V-TEK Royce DE35-ST User Manual
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V-TEK Royce DE35-ST User Manual

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DE35-ST & DE35-300
User's Guide
User's Guide #D292469I
Royce Instruments
V-TEK, Inc.
480 Technology Way
751 Summit Avenue
Napa, CA 94558
Mankato, MN 56001
PH (707) 255-9078
PH (507) 387-2039
www.royceinstruments.com
www.vtekusa.com

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Summary of Contents for V-TEK Royce DE35-ST

  • Page 1 DE35-ST & DE35-300 User’s Guide User’s Guide #D292469I Royce Instruments V-TEK, Inc. 480 Technology Way 751 Summit Avenue Napa, CA 94558 Mankato, MN 56001 PH (707) 255-9078 PH (507) 387-2039 www.royceinstruments.com www.vtekusa.com...
  • Page 2 BLANK PAGE D292469I...
  • Page 3 EC Declaration of Conformity Manufacturer’s Name: V-TEK Inc. Manufacturer’s Address: 751 Summit Avenue Mankato, MN 56001 Bearing sole responsibility, hereby declare that the product referred to by this declaration is in conformity with the following standards or normative documents: Description:...

  • Page 4: Table Of Contents

    DE35-ST Operating Instructions CONTENTS Contents Introduction & Overview Overview Utility Requirements Installed Dimensions: DE35-ST Installed Dimensions: DE35-300 Machine Setup & Installation Safety Instructions Unpacking & Installation Uncrate the DE35/DE35-300 Unpack the Carton Setup & Start-Up Connections & Setup Power Up Installing an Eject Head Installing a Pickup Tip Installing the Wafer Holder...
  • Page 5 Output Select Synchronized Die Lift: X-Axis Placement Sequence: Inspections Options Die Inverter: Selected/Not Selected Output Sizes Menu Modes of Operation Run Mode Keyboard Function in Run Mode Single Step Mode Keyboard Function in Single Step/Teach Mode Pick & Place Cycle Teach Mode Output Setup Changing Output Sizes...
  • Page 6 DE35-ST Operating Instructions Adjusting the Die to the Pickup Tip: DE35-ST Die Inverter System Die Inverting Cycle Die Inverting Discussion Adjust Die Inverter Home Position Adjust the Inverter Flexure Adjust Inverter Z & Y Position Non-Surface Contact Operation Non-Surface Contact Pickup Cycle Edge Pick Up Adjust Pickup Grippers Replace Gripper Fingers...
  • Page 7 Preventative Maintenance Schedule Bi-monthly Maintenance Semi-Annual Maintenance: Maintenance Procedures Setting the Camera Tube Mounting Position Optical Center and Follow Focus Setup Adjusting Pickup Height at the Pick Position Adjust Pickup Height at Place Positions Eject Head Maintenance, Needle Replacement and Planarization. Needle Replacement and Planarization: EJT, EJTN, EJM, EJMN, EJA, EJAN Required Tooling &...

  • Page 8: Introduction & Overview

    DE35-ST Operating Instructions Introduction & Overview Overview The DE35 ST and DE35-300 semi-automatic die pick-and-place systems are a simple low cost machine for picking die from sawn or scribed wafers mounted on adhesive film. Die can be placed into waffle packs, gel packs, film frames, or directly onto substrates. The DE35-ST and DE35-300 will handle die sizes from as small as 0.008 inch square to over 1.0 inch square.

  • Page 9: Utility Requirements

    Utility Requirements 40 - 80 psi (2.7 - 5.4 atm), oil free Tubing, polyurethane, 85A, 1/8 ID, 1/4 OD, 126 PSI MAX @ 75 DEG F, TRANSPARENT BLUE, or equivalent (customer supplied). Note: Oil free air preferred since some discharge to atmosphere will take place. VACUUM 20 in Hg (508 mm Hg) Tubing, vinyl (PVC OR TYGON), 1/8 ID, 1/4 OD, CLEAR, or equivalent...

  • Page 10: Machine Setup & Installation

    DE35-ST Operating Instructions Machine Setup & Installation The DE35 ST Die Pick and Place System is intended to be installed in a facility meeting the listed environmental requirements unless otherwise specified in a particular section. • Indoor use • Altitude up to 2000 meters •...

  • Page 11: Safety Instructions

    Safety Instructions The information in this document is subject to change in order to improve reliability, design, or function without prior notice and does not represent a commitment on the part of this company. 1. Read Instructions - All the safety and operating instructions must be read before the machine is operated.
  • Page 12 DE35-ST Operating Instructions 11. Do not use machine in the vicinity of a gas leak - If you suspect a gas leak, report it immediately, but use a telephone away from the area where gas is leaking. 12. Use only the correct power source as marked on the machine - If you are not sure of the power supply;...

  • Page 13: Unpacking & Installation

    Unpacking & Installation Uncrate the DE35-ST/DE35-300 1. Remove all packaging material and place the mainframe on a suitable, secure table. 2. Connect air and vacuum in accordance with the specifications given in Utility Requirements section. 3. Connect all power. Unpack the Carton 1.

  • Page 14: Setup & Start-Up

    DE35-ST Operating Instructions Setup & Start-Up Connections & Setup 1. Locate the Foot Switch and plug into the appropriate connector on the Rear Panel. 2. Remove the Transit Screw holding the X-Y Stage in position. This is located at the front right corner of the X-Y Stage and has a red plastic cap.

  • Page 15: Power Up

    ii. Connect the keyboard and mouse to USB (5 & 6) b. The system possesses multiple cameras: i. Connect the cameras to USB 4 – 6. ii. Connect the keyboard and mouse to the PC’s front USB ports. Figure 2 – Front of the PC Power Up Figure 2 –...

  • Page 16: Installing An Eject Head

    DE35-ST Operating Instructions Installing an Eject Head Select the appropriate Eject Head for the die size which will be picked. If unsure which Eject Head to use, refer to the Table of Recommended Eject Head Sizes at the end of this manual.

