Olympus CIX100 Instructions Manual
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Olympus CIX100 Instructions Manual

Cleanliness inspector system
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Instructions
Sample Holders
OLYMPUS CIX100 Cleanliness Inspector System
English
Optical Microscope Accessory

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Summary of Contents for Olympus CIX100

  • Page 1 Instructions Sample Holders OLYMPUS CIX100 Cleanliness Inspector System English Optical Microscope Accessory...
  • Page 2 Any copyrights relating to this manual shall belong to EVIDENT Technology Center Europe GmbH. We at EVIDENT Technology Center Europe GmbH have tried to make the information contained in this manual as accurate and reliable as possible. Nevertheless, EVIDENT Technology Center Europe GmbH disclaims any warranty of any kind, whether expressed or implied, as to any matter whatsoever relating to this manual, including without limitation the merchantability or fitness for any particular purpose.

  • Page 3: Table Of Contents

    8.1 Mounting and inspection of filter membranes in the CIX100 system 8.2 Mounting and inspection of tape lift samples in the CIX100 system 8.3 Mounting and inspection of particle trap samples in the CIX100 system 9 Exchanging the stage insert of a CIX100 system for metallurgical applications 45...

  • Page 4: Sample Holders For The Olympus Cix100 Cleanliness Inspector System

    47 mm and 55 mm) with either white or black background, particle traps and tape lift samples can be analyzed in your CIX100 system. This manual describes how to integrate each of these optional sample holders and sample types to your CIX100 system for optimal usability.

  • Page 5: Available Sample Holders And Sample Types

    Sample Holders 1.4 Available sample holders and sample types E9701689 HW-CIX-FH-25B E9701690 HW-CIX-FH-47B E9701691 HW-CIX-FH-55B E9701692 HW-CIX-FH-25W E9701591 HW-CIX-FH-47W E9701592 HW-CIX-FH-55W Sample type name in CIX ASW software: uncovered membrane clamp desk (white or black)
  • Page 6 OLYMPUS CIX100 Cleanliness Inspector System E9701695 HW-CIX-HTL Sample type name in CIX ASW software: tape lift metallic frame with marks for tape widths 50 mm and 19 mm black base with white surface back side marked with dots E9701696 HW-CIX-HPT Sample type name in CIX ASW software: particle trap...
  • Page 7 Sample Holders The following table gives an initial indication of which sample holder is recommended for which application in the CIX100 system. Article Short article Article code Examples of application fields number description Holder with black desk for filter Holders with black background can be used to...
  • Page 8 This stage insert is a flat plate which can be stage insert (not mounted to the CIX100 stage. This is useful E9701694 HW-CIX-SIFP compatible with when CIX100 is to be used for metallurgy. The sample holders listed samples can be placed on top of this flat plate. above)

  • Page 9: Safety

    Sample Holders Safety For all samples used in the CIX100 system, make sure to follow all the instructions concerning size and weight specified in the System Setup Guide. Please read the CIX100 System Setup Guide carefully before using your CIX100 system or installing new hardware to your system.
  • Page 10 When the CIX100 software is used or the joystick is used to control the stage movement, make sure that nothing hinders the movement of the system.
  • Page 11 Sample Holders ATTENTION Make sure that the filter desk of the filter holders and the white surface of the sample holder for tape lift samples are clean and free of dust. Do not touch these surfaces directly to avoid fat transmission. If necessary, clean the surfaces with compressed air or with a dust free lens paper and a few drops of alcohol.

  • Page 12: Setup Of Olympus Cix100 Cleanliness Inspector System At Time Of Delivery

    Setup of OLYMPUS CIX100 Cleanliness Inspector System at time of delivery The CIX100 system is delivered in a state ready for the inspection of dark and reflective particles on white, matt filter membranes. The standard filter holder for membranes of 47 mm diameter is included and can be used directly with a filter membrane.

