Strasbaugh nTellect 7AF Operation And Maintenance Manual

Wafer grinder

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nTellect

(Model 7AF)

Wafer Grinder

Operations and

Maintenance Manual

™

S T R A S B A U G H

825 Buckley Road

San Luis Obispo, California 93401

Phone

(805) 541-6424

Fax:

(805) 541-6425

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Page 1 nTellect ™ (Model 7AF) Wafer Grinder Operations and Maintenance Manual S T R A S B A U G H 825 Buckley Road San Luis Obispo, California 93401 Phone (805) 541-6424 Fax: (805) 541-6425...
Page 3 Operations and Maintenance Manual Table of Contents TABLE OF CONTENTS 1 - I HAPTER NTRODUCTION About this Manual Contents and Purpose Update Sections Document Conventions Touch Screen Control Panel At the PC Keyboard Step-By-Step Instructions About the Machine Mechanical Components Electrical Distribution and Control Safety General Operation...
Page 4 Strasbaugh (Model 7AF) Wafer Grinder Tellect 2 - I HAPTER NSTALLATION Overview Step 1 - Unpacking/Inspection Preparation for Installation Step 2 - Machine Placement For Manufacturing Locations with a Wide Access Door (70 Inches or Greater) For Manufacturing Locations with a Narrow Access Door...
Page 5 Operations and Maintenance Manual Table of Contents 3 - P HAPTER HYSICAL ESCRIPTION Overview Cabinetry Door Numbering System Service Doors (Doors 7, 8 , 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, and 21) Disconnect Enclosure Door (Door 20) Operator Doors (Doors 5 and 6) Cassette Turrets (Doors 1, 2, 3, and 4) Interlock Safety Switches...
Page 6 Strasbaugh (Model 7AF) Wafer Grinder Tellect 4 - M HAPTER ECHANICAL ESCRIPTION Overview Grinding Area Bridge Assembly Spindle Assemblies Coarse/Fine Spindles Left/Right Work Chucks Air Bearing Spindles Left/Right Digital Measurement Probes Left/Right Conditioning Arms Wafer Handling Area Robot Pre-Aligner Spin-Rinse Station...
Page 7 Operations and Maintenance Manual Table of Contents 6 - P HAPTER OWER ISTRIBUTION Introduction AC Distribution DC Distribution Power Up Interlocks 7 - P HAPTER LUMBING ESCRIPTION Clean Dry Air System Vacuum System Water System Exhaust System Drain System 8 - O HAPTER PERATOR UNCTIONS...
Page 8 Strasbaugh (Model 7AF) Wafer Grinder Tellect Basic Operation Summary Problems and Error Messages 1 - Powering Up 2 - Homing the Machine Check for Obstructions and Display the Home Machine menu Home the Machine Automatically Home Individual Servos Manually 3 - Checking Utilities...
Page 9 Operations and Maintenance Manual Table of Contents 9 - M HAPTER ACHINE ETUP Overview Wafer Recipes Menu Grinding Sequence Recipe Parameter Settings and Information Available at the Wafer Recipes Menu Coarse and Fine Grind Recipe Steps and Parameters Wafer Parameters Estimated Throughput in Wafers Per Hour Example Recipes Choices Available at the Wafer Recipes Menu...
Page 10 Strasbaugh (Model 7AF) Wafer Grinder Tellect 10 - P HAPTER REVENTIVE AINTENANCE CHEDULES Overview Daily Preventive Maintenance Schedule 7-Day or 5,000 Wafers Preventive Maintenance Schedule 30-Day or 20,000 Wafers Preventive Maintenance Schedule 180-Day or 80,000 Wafers Preventive Maintenance Schedule 365-Day or 160,000 Wafers...
Page 11 Operations and Maintenance Manual Table of Contents Before You Begin Level the Horizontal Rails of the Bed III. Level the Lower Left and Right Spindle Assemblies Mount the Fringe Plates to the Lower Spindle Assemblies and Adjust Adjust Upper Spindle Assemblies to Positions Parallel with Lower Right Spindle Adjust Lower Left Spindle Assembly Parallel to Upper Spindle Assemblies VII.
Page 12 Strasbaugh (Model 7AF) Wafer Grinder Tellect 12 - S HAPTER OFTWARE ALIBRATION ROCEDURES Overview Menus Used in Maintenance and Calibration Machine Maintenance Menu Information Available at the Maintenance Menu Choices Available at the Machine Maintenance Menu Using the Machine Maintenance Menu's Manual Controls - An Example...
Page 13 Operations and Maintenance Manual Table of Contents CHAPTER 13 - PNEUMATIC ADJUSTMENTS Overview Clean Dry Air Incoming Clean Dry Air Left/Right Grind Chamber Seals Left/Right Chuck Conditioning Arms Up Left/Right Chuck Conditioning Arms Engage Left/Right Chuck Conditioning Arms Brush Rotation Left/Right Chuck Conditioning Arms Downforce Automatic Lubricator Send 1 Cassette Turret Rotary Actuator...
Page 14 Strasbaugh (Model 7AF) Wafer Grinder Tellect 14 - T HAPTER ROUBLESHOOTING Overview Messages Displayed on the Control Computer Screen Take Precedence! Assumption Work and Spin Chuck Homing Hardware Machine Operation Checkout Normal Operating Conditions and Strategies for Maintaining Them Grind Force...
Page 15 Operations and Maintenance Manual Table of Contents Grind Wheel Coarse Wheel is Down Fine Wheel is Down Load Cell Coarse Z Load Cell Fine Z Load Cell Prealigner Prealigner Error Probes Left Probe Right Probe Left Probe is Down Right Probe is Down Reference Bad Reference Robot Communication...
Page 16 Strasbaugh (Model 7AF) Wafer Grinder Tellect 15 - S HAPTER OFTWARE AND ONTROL OMPUTER AINTENANCE Overview Messages Displayed on the Control Computer Screen Take Precedence! Assumption Backup and Recovery Software Version Required Backup Restore Protecting Recipe Files--Temporary Security Measures Software Version Required...
Page 17 Operation and Maintenance Manual Model 7AF Wafer Grinder Appendices Appendix A Calibration Variables Listing Appendix B Engineering Drawings (bound under separate cover) Appendix C Customer Parts List Appendix D Electrical Input/Output System Address List Appendix E Vacuum Station Appendix F Maintenance Log Sheets Appendix G Manufacturers' Documentation Sheets...
Page 18: Table Of Contents
Strasbaugh Table of Contents List of Figures Figure 2-1 Top View of Wafer Handling Section with References to Procedure Steps 2-18 Figure 2-2 Side View Detail of Alignment Leg and Its Adjacent Caster 2-19 Figure 2-3 Utility Connections 2-23 Figure 3-1...
Page 19 Operation and Maintenance Manual Model 7AF Wafer Grinder Figure 8-16 Example of a Work Chuck Dressing Recipe 8-63 Figure 8-17 Example of a Work Chuck Truing Recipe 8-63 Figure 9-1 Wafer Recipes Menu Figure 9-2 Wheel and Chuck Recipes Menu 9-21 Figure 11-1 Lower Spindle Side to Side Adjustment...
Page 20 Strasbaugh Table of Contents Menu Information Locator The table below lists the 7AF software menus alphabetically together with the location(s) in the Operation and Maintenance manual at which detailed information for each may be found. Menu Where to Find Details - Manual...
Page 21 Strasbaugh nTellect (Model 7AF) Wafer Grinder Operations and Maintenance Manual Revision Record Changes shown in reverse-chronological order (latest changes on top). File this notice after the Table of Contents. Date Change(s) Pages Affected / Actions June 14, 2004 TOC, page TOC-7; Chapter 1, page 8;...
Page 22 Jan. 08, 1996 Revised preventive maintenance Replace pages 10-1 through 13 with 10-1U schedules. through 16U. Oct. 30, 1995 Vacuum connections changed. Grind Replace title page, Main Table of Contents, Wheel and Work Chuck Change List of Figures, and Menu Information procedures moved to Chapter 11.
Page 23 Operations and Maintenance Manual Introduction Introduction • About the Manual • About the Model 7AF Wafer Grinder • Safety • Guarantee/Warranty Certificate Version 1.2 - June 2004 1 - 1...
Page 24 Strasbaugh Tellect (Model 7AF) Wafer Grinder INTRODUCTION About the Manual Contents and Purpose Update Sections Document Conventions Touch Screen Control Panel At the PC Keyboard Step-By-Step Instructions About the Machine Mechanical Components Electrical Distribution and Control Safety General Operation Visual Hazard Alerts...
Page 25 PDATE ECTIONS Appendix E of the Operations and Maintenance Manual provides a location for filing manual update sheets supplied by Strasbaugh. Maintain the Update Sections and check them regularly. Version 1.2 - June 2004 1 - 3...
Page 26 Strasbaugh Tellect (Model 7AF) Wafer Grinder OCUMENT ONVENTIONS OUCH CREEN PERATOR AND AINTENANCE ROCEDURES Selections to be made on the control computer's touch screen are represented in the manual in a two-column format with the screen symbol to be selected displayed in bold type in the left column.
Page 27 Operations and Maintenance Manual Introduction ONTROL ANEL PERATOR AND AINTENANCE ROCEDURES Characters in all caps in angled brackets ("<", ">") represent a single push button on the control panel. Example: <MACHINE ON> is the symbol used for the Machine On push button in procedures shown in this manual.
Page 28 Fully automated wafer handling provides cassette to cassette processing. To achieve these goals Strasbaugh engineers have incorporated a number of enhancements over previous grinders built by Strasbaugh and by its competitors.
Page 29 Operations and Maintenance Manual Introduction ECHANICAL OMPONENTS The machine consists of two major mechanical components (the grinding area and the wafer handling area), each enclosed within separate machine cabinet sections which detach for easy access to internal components. Together the cabinet sections form a grind area and protective user enclosure to provide a sturdy, safe and clean grinding process: •...
Page 30 Strasbaugh Tellect (Model 7AF) Wafer Grinder LECTRICAL ISTRIBUTION AND ONTROL The Model 7AF Wafer Grinder’s electrical distribution and control systems are designed to provide all necessary control functions for polish process optimization while maintaining the reliability and ease of use necessary for the production environment.
Page 31 Operations and Maintenance Manual Introduction SAFETY The Model 7AF Wafer Grinder has been designed for safe operation. However, caution should be exercised while operating this machine. Failure to adhere to the following safety instructions and to good safety practices may result in injury to personnel or damage to the machine.
Page 32 Strasbaugh Tellect (Model 7AF) Wafer Grinder ISUAL AZARD LERTS To aid the user in safe operation of the 7AF, visual hazard alert graphics are placed in appropriate locations throughout the Operations and Maintenance manual. The graphics alert the user to the existence of pinch points, areas of potential entanglement, possible hot surfaces, chemical hazards, and electrical hazards on the machine.
Page 33 Operations and Maintenance Manual Introduction Alert Graphic: Symbol: • pinch points When to Be Aware: • whenever machine parts are moving. • anytime immediately before and during auto mode operation. • anytime immediately before and during manual operation. • Note that diamond wheels and work chucks may continue to rotate briefly after the cycle is completed.
Page 34 Strasbaugh Tellect (Model 7AF) Wafer Grinder Alert Graphic: Symbol: • pinch points When to Be Aware: • while the machine is being removed or installed. • when moving the machine (as in during installation). Notes: When moving the machine, always use a forklift. Follow the detailed instructions for forklift use with the machine found in the Installation chapter of this manual.
Page 35 Operations and Maintenance Manual Introduction PRAYER • Use caution with the sprayer. • Direct spray ONLY IN THE WORK AREA. It is inadvisable to splash electrical and mechanical components sensitive to water with careless spraying. AFETY NTERLOCK WITCHES • Overriding door safety interlocks for the purpose of observing results of maintenance adjustments is not recommended.
Page 36 Strasbaugh Tellect (Model 7AF) Wafer Grinder UARANTEE ARRANTY ERTIFICATE 1 - 14 Version 1.2 - June 2004...
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Page 39 Operations and Maintenance Manual Installation Installation • Unpacking/Inspection • Machine Placement • Leveling the Machine Sections • Utility Requirements • Utility Connections • Initial Alignments - Completing the Installation Version 1.2 - June 2004 2 - 1...
Page 40 Strasbaugh (Model 7AF)Wafer Grinder Tellect INSTALLATION Overview Step 1 - Unpacking/Inspection Preparation for Installation Step 2 - Machine Placement For Manufacturing Locations with a Wide Access Door (70 Inches or Greater) For Manufacturing Locations with a Narrow Access Door (Greater than 50 Inches but Less than 70 Inches)
Page 41 Operations and Maintenance Manual Installation INSTALLATION OVERVIEW The Model 7AF Wafer Grinder consists of two machine cabinet sections, grinding and wafer handling, bolted together at the right side of the machine and hinged at the left. The machine sections separate, and the handling section rolls away from the grinding section to provide internal access to both sections for adjustments and maintenance.
Page 42 Strasbaugh (Model 7AF)Wafer Grinder Tellect STEP 1 - UNPACKING/INSPECTION The Model 7AF Wafer Grinder is shipped from the factory in one unified section--with the grinding area and wafer handling area bolted together in the machine operation configuration. The handling section is attached to the grinding section by a hinge at the left side of the machine and two 3/8-16 setscrew/wing nut sets located at the right side of the machine, as viewed from the front.
Page 43 Operations and Maintenance Manual Installation REPARATION FOR NSTALLATION Tools Required • 9/16-in. open-end wrench Procedure Carefully remove the protective plastic covers. Remove the padded block from beneath the monitor. The machine is attached to the pallet with lag screws fitted through holes in the cabinet base frame (grinding area) and with L brackets (handling area).
Page 44 Strasbaugh (Model 7AF)Wafer Grinder Tellect STEP 2 - MACHINE PLACEMENT The Model 7AF Wafer Grinder must be located on a FLAT, LEVEL SURFACE. The machine requires a minimum of THREE FEET of CLEARANCE around all sides for service access. The necessary connections for electrical, plumbing, and exhaust utilities are all accessible from the rear of the machine.
Page 45 Operations and Maintenance Manual Installation Tools Required • forklift equipped with 50-inch tines • dolly • 9/16-in. open end wrench • 3/16-in. hex key • two 1-in. x 3 1/2-in. x 1/2-in. bearing clamps For Manufacturing Locations with a Wide Access Door (70 Inches or Greater) Use a FORKLIFT to lift the machine from its pallet.
Page 46 Strasbaugh (Model 7AF)Wafer Grinder Tellect e. Replace the three 3/8-16 screws removed earlier. Using the six 1/4-20 socket head screws removed from the shipping bracket, install the two 1-in. x 3 1/2-in. x 1/2-in. bearing clamps at the rear of the bridge.
Page 47 Operations and Maintenance Manual Installation STEP 3 - LEVELING THE TWO MACHINE SECTIONS The Model 7AF Wafer Grinder must be level for proper operation. UMMARY The list below summarizes the procedures needed to level the two machine sections. The sections following provide detailed steps for each. Level the grinding area section.
Page 48 Strasbaugh (Model 7AF)Wafer Grinder Tellect RINDING ABINET EVELING ROCEDURE Tools Required • standard bubble level • 15/16-in. open end wrench • 3/8-in. open end wrench EVELING The grinding section of the machine has four leveling feet. The leveling feet can be raised or lowered by turning the hex head adjustment bolt above each foot after loosening the locking nut.
Page 49 Operations and Maintenance Manual Installation Right Side GOALS: (1) A bubble level reads LEVEL when placed (horizontally) on top of the floor of the machine cabinet, inside door 17, (2) A bubble level reads PLUMB when placed (vertically) at the right side front of the machine at the intersection of the top and bottom machine cabinets.
Page 50 Strasbaugh (Model 7AF)Wafer Grinder Tellect Move the bubble level to the right side exterior front of the machine, positioning it vertically at the intersection of the top and bottom machine cabinets. a. If the reading meets GOAL 2, skip to Step 7., below.
Page 51 Operations and Maintenance Manual Installation Left Side GOALS: (1) A bubble level reads LEVEL when placed (horizontally) on top of the floor of the machine cabinet, inside door 14, (2) A bubble level reads PLUMB when placed (vertically) at the left side front of the machine at the intersection of the top and bottom machine cabinets.