  • Page 17: Installing A Pickup Tip

    Installing a Pickup Tip To install a Pickup Tip you will need a .050 Allen Hex Key and the proper size tip for the die you want to pick. 1. With the power ON, use the ARM LOAD/UNLOAD key to sequence the Z-Arm till it is located between the Wafer Holder and the Output Plate.

  • Page 18: Installing The Wafer Holder

    DE35-ST Operating Instructions Installing the Wafer Holder 1. Install the Wafer Holder on the Die Eject Stage (DES) with the 10-32 x 2.25 socket cap screws provided. Figure 1.1: Max 4 in Wafer Diameter Holder Figure 1.2: Max 6 in Wafer Diameter Holder Figure 1.3: Max 8 in Wafer Diameter Holder D292469I...

  • Page 19: Check Follow Focus & Zoom Center

    2. Plug the Interlock Cable into the connector located on the panel to the right of the DES. 3. Install a Wafer with die on the Wafer Holder. 4. Align the die on the X and Y Axis by rotating the wafer in the holder. Final alignment can be done with the Theta Adjustment of the Wafer Holder.

  • Page 20: System Alignment: De35

    DE35-ST Operating Instructions System Alignment: DE35 NOTE: For DE35-300 alignment, proceed to the next section. After the System has been assembled it must be aligned. The Pickup tip, Eject needle and the Camera must be properly aligned for the system to properly pick and place die. 1.
  • Page 21 7. Loosen the large Thumbscrew on the top of the Camera Mount. Unscrew both adjustment screws until the crosshairs are past the mark then lightly snug the large Thumbscrew. Turn the adjustment screws until the crosshairs bisect the mark on the tape left by the tip. Tighten the large Thumbscrew. The crosshairs should now be at the center of the tip.

  • Page 22: System Alignment: De35-300

    DE35-ST Operating Instructions If desired, click on the original '+', then ensure it is selected by pressing send forward or send backward until the active handle boxes are on the '+'. Right click and select delete. System Alignment: DE35-300 NOTE: For standard DE35 alignment, see the previous section. After the System has been assembled it must be aligned.
  • Page 23 6. Press the ← or → keys to move the pick position left or right. 7. Press the NO key to terminate the cycle. The Arm will move to the right to the Wait position. A circular mark from the Pickup Tip on the tape should be visible at this time.
  • Page 24 DE35-ST Operating Instructions located under the Wafer Holder on the operator side of the base as shown below. WARNING: DO NOT MOVE THE EJECT HEAD Y POSITION WHILE THE NEEDLES ARE UP, doing so may break the needles or tear the wafer tape. 10.
  • Page 25 b. Adjust the X-Y positioning screws c. Secure the locking thumb screw 11. Click on the '#' in the Royce Technical Video software. Move the cursor over to the live video image. Click on the top left corner of the die and drag down to the bottom right corner of the die and release.
  • Page 26 DE35-ST Operating Instructions BLANK PAGE D292469I...

  • Page 27: Basic Operation

    Basic Operation Royce Technical Video Operation Shapes: Shapes are used by the operator to target die onscreen prior to beginning a pick and place cycle. Shapes can also be used on the screen to show the position of the Pick Up Tip and/or Eject Needles to aid with system alignment.
  • Page 28 DE35-ST Operating Instructions For no fill color (transparent background), right click on the shape and deselect “Background Transparent” from the right-click menu Figure 5 - Right-Click Menu when shape is "active" • To change the shape’s line style and weight, right click on the shape.
  • Page 29 Text Boxes: These are used to add text to the live video image. 1. To create a Text Box, click the Text Box button and then click and drag on the live video screen to create a text box of the desired size.
  • Page 30 DE35-ST Operating Instructions Show Dimensions: 1. Right click on the desired object (must be a crosshair, rectangle, or ellipse). 2. Select “Show Dimensions”. Using Dimensions: Once dimensions are configured as described above, a shape can be drawn around any item of interest (die, surface defect, feature, etc.), and the real dimensions of that shape will be calculated and displayed.
  • Page 31 Image Capture: This feature allows the user to take a snapshot of the image shown in the live video portion of the screen. This snapshot is captured with and without the on-screen shapes. • By pressing the Camera Icon on the toolbar, the program automatically captures two screenshots and saves them at the below location as .png image files: C:\Program Files (x86)\Royce Instruments\RoyceTechnicalVideo\Images...
  • Page 32 DE35-ST Operating Instructions • The frame rate of the live video image is displayed for the user’s reference in the Toolbar (1 Hz = 1 frame per second). • The user can minimize the program and return to the Windows desktop by pressing the Windows key + D.
  • Page 33 Digital Camera Adjustments For FLIR USB3 Digital Cameras: The digital camera settings are adjusted at the factory and typically do not require subsequent adjustment. If running new applications or raw live camera images are too dim, bright, or otherwise unclear even after illumination and focus adjustments, then making adjustments to the digital camera settings may help resolve the issue.
  • Page 34 DE35-ST Operating Instructions Next you will see a window showing the live image from the selected camera. From the Settings menu, select Toggle Camera Control Dialog to open the camera settings. Adjust relevant camera settings in the Camera Settings tab and see the effect of changes on the live camera image screen.
  • Page 35 Connect to the DE35 with the Royce Firmware Utility 1. Verify that the USB to Serial converter is connected to the DB9 RS-232 cable. Connect the USB side to USB port#3 as defined in Figure 1 (page 1). 2. Connect the other end of the DB9 to the mainframe COM2 port on the back panel of the DE35.
  • Page 36 DE35-ST Operating Instructions Using Mainframe Tools to Perform a Firmware Backup Description – To backup all 9 DE35-ST mainframe process recipes, including output patterns, pattern calibrations, process settings, and pick and place settings, a Firmware Backup can be completed to save a copy of this information to the Royce Technical Video PC. Once a backup has been created, the Update Firmware function can be used to restore DE35-ST mainframe firmware from the backup.
  • Page 37 Using Mainframe Tools to Perform a Firmware Upgrade 1. Click Update Firmware. 2. Within the new window click the desired firmware package and click Update. restore mainframe firmware from a backup, click the desired backup (MF_BACKUP_YYYYMMddHHmmss). 3. Once the update has completed a File Management Success dialog will appear and indicate the number of affected files.
  • Page 38 DE35-ST Operating Instructions Operational Set Up The following is a step-by-step setup procedure and will vary between machines according to what options you have installed. It quickly sets up the DE35 ST for basic operation. A more detailed description of all keys, menus and operation can be found later in the manual.
  • Page 39 >QUIT MENU i. With the curser > in front of >QUIT MENU, press the YES key to exit the menu. ii. With the curser > at any position in the menu, pressing the NO key to place the curser in front of >QUIT MENU.
  • Page 40 DE35-ST Operating Instructions >4 TRAYS, 2 IN. - PLATE 3105 Select desired Output. i. Press the YES key. >4 TRAYS, 2 IN. - PLATE 3105 line becomes active. ii. Press + / - keys to scroll through the output types available and choose the desired output.
  • Page 41 iii. Use the +/- buttons on the keypad until the desired grade is shown. Output Grade choices will appear as follows: • 1 Output Grade • 2 Output Grade • 3 Output Grade • 4 Output Grade iv. Press Yes to save. Note: Each tray can be assigned a different grade or all trays can be assigned the same grade.
  • Page 42 DE35-ST Operating Instructions ii. Press the NO key at this time will take you to QUIT MENU for the OUTPUT SELECT menu. Pressing the YES key again will take you back to QUIT MENU. i. Press the Output Sizes key. Select/Enter Waffle Pack part number.

