Related Manuals for Halma Alicat Scientific M Series
Summary of Contents for Halma Alicat Scientific M Series
- Page 1 OPERATING MANUAL FOR STANDARD FLOW AND PRESSURE DEVICES Models M · MC · P · PC · L · LC...
- Page 2 Thank you for purchasing your Alicat device. If you have any questions, or if something is not working as expected, please contact us. We are eager to help you in any way possible. Contact Information MC-10SLPM World Headquarters, Europe Tucson, Arizona, USA europe@alicat.com info@alicat.com Geograaf 24...
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Page 3: Table Of Contents
Contents Introduction Device Setup Quick Start Guide Gas Selection Mass Flow Devices Installation and Startup Gas Select™ Safety Warnings COMPOSER™ Gas Mixes Installation Creating New Mixes in COMPOSER™ Filters Viewing, Deleting, and Creating Similar Mixes Power and Signal Connections Analog Signals Sensor Setup Option: Charging a Portable Meter or Gauge Engineering Units... - Page 4 Modbus RTU Communication Establishing Communication Multidrop Information Modbus RTU Serial Protocol Process Data Writing Control and Configuration Information Status Flags Modbus Reading and Status Registers Special Commands Custom Gas Mixtures Special Commands and Arguments Special Command Result Status Codes Troubleshooting Mass Flow Devices Maintenance Cleaning...
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Page 5: Introduction
Introduction M-100SLPM Depending on the model, Alicat devices have a variety of features: • 1000 readings per second guarantees high resolution data. • High-accuracy performance for all your flow. Use the mass flow devices with any of the 98+ gases included with Gas Select™ (page 23). -
Page 6: Quick Start Guide
Quick Start Guide Setup • Connect your device. Ensure that flow passes through your device in the same direction as the arrow on This MC-1SLPM-D model mass the flow body (usually left to right). flow controller is a typical unit. The flow body and the valve Application setup examples can be sizes can vary significantly. -
Page 7: Installation And Startup
Installation and Startup Safety Warnings • For assistance in performing any disassembly • Operating this device under conditions which exceed of the device, please contact Alicat the specifications noted in the manual or specification support (page 2) for assistance. sheet could lead to equipment damage or injury. Installation The device does not require straight runs of pipes either Control Valve... -
Page 8: Filters
Filters When pressure drop is not a concern, use in-line sintered Liquid: filters to prevent large particulates from entering the flow • 20 microns for devices with flow ranges ≤100 CCM. body of the controller. Suggested maximum particulate sizes • 40 microns for devices with flow ranges >100 CCM. are as follows Pressure: Mass Flow:... -
Page 9: Analog Signals
Analog Signals Using Ground to Tare (Meters and Gauges) You can tare your meter or gauge remotely by momentarily Primary Analog Output Signal grounding pin 4. When the switch is closed, the device tares. Most devices include a primary analog output signal that Operation resumes when the switch is released. -
Page 10: Bleed Ports Liquid Devices
Bleed Ports Liquid Devices Liquid devices include bleed ports (8-32 Nylon-tipped screw) on the front for the removal of air bubbles. ✓ Note: A small amount of liquid will leak from the device during this procedure. Take necessary precautions to prevent damage to anything nearby. Bleed both of the ports as follows: 1. -
Page 11: Basic Operations
Basic Operations This section covers the most common functions of your device. Settings for more specialized needs can be found after this section. Some information found in this section may be repeated in other sections for ease of section navigation. Viewing Live Data The display screen has a number of options for displaying live data. -
Page 12: Taring The Device
Taring the Device Taring is an important practice that ensures your device provides its most accurate measurements. This function gives a zeroed reference point for measurements. For devices installed with a barometer, the absolute pressure reading can be tared when venting to the local barometric pressure. On mass flow meters, liquid meters, and pressure controllers/ gauges, the tare button is found on the main screen. -
Page 13: Selecting Gas Mass Flow Devices
Selecting Gas Mass Flow Devices → → MENU SETUP Active Gas In most cases, mass flow devices are physically calibrated at the factory using air. Gas Select™ allows you to reconfigure the device to flow a different gas without any need to send it back for a physical recalibration. -
Page 14: Data Screens
Data Screens Depending on the device, there can be up to four screens providing different information based on your needs. Further settings for the data screens can be found on page Live Screen The live screen is the default data screen of the device. This provides access to the different measurements that a device may be taking. -
Page 15: Option: Color Tft Display
Option: Color TFT Display Instruments ordered with a color display are functionally the same as standard backlit monochrome instruments. The color enables additional on-screen information. Multi-Color Display Indicators • GREEN: Parameter labels and adjustments associated with the button directly above or below the label are presented in green. -