Page 52 Strasbaugh (Model 7AF)Wafer Grinder Tellect GOAL Adjust the leveling feet until 2 (above) is met: a. Using a 15/16-in. open end wrench, rotate the locking nut of each locking nut and adjusting bolt pair counterclockwise to loosen. b. Using a 3/8-in. open-end wrench, rotate each hex head adjusting bolt counterclockwise or clockwise (up or down) as needed to meet GOAL 2.
Page 53 Operations and Maintenance Manual Installation Adjust the leveling feet until the goal is met: a. Using a 15/16-in. open end wrench, rotate the locking nut of each locking nut and adjusting bolt pair counterclockwise to loosen. b. Using a 3/8-in. open-end wrench, rotate each hex head adjusting bolt counterclockwise or clockwise (up or down) as needed to meet the goal.
Page 54 Strasbaugh (Model 7AF)Wafer Grinder Tellect ANDLING ABINET EVELING ROCEDURE Tools Required • standard bubble level • 3/4-in. socket or open end wrench • 5/8-in. open end or socket wrench • 3/16-in. hex key • feeler gauge EVELING ASTERS The handling section of the machine has two leveling casters.
Page 55: Figure 2-1 Top View Of Wafer Handling Section With References To Procedure Steps
Operations and Maintenance Manual Installation Figure 2-1 Top View of Wafer Handling Section with References to Procedure Steps Version 1.2 - June 2004 2 - 17...
Page 56 Strasbaugh (Model 7AF)Wafer Grinder Tellect Figure 2-2 Side View Detail of Alignment Leg and Adjacent Caster Adjust the alignment leg (cam follower ball bearing) located at the right side of the machine and extending from the handling section to the grinding section: a.
Page 57 Operations and Maintenance Manual Installation Adjust the adjacent caster: GOAL: The gap between the floor and the bottom of the caster should between 1/16 and 1/32-in. when measured with a feeler gauge. a. Using a 3/4-in. socket or open end wrench, loosen the 1/2-in. locking nut. b.
Page 58 Note: The vacuum connection to the machine will collect some process water and silicon particles through the vacuum line to the vacuum source. An isolated vacuum pump with a self-contained drain system is available from Strasbaugh as a machine option. For use with a facility vacuum supply, a wall mountable vacuum/waste separator is also available.
Page 59 Operations and Maintenance Manual Installation STEP 5 - CONNECTING UTILITIES TO EXTERNAL SOURCES The following illustration and paragraphs explain the procedure for completing the utility connections. The engineering drawings in the Appendices of this manual provide further information regarding locations for utilities connections. For further details on plumbing, see the Plumbing Description chapter of this manual.
Page 60 Strasbaugh (Model 7AF)Wafer Grinder Tellect Figure 2-3 Utility Connections UTILITY REQUIREMENT CONNECTION INDUSTRIAL WASTE DRAIN gravity feed 2-inch pipe EXHAUST 250 CFM at 1/2-in. static pressure 5-inch diameter DI WATER IN 6 GPM at 30 PSI min. 1/2-inch tube DI WATER OUT 6 GPM at 30 PSI min.
Page 61 Operations and Maintenance Manual Installation LECTRICAL The electrical supply [I] is connected to the main machine circuit breaker (208 VAC), which in turn is connected to the main machine circuit breaker disconnect enclosure door handle assembly . The circuit breaker is mounted on the inside of the electrical disconnect box.
Page 62 Strasbaugh (Model 7AF)Wafer Grinder Tellect LEAN The clean dry air supply [H], which supplies air to the pneumatic system and the air bearing spindles, is connected via a 1/2-inch tube connector located at the lower rear of the machine. The supply should be flexible tubing designed to accommodate the specified flow and pressure.
Page 63 The vacuum clean dry air supply [J] connection is a 1/4-inch tube inlet located at the lower rear of the machine. The fitting is on the system side of the Strasbaugh vacuum system.
Page 64 Strasbaugh (Model 7AF)Wafer Grinder Tellect NDUSTRIAL ASTE The industrial waste drain [A], the machine’s main drain, is connected via a two- inch pipe a the lower rear of the machine. The industrial waste drain carries DI water and residual amounts of product removal residue;...
Page 65 Operations and Maintenance Manual Installation STEP 6 - INITIAL ALIGNMENTS - COMPLETING THE INSTALLATION After following the steps in this chapter for unpacking, placing, and leveling the machine sections, and connecting utilities, read the introduction to the mechanical maintenance procedures and complete the Initial Adjustments, both located in the Mechanical Maintenance Procedures chapter of this manual.
Page 66 Strasbaugh (Model 7AF)Wafer Grinder Tellect NITIAL DJUSTMENTS ANDLING Procedure Manual Chapter Before You Begin (preparatory procedures) Chapter 11 Level the Robot Chapter 11 OBOT OFTWARE ALIBRATION ROCEDURES Procedure Manual Chapter Robot Software Calibration Procedures Chapter 12 2 - 28 Version 1.2 - June 2004...
Page 67 Operations and Maintenance Manual Physical Description Physical Description • Overview • Cabinetry • Subassemblies • Control Panel and Emergency Off Buttons • Control Computer • User Interface Version 1.2 - June 2004 3 - 1...
Page 68: Figure 3-8 Main Menu
Strasbaugh (Model 7AF) Wafer Grinder Tellect PHYSICAL DESCRIPTION Overview Cabinetry Door Numbering System Service Doors (Doors 7, 8 , 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, and 21) Disconnect Enclosure Door (Door 20) Operator Doors (Doors 5 and 6)
Page 69 Operations and Maintenance Manual Physical Description PHYSICAL DESCRIPTION OVERVIEW The chapter below provides an overview of the physical features, layout, and function of the Model 7AF Wafer Grinder. The illustrations presented are not to scale; their purpose is to offer a simplified view of the components of the machine. The Cabinetry section details outside views of the machine, including doors and panels, location of standard emergency off buttons, and power switches.
Page 70 Strasbaugh (Model 7AF) Wafer Grinder Tellect CABINETRY The figures below illustrate four views of the Model 7AF Wafer Grinder, identifying service and operator doors, cassette turrets, and the subassemblies accessible through each. Each figure has its own part identification list and some description. The doors are also identified in Figures 3-1, 3-2, 3-3, and 3-4.
Page 71 Operations and Maintenance Manual Physical Description PERATOR OORS OORS Door 5 (the left side operator door) and door 6 (the right side operator door) open manually without latches for operator convenience. 1, 2, 3, ASSETTE URRETS OORS The four cassette turrets are software controlled to provide operator access to the wafer cassettes.
Page 72 Strasbaugh (Model 7AF) Wafer Grinder Tellect The action of the single-acting interlocks is identical to that of the double-acting switches with the exception that the single-acting switches cannot be defeated. Double-acting Single-acting Disconnect Interlocks Interlocks Interlocks Enclosure Doors Doors Doors...
Page 73: Figure 3-1 Model 7Af Wafer Grinder - Front View
Operations and Maintenance Manual Physical Description ACHINE IEWS Figure 3-1 Model 7AF Wafer Grinder - Front View 8 (Door 8) 9 (Door 9) Door 1 (Send 1 Cassette) Door 2 (Send 2 Cassette) Door 3 (Receive 2 Cassette) Door 4 (Receive 1 Cassette) Monitor Suspension Arm Monitor Control Panel...
Page 74 Strasbaugh (Model 7AF) Wafer Grinder Tellect The Front Emergency Off Button (10) is an emergency off switch, used for instantly stopping all machine motion and turning off control power at any time. The Control Panel (7) and Monitor (6), are described in detail later in this chapter.
Page 75: Figure 3-2 Left Side View
Operations and Maintenance Manual Physical Description Figure 3-2 Left Side View 6 (Door 12) (Door 2) (Door 5) 7 (Door 13) (Door 1) 8 (Door 14) 4 (Door 7) Door 1 (Send 1 Cassette) Door 2 (Send 2 Cassette) Door 5 (Left Operator Door) Door 7 (Left Handling Service Door) Monitor (Side View) Door 12 (Left Top Grind Area Door)
Page 76 Strasbaugh (Model 7AF) Wafer Grinder Tellect Doors 1 and 2, (1) (2), provide access to the Send 1 and Send 2 cassette turrets. The pre-aligner, left work chuck, left measurement probe, and left conditioning arm are accessed through Door 5 (3).
Page 77: Figure 3-3 Right Side View
Operations and Maintenance Manual Physical Description Figure 3-3 Right Side View 6 (Door 15) (Door 3) 7 (Door 16) (Door 6) (Door 4) 4 (Door 10) 8 (Door 17) Door 3 (Receive 2 Cassette) Door 4 (Receive 1 Cassette) Door 6 (Right Operator Door) Door 10 (Right Handling Service Door) Monitor (Side View) Door 15 (Right Top Grind Area Door)
Page 78 Strasbaugh (Model 7AF) Wafer Grinder Tellect Doors 3 and 4, (1) (2), provide access to the Receive 2 and Receive 1 cassette turrets. The spin-rinse station, right work chuck, right measurement probe, and right conditioning arm are accessed through Door 6 (3).
Page 79: Figure 3-4 Rear View
Operations and Maintenance Manual Physical Description Figure 3-4 Rear View (Door 18) (Door 19) (Door 20) (Door 20) (Door 21) Door 18 (Inverter Enclosure Door) Door 19 (Rear Grind Door) Door 20 (Disconnect Enclosure Door) Door 21 (Input/Output Door) Main Machine Circuit Breaker Disconnect Enclosure Door Handle Assembly Version 1.2 - June 2004 3 - 13...
Page 80 Strasbaugh (Model 7AF) Wafer Grinder Tellect Access to the variable frequency drive and the DC servo amplifiers is through Door 18 (1). Door 19 (2) provides access to the upper spindles. Door 20 (3) provides access to the main circuit breaker, the power distribution circuit...
Page 81: Figure 3-5 Wafer Grinder Subassemblies
Operations and Maintenance Manual Physical Description SUBASSEMBLIES Figure 3-5, shown below, is a top view of the Model 7AF Wafer Grinder. The labeled subassemblies participate in the wafer grinding process and manipulation of the wafers. Figure 3-5 Wafer Grinder Subassemblies Bridge Assembly 9 Right Work Chuck Coarse Spindle...
Page 82 Strasbaugh (Model 7AF) Wafer Grinder Tellect RINDING The Bridge Assembly (1) moves the upper Coarse (2) and Fine (3) spindles left and right over the work chucks. The Coarse (2) and Fine (3) Spindles grind the wafers on the left and right work chucks.
Page 83 Operations and Maintenance Manual Physical Description AFER ANDLING The Pre-Aligner (10) centers the wafer and aligns the notch or flat (usually notch for eight-inch wafers and flat for six-inch wafers), orienting the wafer for presentation to the robot. The Send 1 (11), Send 2 (12), Receive 1 (14), Receive 2 (13) Cassette Access Turret Assemblies provide wafer cassette access to the operator.
Page 84: Figure 3-6 Control Panel
Strasbaugh (Model 7AF) Wafer Grinder Tellect CONTROL PANEL AND EMERGENCY OFF BUTTONS ONTROL ANEL The control panel is located on the Model 7AF Wafer Grinder at the top front of the monitor. Figure 3-6 shows the layout of the panel components. A description of each component follows the figure.
Page 85 Operations and Maintenance Manual Physical Description MERGENCY UTTONS The 7AF is equipped with two EMERGENCY OFF push buttons, one on the control panel above the monitor and one at the rear of the machine in the door of the disconnect enclosure. After pressing an EMERGENCY OFF button, the operator restarts the machine from the beginning by pressing the MACHINE ON push button.
Page 86 Strasbaugh (Model 7AF) Wafer Grinder Tellect CONTROL COMPUTER The system unit of the control computer is detailed in the Control System Description chapter of this manual. The section below addresses the monitor, touch screen, and keyboard and provides an illustration of each menu displayed by the 7AF control computer.
Page 87 Operations and Maintenance Manual Physical Description Plug the keyboard into the system unit's keyboard connection. Turn all machine power back ON by pulling the main machine disconnect switch back up to the on position. Press the <MACHINE ON> push button, located on the control panel, to restore power to the machine's controllers and subassemblies.
Page 88 Strasbaugh (Model 7AF) Wafer Grinder Tellect USER INTERFACE The menu tree below illustrates access relationships among the 7AF menu screens. The menu display section which follows provides a copy of each menu screen with a brief description and a chapter reference for locating detailed information on use.
Page 89 Operations and Maintenance Manual Physical Description Figure 3-8 Main Menu At the Main Menu screen, displayed when the machine is powered up, you may select the Home Machine, Grind Cycle, Edit Recipes, Dress Cycle, or Machine Maintenance. Version 1.2 - June 2004 3 - 23...
Page 90 Strasbaugh (Model 7AF) Wafer Grinder Tellect ACHINE Figure 3-9 Home Machine Menu Both homing of machine components and automatic referencing sequences for the work chucks and probes are performed at the Home Machine menu. For further information, refer to the Operator Functions chapter of this manual.
Page 91 Operations and Maintenance Manual Physical Description RIND YCLE Figure 3-10 Grind Cycle Menu Automatic wafer grinding cycles are run at this menu, with machine status and progress of wafers through the machine displayed during the cycle. For more information on the Grind Cycle menu, see the Operator Functions chapter of this manual.
Page 92 Strasbaugh (Model 7AF) Wafer Grinder Tellect ECIPES AFER ECIPES Figure 3-11 Edit Recipes (Wafer Recipes) Menu At the Wafer Recipes menu, selected by touching the Edit Recipes button on the Main Menu, you may edit the grind recipe currently in use or select a stored recipe to edit.
Page 93: Figure 3-12 Wheel And Chuck Recipes Menu
Operations and Maintenance Manual Physical Description HEEL AND HUCK RUING AND RESSING ECIPES Figure 3-12 Wheel and Chuck Recipes Menu The grind wheel and chuck truing and dressing recipes (current and stored) are edited at the Wheel and Chuck Recipes menu. For further information on this menu, see the Machine Setup chapter of this manual.
Page 94 Strasbaugh (Model 7AF) Wafer Grinder Tellect RESS YCLE Figure 3-13 Dress Cycle Menu The Dress Cycle menu runs automatic routines for truing and dressing the grind wheels and work chucks. For further information on the Dress Cycle menu, see the Operator Functions chapter of this manual.
Page 95 Operations and Maintenance Manual Physical Description ACHINE AINTENANCE Figure 3-14 Machine Maintenance Menu At the Machine Maintenance menu you may move machine components independently during maintenance and calibration procedures. The Output Control/Input Status and Machine (Calibration) Setup menus are also accessed from this menu. For further information on the Machine Maintenance menu, refer to the Software Calibration chapter of this manual.
Page 96 Strasbaugh (Model 7AF) Wafer Grinder Tellect UTPUT ONTROL NPUT TATUS Figure 3-15 Output Control/Input Status Menu At the Output Control/Input Status menu you may force outputs on and off for the chuck conditioners, work chucks, pre-aligner, robot, and spin-rinse station. In addition, the cassette turrets may be rotated, and the railing systems may be lubricated.
Page 97 Operations and Maintenance Manual Physical Description ACHINE ALIBRATION ETUP NTRY Figure 3-16 Machine Setup Entry Menu The Machine Setup menu lists the current values of the calibration list variables and stores new variable values for all servos except the robot. For further information on this menu, refer to the Software Calibration chapter of this manual.
Page 98 Strasbaugh (Model 7AF) Wafer Grinder Tellect This page intentionally left blank. 3 - 32 Version 1.2 - June 2004...
Page 99 Operations and Maintenance Manual Mechanical Description Mechanical Description • Bridge Assembly • Spindle Assemblies • Left/Right Digital Measurement Probes • Left/Right Conditioning Arms • Robot • Pre-Aligner • Spin-Rinse Station • Cassette Access Turret • Assemblies Version 1.2 - June 2004 4 - 1...
Page 100 Strasbaugh (Model 7AF) Wafer Grinder Tellect MECHANICAL DESCRIPTION Overview Grinding Area Bridge Assembly Spindle Assemblies Coarse/Fine Spindles Left/Right Work Chucks Air Bearing Spindles Left/Right Digital Measurement Probes Left/Right Conditioning Arms Wafer Handling Area Robot Pre-Aligner Spin-Rinse Station Send 1, Send 2, Receive 1, Receive 2 Cassette Access Turret Assemblies 4 - 2 Version 1.2 - June 2004...