  • Page 43: Calibrating Waffle Packs

    Calibrating Waffle Packs The waffle pack dimensions are loaded when the part number is entered. The dimensions are rough, and to insure proper placement accuracy the waffle packs should be calibrated each time a new part number is used. The same applies when the waffle pack is filled and fresh packs are installed.

  • Page 44: Full Cycle: Pick & Place In Single Step Mode

    DE35-ST Operating Instructions Full Cycle: Pick & Place in Single Step Mode This cycle will vary with different options selected. 1. TURN ON TAPE VACUUM. 2. ARM GO TO PICK POSITION. 3. GO DOWN TO PICK HEIGHT. 4. TURN ON PICKUP VACUUM. 5.
  • Page 45 BLANK PAGE D292469I...

  • Page 46: Detailed Operation

    DE35-ST Operating Instructions Detailed Operation Menus Overview The DE35 ST has two menus: OUTPUT SELECT and OUTPUT SIZES. The OUTPUT SELECT menu is used to process Recipes, select Pick and Place mode, and select the type of Output Plate, Output Grades, Output Pattern and Inspection Options. It includes the following features.

  • Page 47: Output Select

    The OUTPUT SIZES menu is used to Calibrate Trays, Clear Trays and to select the Pattern Number for the output tray. • Enter the Pattern number of the waffle pack being used. o If it is a programmed pattern number the dimensions will automatically be called up.
  • Page 48 DE35-ST Operating Instructions Pick from Wafer - Place to Output When active, this line allows you to select available Pick and Place options to set up the process you want to perform. A few examples of Pick and Place options are listed below: PICK FROM WAFER - PLACE TO OUTPUT In this sequence the system will pick a die from the wafer and place it in the...
  • Page 49 1 trays, 4 in - Plate 3084 This will set up the output of the machine for one, four inch, waffle pack. The sequence of which the machine will place the die is in the first pocket of the waffle pack then the second pocket of the waffle pack and so on, until the waffle pack is full.

  • Page 50: Synchronized Die Lift

    DE35-ST Operating Instructions X Output Grades This line when active allows you to choose from 1, 2, 3 or 4 grades for your output when using any 4-pack configuration. You can choose 1 or 2 grades when using any 2-pack configuration. When using grades, pressing OUTPUT LOAD/UNLOAD after placing a Die will move the table out to the load/unload position allowing you to replace that tray without affecting the count of the other grades.

  • Page 51: X-Axis Placement Sequence

    X-Axis Placement Sequence: Normal/Inverted The normal X-Axis Placement Sequence in a waffle pack or Gel Pak is shown below: Right Rear of Machine Left Rear of Machine Left Front of Machine Right Front of Machine The Normal sequence starts on the front right side of the Waffle Pack or Gel Pak and places die from right to left.
  • Page 52 DE35-ST Operating Instructions Y-Axis Placement Sequence: Normal/Inverted The Normal Y-Axis Placement Sequence in a Waffle Pack or Gel Pak is shown below: Right Rear of Machine Left Rear of Machine Left Front of Machine Right Front of Machine The Normal Y-Axis Placement Sequence starts on the front side of the Waffle Pack or Gel Pak and places die from Front to Rear.

  • Page 53: Inspections Options

    Inspections Options Submenu This Sub Menu allows you to select or de-select any Inspection options that may be on your machine. Inspect Die Underside- Selected/Not Selected: Selecting this mode allows the operator to view and inspect the underside of the die. This will set up the machine so that the pickup arm stops over the optional underside inspection camera, before placing the die.

  • Page 54: Output Sizes Menu

    DE35-ST Operating Instructions Output Sizes Menu To enter the menu, press the key labeled OUTPUT SIZES. The Output Sizes menu has many options, however, only two lines will be displayed at a time. Pressing the YES key with the curser > in front of any menu item will place a blinking curser in the option, allowing you to change the numeric value.
  • Page 55 Once the tip is centered in the first pocket, press the + key to advance to the last position of the waffle pack. The better these positions are aligned, the better the die placement will be. For a more accurate calibration: start in single step; pick a die;...
  • Page 56 DE35-ST Operating Instructions Y Pitch This number tells the machine the distance in inches from the leading edge of one pocket to the leading edge of the next pocket in the Y direction. X Positions This number tells the machine how many die will be placed per row in the X direction.
  • Page 57 BLANK PAGE D292469I...