Page 16: Device Information
Device Information ABOUT MENU → ABOUT menu ( ) contains information for setup, configuration, and troubleshooting. Basic Device Information → → MENU ABOUT About Device This includes information on the following: MODEL • : Device model SERIAL NO • : Serial number DATE MFG •... -
Page 17: Process Control
Process Control Controllers For a controller to regulate the flow or pressure, it needs to have a setpoint established. The setpoint is the amount of flow or the pressure that the controller attempts to achieve in a process line. Setpoint Control menu. -
Page 18: Idle Connection Response
Idle Connection Response → → → MENU CONTROL Setpoint Setup On Comm Timeout If the communication connection is timed out, the controller can either set a zero setpoint, or maintain the last setpoint given. The timeout time is infinite by default and can be manually defined (page 27). -
Page 19: Ramping Options
Ramping Options Ramping options control when ramping occurs. This can be when the setpoint changes, when the device powers on, or when setting a zero setpoint. Ramp Up • can toggle between on and off. When off, the ramp rate will not be honored when increasing flow or pressure to reach a given setpoint. -
Page 20: Repeat A Batch
Repeat a Batch Warning: Flow resumes immediately at the current setpoint when batch dispensing is turned off. RESET • For an identical batch, press Flow begins immediately. ✓ BATCH Note: The controller retains batch size • For a new batch of a different size, press across power cycles. -
Page 21: Pd/Pdf Or Pd²I Control Algorithms
PD/PDF or PD²I Control Algorithms Delayed or Unattained Setpoint: → → → MENU CONTROL Control Loop Loop Type • PD: Increase the P gain in increments of 10%, and then Your controller uses an electronic closed loop controller to decrease the D gain by small amounts to fine-tune. determine how to actuate its valve(s) in order to achieve the •... -
Page 22: Control Deadband For Pressure Control
Control Deadband for Pressure Control → → → MENU CONTROL Control Loop Control Deadband The control deadband is designed to minimize the amount of gas exhausted and improve stability. There is no active control within the deadband setting. ✓ Note: A control deadband cannot be set when the device is configured to control flow (page... -
Page 23: Device Setup
Device Setup Gas Selection Mass Flow Devices In most cases, your mass flow device was physically calibrated at the factory using air. Gas Select™ allows you to reconfigure the device to flow a different gas without any need to send it back for a physical recalibration. -
Page 24: Creating New Mixes In Composer
Creating New Mixes in COMPOSER™ → → → MENU SETUP Active Gas → COMPOSER Mixes Create Mix Give the Mix a Short and Long Name DOWN changes the character. Valid characters include A–Z, . , - CANCEL 0–9, punctuation ( ), and space. -
Page 25: Stp/Ntp Reference Values Mass Flow Devices
STP/NTP Reference Values Flow and Pressure Averaging Mass Flow Devices → → → → → → MENU SETUP Sensor MENU SETUP Sensor Flow Averaging → → → Flow Ref or NTP Flow Ref MENU SETUP Sensor Pressure Averaging A mass flow device references a given temperature and Averaging the flow over a longer time may be useful in pressure combination to calculate flow. -
Page 26: Totalizer Display
Totalizer while Controlling Pressure Totalizer Limit There are 4 options for how the totalizer reacts when it While using a mass flow or liquid controller to control pressure, reaches its limit: the flow rate may exceed the maximum measurable flow (128% of full scale) with an abrupt pressure change. -
Page 27: Serial Communications Configurations
Serial Communications Configurations → → MENU SETUP RS-232 Serial or RS-485 Serial You can operate your device via its data connection for easy streaming and logging of all data. Before connecting the device to a computer, ensure that it is ready to communicate by checking the options in this menu. -
Page 28: Screen Lighting
their measurement in the center of the display. If this Show Actions Menu option is set to , an option to change that parameter’s engineering units is shown, as well as an option to highlight the parameter. Show Valve Drive •... -
Page 29: Serial Ascii Communication
Serial ASCII Communication Connecting your device to a computer allows you to log the data that it generates. The device communicates digitally through its communications connector and a cable using a real or virtual COM port on your computer. This section of the manual shows you how to operate the device using ASCII commands. -
Page 30: Streaming Mode
Streaming Mode In streaming mode, your device automatically sends a line of live data at regular intervals. Only one unit on a given COM port may be in streaming mode at a time. To put your device into streaming mode, type: unit_id @ @... -
Page 31: Setpoint
Additional columns, including status codes (page 11), may be present to the right of the gas label column. The unit ID appears in the data frame only when the device is in polling mode. Setpoint Controllers Serial/Front Panel Before attempting to send a setpoint to your controller serially, confirm that its setpoint source is set to (page 17). -
Page 32: Quick Command Reference
Quick Command Reference Serial commands are not case-sensitive, but are presented here as capitalized to help differentiate them from command variables. General Commands for All Devices unit_id desired_id Change the unit ID: unit_id V Tare flow: unit_id P... -