Page 101 Operations and Maintenance Manual Mechanical Description MECHANICAL DESCRIPTION OVERVIEW This chapter provides descriptions of the mechanical assemblies and components participating in the auto grind cycle functions. For a description of the auto grind cycle of operation (the sequence of events), refer to the Operator Functions chapter of this manual.
Page 102 Strasbaugh (Model 7AF) Wafer Grinder Tellect PINDLE SSEMBLIES OARSE PINDLES Identical except for the type of diamond wheel installed, the coarse and fine spindles grind the wafers on the left and right work chucks. Each is an air bearing spindle (for details, see below) mounted vertically and passing through a casting mounted to the vertical rails.
Page 103 Operations and Maintenance Manual Mechanical Description IGHT HUCKS Each work chuck spindle is an air bearing (see below) spindle mounted to one of the side plates of the bed. The work chuck spindles are functionally and structurally very similar to the coarse and fine (upper) spindles, with the exception that the upper spindles are designed to rotate at faster speeds than the lower (work chuck) spindles.
Page 104 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT IGITAL EASUREMENT ROBES The left and right digital measurement probes function as in process contact gauges to reduce variation in wafer thickness. Vacuum retractable, each uses a linear encoder to monitor positioning. The rubber boot provides water resistance. The probes are mounted on support arms through which power cables and vacuum tubes are run.
Page 105 Operations and Maintenance Manual Mechanical Description WAFER HANDLING AREA OBOT The Equipe Technologies robot performs wafer transportation, moving among the wafer cassette turrets, the pre-aligner, the work chucks, and the spin-rinse station. The robot is equipped with a rotating wrist and a single vacuum chuck end effector to permit picking the wafer up from either the bottom or top as needed.
Page 106 Strasbaugh (Model 7AF) Wafer Grinder Tellect The robot arm performs radial movements via a specially constructed belt driven pulley system. In addition to the pulley system, the arm consists of two supporting rings, a limit ring, a virtual arm, a forearm, and an end effector base with dowel pins.
Page 107 Operations and Maintenance Manual Mechanical Description INSE TATION Note: The times included in the description below are approximate--all times are process-oriented and variable. With the spin-rinse station's spindle in up position, the robot releases the wafer onto the spindle. Vacuum is then turned on at the vacuum chuck in preparation for holding the wafer in place.
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Page 109 Operations and Maintenance Manual Control System Description Control System Description • Control Computer • Servo Control • Servo Amplifier • I/O and Interface System • Robot and Controller • Pre-Aligner and Controller • Digital Measurement Probes Version 1.2 - June 2004 5 - 1...
Page 110 Strasbaugh (Model 7AF) Wafer Grinder Tellect CONTROL SYSTEM DESCRIPTION Control Computer Servo Control Servo Amplifier I/O and Interface System Robot and Controller Pre-Aligner and Controller Digital Measurement Probes 5 - 2 Version 1.2 - June 2004...
Page 111 Operations and Maintenance Manual Control System Description CONTROL SYSTEM DESCRIPTION CONTROL COMPUTER The control computer is an industrial personal computer (PC), with a high resolution color touch screen for operator input. An enhanced PC keyboard is also provided for maintenance input. The control computer is equipped with multiple I/O cards to provide for control of primary machine functions.
Page 112 Strasbaugh (Model 7AF) Wafer Grinder Tellect The servo motors are labeled axis 1 through 8. The table below shows the motion provided by each: Axis Label Motion Provided bridge side to side motion coarse grind wheel up/down fine grind wheel up/down...
Page 113 Operations and Maintenance Manual Control System Description SERVO AMPLIFIER Refer to engineering drawings labeled 118168E_ (electrical) and 118168L_ (logic/software) for the following discussion. For each of the six DC motors discussed above in the Servo Control section, an amplifier module communicates between the motion control board and the brushless DC servo motor.
Page 114 Strasbaugh (Model 7AF) Wafer Grinder Tellect I/O AND INTERFACE SYSTEM The I/O and interface system hardware used in the machine form an industry standard optically isolated I/O system. This system incorporates brain boards, driver modules, and a host computer interface card to read or drive all digital and analog signals.
Page 115 Operations and Maintenance Manual Control System Description ROBOT AND CONTROLLER, PRE-ALIGNER AND CONTROLLER The Equipe Technologies robot and controller and pre-aligner and controller packages incorporate closed loop DC servo motor control and precision mechanics for wafer handling with full servo control of the radial, theta, and Z axes. The robot's radial motion extends and retracts the robot arm through a center point;...
Page 116 Strasbaugh (Model 7AF) Wafer Grinder Tellect The pre-aligner is used as a subsystem to the robot; the primary RS-232 port (COM 1) of the pre-aligner controller is connected to the COM 2 port of the robot's controller. When daisy-chained, the robot's controller will act as a master, and the pre-aligner controller will be the slave.
Page 117 Operations and Maintenance Manual Power Distribution Power Distribution • AC Distribution • DC Distribution • Power Up • Interlocks Version 1.2 - June 2004 6 - 1...
Page 118 Strasbaugh (Model 7AF) Wafer Grinder Tellect POWER DISTRIBUTION Introduction AC Distribution DC Distribution Power Up Interlocks 6 - 2 Version 1.2 - June 2004...
Page 119 Operations and Maintenance Manual Power Distribution POWER DISTRIBUTION INTRODUCTION For the electrical schematics refer to the engineering drawings labeled 118168E_ (electrical). Part locations for most of the electrical components are found on the engineering drawings. Each wire is identified at its termination points by alphanumeric characters in black on a white tape background.
Page 120 Strasbaugh (Model 7AF) Wafer Grinder Tellect Terminal strip 8TS branches out three-phase, 208 VAC power to each of the two variable frequency AC grind spindle rotational drives and single-phase 208 VAC power to transformer 3T and transformer 2T. Transformer 2T is a step down transformer providing single-phase 120 VAC power to three DC voltage power supplies, 1PS, 2PS, and 3PS, and to three 120 VAC duplex receptacles.
Page 121 Operations and Maintenance Manual Power Distribution POWER UP Refer to the engineering drawings for the following description of power up circuitry. The basic functions of the power up circuit are to maintain closure of circuit paths 1L1, 1L2, and 1L3 after the Machine On pushbutton is depressed and to break the circuit path if a "fault"...
Page 122 Strasbaugh (Model 7AF) Wafer Grinder Tellect INTERLOCKS WARNING: Do not override safety interlocks. All procedures in the 7AF Operations and Maintenance Manual are written to be performed with door interlocks CLOSED at any time the machine is in motion. The 7AF has a total of 21 doors. For door descriptions and locations, see the Physical Description chapter of this manual.
Page 123 Operations and Maintenance Manual Power Distribution The action of the single-acting interlocks is identical to that of the double-acting switches with the exception that the single-acting switches cannot be defeated. Double-acting Single-acting Disconnect Interlocks Interlocks Interlocks Enclosure Doors Doors Doors Door 20 7, 8, 9 10, 17, 18...
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Page 125 Operations and Maintenance Manual Plumbing Description Plumbing Description • Clean Dry Air System • Vacuum System • Water System • Exhaust System • Drain System Version 1.2 - June 2004 7 - 1...
Page 126 Strasbaugh (Model 7AF) Wafer Grinder Tellect PLUMBING DESCRIPTION Clean Dry Air System Vacuum System Water System Exhaust System Drain System 7 - 2 Version 1.2 - June 2004...
Page 127 Operations and Maintenance Manual Plumbing Description PLUMBING DESCRIPTION See the Installation and Pneumatic Adjustments chapters of this manual for further details on the systems discussed below. Color-Coded Tubing The system for color identification of tubing used in the 7AF is shown below: Color Function Green...
Page 128 Strasbaugh (Model 7AF) Wafer Grinder Tellect CLEAN DRY AIR SYSTEM Refer to the engineering drawings labeled 118168P_ (pneumatic) and the Pneumatic Adjustments chapter of this manual for details on air use and related valve panels. The inhouse clean dry air supply must be a minimum of 100 PSI for proper operation of all machine functions.
Page 129 The vacuum connection to the machine will collect a significant amount of process water and silicon particles through the vacuum line to the vacuum source. An isolated vacuum pump with a self-contained drain system is available from Strasbaugh as a machine option. For use with a facility vacuum supply, a wall-mountable vacuum/waste separator is also available.
Page 130 Strasbaugh (Model 7AF) Wafer Grinder Tellect WATER SYSTEM The water system is comprised of two subsystems, D.I. (deionized water) and municipal or temperature-controlled water, all detailed on the engineering drawings labeled 118168F_ (fluids). Refer also to the Pneumatic Adjustments chapter of this manual for details on water use and related valve panels.
Page 131 Operations and Maintenance Manual Plumbing Description EXHAUST SYSTEM Refer to the engineering drawings labeled 118168F_ (fluids) and 118168A_ (assembly) for further details. The exhaust system consists of hoses, a plenum located in the handling section of the machine between the robot and the grinding chamber, and a connection to an inhouse exhaust source.
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Page 133 Operations and Maintenance Manual Operator Functions Operator Functions • Menus in Basic Operation • Auto Grind Cycle Sequence of Events • Basic Operation • Truing and Dressing Wheels & Chucks • Using Probes • Operator Preventive Maintenance • Light Tower Operation Version 1.2 - June 2004 8 - 1...
Page 134 Strasbaugh (Model 7AF) Wafer Grinder Tellect OPERATOR FUNCTIONS Overview Menus Used in Basic Operation Menu Tree Main Menu Home Machine Menu Grind Cycle Menu Dress Cycle Menu Auto Grind Cycle Sequence Event Sequence Basic Operation Summary Problems and Error Messages...
Page 135 Operations and Maintenance Manual Operator Functions Using the Probes Raising and Lowering the Probes Referencing the Probes Measuring the Thickness of an Item on the Work Chuck Operator Daily Preventive Maintenance Schedule Light Tower Operation Idle: Green Flashing, No Alarm Sounds Running: Green Steady, No Alarm Sounds Needs Assistance: Yellow Flashing, Alarm Sounds Needs Assistance, Acknowledged: Yellow Steady, No Alarm Sounds...
Page 136 Strasbaugh (Model 7AF) Wafer Grinder Tellect OPERATOR FUNCTIONS OVERVIEW This chapter is designed to provide step-by-step procedures to the machine operator for operating and maintaining the 7AF Wafer Grinder on a daily basis. Actions to be taken by the operator are shown in numbered steps with computer commands printed in bold type.
Page 137 Operations and Maintenance Manual Operator Functions Error Messages See the Troubleshooting chapter of this manual for resolution of any onscreen error messages not covered in this chapter. Help Buttons Help buttons at several menus display directions for making selections at the currently displayed menu.
Page 138 Strasbaugh (Model 7AF) Wafer Grinder Tellect MENUS USED IN BASIC OPERATION The section below provides details on the menus used in basic machine operation. The menu tree illustrates access relationships among the 7AF menu screens. Figure 8-1 Menu Tree Main...
Page 139: Figure 8-2 Main Menu
Operations and Maintenance Manual Operator Functions The Main Menu is the menu displayed upon the screen when the machine is powered Figure 8-2 Main Menu Version 1.2 - June 2004 8 - 7...
Page 140 Strasbaugh (Model 7AF) Wafer Grinder Tellect Choices Available at the Main Menu Buttons Functions Home Touch the Home Machine button to select the Home Machine Machine menu, the location at which the machine is homed and the chucks and probes are referenced.
Page 141: Figure 8-3 Home Machine Menu
Operations and Maintenance Manual Operator Functions ACHINE The Home Machine menu is the location at which the machine is homed and the chucks and probes are referenced. Figure 8-3 Home Machine Menu The icons (images) displayed at the left side of the Home Machines menu represent the machine subassemblies.
Page 142 Strasbaugh (Model 7AF) Wafer Grinder Tellect Choices Available at the Home Machine Menu Buttons, Submenus and Functions Icons QUIT Touch the QUIT button to return to the Main Menu. Home Touch the Home All button to automatically home the robot, pre- aligner, coarse spindle z-axis, fine spindle z-axis, and bridge.
Page 143 Operations and Maintenance Manual Operator Functions Reference Touch the Reference Probes button to display the Reference Probes submenu, shown immediately below, at which you may select the Probes probe(s) to reference. Note that referencing the probes zeros them on the work chucks. Touch the Left button to reference the left probe.
Page 144 Strasbaugh (Model 7AF) Wafer Grinder Tellect Notes on Spindle Height and Probe Position Displays: When the machine is first powered up, homing zeros out the screen readout for spindle height at the limit switch located at the top of the stroke.
Page 145 Operations and Maintenance Manual Operator Functions Component or Function Position or Status BRIDGE Present location of the bridge as measured in inches from its right side (home) position. Wheel Coarse Fine Height Coarse spindle height above Fine spindle height above the the work chuck after work chuck after referencing, referencing, measured in...
Page 146 Strasbaugh (Model 7AF) Wafer Grinder Tellect Other Messages Homing A "homing" message displayed above a machine component icon indicates the component is currently being homed. Homed A "homed" message displayed above a machine component icon indicates the component has been homed.
Page 147: Figure 8-4 Grind Cycle Menu
Operations and Maintenance Manual Operator Functions RIND YCLE The Grind Cycle (automatic grind) menu is the screen location at which automatic wafer grinding cycles are run. Figure 8-4 Grind Cycle Menu The icons (images) displayed at the left side of the Grind Cycle menu represent the machine subassemblies.
Page 148 Strasbaugh (Model 7AF) Wafer Grinder Tellect Choices Available at the Grind Cycle Menu Buttons, Submenus, Functions and Icons QUIT Touch the QUIT button to return to the Main Menu. Select Recipe Touch the Select Recipe button to display the list of stored grind recipes.
Page 149 Operations and Maintenance Manual Operator Functions Pause Touch the Pause Cycle button to interrupt a grind cycle. Resume the grind cycle by touching the Start Cycle button. Cycle The Pause Cycle function may be used to suspend a cycle for making adjustments when the real time status display values are not within the range of requirements.
Page 150 Strasbaugh (Model 7AF) Wafer Grinder Tellect RESS YCLE The Dress Cycle (automatic dress) menu is the screen location at which automatic cycles for truing and dressing the work chucks and grind wheels are run. When to True and Dress Grind Wheels and Work Chucks •...
Page 151: Figure 8-5 Dress Cycle Menu
Operations and Maintenance Manual Operator Functions Figure 8-5 Dress Cycle Menu The icons (images) displayed at the left side of the Dress Cycle menu represent the machine subassemblies. Version 1.2 - June 2004 8 - 19...
Page 152 Strasbaugh (Model 7AF) Wafer Grinder Tellect Choices Available at the Dress Cycle Menu Buttons, Submenus, Functions and Icons QUIT Touch the QUIT button to return to the Main Menu. Grind Chuck Touch the Grind Chuck button to display the Select Chuck and Select Grind submenu choices, shown below.