  • Page 58: Modes Of Operation

    DE35-ST Operating Instructions Modes of Operation Run Mode When the machine is in Normal Operations mode, the currently selected Waffle Pack pattern number will be shown on the top line of the display and the total number of devices placed will show on the bottom line of the display. When the Foot Pedal is pressed, the arm will leave its current position (usually the Wait Position) and will go directly to the Die Pickup Position.
  • Page 59 The following will describe keyboard functions when the machine is in the Run Mode. Coarse/Fine This key has no function in RUN mode. Left/Right Arrow Pressing the Right/Left Arrow key with the pick arm in the wait position will move the arm to the last placement position on the waffle pack.
  • Page 60 DE35-ST Operating Instructions +/- Keys Pressing the +/- keys with the Pick Arm in the wait position will move the arm to the last placement position on the waffle pack. Once the arm has moved to this position, the + key will move the arm forward through each pocket of the current waffle pack until it reaches the last pocket.
  • Page 61 Output Load/Unload Pressing Output Load/Unload will move the output stage to home position, toward the back of the machine. Pressing it again will move the stage to the front of the machine for easy access to the waffle packs. When this key is pressed, the place position will reset to the first pocket of the first waffle pack and the die count is reset to 0.

  • Page 62: Single Step Mode

    DE35-ST Operating Instructions Single Step Mode This mode forces the machine to go through the pick and place cycle one step at a time, stopping between each step until the foot pedal is pressed. It also automatically puts the machine into a teach mode to allow for positions, delay times etc. to be edited. Single Step Mode will need to be used for first set up of the machine, any time a new die size will be picked, any time the Eject Head is removed or adjusted, any time the Pickup Tip is removed, or if you find the pick and placement of the die is not accurate.
  • Page 63 The following describes the key functions when the system is in Single Step/Teach Mode. Coarse/Fine Switches between Fine (1 Step) and Coarse (10 steps) for each action of the X, Y and Z drives. The X-drive moves 2 mils per step. The Y and Z drives move 1 mil per step.

  • Page 64: Pick & Place Cycle

    DE35-ST Operating Instructions NOTE: The pickup tip will only sense forces pushing up on the bottom of the tip. If the pickup tip cannot be adjusted any further in the down direction, the message REACHED LIMIT will appear briefly in the display, accompanied by 3 beeps.
  • Page 65 5. LIFT NEEDLES Eject Head Needles are raised. No software adjustment necessary, however, the needle height may need adjustment. This is a mechanical adjustment: to raise the needles turn the Stop Ring on the Eject Actuator counter clockwise, to lower turn the Stop Ring clockwise. Note: Pneumatic Ejectors only, see Motorized Ejector section on page 105 for details.
  • Page 66 DE35-ST Operating Instructions 12. ARM GO TO PLACE POSITION. The arm will now move to the right to the position over the waffle pack to place the die. If inspections options are installed on the system, the arm will move to whatever is the next position in the sequence. 13.

  • Page 67: Teach Mode

    Teach Mode When the system is in Teach Mode, TEACH RUN will appear on the LCD and the system settings (positions, delay times etc.) are enabled to be changed. NOTE: When the SINGLE STEP key is pressed the system is automatically put into the teach mode.

  • Page 68: Output Setup

    DE35-ST Operating Instructions Output Setup Changing Output Sizes To change the output waffle pack dimensions, press the OUTPUT SIZES key. This will display the Output Sizes Menu on the LCD display with a cursor > pointing to the relevant line. Use the Up/Down Arrow keys to move the cursor >...

  • Page 69: Calibrating Waffle Packs

    3. Press YES again. The system will search its memory to see if it already has that part number programmed. During that time, a SEARCHING LIST message will show in the display. If the Waffle Pack part number is already saved in the program, the dimensions for that part number will be automatically assigned and will appear in the display.
  • Page 70 DE35-ST Operating Instructions 5. Use the Up/Down and Left/Right Arrow keys to position the Pickup Tip in the center of the cavity. 6. When tip is positioned correctly, press the key again. 7. The arm will step to the next calibration pocket and repeat the adjustment.

  • Page 71: Programming Waffle Pack Dimensions

    Programming Waffle Pack Dimensions There are many non-catalog waffle packs in use that are not pre-programmed into the machine. This is not a problem since the machine can be user programmed for up to 75 user specified waffle pack part numbers and dimensions. Similarly, the user can also assign Gel Pack part number and dimensions to the Output Array Pattern of choice.
  • Page 72 DE35-ST Operating Instructions X Pockets This is the number of columns pockets in a left to right direction. If you enter a number too large for the size pack you are using the system will beep three times and display OUTPUT DIMENSIONS INVALID.

  • Page 73: Erasing Unwanted Pattern Numbers

    Erasing Unwanted Pattern Numbers To make room in the list for new user programmed pattern numbers, you may need to erase old pattern numbers which are not currently active. 1. Select the pattern number to be erased in the menu, either by keying the pattern number into the pattern number line in the menu or by browsing through the list with the Left/Right Arrow keys.

  • Page 74: Changing Output Configuration

    DE35-ST Operating Instructions Changing Output Configuration To change the output configuration of the DE35 ST, press the OUTPUT SELECT key. This > will display two lines of the Output Select Menu with the cursor pointing to Quit Menu. 1. Arrow down to Output Plate Configuration, press YES.

  • Page 75: Pickup Head Adjustment

    PICKUP HEAD ADJUSTMENT Adjusting the Pickup Height and Position 1. Place the system in Single Step Mode by pressing the SINGLE STEP key. 2. Cycle the system until the Pickup is at pick height over the Die Ejector. 3. Press the UP/DOWN keys to adjust the pickup height as needed. Each key press will move the head one step (.00125 in) or ten steps (.0125 in), according to the COARSE/FINE key setting.

  • Page 76: Adjusting Lift To Search Height

    DE35-ST Operating Instructions 5. The new value for Pick Up Delay is retained in long term memory and will not have to be re-entered when the machine is next turned ON. 6. The delay may be changed at any time using the procedure outlined above. Adjusting Lift to Search Height LIFT TO SEARCH HEIGHT AT XXXX u/se enables a slow lift off the Gel-pak or tape to a...