  • Page 13: Adding New Sample Types To Your Cix100 System

    Sample Holders Adding new sample types to your CIX100 system For adding new sample types (available with CIX ASW software version number 1.5.2 or higher), please make sure to log into CIX ASW software as administrator. Then you have full access to the system configuration on the start page of your CIX ASW software.
  • Page 14 OLYMPUS CIX100 Cleanliness Inspector System sample, which is always activated in the CIX100 system. 4. Select the appropriate other sample type or types you want to activate. If you are unsure, please compare with the list of sample types and holders...

  • Page 15: Calibrating Shading Correction For A New Sample Type

    [Calibrate]. In the following dialog box, you find a list of observation methods. In your CIX100 system, each observation method represents a list of software settings optimized for the analysis under specific optical conditions. Each sample type requires its own observation method. If...
  • Page 16 OLYMPUS CIX100 Cleanliness Inspector System Each observation method is marked with a tick if the shading correction has been performed already and marked with a yellow exclamation mark if the shading correction is still missing. 3. Select an observation method which is still undefined. If you start on top, you will start with the new sample type without real color slider selected.
  • Page 17 Sample Holders 4. Skip the acquisition of the dark current correction image. The dark current calibration does not need to be repeated here as it was already calibrated during installation (i.e. keep the check box checked) and click [Next>].
  • Page 18 5. Select all check boxes in the following dialog except [White Balance] and click [Next >]. All objectives your CIX100 system is equipped with are listed in this dialog and must be calibrated. Standard objectives are 1.25x, 5x and 10x.
  • Page 19 Sample Holders 6. Go to an empty part of the sample and defocus such that no structures are visible any more on the display area on the left side. Usually, this can be done by moving the stage a low position of the Z- range.
  • Page 20 OLYMPUS CIX100 Cleanliness Inspector System 7. Click [Next>] to allow the system to acquire the correction images for all objectives in your system. A green bar indicates the progress. Do not change any settings until the acquisition has been finished.
  • Page 21 Sample Holders 9. Click [Finish] when all images have been acquired. 10. Follow the instruction in the message and click [OK].
  • Page 22 OLYMPUS CIX100 Cleanliness Inspector System 11. Repeat these calibration steps until the shading correction is calibrated for all observation methods listed in the calibration dialog box. Whenever the Real Color Slider is applied for a calibration, the system will remind you to insert or remove the real color slider with a pop-up window.
  • Page 23 Sample Holders 12. When the process is finished successfully, the [Shading Correction] entry will be marked with a blue tick in the [Calibration] dialog box indicating that a white balance has been performed for all observation methods now.

  • Page 24: Calibrating White Balance For A New Sample Type

    [Hardware] > [Device List] > [Device settings] dialog box as described in chapter "Adding new sample types to your CIX100 system" on page 13. These may be tape lift, particle trap, or covered membrane.
  • Page 25 2. Select [White balance] and click [Calibrate]. In the following dialog box, you find a list of observation methods. In your CIX100 system, each observation method reflects a list of optimized software settings for the analysis under specific optical conditions. Each sample type requires its own observation method. If...
  • Page 26 OLYMPUS CIX100 Cleanliness Inspector System Each observation method is marked with a tick if the white balance has been performed already and marked with a yellow exclamation mark if the white balance has not yet been performed. 3. Select an observation method which is still undefined. If you start on top, you will start with the new sample type without real color slider selected.
  • Page 27 Sample Holders 8. All objectives your CIX100 system is equipped with are listed in this dialog box and must be calibrated. Standard objectives are 1.25x, 5x and 10x.
  • Page 28 OLYMPUS CIX100 Cleanliness Inspector System 9. Approximately focus the sample and image a clean part of sample without any particulate contamination.
  • Page 29 Sample Holders 10. Follow the instructions of the pop-up windows until all images are acquired. A green bar indicates the progress. Please do not change any settings until the acquisition has been finished.
  • Page 30 OLYMPUS CIX100 Cleanliness Inspector System 11. Click [Finish] when all images have been acquired. 12. Follow the instruction and click [OK].
  • Page 31 Sample Holders 13. If the sample was underexposed for a certain objective, repeat the process for the respective objective and increase the exposure time before acquiring the image. 14. Repeat these calibration steps until the white balance is calibrated for all observation methods listed in the calibration dialog box.
  • Page 32 OLYMPUS CIX100 Cleanliness Inspector System Whenever the Real Color Slider is applied for a calibration, the system will remind you to insert or remove the real color slider with a respective pop- up window. Please follow these instructions and click [OK] after you have inserted or removed the slider.