Page 153 Operations and Maintenance Manual Operator Functions Stop Touch the Stop Cycle button: Cycle a. when possible danger to people, product, or machine is indicated. Touching the Stop button stops all machine movement, turns all fluids off, and cancels the cycle. Power stays on, and the computer screen continues to display.
Page 154 Strasbaugh (Model 7AF) Wafer Grinder Tellect AUTO GRIND CYCLE SEQUENCE The section below provides a detailed narration of the sequence of machine events comprising the automatic grind cycle. Assumptions - the events sequence below was written with the assumption that the machine has been correctly installed and maintained, per procedures found in the Model 7AF Operation and Maintenance manual.
Page 155 Operations and Maintenance Manual Operator Functions VENT EQUENCE The operator rotates the turrets to position the cassettes for pickup and delivery by the wafer handling robot. The robot scans the first available send cassette and displays the number of wafers in the cassette on that cassette’s corresponding screen icon.
Page 156 Strasbaugh (Model 7AF) Wafer Grinder Tellect The bridge moves to the left position and begins to fine grind the second wafer while the robot removes the first wafer (Wafer #1) from the load chuck and places it on the spin/rinse station.
Page 157 Operations and Maintenance Manual Operator Functions BASIC OPERATION UMMARY The list below is a summary of the procedures needed to start up the 7AF and complete an automatic grind cycle. The sections following provide detailed steps or appropriate references for each. Power Up.
Page 158 Strasbaugh (Model 7AF) Wafer Grinder Tellect 1 - P OWERING Follow the steps below to power up the machine and display the Main Menu: Operator Action Explanation/Screen Display Utilities Confirm that all facilities to the machine (D.I. water, vacuum, and city water) are ON.
Page 159 Operations and Maintenance Manual Operator Functions Main Machine Circuit Breaker Move the Main Machine Circuit Disconnect Switch Breaker Disconnect Switch lever, located at the upper right rear of the machine, UP to its on position. The red indicator lamp on the control panel should now be ON.
Page 160: Figure 8-6 Main Menu At Power Up
Strasbaugh (Model 7AF) Wafer Grinder Tellect Figure 8-6 Main Menu at Power Up 8 - 28 Version 1.2 - June 2004...
Page 161 Operations and Maintenance Manual Operator Functions 2 - H OMING THE ACHINE WARNING! Before beginning the homing sequence, check for potential crash situations due to previous movement of assemblies using the manual controls at the Machine Maintenance menu. Homing moves all necessary parts of the machine into correct alignment for the auto grind cycle.
Page 162 Strasbaugh (Model 7AF) Wafer Grinder Tellect HECK FOR BSTRUCTIONS AND ISPLAY THE ACHINE MENU Operator Action Explanation/Screen Display Clear machine. Verify that the machine has been cleared of wafers and the robot, pre-aligner, fine z-axis, coarse z-axis, and bridge are free of obstructions.
Page 163 Operations and Maintenance Manual Operator Functions For details on the selections and information available at the Home Machine menu, refer to Menus Used in Basic Operation, located at the beginning of this chapter. At the Home Machine menu, you may home the servos automatically or manually in sequence by following either of the procedures below.
Page 164 Strasbaugh (Model 7AF) Wafer Grinder Tellect Touch the icon of the axis to be homed (for example, the robot) to home that axis individually: Operator Action Explanation/Screen Display • Robot icon At the Home Machine menu, touch the "Robot" icon to home the robot individually.
Page 165 Operations and Maintenance Manual Operator Functions • QUIT When all assemblies have been homed, touch the QUIT button to return to the Main Menu. NDIVIDUAL ERVOS ANUALLY Homing of individually selected servos is useful in conjunction with performance of mechanical and software calibration maintenance procedures. WARNING! Before beginning the homing sequence, check for potential crash situations due to previous movement of assemblies...
Page 166 Strasbaugh (Model 7AF) Wafer Grinder Tellect Robot icon At the Home Machine menu, touch the "Robot" icon to home the robot individually. When the robot has been homed, a "homed" message will appear above the robot icon. QUIT Touch the QUIT button to return to the Main Menu.
Page 167 Operations and Maintenance Manual Operator Functions 3 - C HECKING TILITIES Follow the steps below to check the utilities. If any of the items listed below does not meet the specification shown, investigate and correct before referencing the machine. Read the supply pressure gauge, located at the lower rear of the machine, to confirm that the facility supply of clean dry air to the machine is between 90 and 100 psi.
Page 168 Strasbaugh (Model 7AF) Wafer Grinder Tellect 4 - R EFERENCING THE HUCKS Tools Required • two untaped wafers • tool suitable for measurement in microns Notes: You must return to the Main Menu between homing the machine and referencing the chucks.
Page 169 Operations and Maintenance Manual Operator Functions Using a measuring device capable of measurement in microns, measure the thickness in microns of two untaped wafers. Record the measurement of each: Wafer A thickness: _____ Wafer B thickness: _____ Place both wafers in a cassette with the major flat of each wafer aligned to the rear of the cassette.
Page 170 Strasbaugh (Model 7AF) Wafer Grinder Tellect To present the cassettes to the robot, rotate the turrets: Operator Action Explanation/Screen Display Send cassette icon Touch the desired "Send" cassette icon to rotate the turret 180 °. Receive cassette icon Touch the desired "Receive" cassette icon to rotate the turret 180 °.
Page 171 Operations and Maintenance Manual Operator Functions During referencing, observe the probe thickness readings in the screen status display area and compare with your wafer thickness measurements: GOAL: The probe readings on the status display should be within +/- 2 microns of the measured thickness of the wafers (from Step 2., above).
Page 172 Strasbaugh (Model 7AF) Wafer Grinder Tellect When "REFD" is displayed above both icons, remove the cassette containing the two reference wafers and return to the Main Menu: Operator Action Explanation/Screen Display Receive Cassette icon Touch the desired "Receive" cassette icon to rotate the turret 180 °.
Page 173 Operations and Maintenance Manual Operator Functions 5 - R UNNING AN UTOMATIC RIND YCLE Error Messages Until the machine has been homed and referenced, the 7AF will not respond to requests to run an auto grind cycle. If the machine has not been referenced when you select the Grind Cycle menu, an error message will be displayed when the Start Cycle button appears.
Page 174 Strasbaugh (Model 7AF) Wafer Grinder Tellect ISPLAY THE RIND YCLE MENU Operator Action Explanation/Screen Display Grind Cycle At the Main Menu, touch the "Grind Cycle" button to select the Grind Cycle menu. The screen displays the (auto) Grind menu shown in figure 8-8 below.
Page 175 Operations and Maintenance Manual Operator Functions ELECT THE ESIRED ECIPE AND RIND Operator Action Explanation/Screen Display Select Recipe At the Grind Cycle menu, touch the "Select Recipe" button to display the list of stored recipes. Cycle 4 Touch the name of the desired recipe (for example, "Cycle 4") to select it.
Page 176 Strasbaugh (Model 7AF) Wafer Grinder Tellect OMPARE THE TORED ECIPE ALUES WITH THE ARAMETER ALUES ECEIVED FROM ROCESS UPERVISOR Operator Action Explanation/Screen Display SHOW RECIPE Touch the "SHOW RECIPE" button to display the coarse grind parameters of the recipe you selected in the steps above.
Page 177: Figure 8-10 Example Of A Fine Grind Recipe
Operations and Maintenance Manual Operator Functions Compare the values of the process parameters shown in the fine grind recipe displayed on the screen with those provided to you by the process supervisor: Operator Action Explanation/Screen Display Show Fine At the Show Recipe submenu, touch "Show Fine"...
Page 178 Strasbaugh (Model 7AF) Wafer Grinder Tellect REPARE THE ASSETTES AND TART THE YCLE Load the wafers in a cassette(s) tape side up with the flat of each aligned to the rear of the cassette. Rotate a send turret away from the robot and place the cassette on it:...
Page 179 Operations and Maintenance Manual Operator Functions Rotate a receive turret away from the robot and place an empty cassette on Operator Action Explanation/Screen Display Receive cassette icon Touch the desired "Receive" cassette icon to rotate the turret 180 °. Place an empty cassette on the turret. Rotate the turret to present the cassette to the robot: Operator Action Explanation/Screen Display...
Page 180 Strasbaugh (Model 7AF) Wafer Grinder Tellect HILE THE YCLE UNNING ONITOR THE TATUS CREEN ISPLAY ALUES During the processing of the wafers, monitor the real time display and compare with the following requirements: Chuck vacuum during grinding must be greater than 18 inches of mercury.
Page 181 Operations and Maintenance Manual Operator Functions Spindle and work chuck speeds match recipe parameters. If any of the above requirements is not met: • If any of the above requirements is not met or if it appears that a wafer may be broken or about to be broken, PAUSE or STOP the cycle by following the procedures shown in If There’s a Problem, Pause or Stop (Cancel) the Cycle, immediately below.
Page 182 Strasbaugh (Model 7AF) Wafer Grinder Tellect ’ HERE ROBLEM AUSE NTERRUPT ANCEL YCLE If at any time during the cycle you observe a problem or potential problem, interrupt or stop the cycle immediately by touching either the Pause Cycle or Stop Cycle button on the menu screen:...
Page 183 Operations and Maintenance Manual Operator Functions HEN THE AFER ROCESSED When the last wafer has been processed, the Start Cycle and Stop Cycle buttons begin flashing, signaling to the operator that the grind cycle has been completed. Turn off the flashing buttons: Operator Action Explanation/Screen Display •...
Page 184 Strasbaugh (Model 7AF) Wafer Grinder Tellect TRUING AND DRESSING THE GRIND WHEELS AND WORK CHUCKS Assumptions The procedures below were written with the assumptions that: The operator has powered up the machine, homed the machine, checked the utilities, and referenced the chucks, per the procedures, above, in this chapter.
Page 185: Figure 8-11 Dress Cycle Menu
Operations and Maintenance Manual Operator Functions ISPLAY THE RESS YCLE Operator Action Explanation/Screen Display Clear wafers. Clear all wafers from the machine. Dress Cycle At the Main Menu, touch the "Dress Cycle" button to select the Dress Cycle menu. The screen displays the (automatic) Dress Cycle menu, shown below. Figure 8-11 Dress Cycle Menu The icons (images) displayed at the left side of the Dress Cycle menu represent the...
Page 186 Strasbaugh (Model 7AF) Wafer Grinder Tellect For details on the selections and information available at the Dress Cycle menu, refer to Menus Used in Basic Operation, located at the beginning of this chapter. Note: The cassette turrets do not rotate at the Dress Cycle menu while the cycle is running.
Page 187 Operations and Maintenance Manual Operator Functions About Truing On the Model 7AF the probes may be used to check the work chucks for true (radial runout, indicated by a probe fluctuation of less than one micron). Truing a wheel or chuck prior to use ensures that the entire face of the wheel is in contact with the part at all times during the grinding cycle.
Page 188 Strasbaugh (Model 7AF) Wafer Grinder Tellect RIND HEEL RESSING AND RUING ELECT THE HEEL AND THE REATMENT ESIRED For the procedure below, we will use dressing the coarse grind wheel as our example. To dress the fine grind wheel or true either the coarse or fine grind wheel, make the desired selections when the Select Wheel and Select Grind submenus are displayed.
Page 189 Operations and Maintenance Manual Operator Functions OMPARE THE TORED ECIPE ALUES WITH THE ARAMETER ALUES ECEIVED FROM ROCESS UPERVISOR Operator Action Explanation/Screen Display SHOW RECIPE Touch the "SHOW RECIPE" button to display the Show Recipe submenu. Note: The selections you have made (Wheel, Coarse, Dressing) will now be displayed in the boxes located just above the Stop Cycle button.
Page 190 Strasbaugh (Model 7AF) Wafer Grinder Tellect Figure 8-14 Example of a Coarse Wheel Truing Recipe Step 1 Step 2 Dwell Lift Coarse 1875 Removal 75 revs. µm Wheel Feed rate µm/sec. Chuck Speed Figure 8-15 Example of a Fine Wheel Truing Recipe...
Page 191 Operations and Maintenance Manual Operator Functions TART THE YCLE Start the cycle: Operator Action Explanation/Screen Display • Start Cycle Touch the "Start Cycle" button to begin the cycle. Notes: The bridge will move to its right position, and the left chuck will be automatically cleaned.
Page 192 Strasbaugh (Model 7AF) Wafer Grinder Tellect HILE THE YCLE UNNING ONITOR THE TATUS CREEN ISPLAY ALUES While the cycle is running, monitor the real time display and compare with the following requirements: a. The force during dressing should remain steady and should not rise above 10 lbs.
Page 193 Operations and Maintenance Manual Operator Functions HERE ROBLEM ANCEL YCLE If at any time during the cycle you observe a problem or potential problem, stop the cycle immediately by touching Stop Cycle button on the menu screen: Operator Action Explanation/Screen Display Stop Cycle Touch the "Stop Cycle"...
Page 194 Strasbaugh (Model 7AF) Wafer Grinder Tellect HUCK RESSING AND RUING ELECT THE HUCK AND THE REATMENT ESIRED For the procedure below, we will use dressing the left chuck as our example. To dress the right chuck or true either the left or right chuck, make the desired selections when the Select Chuck and Select Grind submenus are displayed.
Page 195 Operations and Maintenance Manual Operator Functions OMPARE THE TORED ECIPE ALUES WITH THE ARAMETER ALUES ECEIVED FROM ROCESS UPERVISOR Operator Action Explanation/Screen Display SHOW RECIPE Touch the "SHOW RECIPE" button to display the Show Recipe submenu. Note: The selections you have made (Chuck, Left, Dressing) will now be displayed in the boxes located just above the Stop Cycle button.
Page 196 Strasbaugh (Model 7AF) Wafer Grinder Tellect Hide the recipe: Operator Action Explanation/Screen Display • HIDE RECIPE Touch the "HIDE RECIPE" button to hide the recipe. TART THE YCLE Start the cycle: Operator Action Explanation/Screen Display • Start Cycle Touch the "Start Cycle" button to start the cycle.
Page 197 Operations and Maintenance Manual Operator Functions HILE THE YCLE UNNING ONITOR THE TATUS CREEN ISPLAY ALUES While the cycle is running, monitor the real time display and compare with the following requirements: a. The force during dressing should remain steady and should not rise above 10 lbs.
Page 198 Strasbaugh (Model 7AF) Wafer Grinder Tellect ’ HERE ROBLEM ANCEL YCLE If at any time during the cycle you observe a problem or potential problem, stop the cycle immediately by touching Stop Cycle button on the menu screen: Operator Action...
Page 199 Operations and Maintenance Manual Operator Functions USING THE PROBES AISING AND OWERING THE ROBES Following the procedures found in the Basic Operation section of this chapter, power up and home the machine. To raise or lower a probe, touch the Measure Thickness button at the Home Machine menu: You Touch to Select Explanation/Screen Display...
Page 200 Strasbaugh (Model 7AF) Wafer Grinder Tellect Measurement Touch the "Measurement" button on the Reference Probes submenu to lower the probes. Measurement To raise the probes, touch the "Measurement" button again (toggle the Measurement button). Cancel Touch the "Cancel" button to close the Reference Probes submenu.
Page 201 Operations and Maintenance Manual Operator Functions EFERENCING THE ROBES Referencing the probes zeros the probes on the work chucks. The probes are automatically referenced during machine homing. For details on the referencing process, refer to the Home Machine menu located in Menus Used in Basic Operation, at the beginning of this chapter.