  • Page 77: Adjusting Die Pickup Tip Force

    Adjusting Die Pickup Tip Force The die Pickup Head is supported by two flat Cantilever Springs. The Cantilevers ensure that the Pickup Head can move up and down without any side-to-side "play" or backlash. This is essential when handling small die. The Cantilevers also provide a way to adjust the pickup force that is imposed on the die during the die ejection process.

  • Page 78: Adjusting Pickup Tip Purge (Blow Off)

    DE35-ST Operating Instructions • Raising the Pickup by one coarse step increases the pickup load by about 40 g. and lifts the Pickup by about 12.5 mil. • For general purposes, use a Pickup load of about 50 g. • Pickup load is not a critical adjustment as far as the machine operation is concerned.
  • Page 79 NOTE: Any contamination on the pickup surface (such as finger grease), or on the wafer (such as photo-resist material) will impair die release reliability. There is a trade-off between Purge Time and Purge Pressure. You will need a shorter time using a higher pressure. When using high blow off pressure, it is important to adjust the placement height so that the die is not blown out of the cavity.

  • Page 80: Die Eject System

    DE35-ST Operating Instructions Die Eject System Adjusting the Die Ejector It is important that Eject Head Needle Pattern aligns squarely with the Front/Back Axis of the machine, as shown below. Eject Needle 1. The Eject Head can be screwed up against the O-ring as far as necessary to align the needle pattern.
  • Page 81 If the air is turned ON and the needles still do not appear, it is likely that the needle height has been incorrectly set and the needles are being prevented from coming up to the required height. Press the EJECT TEST key a second time to turn off the Die Ejector then adjust the large Diameter Ring that surrounds the Ejector Actuator in a counter clockwise direction.

  • Page 82: Adjusting The Die To The Pickup Tip: De35-St

    DE35-ST Operating Instructions Adjusting the Die to the Pickup Tip: DE35-ST NOTE: For DE35-300 alignment, see System Alignment section on page 20. For reliable operation, the Pickup Tip, Die Ejector Needle and Video Cross Hair must all be positioned correctly. This is a critical adjustment for die sizes under 0.050 in. sq. or when using an edge contact, Collet style, pick up tip.
  • Page 83 NOTE: The Die Ejector is automatically switched off after about 1 minute D292469I...

  • Page 84: Die Inverter System

    DE35-ST Operating Instructions Die Inverter System The Die Inverter is an optional device used to invert or flip the die upside down before placing to the Output Fixture. In order for the die to be inverted, the die must first be picked and placed to the Die Inverter place position.

  • Page 85: Die Inverting Cycle

    Die Inverting Cycle The following is a breakdown of the Die Inverting Pick and Place Cycle. You can view each of these steps by pressing the SINGLE STEP key and stepping through the cycle using the Foot Switch. 1. DIE INVERTER TO HOME POSITION The Die Inverter will home before each Pick &...
  • Page 86 DE35-ST Operating Instructions 9. ARM GO TO DIE INVERTER CLEARANCE POS. The Pickup Arm will go to the Inverter Clearance Position. This is defaulted to the right of the Inverter Assembly. This position can be adjusted by using the Left/Right Arrow keys to move the X Axis Pickup Head as necessary. This position is provided to ensure that the Pickup Head is clear of the Inverter during the rotation step.

  • Page 87: Die Inverting Discussion

    18. DIE INVERTER PICKUP VAC OFF + DELAY The Inverter Pickup Tip Vacuum will turn OFF. This is necessary to achieve proper die transfer. There is a small delay that is not programmable. 19. GO UP TO TRAVERSE HEIGHT The Pickup Arm Z will move up to the traverse height to clear obstructions when moving.

  • Page 88: Adjust Die Inverter Home Position

    DE35-ST Operating Instructions Adjust Die Inverter Home Position The Inverter Pick Tip is attached to the Inverting Arm. This arm will rotate 180 degrees from the homed position. To ensure proper die transfer, it is necessary to ensure that the tip position on the arm is level with the system. The arm homing position can be adjusted by adjusting the position of the Homing Sensor Flag (a black anodized set screw is used for this purpose).

  • Page 89: Adjust The Inverter Flexure

    Adjust the Inverter Flexure The Inverter Flexure is the portion of the Die Inverter that receives the previously picked die. This flexure will bend downward as the die is being transferred from the Pickup Tip. The position of the Flexure is adjusted using a nylon tipped set screw. This position should be adjusted so that the Flexure Tip is level or planar with the Inverter Pickup Tip.

  • Page 90: Non-Surface Contact Operation

    DE35-ST Operating Instructions Non-Surface Contact Operation Non-Surface Contact (NSC) is a method of picking up the die which prevents any physical contact with the top surface of the die. To perform NSC die pick up from adhesive tape, the die must first be ejected from the tape. Once ejected, the die is picked up by the edges.
  • Page 91 4. LIFT NEEDLES Eject Head Needles are raised. No software adjustment is necessary; however, the needle height may need adjustment. This is a mechanical adjustment. To RAISE the needles turn the Stop Ring on the Eject Actuator counter clockwise, to LOWER the needles turn the Stop Ring clockwise.

  • Page 92: Edge Pick Up

    DE35-ST Operating Instructions 13. GO DOWN TO PLACE HEIGHT The Pickup Arm will move down to place height to place the die into the Waffle Pack. Use the UP/DOWN keys to adjust the place height. Use the ARROW keys to properly position the die into the pocket. 14.

  • Page 93: Adjust Pickup Grippers

    During the placement part of the cycle, the Gripper Fingers will open to drop the die into the Waffle Pack cavity. The placement height is not critical, for example, successful trials have been made dropping the die from the full Arm Traverse Height. Although this is the fastest mode of operation, it is not recommended.