  • Page 33: Performing An Inspection With Different Sample Types With A Cix100 System

    Here, only the steps in a standard inspection configuration are explained which are specific when new sample types have been added to the system. For all other functionality of your CIX100 software, please refer to the CIX ASW software’s help. 1. Start a sample inspection.
  • Page 34 [Device Settings] dialog box, each of these new sample types will be listed in a drop down menu. Select the sample type you are currently using. By default the last sample type used with your CIX100 system will always be activated here.
  • Page 35 Sample Holders To do this, click [Calibrate Stage Limits]. CAUTION - The stage is moving! Follow the instructions given by the dialog box and described in the CIX ASW software’s help. For a recalibration of Z, mark [Z Axis] in the appropriate step. After the calibration, your system automatically returns to the [Mount Sample] step of your inspection workflow.

  • Page 36: Best Practices For The Versatile Sample Holders For Your Cix100 System

    To open the filter holder, rotate the clamp, remove any filter from the desk, place a new filter centrally on the desk. Then slide the filter holder into sample position 1 of the CIX100 stage insert by placing it at the front of the stage insert and sliding it backwards.
  • Page 37 Sample Holders...

  • Page 38: Mounting And Inspection Of Tape Lift Samples In The Cix100 System

    It is recommended to follow the instructions described in the ASTM E1216-11 standard reapproved in 2016 for tape lift inspection with the CIX100 system. The recommended type of tape is 3M No. 480. It is not guaranteed that other types of tapes can be used with the CIX100 system.
  • Page 39 4. Rotate the frame such that the sticky side of the tape faces upwards. The frame is secured by magnets. 5. Slide the tape holder into the CIX100 stage insert in position 1 in the same way as the standard filter holder. The dots imprinted in the sample holder...
  • Page 40 OLYMPUS CIX100 Cleanliness Inspector System If a rectangular inspection area is to be used, specify this in the inspection configuration. Also, a fixed inspection area size can be defined in the inspection configuration.

  • Page 41: Mounting And Inspection Of Particle Trap Samples In The Cix100 System

    8.3 Mounting and inspection of particle trap samples in the CIX100 system Only use particle traps recommended by EVIDENT for application in the CIX100 system. The “HW-CIX-HPT” holder is specifically for use with the “HW-CIX-PT-10” particle traps, which is a pack of ten traps.
  • Page 42 OLYMPUS CIX100 Cleanliness Inspector System...
  • Page 43 Sample Holders...
  • Page 44 OLYMPUS CIX100 Cleanliness Inspector System...

  • Page 45: Exchanging The Stage Insert Of A Cix100 System For Metallurgical Applications

    Sample Holders Exchanging the stage insert of a CIX100 system for metallurgical applications When wanting to inspect metallurgical samples, it may be sensible to exchange the stage insert with a stage insert without openings for sample holders. When wanting to remove the stage insert, follow all instructions given in the stage manual.
  • Page 46 201, 202, 203 (2nd Floor), Tower C, Unitech Cyber Park, Sector 39, Gurgaon-122022, India Evident Australia Pty Ltd. Level 4, 97 Waterloo Road, Macquarie Park, NSW 2113, Australia * The product might not be available in all countries and via all distributors listed here. 本製品は、ここに記載されている国や販売店では入手できない場合があります。 该产品可能不会在所有国家和通过这里列出的所有分销商提供。 E97TDO-6141-00 TDO-MANUAL-CIX100-ACCESSORIES...

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