Page 202 Strasbaugh (Model 7AF) Wafer Grinder Tellect Home Machine At the Main Menu screen, touch the "Home Machine" button to select the Home Machine menu. Displays: Home menu Confirm that a "homed" message appears above the bridge icon, indicating that the bridge has been homed.
Page 203 Operations and Maintenance Manual Operator Functions Remove items from the work chucks: a. Open the operator access door. b. Remove any items from the work chucks. c. Close the operator access door. At the Home Machine menu, reference the probes: You Touch to Select Explanation/Screen Display Home Machine...
Page 204 Strasbaugh (Model 7AF) Wafer Grinder Tellect EASURING THE HICKNESS OF AN TEM ON THE HUCK To measure the thickness on an item placed on a work chuck, follow the steps below: Follow the procedures found in the Referencing the Probes section, immediately above, to reference the probes.
Page 205 Operations and Maintenance Manual Operator Functions You Touch to Select Explanation/Screen Display Measurement Touch the "Measurement" button on the Reference Probes submenu to move the probes down to measure the thickness of items resting on the work chucks. Note: The probe measurement values are shown in the status display boxes at the right side of the menu screen.
Page 206 Strasbaugh (Model 7AF) Wafer Grinder Tellect OPERATOR DAILY PREVENTIVE MAINTENANCE SCHEDULE This schedule is repeated in the Preventive Maintenance chapter of this manual. Notice: As a part of Operator Daily Preventive Maintenance, the Operator is responsible for reporting anything indicating abnormal operation. For...
Page 207 Operations and Maintenance Manual Operator Functions SUBJECT ACTION FREQUENCY Abnormal noises, As soon as possible. EPORT OBSERVATIONS TO vibrations; malfunctions, SUPERVISOR questionable product. Air Bearings Check for vibration, non- Daily. rotation. Grind Pan and Diamond Clean. Daily. Wheel Housings Chuck Conditioner Check for wear and Daily.
Page 208 Strasbaugh (Model 7AF) Wafer Grinder Tellect LIGHT TOWER OPERATION The light tower provides visible and audible indications of the machine state. The color of the light, whether or not the light is flashing, and the presence or absence of an audible alarm all aid in communicating machine status to the operator. The information below details possible machine states, their indicators, and suggested immediate actions to be taken in response to the states.
Page 209 Operations and Maintenance Manual Operator Functions EEDS SSISTANCE ELLOW LASHING LARM OUNDS Each time the "Operator Instruction" message is displayed on the control computer screen (requesting operator attention to move the machine into the next state or to offer information) the tower light will change to flashing yellow within five seconds of the screen’s display of the message.
Page 210 Strasbaugh (Model 7AF) Wafer Grinder Tellect AULT LASHING LARM OUNDS Whenever a "FAULT" message is displayed, requesting operator attention, the light tower changes to flashing read and the alarm sounds within five seconds of the screen’s display of the message. The five second delay before the light begins flashing and the alarm begins sounding permits the operator to respond before the alarm sounds.
Page 211 Operations and Maintenance Manual Operator Functions AULT CKNOWLEDGED TEADY LARM OUNDS This state indicates that a fault has occurred, but that an operator has touched the screen to acknowledge the presence of the fault. Clear this state by eliminating the cause of the fault.
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Page 213 Operations and Maintenance Manual Machine Setup Machine Setup • Overview • Wafer Recipes Menu • Wheel and Chuck Recipes Menu Version 1.2 - June 2004 9 - 1...
Page 214 Strasbaugh (Model 7AF) Wafer Grinder Tellect MACHINE SETUP Overview Wafer Recipes Menu Grinding Sequence Recipe Parameter Settings and Information Available at the Wafer Recipes Menu Coarse and Fine Grind Recipe Steps and Parameters Wafer Parameters Estimated Throughput in Wafers Per Hour...
Page 215 Operations and Maintenance Manual Machine Setup MACHINE SETUP OVERVIEW This chapter is designed to provide step-by-step procedures for customizing key features of the wafer grinding process and the processes for truing and dressing the grind wheels and work chucks. Actions to be taken by the operator are shown in numbered steps with computer commands printed in bold type.
Page 216 Strasbaugh (Model 7AF) Wafer Grinder Tellect Error Messages Refer to the Troubleshooting chapter of this manual for resolution of any onscreen error messages not covered in this chapter. Help Buttons Help buttons at several menus display directions for making selections at the currently displayed menu.
Page 217 Operations and Maintenance Manual Machine Setup WAFER RECIPES MENU The Wafer Recipes menu, at which grind parameters for up to 12 grind recipes may be entered, changed, and saved, is based upon a spreadsheet model, with two sets of rows and columns displaying coarse and fine grind parameter values in cells.
Page 218: Figure 9-1 Wafer Recipes Menu
Strasbaugh (Model 7AF) Wafer Grinder Tellect Figure 9-1 Wafer Recipes Menu Wafer Grinding - Target Wafer Thickness Goal For wafer grinding on the 7AF, the grinding steps work to a target wafer thickness; whereas for wheel and chuck dressing and truing, the 7AF removes a specified amount (in microns) of material from the chuck or grind wheel.
Page 219 Operations and Maintenance Manual Machine Setup RINDING EQUENCE The 7AF grinding sequence for both coarse and fine grind is divided into the segments shown below. Five segments (grinding step 1, grinding step 2, grinding step 3, dwell, and lift) are programmable at the Wafer Recipes menu. Grind Sequence Segment...
Page 220 Strasbaugh (Model 7AF) Wafer Grinder Tellect Grinding Grinding is divided into the steps shown below: Step 1 During step 1, the wafer is ground from its original wafer thickness to the step 1 target thickness goal at the step 1 programmed feedrate and work chuck speed specified by the recipe.
Page 221 Operations and Maintenance Manual Machine Setup ECIPE ARAMETER ETTINGS AND NFORMATION VAILABLE AT AFER ECIPES The section below provides details on the entries to be made and the information displayed at the Wafer Recipes menu. OARSE AND RIND ECIPE TEPS AND ARAMETERS Grind Wheel Speed The grind wheel spindle speed (in revolutions per minute), which remains constant...
Page 222 Strasbaugh (Model 7AF) Wafer Grinder Tellect Grind Steps and Parameters WARNING! If the Wafer Diameter is not correct, the robot will crash into the wafers. Be sure to set the Wafer Diameter (located in the Wafer Parameters box) to match the diameter of the wafers to be ground.
Page 223 Operations and Maintenance Manual Machine Setup The chart below depicts a partial representation of the Wafer Recipes menu with definitions for the values to be entered in the cells. GRIND STEPS PARAMETERS Step 1 Step 2 Step 3 Dwell Lift THICKNESS value entered = value entered =...
Page 224 Strasbaugh (Model 7AF) Wafer Grinder Tellect AFER ARAMETERS WARNING! If the Wafer Diameter is not correct, the robot will crash into the wafers. Be sure to set the Wafer Diameter (located in the Wafer Parameters box) to match the diameter of the wafers to be polished.
Page 225 Operations and Maintenance Manual Machine Setup XAMPLE ECIPES Example of a Coarse Grind Recipe Step Step Step Dwell Lift 1875 Thickness µm Coarse Wheel revs. Feed Wafer 800 Feed rate µm/sec. Thickness Tape Chuck Thickness Speed Example of a Fine Grind Recipe Step Step Step...
Page 226 Strasbaugh (Model 7AF) Wafer Grinder Tellect HOICES VAILABLE AT THE AFER ECIPES Buttons, Submenus and Functions Icons Touch the Quit button to return to the Main Menu. Quit Save Grind The Save Grind Data message is displayed when the Quit button is selected.
Page 227 Operations and Maintenance Manual Machine Setup Machine The Machine Alarms button is reserved for future development. Alarms Help Touch the Help button to display information on making selections at the Wafer Recipes menu. Select a parameter you wish to change by touching its current Keypad value.
Page 228 Strasbaugh (Model 7AF) Wafer Grinder Tellect SING THE AFER ECIPES UMMARY The list below is a summary of the procedures needed to enter grind recipe parameters. The sections following provide detailed steps for each. Select the name of the recipe.
Page 229 Operations and Maintenance Manual Machine Setup 2 - E NTER THE OARSE RIND To enter data: Operator Action Explanation/Screen Display cell Touch the desired cell to select it. (For example, on the Coarse Grind spreadsheet touch the cell at which Step 1 and THICKNESS intersect to enter a new wafer thickness goal for grind step 1.) Touch the keypad number(s) desired to enter the new...
Page 230 Strasbaugh (Model 7AF) Wafer Grinder Tellect To enter data for another parameter: Touch the desired cell to select it, touch the desired numbers at the keypad, and touch the Enter button to confirm. Repeat for as many parameters as desired.
Page 231 Operations and Maintenance Manual Machine Setup 5 - Q UIT AND HANGES When you have finished changing parameters for the spreadsheet displayed, save the data and return to the Main Menu: Note: There are 33 parameters available for each recipe. Be sure to save the data you just entered before returning to the Main Menu.
Page 232: Figure 9-2 Wheel And Chuck Recipes Menu
Strasbaugh (Model 7AF) Wafer Grinder Tellect WHEEL AND CHUCK RECIPES MENU The truing and dressing recipes for the coarse and fine grind wheels and left and right work chucks are entered, edited, and stored at the Wheel and Chuck Recipes menu.
Page 233 Operations and Maintenance Manual Machine Setup Wheel & On the Select Recipe dialog box, choose the Coarse or Chuck Fine Wheel or Work Chuck button to select from Recipes the Wheel and Chuck Recipes menus (or touch Cancel). The screen displays the recipe menu (sample below). Figure 9-3 Coarse Wheel Recipe Menu (Example) Wheel and Chuck Truing and Dressing - Target Removal Goal...
Page 234 Strasbaugh (Model 7AF) Wafer Grinder Tellect About Truing On the Model 7AF the probes may be used to check the work chucks for true (radial runout, indicated by a probe fluctuation of less than one micron). Truing a wheel or chuck prior to use ensures that the entire face of the wheel is in contact with the part at all times during the grinding cycle.
Page 235 Operations and Maintenance Manual Machine Setup ECIPE ARAMETER ETTINGS AND NFORMATION VAILABLE AT HEEL AND HUCK ECIPES The section below provides details on the entries to be made and the information displayed at the Wheel and Chuck Recipes menu. RESS AND ECIPE TEPS AND ARAMETERS...
Page 236 Strasbaugh (Model 7AF) Wafer Grinder Tellect The chart below depicts a partial representation of the Wheel and Chuck Recipes menu dress recipe display with definitions for the values to be entered in the cells. PARAMETERS DRESS STEPS Step 1 Step 2...
Page 237 Operations and Maintenance Manual Machine Setup RIND HEEL XAMPLE ECIPES Grind Wheel Dressing Example of a Coarse Wheel Dressing Recipe Step Step Dwell Lift Coarse Wheel 1875 Removal µm revs. Feed rate µm/sec. Chuck Speed Example of a Fine Wheel Dressing Recipe Step Step Dwell...
Page 238 Strasbaugh (Model 7AF) Wafer Grinder Tellect One chuck truing recipe is stored and used for both work chucks. Example of a Work Chuck Dressing Recipe Step 1 Step Dwell Lift 2500 Removal µm Coarse Wheel revs. Feed rate µm/sec. Chuck Speed...
Page 239 Operations and Maintenance Manual Machine Setup HOICES VAILABLE AT THE HEEL AND HUCK ECIPES Buttons, Submenus, Functions and Icons Touch the Quit button to return to the Wafer Recipes menu. Quit Save Data The Save Data message is displayed when the Quit button is selected.
Page 240 Strasbaugh (Model 7AF) Wafer Grinder Tellect Keypad Select a parameter you wish to change by touching its current value. Touch the numbers and decimal point buttons on the keypad to enter a new parameter value. Values are displayed as you enter them in the entry display box located just above the Clear button.
Page 241 Operations and Maintenance Manual Machine Setup SING THE HEEL AND HUCK ECIPES UMMARY The list below is a summary of the procedures needed to enter dressing and truing recipe parameters. The sections following provide detailed steps for each. Select the name of the recipe. Enter the dress and true data.
Page 242 Strasbaugh (Model 7AF) Wafer Grinder Tellect 2 - E NTER THE RESS AND ECIPE To enter data: Operator Action Explanation/Screen Display cell Touch the desired cell to select it. (For example, on the Dress Recipe spreadsheet, touch the cell at which Step 1 and REMOVAL AMOUNT intersect to enter a new removal amount goal for dress step 1.)
Page 243 Operations and Maintenance Manual Machine Setup To correct errors at the entry display box: Operator Action Explanation/Screen Display Clear Touch the "Clear" button to delete an entry from the entry display box. Touch the screen's keypad number(s) desired to reenter the value (for example, "333").
Page 244 Strasbaugh (Model 7AF) Wafer Grinder Tellect 3 - Q UIT AND HANGES When you have finished changing parameters for the spreadsheet displayed, save the data and return to the Wafer Recipes menu: Note: There are 26 parameters available for each dressing and truing recipe. Be sure to save the data you just entered before returning to the Wafer Recipes menu.
Page 245 Operations and Maintenance Manual Preventive Maintenance Schedules Preventive Maintenance Schedules • Daily Maintenance Schedule • 7-Day or 5,000 Wafer Maintenance • 30-Day or 20,000 Wafer Maintenance • 180-Day or 80,000 Wafer Maintenance • 365-Day or 160,000 Wafer Maintenance Version 1.2 - June 2004 10 - 1...
Page 246 Strasbaugh (Model 7AF) Wafer Grinder Tellect PREVENTIVE MAINTENANCE SCHEDULES Overview Daily Preventive Maintenance Schedule 7-Day or 5,000 Wafers Preventive Maintenance Schedule 30-Day or 20,000 Wafers Preventive Maintenance Schedule 180-Day or 80,000 Wafers Preventive Maintenance Schedule 365-Day or 160,000 Wafers Preventive Maintenance Schedule 10 - 2 Version 1.2 - June 2004...
Page 247 Operations and Maintenance Manual Preventive Maintenance Schedules PREVENTIVE MAINTENANCE SCHEDULES OVERVIEW This chapter provides schedules for preventive maintenance of all systems of the Model 7AF Wafer Grinder. For procedures listed in the schedules, see the appropriate chapters of this manual. For some procedures, additional detail is provided in the section notes included with the schedules.
Page 248 Strasbaugh (Model 7AF) Wafer Grinder Tellect DAILY PREVENTIVE MAINTENANCE SCHEDULE Notice: As a part of Daily Preventive Maintenance, the operator is responsible for reporting anything indicating abnormal operation. For example: abnormal noises or vibrations malfunctions questionable product WARNING: Confirm that the diamond wheel is not spinning before beginning any maintenance inspection or procedure.
Page 249 Operations and Maintenance Manual Preventive Maintenance Schedules DAILY PREVENTIVE MAINTENANCE SCHEDULE ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Abnormal noises, vibrations; REPORT Unknown. malfunctions, questionable OBSERVATIONS TO product. SUPERVISOR AS SOON AS POSSIBLE. • Air Bearings Check for vibration, Requires approx. 2 min. to non-rotation.
Page 250 Strasbaugh (Model 7AF) Wafer Grinder Tellect Check the various dial pressure gauges (clean dry air supply, chuck air blow off, D.I. water, and vacuum) to confirm that readings correspond with pneumatic maintenance records -- see the Pneumatic Adjustments chapter of this manual for details. Adjust as needed.
Page 251 Operations and Maintenance Manual Preventive Maintenance Schedules 7-DAY OR 5,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE WARNING: Confirm that the diamond wheel is not spinning before beginning any maintenance inspection or procedure. ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Control Computer, Robot Clean the air cooling Procedure will take approx.