  • Page 94: Replace Gripper Fingers

    DE35-ST Operating Instructions 5. Adjust Closing Speed & Force a. The Closing Speed of the Gripper Finger is adjusted using the Needle Valve located on top of the right Solenoid Valve. b. The Closing Force may be adjusted from zero up to about 20 grams using the Front Panel Vacuum Regulator Control located to the right of the Die Eject Speed Control.
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  • Page 96: Die Underside Inspection

    DE35-ST Operating Instructions Die Underside Inspection Systems equipped with the Underside Inspection Camera have the option to view the bottom of the die before placement, allowing the operator to observe any defects in the back side of the diode to include impurities, damage and voids. After inspection the operator is given several different placement locations to choose from: •...

  • Page 97: Underside Inspection Cycle

    Underside Inspection Cycle The following is a breakdown of the full pick and place cycle with the Underside Inspection Option: 1. TURN ON TAPE VACUUM. 2. ARM GO TO PICK POSITION. 3. GO DOWN TO PICK HEIGHT. 4. TURN ON PICKUP VACUUM. 5.

  • Page 98: Die Facet Inspection

    DE35-ST Operating Instructions Die Facet Inspection The Facet Inspection Station uses a high magnification lens to view cuts, chips, cracks and defects in the die. This station rotates the die and allows the operator to move the Optics along the length of the die while under high magnification. All sides of optical filters, or facets of laser diodes, and other devices can be observed.
  • Page 99 To adjust the Die (Pickup Tip) on the Y Axis (front to back) direction, there are mechanical adjustments made with positioning screws: 1. Place the system in Single Step Mode by pressing the SINGLE STEP key. 2. Cycle the system until the pickup is holding a die at the Down position over the Rotating Spindle of the Facet Inspection Camera.

  • Page 100: Facet Inspection Cycle

    DE35-ST Operating Instructions Facet Inspection Cycle TURN ON TAPE VACUUM. ARM GO TO PICK POSITION. GO DOWN TO PICK HEIGHT. TURN ON PICKUP VACUUM. NEEDLE SPEED = XXXX u/sec LIFT NEEDLES = XXX u WAIT N.NNN SECS FOR DIE TO LIFT. LIFT TO SEARCH HEIGHT AT XXXX u/sec.
  • Page 101 PURGE PICKUP X.XXX secs. DELAY AFTER PLACE X.XXX secs. GO TO TRAVERSE HEIGHT. FINISH CYCLE. 300um die on Rotating Spindle under LED Light D292469I...

  • Page 102: Wafer Holders

    DE35-ST Operating Instructions Wafer Holders The DE35 ST Wafer Holders are available for both expanding and non-expanding film holders for all current film frames or rings, handling up to 8-inch wafers. Expanding Wafer Holders are designed to stretch the tape mounting the wafer to make the die easier to pick by loosening the adhesive and widening the streets between the die.

  • Page 103: Film Frame Holders

    Film Frame Holders Frame Holders are a flat circular frame with notches and flats to polarize the location of the frame in the holder. This insures the die is loaded into the DE35 ST in the proper orientation every time. Frame Holders come in a variety of sizes for all wafer sizes. Operation of Expanding Film Frame Holder 1.

  • Page 104: Ring Holders

    DE35-ST Operating Instructions b. While moving the holder back and forth, rotate the frame until the streets are close to the cross hairs. c. Close the holder and use the Theta Adjust Knurled Screw to fine adjust the ring. Ring Holders Film Rings are two-piece rings approximately 1/4 in thick and various diameters for various wafer sizes.
  • Page 105 To check North/South orientation, push the Frame Holder backward and forward quickly. If the orientation is correct, the CCTV image of the saw cuts will scan accurately along the cross hairs. 9. The Wafer Holder is designed with a Theta correction of about 5 degrees. To rotate it, adjust the Theta Adjust Knurled Screw which is located at an angle on the left side of the frame holder.

  • Page 106: Des-Aum Die Eject Actuator

    DE35-ST Operating Instructions DES-AUM Die Eject Actuator The Automated Die Eject Actuator is a motorized actuator with a controller capable of fine adjustments in Needle Height and Eject Speed. The Needle Height has a range of 100 to 2000 microns, and can be adjusted in increments of 10 or 100 Microns.
  • Page 107 Blank Page D292469I...

  • Page 108: Basic Troubleshooting & Maintenance

    DE35-ST Operating Instructions Basic Troubleshooting & Maintenance Preventative Maintenance Schedule Warning: Do Not Lubricate X- or Y- Lead screws!!! Bi-monthly Maintenance 1. Grease Z-Motion Worm Gear with Teflon grease (Royce P/N 2359). 2. Lightly lubricate X-Slide Bar. Use light machine oil (such as “3 in 1” oil). Wipe off excess oil.
  • Page 109 3. Lubricate Contact Clear Switch Pin with one drop of WD-40. Apply one drop Contact Clear Switch Pin of WD-40 to contact surface. Wipe off excess. D292469I...

  • Page 110: Semi-Annual Maintenance

    DE35-ST Operating Instructions Semi-Annual Maintenance: Die Eject Stage NOTE: An example of the DE35-ST stage is shown below. If working with a DE35- 300, the stage appearance may vary but the maintenance requirements will remain the same. 1. Lubricate Cross Roller Ways For both DES-AUM &...
  • Page 111 2. Check DES Hand Wheel Assembly: a. O-rings around the outside rim of Hand Wheel (Royce P/N 2439); (1) left and (1) right. b. O-rings inside the Hand Wheel Bearing Block (Royce P/N 2440); (3) in the left side block and (3) in the right side block. c.

  • Page 112: Maintenance Procedures

    DE35-ST Operating Instructions Maintenance Procedures Setting the Camera Tube Mounting Position 1. Rotate the Focus Adjust, so that it is in the center of its travel. 2. Hold the Camera Tube and loosen the Allen Screw on the right side of the Camera Tube Mounting Block (next to the Thumb Screw).

  • Page 113: Adjusting Pickup Height At The Pick Position

    Adjusting Pickup Height at the Pick Position 1. Turn the DE35 OFF. 2. Lower the Eject Head to its lowest height. 3. Turn the DE35 ON and allow it to reset. 4. Install sample into the work holder. 5. Position a die sample over the Eject Head. 6.

