglycol, nitroglycerine, nitrocellulose, and other explosive nitric esters ②Trinitrobenzen, trinitrotoluene, picric acid, and other explosive nitro compounds ③Peracetic acid, methyl ethyl ketone peroxide, benzoyl peroxide, and other organic peroxides Metal “litium”, metal “potassium”, metal “sodium”, yellow phosphorous, phosphorus sul- fide, red phosphorous, celluloid, calcium carbide (alias, carbide), lime phosphide,... - Page 33 Be sure to comply with the handling instructions described in this manual when using the machine. Yamato Scientific shall not be liable whatsoever for accidents or failures which may result from using the machine in manners not authorized in this manual.
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