Page 252 Strasbaugh (Model 7AF) Wafer Grinder Tellect NOTES: Air Cooling System of the Control Computer, the Robot Controller, and the Pre- Aligner Controller Once per week, check the air cooling system of the control computer, the robot controller, and the pre-aligner controller. Frequency of checks is dependent on the cleanliness of the surrounding environment.
Page 253 Operations and Maintenance Manual Preventive Maintenance Schedules 7-DAY OR 5,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE (CONTINUED) ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Grind Wheels Check for wear and Requires approx. 2 min. to damage; replace if check. necessary. Corrective procedure (replace wheels, dress wheels, reference wheels) will take approx.
Page 254 Strasbaugh (Model 7AF) Wafer Grinder Tellect 7-DAY OR 5,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE (CONTINUED) ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Spin-Rinse Chuck Water Check for adequate flow. Requires approx. 5 min. to check. Corrective procedure will take longer. • Vacuum Generator Check output vacuum.
Page 255 Operations and Maintenance Manual Preventive Maintenance Schedules 30-DAY OR 20,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE WARNING: Confirm that the diamond wheel is not spinning before beginning any maintenance inspection or procedure. ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Coolant Flow Check/adjust. Requires approx.
Page 256 Strasbaugh (Model 7AF) Wafer Grinder Tellect 180-DAY OR 80,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE WARNING: Confirm that the diamond wheel is not spinning before beginning any maintenance inspection or procedure. ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Ball Rails Lubricate lightly with Procedure will take approx.
Page 257 Operations and Maintenance Manual Preventive Maintenance Schedules 180-DAY OR 80,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE (CONTINUED) ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Upper Spindle Z-Axis Drive Check/inspect for Requires approx. 5 min. to Belts cracking or fraying. check. Corrective Replace if evident. procedure will take longer.
Page 258 Strasbaugh (Model 7AF) Wafer Grinder Tellect 365-DAY OR 160,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE WARNING: Confirm that the diamond wheel is not spinning before beginning any maintenance inspection or procedure. ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Robot Position Alignment Calibrate.
Page 259 Operations and Maintenance Manual Preventive Maintenance Schedules 365-DAY OR 160,000 WAFERS PREVENTIVE MAINTENANCE SCHEDULE (CONTINUED) ESTIMATED TIME TO SUBJECT ACTION COMPLETE • Upper Spindle Weight Force Calibrate. Procedure will take approx. 1 hr. • Vacuum Pump Clean. Procedure will take approx. 1 hr.
Page 260 Strasbaugh (Model 7AF) Wafer Grinder Tellect (This page intentionally left blank) 10 - 16 Version 1.2 - June 2004...
Page 261 Operations and Maintenance Manual Mechanical Maintenance Procedures Mechanical Maintenance Procedures • Manual Control of Assemblies • Initial Alignments • Bridge • Spindles • Digital Probes • Robot • Pre-Aligner • Spin/Rinse Station • Cassette Turrets Version 1.2 - June 2004 11 - 1...
Page 262 Strasbaugh (Model 7AF) Wafer Grinder Tellect MECHANICAL MAINTENANCE PROCEDURES Overview Manual Control of Assemblies Menus Used in the Mechanical Maintenance Procedures Manual Movement of the Bridge with Machine Power OFF Initial Alignments Grinding Area Summary Before You Begin Level the Horizontal Rails of the Bed III.
Page 263 Operations and Maintenance Manual Mechanical Maintenance Procedures Robot Pre-aligner Spin-Rinse Station Spin-Rinse Motor Drive Belt Adjustment Spin-Rinse Chuck Up/Down Cylinder Reed Switch Adjustments Cassette Turrets Rotary Actuator Sensor Load/Robot Position Adjustments Before You Begin Load Position Check All Four Turret Switches and Record Results Adjust the Load Position Sensors Test the New Positioning Robot Position...
Page 264 Strasbaugh (Model 7AF) Wafer Grinder Tellect (This page intentionally left blank) 11 - 4 Version 1.2 - June 2004...
Page 265 Operations and Maintenance Manual Mechanical Maintenance Procedures MECHANICAL MAINTENANCE OVERVIEW NOTICE: Be sure to complete the procedures in the sections below before performing the software calibration adjustments addressed in the Software Calibration chapter of this manual. The Mechanical Maintenance Procedures chapter provides step-by-step procedures for both the grinding and wafer handling area sections of the machine.
Page 266 Strasbaugh (Model 7AF) Wafer Grinder Tellect MANUAL CONTROL OF ASSEMBLIES ENUS SED IN THE ECHANICAL AINTENANCE ROCEDURES The Machine Maintenance and Output Control/Input Status menus provide selective manipulation of machine components when performing maintenance and adjustment procedures. For detailed information on the Machine Maintenance, Output Control/Input Status, and Machine (Calibration) Setup Entry menus, refer to Menus Used In Maintenance and Calibration, found in the Software Calibration chapter of this manual.
Page 267 Operations and Maintenance Manual Mechanical Maintenance Procedures ANUAL OVEMENT OF THE RIDGE WITH ACHINE OWER To manually move the bridge (for example, to make room for the level on the work chuck mounting plates): CAUTION: Always confirm that the digital probes are in up position before moving the bridge to avoid breaking them off! 1.
Page 268 Strasbaugh (Model 7AF) Wafer Grinder Tellect INITIAL ALIGNMENTS The initial alignments are divided into two sections, one for the grinding area of the machine and one for the handling area of the machine. When the procedures for both sections have been completed, perform the software calibration procedures for the robot, found in the Software Calibration chapter of this manual.
Page 269 Operations and Maintenance Manual Mechanical Maintenance Procedures UMMARY The list below summarizes the procedures required to complete the initial alignments for the grinding area of the machine. The procedures must be performed in the order shown below. I. Before You Begin (preparatory procedures) II.
Page 270 Strasbaugh (Model 7AF) Wafer Grinder Tellect EFORE EGIN Tools Required • 5/32-in. hex key • 3/16-in. hex key Complete the Grinding Area Cabinet Base Leveling Procedure If the cabinet base has not yet been leveled, follow the procedures found in the Installation chapter of this manual to complete the Grinding Area Cabinet Base Leveling Procedure (refer to Leveling the Two Machine Sections).
Page 271 Operations and Maintenance Manual Mechanical Maintenance Procedures EPARATE THE RINDING ECTION OF THE ACHINE FROM THE ANDLING ECTION Open doors 14 and 17. Remove the two 3/8-16 wing nuts and washers, located at the right side of the machine behind door 17, which secure the grinding section of the machine to the handling section: a.
Page 272 Strasbaugh (Model 7AF) Wafer Grinder Tellect Disconnect the utility hoses joining the grinding area facilities to the handling area: a. Disconnect the 1-inch drain from the bottom of the plenum. b. Disconnect the D.I. water line from its connection underneath the spin- rinse station by depressing its quick disconnect and pulling.
Page 273 Operations and Maintenance Manual Mechanical Maintenance Procedures EMOVE THE RINDING ECTION OORS PPER RIND HAMBER OVERS AND THE PPER RIND HAMBER EALING LATES If the bridge is not at its center position, move it to the center by following the steps below: CAUTION: Always confirm that the digital probes are in up position before moving the bridge to avoid breaking them off!
Page 274 Strasbaugh (Model 7AF) Wafer Grinder Tellect Remove the upper right grind chamber sealing plate (the curved lip located at the front of the spindle): WARNING: You must remove both upper grind chamber sealing plates to avoid breaking off the digital probes when manually moving the bridge! a.
Page 275 Operations and Maintenance Manual Mechanical Maintenance Procedures EVEL THE ORIZONTAL AILS OF THE Tools Required • 15-inch long standard bubble level • 1 1/4-in. open end wrench • 1 1/8-in. open end wrench Turn Machine Power OFF Follow the procedures found in the Operator Functions chapter of this manual. IDE TO EVELING Manually move the bridge to the right side of the machine, aligning the upper...
Page 276 Strasbaugh (Model 7AF) Wafer Grinder Tellect GOAL: The upper left spindle U-bracket must be aligned over the inflatable seal surrounding the right work chuck. Through the door 19 opening at the rear of the machine, place a 15-in. long level side to side on the rear horizontal bridge rail (one end of the level pointing toward the left side of the machine cabinet and the other end pointing toward the right side).
Page 277 Operations and Maintenance Manual Mechanical Maintenance Procedures At the bottom front of the grinding section cabinet, locate the two 3/4-10 hold- down bolts and the single 3/4-10 adjusting bolt mounted between the two hold-down bolts. Loosen the two 3/4-10 hex nuts securing the two hold-down bolts: a.
Page 278 Strasbaugh (Model 7AF) Wafer Grinder Tellect Using a 1 1/8-in. open end wrench, rotate the 3/4-10 center adjusting bolt as needed to meet the goal: GOAL: The reading of the level should be centered within the level's marks. Notes: Rotating the adjusting screw clockwise raises the front of the bridge.
Page 279 Operations and Maintenance Manual Mechanical Maintenance Procedures III. EVEL THE OWER EFT AND IGHT PINDLE SSEMBLIES Tools Required • 3/16-in. hex key • 8-inch long standard bubble level • 3/4-in. open end wrench • 9/16-in. open end wrench or 1/4-in. hex key Before You Begin Complete the procedure for leveling the horizontal rails of the bed, above.
Page 280 Strasbaugh (Model 7AF) Wafer Grinder Tellect If the work chucks and their backing plates are installed, remove them by following the steps below: Note: The machine is shipped with the shrouds and mounting plates installed on the lower air bearings. Work chucks are not installed before shipping. If work chucks are now installed, remove them.
Page 281: Figure 11-1 Lower Spindle Side To Side Adjustment
Operations and Maintenance Manual Mechanical Maintenance Procedures EVEL THE OWER PINDLE SSEMBLY Side to Side Figure 11-1 Lower Spindle Side to Side Adjustment Version 1.2 - June 2004 11 - 21...
Page 282 Strasbaugh (Model 7AF) Wafer Grinder Tellect If needed, manually move the bridge to make room for the level on the work chuck mounting plates: CAUTION: Always confirm that the digital probes are in up position before moving the bridge to avoid breaking them off! a.
Page 283: Figure 11-2 Lower Spindle Front To Rear Adjustment
Operations and Maintenance Manual Mechanical Maintenance Procedures b. Using a 3/4-in. open end wrench, rotate the screw as needed to meet the goal. Rotating the screw clockwise lowers the side of the spindle nearest the left side of the machine. Rotating the screw counterclockwise raises the side of the spindle nearest the left side of the machine.
Page 284 Strasbaugh (Model 7AF) Wafer Grinder Tellect To adjust the position: a. Locate the lower left spindle front to rear adjusting screw, a wedge assembly extending vertically from the bottom of the lower left spindle assembly. Notes: Access the adjusting screw through the door 14 opening.
Page 285 Operations and Maintenance Manual Mechanical Maintenance Procedures EVEL THE OWER IGHT PINDLE SSEMBLY Note: Refer to Figures 11-1 and 11-2, above, when performing the lower right spindle adjustment. Side to Side Place an 8-in. long standard bubble level side to side (with one end of the level pointing toward the left side of the machine cabinet and the other end pointing toward the right side) on the right work chuck mounting plate.
Page 286 Strasbaugh (Model 7AF) Wafer Grinder Tellect Front to Rear Rotate the level to a front to rear position on the right work chuck mounting plate (one end pointing toward the front of the machine cabinet and the other end pointing toward the rear).
Page 287 Operations and Maintenance Manual Mechanical Maintenance Procedures Recheck Both Leveling Adjustments Recheck the side to side adjustment by repeating the steps above in this section. If needed, repeat the side to side adjustment until the goal is met. Recheck the front to rear adjustment by repeating the steps above in this section.
Page 288 Tools Required • Strasbaugh fringe plate tool kit, shipped with the machine (contents: one fringe plate tool, 16 spring washers, eight 1/4-20 screws, two probe fixtures, two 1/4-20 bolt and nut pairs, four 1/4-20 x 3 in. s.s. set screws) •...
Page 289 Operations and Maintenance Manual Mechanical Maintenance Procedures Place one fringe plate tool, counterbored holes up, on the work chuck mounting plate, aligning the fringe plate holes with the four washer pairs. CAUTION: Handle the top surface of the fringe plate with care--even minor damage to the top surface may impair the plate's accuracy as a tool.
Page 290 Strasbaugh (Model 7AF) Wafer Grinder Tellect DJUST RINGE LATES Left Spindle Fringe Plate Manually move the bridge by rotating the bridge sprocket until the upper left spindle is centered over the lower left spindle and the upper right spindle is centered over the lower right spindle.
Page 291 Operations and Maintenance Manual Mechanical Maintenance Procedures d. Using a 3/16-in. hex key and one of the 1/4-20 bolts (from the bolt and nut pairs included in the fringe plate tool kit) mount the probe fixture to any one of the six holes in the upper left spindle grinding wheel backing plate. Position the probe such that the probe bellows is as close to the backing plate as possible without touching it.
Page 292 Strasbaugh (Model 7AF) Wafer Grinder Tellect Reference the probe at the Home Machine menu: Touch to Select Explanation/Screen Display Home Machine At the Main Menu screen, touch the "Home Machine" button to select the Home Machine menu. Displays: Home menu...
Page 293 Operations and Maintenance Manual Mechanical Maintenance Procedures Rotate the fringe plate while observing the left probe reading on the Home Machine menu screen: a. While holding the grind wheel stationary with one hand, slowly rotate the fringe plate one full revolution with the other hand. b.
Page 294 Strasbaugh (Model 7AF) Wafer Grinder Tellect DJUST THE PPER PINDLE SSEMBLIES TO OSITIONS ARALLEL WITH THE OWER IGHT PINDLE Tools Required • 3/4-in. open end wrench • 9/16-in. open end wrench or 1/4-in. hex key PPER PINDLE At the Home Machine menu, raise the probes:...
Page 295 Operations and Maintenance Manual Mechanical Maintenance Procedures Manually move the bridge to the right side of the machine, aligning the upper left spindle over the lower right spindle: • Reach inside the sprocket cover and rotate the sprocket clockwise or counterclockwise as needed to move the bridge and position the upper left spindle.
Page 296: Figure 11-4 Upper Spindle Probe Reading Points
Strasbaugh (Model 7AF) Wafer Grinder Tellect b. Record the probe readings displayed at Points A, B, and C as shown in Figure 11-4. Point A ___ Point B ___ Point C ___ GOAL: The readings at Points A, B, and C should be within +/- 2 microns of each other.
Page 297: Figure 11-5 Upper Spindle Side To Side Adjustment
Operations and Maintenance Manual Mechanical Maintenance Procedures To make corrections, adjust--either one or both--the upper left spindle side to side adjusting screw and the upper left spindle front to rear adjusting screw: Side to Side Figure 11-5 Upper Spindle Side to Side Adjustment a.
Page 298: Figure 11-6 Upper Spindle Front To Rear Adjustment
Strasbaugh (Model 7AF) Wafer Grinder Tellect Front to Rear Figure 11-6 Upper Spindle Front to Rear Adjustment c. Locate the upper left spindle front to rear adjusting screw, a wedge assembly extending horizontally from the rear of the upper left spindle assembly.