  • Page 114: Eject Head Maintenance, Needle Replacement And Planarization

    DE35-ST Operating Instructions Eject Head Maintenance, Needle Replacement and Planarization. Needle Replacement and Planarization: EJT, EJTN, EJM, EJMN, EJA, EJAN Required Tooling & Supplies: ● Planarization Kit [PLNZ-TOOL-17277] o Tool rings [2607, 3359, 28477] o Flat mirror [4359] o Hex Allen key 0.035” [2976] o Hex Allen key 0.050”...

  • Page 115: Eject Head Overview

    ● Use appropriate shim for NSC needle height adjustment. ● Use piston installed in eject cap where needle access allows. ● Use small and large tool rings for most pistons. Eject Head Overview The Piston houses the eject needles and is the moving part during the needle eject. The Eject Head Body houses the piston and supplies vacuum to the wafer tape via the body cap.

  • Page 116: 1.1, 1.5 & 2.0 Diameter Eject Heads

    DE35-ST Operating Instructions Eject Needle Set Screw(s) Stainless Steel Ball(s) 1.1, 1.5 & 2.0 Diameter Eject Heads Note for piston and hex style eject heads: Based on piston design, a set screw may secure more than one needle in the piston and can vary by eject head.
  • Page 117 Piston Eject needle(s) Stainless Steel Ball(s) Piston O-ring Eject Needle Set Screw(s) Eject Head Body Hex style EJT Vacuum Tube Flange O-ring Piston Spring Hex Nut Top view Eject Needles Piston Eject Needle Set Screws Stainless Steel Ball(s) Eject Head Body Plunger style EJT Flange Locking Set Screw...

  • Page 118: Needle Replacement & Planarization Of 0.75 Inch Diameter (Small) Eject Heads

    DE35-ST Operating Instructions Eject Needles Springs Piston Stainless Steel Ball Plunger O-ring Plunger Needle Set Screws Needle Replacement & Planarization of 0.75 inch diameter (small) Eject Heads Removal of broken needles Note: If there are no broken needles, there is no need to remove eject head body. Loosen the eject needle setscrew(s) on the piston, remove the eject needle(s) from the bottom of the piston, replace and planarize.
  • Page 119 2. For both EJT and EJA styles, hold the top of the eject head body (away from the needle holes) and bottom of brass piston. Press up on the piston until the locking set screw is mid-position and remove the locking set screw using a 0.035” hex key from the slot in the threads.
  • Page 120 DE35-ST Operating Instructions 6. Return the piston into the body with spring and locking set screw, as before. Be sure that all needle holes are aligned with the holes in the eject head body. Also be sure that the mounting screw holes in the piston align with those in the eject head body. Tightened the locking set screw until it is below the threads of the eject head body.

  • Page 121: Insertion Of New Needle(S) And Planarization

    Insertion of new needle(s) and planarization. 7. Place the eject head with the topside surface down (holes that the needle tip(s) exits) on the mirror. Carefully insert the new needles into the brass piston in the appropriate holes. 8. Gently tap the back end of the needle lightly to ensure the tip of the needle is resting on the surface of the mirror.
  • Page 122 DE35-ST Operating Instructions 10. EJA only: Insert the eject head into the adapter while matching the marks on the eject head with the mark on the adapter. Secure the body and vacuum chamber together with the two screws removed in step 1, if equipped with integrated vacuum chamber (EJA).

  • Page 123: Removal Of Broken Needles

    Needle Replacement and Planarization of 1.1, 1.5 and 2.0 inch diameter (large) Eject Heads Piston style EJA Plunger style EJT Hex style EJT Removal of broken needles If the Eject Head includes Integrated Vacuum Gallery (EJA), loosen the two (or four) small set screws O-rings: around the body clamping...
  • Page 124 DE35-ST Operating Instructions Remove piston: a. Piston style eject heads: i. Carefully remove the Piston springs and set aside. Slide Piston the piston from the eject O-ring head body pressing up [2350] from the bottom of the piston (if present, remove any locking screws first) b.
  • Page 125 Insertion of new needle(s) and planarization 4. Each needle has a set screw that secures it in the brass piston. Loosen the set screw that corresponds to the needle requiring replacement. Remove the needle and replace with the new needle. Tighten the set screw with the needle slightly lower than the other needles.
  • Page 126 DE35-ST Operating Instructions 7. Inspect piston/plunger and internal o-ring for debris. Wipe off the piston and replace o-ring [2091] if worn or cracked. Apply a small amount of grease [2359] around the o-ring. Inspect eject body o-ring [2441] and replace if worn or cracked.
  • Page 127 ii. Holding top of the piston, replace the hex/locking screw and tighten. iii. Verify the spring is seated at edge of the hex nut, perpendicular to the shaft axis. The edge of the spring should not go beyond the plane edge of the hex screw. Note: If the spring cannot be set flush to plane edge of hex screw, replace the spring [PN 2092].
  • Page 128 DE35-ST Operating Instructions 9. Align the piston/flange with the eject body, making sure the needle holes and screw holes match. Gently lower the flange into the body, install the 2 screws that hold the flange to the body. 10. To check piston motion, carefully hold the eject head between your thumb and the piston to make sure it moves smoothly.

  • Page 129: Eject Needle List

    Eject Needle List How to determine the right eject needle for your application: 1. Determine the eject head diameter and/or the needle length. 2. Determine the needle diameter. 3. Determine the needle tip radius (.001 inch is standard for most applications) 4.
  • Page 130 DE35-ST Operating Instructions Blank Page D292469I...

  • Page 131: Appendices

    Appendices Appendix A: Table of Recommended Eject Heads Shortest Die Suggested Eject Eject Comments Side Head Diameter Needle Under 0.030 in. EJT-001-19450 0.75 in. EN-3 Single needle for small die 0.031 to 0.045 in. EJT-020-02447 0.75 in. EN-4 Quad needle, 0.020 in. sq. 0.046 to 0.080 in.
  • Page 132 DE35-ST Operating Instructions Blank Page D292469I...

