SEMC TF20 User Manual page 12

b. Click "calculate atlas"
c. Click "play" to collect atlas
13. Gain references. For gains, it does not matter if objective aperture is in or out. Must be done over
vacuum.
a. EN preset gains
i. Prepare beam for target dose = 30 - 60 electrons/Å
bigger than second circle on flu screen)
ii. Dark reference
1. Close column valves and flu screen down
2. In "correction" node → "settings" → see LEFT image below → "dark"
and "both channels"
Last updated 10/29/2020
2
(SS 5, beam diameter ~ 2X
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