Page 299 Operations and Maintenance Manual Mechanical Maintenance Procedures PPER IGHT PINDLE Note: Refer to Figures 11-5 and 11-6, above, when performing the upper right spindle adjustments. At the Home Machine menu, raise the probes: Touch to Select Explanation/Screen Display • Measure Thickness At the Home Machine menu, touch the "Measure Thickness"...
Page 300 Strasbaugh (Model 7AF) Wafer Grinder Tellect Rotate the grind wheel while observing the right probe reading on the Home Machine menu screen: a. While gently holding the fringe plate with one hand, manually rotate the upper right spindle grind wheel.
Page 301 Operations and Maintenance Manual Mechanical Maintenance Procedures To make corrections, adjust--either one or both--the upper right spindle side to side adjusting screw and the upper right spindle front to rear adjusting screw: Side to Side a. Locate the upper right spindle side to side adjusting screw, a two-pitch screw extending horizontally from the side of the upper right spindle assembly.
Page 302 Strasbaugh (Model 7AF) Wafer Grinder Tellect Front to Rear c. Locate the upper right spindle front to rear adjusting screw, a wedge assembly extending horizontally from the rear of the upper right spindle assembly. Notes: Access the adjusting screw through the door 19 opening.
Page 303 Operations and Maintenance Manual Mechanical Maintenance Procedures VI. A DJUST THE OWER PINDLE SSEMBLY TO A OSITION ARALLEL WITH THE PPER PINDLE SSEMBLIES Tools Required • 3/4-in. open end wrench • 9/16-in. open end wrench or 1/4-in. hex key UPPER LEFT SPINDLE Note: At the end of the procedure above (Adjust the Upper Spindle Assemblies to Positions Parallel with the Lower Right Spindle), the upper left spindle should still be positioned...
Page 304 Strasbaugh (Model 7AF) Wafer Grinder Tellect Rotate the grind wheel while observing the left probe reading on the Home Machine menu screen: a. Gently grasp the grind wheel to prevent it from rotating. DO NOT press down on the grind wheel; apply gentle side force to restrain it.
Page 305 Operations and Maintenance Manual Mechanical Maintenance Procedures b. Using a 3/4-in. open end wrench, rotate the screw as needed to meet the goal. Rotating the screw clockwise lowers the side of the spindle nearest the left side of the machine. Rotating the screw counterclockwise raises the side of the spindle nearest the left side of the machine.
Page 306 Strasbaugh (Model 7AF) Wafer Grinder Tellect UPPER RIGHT SPINDLE At the Home Machine menu, raise the probes: Touch to Select Explanation/Screen Display • Measure Thickness At the Home Machine menu, touch the "Measure Thickness" button to raise the probes. CAUTION: Always confirm that the digital probes are in up position before...
Page 307 Upper Spindle Assemblies (above in this section). Upper Left Spindle Upper Right Spindle If the goal is still not met when the lower left spindle assembly is tested against the upper right spindle, contact Strasbaugh for assistance. Version 1.2 - June 2004 11 - 47...
Page 308 Strasbaugh (Model 7AF) Wafer Grinder Tellect VII. B RIDGE IGHT RAVEL ROXIMITY ENSOR DJUSTMENTS IMPORTANT NOTES! • The distance between the spindles (when measured from center of spindle to center of spindle) should be 15 inches. To measure: 1. Remove door 19.
Page 309 Operations and Maintenance Manual Mechanical Maintenance Procedures EFORE EGIN Tools Required • feeler gauge • adjustable wrench • six-inch scale Turn Machine Power On Follow the procedures detailed in the Operator Functions chapter of this manual. Right Travel Sensor HECK RESENT ALIBRATION AND DJUST...
Page 310 Strasbaugh (Model 7AF) Wafer Grinder Tellect Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the "Machine Maintenance menu. Displays: Machine Maintenance menu Factor x 1000 Estimate the distance the bridge must move and set the factor.
Page 311 Operations and Maintenance Manual Mechanical Maintenance Procedures ⇒ Touch the "Right Arrow" button on the bridge icon at the top of the screen as many times as needed to have the bridge approach the sensor. Factor x 10 As the bridge nears the sensor, reduce the factor as needed to Factor x 1 move the bridge in smaller increments.
Page 312 Strasbaugh (Model 7AF) Wafer Grinder Tellect iii. Tighten the sensor nuts. Move the bridge over the sensor: Touch to Select Explanation/Screen Display Factor x 10 Factor x 1 At the Machine Maintenance menu, reduce the factor as needed to move the bridge in small increments.
Page 313 Operations and Maintenance Manual Mechanical Maintenance Procedures Test the sensor position by moving the bridge away from and back toward the sensor in small increments, finally positioning the bridge such that it covers one-half of the sensor: GOAL: The sensor's LED should be ON when the bridge covers one-half of the sensor.
Page 314 Strasbaugh (Model 7AF) Wafer Grinder Tellect If the light does not come ON, return to Step 10, above in this section, to reposition the sensor. If the light comes ON, go on to Left Travel Sensor, below. Left Travel Sensor...
Page 315 Operations and Maintenance Manual Mechanical Maintenance Procedures Factor x 1000 Estimate the distance the bridge must move and set the factor. For example, touch the "Factor x 1000" button to set the factor at .001 inches x 1000. Notes: .001 inches x 1000 = one inch of movement per touch of the Right or Left Arrow button touch.
Page 316 Strasbaugh (Model 7AF) Wafer Grinder Tellect Evaluate the sensor position: a. If the bridge looks as if it can be moved over the sensor without clipping the sensor tip, skip to Step 5., below. Note: The gap between the sensor tip and the lower bridge casting should be between 1/32 in.
Page 317 Operations and Maintenance Manual Mechanical Maintenance Procedures At the Machine Maintenance menu, carefully move the bridge to the left until the hard stop spring cushion is compressed one-half inch: GOAL: Watching carefully and moving slowly, move the bridge until the spring cushion is compressed one-half inch (one- half stroke).
Page 318 Strasbaugh (Model 7AF) Wafer Grinder Tellect With the bridge positioned such that the spring cushion is compressed one-half inch, check to see if the left proximity sensor light (LED) is ON: GOAL: The proximity sensor light should be ON when the bridge is positioned such that the spring cushion is compressed one- half inch.
Page 319 Operations and Maintenance Manual Mechanical Maintenance Procedures Test the sensor position by moving the bridge away from and back toward the sensor in small increments, finally positioning the bridge such that the spring cushion is compressed one-half inch: GOAL: The sensor's LED should be ON when the bridge is positioned such that the spring cushion is compressed one- half inch.
Page 320 Strasbaugh (Model 7AF) Wafer Grinder Tellect HEN A ATISFACTORY DJUSTMENT CHIEVED Replace service doors. Power down. Power up and home the machine. 11 - 60 Version 1.2 - June 2004...
Page 321 Operations and Maintenance Manual Mechanical Maintenance Procedures VIII. S PINDLE RAVEL ROXIMITY ENSOR DJUSTMENTS Notes: The upper sensor for each spindle is the home sensor. Both sensors are mounted horizontally. EFORE EGIN Tools Required • feeler gauge • adjustable wrench •...
Page 322 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Machine Maintenance menu, carefully move the bridge to its center position: GOAL: The bridge should be positioned such that the coarse spindle is over the left work chuck. Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine...
Page 323 Operations and Maintenance Manual Mechanical Maintenance Procedures Note: The distance from the center of the upper sensor to the top of the white counterbalance bracket should be 1 7/8 in. when measured with a scale. b. If the sensor trigger looks as if it will clip the sensor when moved vertically, adjust the horizontal position of the sensor to permit the sensor trigger to move vertically without touching the sensor trigger: i.
Page 324 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Machine Maintenance menu, carefully move the spindle up in small increments, positioning the spindle such that the diamond wheel does not protrude below the inflatable seal top cover and the spindle casting is not...
Page 325 Operations and Maintenance Manual Mechanical Maintenance Procedures Factor x 10 Factor x 1 As the spindle nears the sensor, reduce the factor as needed to move the spindle in smaller increments. ⇑ Touch the "Up Arrow" button just to the left of the coarse spindle icon as many times as needed to position the spindle to meet the goal.
Page 326 Strasbaugh (Model 7AF) Wafer Grinder Tellect Test the sensor position by moving the sensor trigger away from and back toward the sensor in small increments, finally positioning the spindle such that it meets the Step 4. goal, above in this section:...
Page 327 Operations and Maintenance Manual Mechanical Maintenance Procedures HEN A ATISFACTORY DJUSTMENT CHIEVED Replace door 19. Home the machine. Version 1.2 - June 2004 11 - 67...
Page 328 Strasbaugh (Model 7AF) Wafer Grinder Tellect IX. W HEN THE RINDING NITIAL DJUSTMENTS UCCESSFULLY OMPLETED Tools Required • 5/32-in. hex key • 3/16-in. hex key Reinstall the probes on their support arms: a. Using a 3/16-in hex key, remove the probe fixtures from the grinding wheel backing plates.
Page 329 Operations and Maintenance Manual Mechanical Maintenance Procedures HANDLING AREA Note: Perform the wafer handling area initial alignments each time the machine is moved and at other times as needed. UMMARY The list below summarizes the procedures required to complete the initial mechanical alignments for the handling area of the machine.
Page 330 Strasbaugh (Model 7AF) Wafer Grinder Tellect EFORE EGIN Tools Required none Complete the Handling Area Cabinet Base Leveling Procedure If the cabinet base has not yet been leveled, follow the procedures found in the Installation chapter of this manual to complete the Handling Area Cabinet Base Leveling Procedure (refer to Leveling the Two Machine Sections).
Page 331 Operations and Maintenance Manual Mechanical Maintenance Procedures Confirm that Air Is ON If needed, follow the procedures found in the Operator Functions chapter of this manual to turn air ON. Power Up the Machine Follow procedures found in the Operator Functions chapter of this manual. Version 1.2 - June 2004 11 - 71...
Page 332 Strasbaugh (Model 7AF) Wafer Grinder Tellect EVEL THE OBOT NOTICE! WHENEVER THE ROBOT OR THE ROBOT END EFFECTOR IS LEVELED, THE THREE PROCEDURES LISTED BELOW MUST BE PERFORMED ALSO: • Align the Pre-Aligner with the Robot • Align the Spin-Rinse Station with the Robot •...
Page 333 Operations and Maintenance Manual Mechanical Maintenance Procedures 1/4-20 hold down screw and 1/4-20 adjusting setscrew pairs located around the base of the robot: For each pair requiring adjustment: a. Using a 3/16-in. hex key, loosen the 1/4-20 hold down screw by rotating it counterclockwise.
Page 334 Strasbaugh (Model 7AF) Wafer Grinder Tellect III. EVEL THE OBOT FFECTOR NOTICE! WHENEVER THE ROBOT OR THE ROBOT END EFFECTOR IS LEVELED, THE THREE PROCEDURES LISTED BELOW MUST BE PERFORMED ALSO: • Align the Pre-Aligner with the Robot • Align the Spin-Rinse Station with the Robot •...
Page 335 Operations and Maintenance Manual Mechanical Maintenance Procedures Turn Vacuum ON Follow the procedures found in the Operator Functions chapter of this manual. FFECTOR ACUUM At the Output Control/Input Status menu, turn vacuum ON to the robot end effector: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine...
Page 336 Strasbaugh (Model 7AF) Wafer Grinder Tellect If needed, rotate the robot wrist to position the robot end effector vacuum seal up: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu.
Page 337 Operations and Maintenance Manual Mechanical Maintenance Procedures FFECTOR ACUUM Rotate the robot wrist to position the end effector vacuum seal down: Touch to Select Explanation/Screen Display Robot icon At the Machine Maintenance menu, touch the "Robot" icon to select the Robot drop down menu.
Page 338 Strasbaugh (Model 7AF) Wafer Grinder Tellect When a satisfactory adjustment is achieved, remove the wafer: a. While holding the wafer with one hand, b. turn vacuum OFF to the end effector, releasing the wafer: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot"...
Page 339 Operations and Maintenance Manual Mechanical Maintenance Procedures IV. A LIGN THE LIGNER WITH THE OBOT Tools Required • four small stock pieces to be used as shims (for example, washers) • test wafer Confirm that Compressed Air Is ON Follow the procedures found in the Operator Functions chapter of this manual. Confirm that Power Is ON Follow the procedures found in the Operator Functions chapter of this manual.
Page 340 Strasbaugh (Model 7AF) Wafer Grinder Tellect Procedure At the Output Control/Input Status menu, turn vacuum ON to the robot end effector and rotate the robot wrist until the end effector is positioned seal down: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine...
Page 341 Operations and Maintenance Manual Mechanical Maintenance Procedures Manually hold a test wafer centered under the end effector until it takes vacuum and is retained by the end effector. To permit manual movement of the robot arm, turn OFF the robot servos: Touch to Select Explanation/Screen Display Robot icon...
Page 342 Strasbaugh (Model 7AF) Wafer Grinder Tellect Test Visually check the position of the wafer relative to the pre-aligner chuck: GOAL: While still being supported by the end effector, the wafer should be parallel to the pre-aligner chuck. If the goal is not met, correct the position by following the procedure in Step 6., immediately below.
Page 343 Operations and Maintenance Manual Mechanical Maintenance Procedures Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu. Servos Touch the "Servos" button to select the Robot Servos submenu.
Page 344 Strasbaugh (Model 7AF) Wafer Grinder Tellect LIGN THE INSE TATION WITH THE OBOT Tools Required • 3/16-in. hex key • 1/8-in. hex key • test wafer Confirm that Compressed Air Is ON Follow the procedures found in the Operator Functions chapter of this manual.
Page 345 Operations and Maintenance Manual Mechanical Maintenance Procedures Move the Spin-Rinse Chuck to Its UP Position Follow the procedures below: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu.
Page 346 Strasbaugh (Model 7AF) Wafer Grinder Tellect Procedure If needed, turn vacuum ON to the robot end effector: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu.
Page 347 Operations and Maintenance Manual Mechanical Maintenance Procedures Turn OFF robot servos to permit manual movement of the robot arm: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu.
Page 348 Strasbaugh (Model 7AF) Wafer Grinder Tellect If the robot won't stay where you place it, turn the robot servos back ON by following the procedure below: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot"...
Page 349 Operations and Maintenance Manual Mechanical Maintenance Procedures Correct the position of the spin-rinse station by adjusting the three 1/4-20 hold down screw and 1/4-20 adjusting setscrew pairs, located underneath the spin station and inside door 10. a. Open door 10. Notes: Opening door 10 shuts down power to the spin-rinse station.
Page 350 Strasbaugh (Model 7AF) Wafer Grinder Tellect When the Test goal has been met, manually return the robot to its retracted position: a. Manually return the robot to its retracted position over the robot base. b. Turn the robot servos back ON by following the procedure below:...
Page 351 Operations and Maintenance Manual Mechanical Maintenance Procedures Remove the test wafer from the robot end effector: a. While holding the wafer with one hand, b. turn vacuum OFF to the end effector, releasing the wafer: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot"...
Page 352 Strasbaugh (Model 7AF) Wafer Grinder Tellect VI. L EVEL THE ASSETTE LATFORMS URRETS Tools Required • 6-inch scale • rubber mallet • circular bubble level • 3/16-in hex key • 1/8-in. hex key • cassette that will accommodate the largest wafer you plan to process •...