Page 33: Modbus Rtu Communication
Modbus RTU Communication Modbus RTU can be used to read and log sensor data, switch between analog and digital control modes, adjust device settings, and control the device. Establishing Communication Multidrop Information The device can communicate via the input/output port on the device. -
Page 34: Writing Control And Configuration Information
Writing Control and Configuration Information All command and control requests to a Device are issued with Modbus function code FC16: “write multiple registers”. Modbus Reading and Status Registers Status Flags Parameter Register Access Devices Interpretation Devices Command ID 1000 Read/Write Temperature Overflow (TOV) Mass Flow and Liquid Command Argument... -
Page 35: Special Commands And Arguments
Special Commands and Arguments Command ID Command Argument Command Name (Register 1000) (Register 1001) Devices Change Gas Number Gas Table Index Mass Flow Create Custom Gas Mixture Gas mixture index (236–255) Mass Flow or 0 to use next available. Delete Custom Gas Mixture Gas mixture index Mass Flow Tare... -
Page 36: Troubleshooting
Troubleshooting If you run into trouble with installation or operation, get in touch with support (page General Use Issue: The buttons do not work, and the screen Issue: I dropped my device. Is it OK? Do I need to shows recalibrate? Action: The flow controller buttons were locked out via Action: If it turns on and appears to respond normally,... -
Page 37: Mass Flow Devices
Mass Flow Devices Issue: Can I use my mass flow device with other gases? Action: Yes mass flow devices are designed to work with many different gases. Gas Select™ includes up to 130 preloaded gases and gas mixes(page 23). You can also define your own mixture using COMPOSER™... -
Page 38: Maintenance
Maintenance ⚠ Warning: Do not attempt to disconnect this device from any system which has been pressurized without independently confirming that all pressure has been safely released and that any hazardous gases which remain in that system have been purged. Cleaning Mass flow and pressure devices do not require cleaning, provided that they flow clean, dry gas. -
Page 39: Appendix A: Pinouts
Appendix A: Pinouts Check the calibration data sheet and pinout for your device. page 29 for additional important information about connecting your device to a computer for serial commands. Individual pinouts available at alicat.com/pinout. The availability of different output signals depend on the options ordered. Female Connector Male Connector Female Connector... -
Page 40: 9-Pin D-Sub Connector Common Pinouts
9-Pin D-Sub Connector Common Pinouts Female Connector Male Connector DB9A DB9 (F) DB9M (M) DB9K DB9R DB9T DB9U DB9B DB9G DB9H DB9I DB9N Analog Current NC TX or B TX or B RX or A Analog Out 2 RX or A TX or B Power In Analog Out 2... -
Page 41: M12 Connector Common Pinouts
M12 Connector Common Pinouts Female Connector Male Connector M12MD 0–5 Vdc Output Signal Optional: 1–5 or 0–10 Vdc Not Connected Optional: 4–20 mA primary output signal Power In Static 5.12 Vdc Optional: Secondary analog output (4–20 mA, 0–5 Vdc, 1–5 Vdc, 0–10 Vdc) or basic alarm Serial RS-232 RX / RS-485(−) Input Signal (receive) Serial RS-232 RX / RS-485(−) Input Signal (receive) Analog Setpoint Input (Controllers) -
Page 42: Appendix B: Reference Information
Appendix B: Reference Information Engineering Units For more information on engineering units, see the engineering units section (page 24). Flow Units Pressure Units Absolute or Volumetric Standard Normal Notes Barometric Gauge Notes µL ∕m SµL ∕m NµL ∕m Microliter per minute‡... -
Page 43: Gas List By Number
Gas List by Number To use any of these gases in your device, use Gas Select™ (page 23). Short Long Short Long Short Long Name Name Name Name Name Name EA-40 Enriched Air-40% O2 Air (Clean Dry) R-116 Hexafluoroethane (C2F6)2 EA-60 Enriched Air-60% O2 Chlorotetrafluoroethane... -
Page 44: Gas List By Category
Gas List by Category See previous page for Gas Select™ index numbers. Pure Non-Corrosive Gases Welding Gases Synthesis Gases Acetylene (C2H2) 40% H2, 29% CO, 20% CO2, 11% CH4 Air (clean, dry) 64% H2, 28% CO, 1.0% CO2, 7.0 CH4 Argon (Ar) C-10 70% H2, 4.0% CO, 25% CO2, 1.0% CH4... -
Page 45: Appendix C: Application Setup
Appendix C: Application Setup MCV Controller Operating Notes Alicat’s MCV mass flow controller is equipped with an integrated Swagelok® positive shutoff valve. This valve is normally closed, but can be opened by supplying 60–120 60 120 Three-way PSIG of air pressure. The shut-off valve closes again when PSIG solenoid valve this pressure is reduced below 60 PSIG. -
Page 46: Back Pressure Control
Back Pressure Control When the valve is located on the downstream side (inverse control), the sensor controls pressure upstream. This configuration is referred to as a back pressure controller. This configuration follows our inverse pressure control algorithm. The valve closes to increase pressure, and opens to decrease pressure. -
Page 47: Remote-Sensing Controller
Remote-Sensing Controller The PC3-Series senses and controls the pressure at a point in the system outside of the pressure controller itself. All PC-Series controllers can be ordered with an additional NPT port that connects to the pressure sensor in the device. The pressure sensor is isolated from the flow path within the device.