  • Page 133: Appendix B: Table Of Recommended Pick-Up Tips

    Appendix B: Table of Recommended Pick-Up Tips Royce Instruments pick-up tools are compatible with all Royce DE35, AP+, MP300 and A45 systems. Vacuum is applied through the pick-up tip to hold the die in place during contact. Pick-up tools differ in material and geometry in order to meet varying die transfer needs.
  • Page 134 DE35-ST Operating Instructions Blank Page D292469I...

  • Page 135: Appendix C: Recommended Spare Parts

    Appendix C: Recommended Spare Parts Note: To order process specific parts such as Eject Head parts, contact Royce Customer Service at customerservice@royceinstruments.com, phone: (707) 255-9078 Immediate Production Back Up Spare Parts These items should be readily at hand for immediate replacement and constitute consumable items.

  • Page 136: Long Term Spare Parts

    DE35-ST Operating Instructions DES X-Y Stage 2336 Spring, eject head position adjustment 1024 Pneumatic ejector diaphragm 2310 Pneumatic ejector diaphragm spring 14305 AUM motorized ejector drive belt Wafer Holder 16158 Replacement Destaco wafer holder clamp Long Term Spare Parts These items are not expected to require replacement for several years, however due to the high speed of technological change;...

  • Page 137: Appendix D: Table Of Fluoroware Waffle Pack Dimensions

    Appendix D: Table of Fluoroware Waffle Pack Dimensions The following table lists the dimensions of many common FLUOROWARE H20 (2 in. square) waffle packs. The list covers most of the Waffle Packs listed in the 1987 catalog and is shown in catalog order.
  • Page 138 DE35-ST Operating Instructions PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-040 0.0840 0.0840 H20-040-24 0.0840 0.0840 H20-045 0.0833 0.0833 H20-045-24 0.0840 0.0840 H20-047 0.0833 0.0833 H20-048 0.1667 0.1667 H20-049 0.0630 0.0630 H20-050-16 0.0833 0.0833 H20-050-24 0.0833 0.0833 H20-050-08 0.1667 0.1667...
  • Page 139 PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-075-17 0.1100 0.1100 H20-075-18 0.0930 0.0930 H20-075-24 0.0930 0.0930 H20-080 0.1667 0.1667 H20-080-11 0.1667 0.1667 H20-080-50 0.1680 0.1680 H20-080-24 0.1340 0.1340 H20-081 0.1670 0.1670 H20-085-18 0.1667 0.1667 H20-085-24 0.1660 0.1660 H20-090-11 0.1667 0.1667...
  • Page 140 DE35-ST Operating Instructions PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-120-24 0.1670 0.1670 H20-122 0.1600 0.1600 H20-124 0.1400 0.1400 H20-130-16 0.1667 0.1667 H20-130-24 0.1667 0.1667 H20-130 0.1667 0.1667 H20-136 0.1940 0.1940 H20-141 0.1940 0.1940 H20-150-16 0.1667 0.1667 H20-150-24 0.1667 0.1667...
  • Page 141 PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-215 0.2870 0.2870 H20-219 0.2900 0.2900 H20-220 0.2960 0.2960 H20-229 0.2930 0.2930 H20-230 0.2700 0.2700 H20-232 0.2790 0.2790 H20-240 0.2880 0.2880 H20-250-24 0.2970 0.2970 H20-250-30 0.2500 0.2500 H20-258 0.3120 0.3120 H20-269 0.4600 0.4600...
  • Page 142 DE35-ST Operating Instructions PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-404 0.1667 0.1667 H20-405 0.1667 0.1667 H20-409 0.0833 0.0833 H20-410 0.2500 0.2500 H20-411 0.4220 0.4220 H20-414 0.1667 0.1667 H20-414-60 0.1667 0.1667 H20-414-24 0.1667 0.1667 H20-417 0.2500 0.2500 H20-420 0.5550 0.5550...
  • Page 143 PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-48088 0.1020 0.1450 H20-59046 0.0840 0.0850 H20-59109 0.1400 0.1900 H20-59157 0.1090 0.2170 H20-60090 0.1700 0.1800 H20-63077 0.0940 0.1080 H20-63650 0.1100 0.9000 H20-65125 0.1000 0.1700 H20-68078 0.1230 0.1130 H20-72090 0.1014 0.1250 H20-73091 0.1440 0.1720...
  • Page 144 DE35-ST Operating Instructions PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-95235 0.1450 0.2950 H20-99144 0.1260 0.1760 H20-99174 0.1150 0.1900 H20-99199 0.1667 0.3750 H20-100120 0.1460 0.1740 H20-100145 0.1250 0.1760 H20-101146 0.1250 0.1750 H20-100220 0.1500 0.2700 H20-110145 0.1740 0.2160 H20-113122 0.1750 0.1740...
  • Page 145 PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-140250 0.1900 0.2900 H20-142173 0.2190 0.1770 H20-145245 0.2500 0.3450 H20-149199 0.2400 0.2900 H20-149249 0.3300 0.5000 H20-150250 0.2400 0.3400 H20-150285 0.1950 0.3350 H20-155117 0.1760 0.2190 H20-160335 0.3300 0.8100 H20-162299 0.2030 0.3290 H20-165149 0.2950 0.2950...
  • Page 146 DE35-ST Operating Instructions PART NUMBER FRONT/BACK FRONT/BACK LEFT/RIGHT LEFT/RIGHT POCKETS SPACING POCKETS SPACING H20-200244 0.2950 0.2950 H20-200265 0.3400 0.3440 H20-200530 0.2500 0.5820 H20-201248 0.2850 0.3400 H20-250750 0.3400 0.8500 H20-279359 0.3450 0.4300 H20-284296 0.3400 0.3280 H20-300850 0.3500 0.8800 H20-310460 0.3500 0.5000 H20-345445 0.5000 0.5000...

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