Page 353 Operations and Maintenance Manual Mechanical Maintenance Procedures OARSE DJUSTMENT EVELING GAINST THE ACHINE Summary: Perform the following set of adjustments in the order shown for each cassette platform. Before You Begin - Preparatory Procedures Window Height Adjustment Window Angle Adjustment Platform Leveling Adjustment Cassette Platform (Turret) 1 Before You Begin - Preparatory Procedures...
Page 354 Strasbaugh (Model 7AF) Wafer Grinder Tellect Rotate the platform, if needed, to position it facing the robot: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu.
Page 355 Operations and Maintenance Manual Mechanical Maintenance Procedures Adjust the window position: a. Open the four screw covers. b. Loosen the four screws and screw cover pairs securing the plexiglass window by rotating the screws counterclockwise. c. Manually adjust the window position as needed to meet the goal. d.
Page 356 Strasbaugh (Model 7AF) Wafer Grinder Tellect Remove the platform: Note: Handle the sensor wires gently. a. Remove the three 1/4-20 hold down bolts from the bottom of the platform by rotating them counterclockwise. b. Lift the platform off and gently place it inside the handling area near the robot.
Page 357 Operations and Maintenance Manual Mechanical Maintenance Procedures b. Lotate the large adjusting screw centered on the locking collar clockwise or counterclockwise as needed to meet the goal. Note: The adjusting screw is hollow to accommodate the sensor wires. c. When the goal is met, rotate the clamp screws clockwise, tightening them to 50%.
Page 358 Strasbaugh (Model 7AF) Wafer Grinder Tellect To manually correct the position: a. Rotate the platform support as needed to meet the goal. b. Rotate the three locking collar clamp screws 100% clockwise to fully tighten. c. Remeasure to check the adjustment and repeat the correction if necessary.
Page 359 Operations and Maintenance Manual Mechanical Maintenance Procedures Power up the machine. While observing the motion, rotate the turret: GOAL: The window should close to a position flush with the frame, closing completely and not overtraveling. a. Rotate the turret to its load position (facing away from the robot): Touch to Select Explanation/Screen Display i.
Page 360 Strasbaugh (Model 7AF) Wafer Grinder Tellect Note: You may need to open the adjacent cassette door and reach around if you find you need to tap the platform from the inside. a. Retest by repeating Step 3., above in this section. If needed, repeat the adjustment.
Page 361 Operations and Maintenance Manual Mechanical Maintenance Procedures Read the level. GOAL: The reading of the level (the bubble) should be centered within the level's circle. If the goal is not met, correct the position by following the procedure in Step 3., immediately below.
Page 362 Strasbaugh (Model 7AF) Wafer Grinder Tellect Rotate the turret back to its robot position (facing the robot): Touch to Select Explanation/Screen Display • Cassette 1 icon At the Output Control/Input Status menu, touch the "Cassette 1" (Send1 Cassette) icon at the Output Control/Input Status Menu to rotate its platform.
Page 363 Operations and Maintenance Manual Mechanical Maintenance Procedures DJUSTMENT EVELING GAINST THE OBOT Cassette Platform (Turret) 1 Before You Begin Confirm that air and vacuum are ON. Confirm that machine is powered up. Procedure Place a cassette on the platform. Use a cassette that will accommodate the largest wafer you plan to process.
Page 364 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Output Control/Input Status menu, turn vacuum ON to the robot end effector: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu.
Page 365 Operations and Maintenance Manual Mechanical Maintenance Procedures Z ON/OFF Touch the "Z ON/OFF" until Z OFF is displayed, indicating the Z axis servo is off. Manually move the robot end effector into the bottom slot of the cassette. Check the position of the wafer: GOAL: While still being supported by the end effector, the wafer must sit in the slot without touching the top or bottom of the slot.
Page 366 Strasbaugh (Model 7AF) Wafer Grinder Tellect d. Rotate the screws clockwise to retighten. e. Close the screw covers. Turn OFF the robot servos: Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu.
Page 367 Operations and Maintenance Manual Mechanical Maintenance Procedures R ON/OFF Touch the "R ON/OFF" until R OFF is displayed, indicating the radial axis servo is off. Theta ON/OFF Touch the "Theta ON/OFF" until Theta OFF is displayed, indicating the theta axis servo is off.
Page 368 Strasbaugh (Model 7AF) Wafer Grinder Tellect When a satisfactory adjustment is achieved, remove the wafer: a. While holding the wafer with one hand, b. turn vacuum OFF to the end effector, releasing the wafer: Touch to Select Explanation/Screen Display i. Robot icon At the Output Control/Input Status menu, touch the "Robot"...
Page 369 Operations and Maintenance Manual Mechanical Maintenance Procedures VII. A DJUST THE ED TO A OSITION ARALLEL TO THE OBOT Tools Required • test wafer EFORE EGIN Confirm that Vacuum Is ON Follow the procedures found in the Operator Functions chapter of this manual. Confirm that All Grinding Area Initial Adjustments Have Been Completed Refer to the Grinding Area Initial Adjustments section, above in this chapter.
Page 370 Strasbaugh (Model 7AF) Wafer Grinder Tellect Confirm that the Following Handling Area Initial Adjustments Have Been Completed • Level the Robot • Level the Robot End Effector • Level the Four Cassette Platforms • Align the Pre-Aligner with the Robot •...
Page 371 Operations and Maintenance Manual Mechanical Maintenance Procedures Touch to Select Explanation/Screen Display Start Cycle Touch the "Start Cycle" button to grind the work chucks. Wait for the cycle to finish. Quit Touch the "Quit" button to return to the Main Menu.
Page 372 Strasbaugh (Model 7AF) Wafer Grinder Tellect Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu. Move To Touch the "Move To" button on the Robot drop down menu to select it.
Page 373 Operations and Maintenance Manual Mechanical Maintenance Procedures Move the robot (and the wafer) to the right work chuck. Touch to Select Explanation/Screen Display Robot icon At the Output Control/Input Status menu, touch the "Robot" icon to select the Robot drop down menu.
Page 374 Strasbaugh (Model 7AF) Wafer Grinder Tellect VIII. W HEN THE RINDING REA AND ANDLING NITIAL LIGNMENTS ATISFACTORILY OMPLETED When the initial alignment procedures for both sections have been completed, perform the software calibration procedures for the robot, found in the Software Calibration chapter of this manual before operating a grind cycle.
Page 375 Operations and Maintenance Manual Mechanical Maintenance Procedures BRIDGE ORIZONTAL RAVEL DJUSTMENT EFORE EGIN Tools Required • 7/16-in. open end wrench • 3/8-in. open end wrench • 5/32-in. hex key HECK RESENT ALIBRATION Remove door 17. Using a 7/16-in. open end wrench, remove the three 1/4-20 bolts securing the lower belt guard by rotating them counterclockwise.
Page 376 Strasbaugh (Model 7AF) Wafer Grinder Tellect Check the tension of the horizontal travel belt: a. Press the belt at midspan with your finger. GOAL: The belt should deflect 1/8 in. at center of belt span with 2 LBS. pressure. Note: For a rough gauge of the feel of the pounds of force needed, press a scale with your finger until it registers the poundage you need to apply.
Page 377 Operations and Maintenance Manual Mechanical Maintenance Procedures b. If the tension needs adjustment, repeat the adjustment procedure. ATISFACTORY DJUSTMENT CHIEVED Replace the belt guard. Replace door 17. Version 1.2 - June 2004 11 - 117...
Page 378 Strasbaugh (Model 7AF) Wafer Grinder Tellect SPINDLES RAVEL DJUSTMENT EFORE EGIN Tools Required • 9/16-in. open end wrench OARSE PINDLE HECK RESENT ALIBRATION Remove door 19. 11 - 118 Version 1.2 - June 2004...
Page 379 Operations and Maintenance Manual Mechanical Maintenance Procedures Check the tension of the Z travel belt: a. Press the belt at midspan with your finger. GOAL: The belt should deflect 1/8 in. at center of belt span with 2 LBS. pressure. Note: For a rough gauge of the feel of the pounds of force needed, press a scale with your finger until it registers the poundage you...
Page 380 Strasbaugh (Model 7AF) Wafer Grinder Tellect CHANGING THE GRIND WHEELS Notes • The procedure below was written for the right (fine) grind wheel. To change the left (coarse) grind wheel, repeat the steps shown below, substituting left for right and following instructions shown in parentheses when appropriate.
Page 381 Operations and Maintenance Manual Mechanical Maintenance Procedures Change Procedure Remove the Grind Wheel Following the procedures found in the Basic Operation section of this chapter, power up and home the machine. Position the bridge as needed. • To change the left grind wheel, move the bridge to its left position. •...
Page 382 Strasbaugh (Model 7AF) Wafer Grinder Tellect DANGER: WAIT until the grind wheel comes to a complete halt before beginning the disassembly procedure shown below! Open/remove doors 15 and 16. (For removal of the left grind wheel, open doors 12 and 13.)
Page 383 Operations and Maintenance Manual Mechanical Maintenance Procedures While carefully providing support for the grind wheel, free the wheel by removing the six 1/4-20 socket head bolts: CAUTION: Without adequate support during the removal process, the grind wheel may break by dropping down onto the conditioning arm.
Page 384 Strasbaugh (Model 7AF) Wafer Grinder Tellect While holding the arm out of the way, slip the new grind wheel up onto the spindle, aligning the grind wheel holes with those of the backing plate. While continuing to support the grind wheel, release the conditioning arm.
Page 385 Operations and Maintenance Manual Mechanical Maintenance Procedures Using a torque wrench fitted with a 3/16-in. hex key to rotate the bolts clockwise to 8 foot-pounds (96 inch-pounds), tighten the 6 socket head bolts in a diametrically opposite sequence: GOAL: Tighten the six socket head bolts to 8 foot-pounds (96 inch- pounds).
Page 386 Strasbaugh (Model 7AF) Wafer Grinder Tellect Following the steps found in the Basic Operation section of this chapter, perform the following procedures in the order shown below: a. Power up. b. Home the machine. c. True the newly installed grind wheel.
Page 387 Operations and Maintenance Manual Mechanical Maintenance Procedures CHANGING THE WORK CHUCKS Tools Required • 3/16-in. hex key • 5/32-in. hex key • D.I. water • lint-free wipes • replacement chuck • 3/32-in. hex key • adjustable torque wrench with a 5/16-in. hex key fitting •...
Page 388 Strasbaugh (Model 7AF) Wafer Grinder Tellect Position the bridge as needed. • To change the left work chuck, move the bridge to its right position. • To change the right work chuck, move the bridge to its left position. For our example, we will change the right work chuck.
Page 389 Operations and Maintenance Manual Mechanical Maintenance Procedures c. Remove the two 3/8-16 wing nuts and washers, located at the right side of the machine behind door 17, which secure the grinding section of the machine to the handling section: i. Manually rotate each wing nut counterclockwise to loosen and remove.
Page 390 Strasbaugh (Model 7AF) Wafer Grinder Tellect g. Disconnect the utility hoses joining the grinding area facilities to the handling area: i. Disconnect the 1-inch drain from the bottom of the plenum. ii. Unclamp the retaining ring of the 5-inch exhaust hose from the plenum.
Page 391 Operations and Maintenance Manual Mechanical Maintenance Procedures c. Using an adjustable torque wrench with a 5/16-in. hex key fitting, tighten the ¼-20 UNC bolts in a star-shaped torque pattern to 40 inch-pounds. (This is approximately one-half of the final torque value.) d.
Page 392 Strasbaugh (Model 7AF) Wafer Grinder Tellect Check for necessary clearance between the probe and the bridge: GOAL: When the probe is in its UP position, the probe tip must be 3/8 in. above the top lip of the inflatable seal when measured with a 6-in.
Page 393 Operations and Maintenance Manual Mechanical Maintenance Procedures Following the steps found in the Basic Operation section of this chapter, perform the following procedures: a. Power up. b. Home the machine. c. True the chuck. d. Dress the coarse grind wheel. e.
Page 394 Strasbaugh (Model 7AF) Wafer Grinder Tellect DIGITAL MEASUREMENT PROBES SSEMBLY EIGHT DJUSTMENTS EFORE EGIN Tools Required • 6-in. scale • 9/16-in. open end wrench Confirm that Air Is ON If needed, follow the procedures found in the Operator Functions chapter of this manual to turn air ON.
Page 395 Operations and Maintenance Manual Mechanical Maintenance Procedures HECK RESENT ALIBRATION At the Machine Maintenance menu, carefully move the bridge to its center position: GOAL: The bridge should be positioned such that the coarse spindle is over the left work chuck. Touch to Select Explanation/Screen Display Machine Maint...
Page 396 Strasbaugh (Model 7AF) Wafer Grinder Tellect Touch to Select Explanation/Screen Display Home Machine At the Main Menu screen, touch the "Home Machine" button to select the Home Machine menu. Displays: Home menu Reference Left Probe At the Home Machine menu, touch the "Reference Left Probe"...
Page 397 Operations and Maintenance Manual Mechanical Maintenance Procedures Using a 6-in. scale, measure the distance from the bottom of each probe tip to the top surface lip of the inflatable seal: GOAL: When the probe is in its UP position, the probe tip must be 3/8 in.
Page 398 Strasbaugh (Model 7AF) Wafer Grinder Tellect Disconnect the utility hoses joining the grinding area facilities to the handling area: a. Disconnect the 1-inch drain from the bottom of the plenum. b. Disconnect the D.I. water line from its connection underneath the spin/rinse station by depressing its quick disconnect and pulling.
Page 399 Operations and Maintenance Manual Mechanical Maintenance Procedures HEN A ATISFACTORY DJUSTMENT CHIEVED Reconnect utility hoses. Bolt the grinding section machine cabinet to the handling area section: a. Rotate the handling section into place. b. Replace a washer and wing nut on each setscrew and manually rotate each wing nut clockwise to firm.
Page 400 Strasbaugh (Model 7AF) Wafer Grinder Tellect ROBOT The robot is a pre-adjusted, self-contained unit. Essential mechanical adjustments are included in the Initial Adjustments section of this chapter. For further information on adjustments internal to the robot, refer the following: •...
Page 401 Operations and Maintenance Manual Mechanical Maintenance Procedures PRE-ALIGNER The pre-aligner is a pre-adjusted, self-contained unit. Essential mechanical adjustments are included in the Initial Adjustments section of this chapter. For further information on adjustments internal to the pre-aligner, refer the following: •...
Page 402 Strasbaugh (Model 7AF) Wafer Grinder Tellect SPIN-RINSE STATION INSE OTOR RIVE DJUSTMENT EFORE EGIN Tools Required • 5/32-in. hex key HECK RESENT ALIBRATION Open door 10. Check the tension of the spin-rinse motor drive belt: a. Press the belt at midspan with your finger.
Page 403 Operations and Maintenance Manual Mechanical Maintenance Procedures b. If the tension meets the goal, go on to When Satisfactory Adjustment Is Achieved, below. c. If the tension needs adjustment, go to the Adjustment Procedure section, below, to make corrections. DJUSTMENT ROCEDURE Using a 5/32-in.
Page 404 Strasbaugh (Model 7AF) Wafer Grinder Tellect INSE HUCK YLINDER WITCH DJUSTMENTS EFORE EGIN Tools Required • 7/64-in. hex key Confirm that Air Is ON Follow the procedures detailed in the Operator Functions chapter of this manual. Turn Machine Power On Follow the procedures detailed in the Operator Functions chapter of this manual.
Page 405 Operations and Maintenance Manual Mechanical Maintenance Procedures HECK RESENT ALIBRATION Up Position Switch At the Output Control/Input Status menu, move the spin-rinse chuck to its up position: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint"...
Page 406 Strasbaugh (Model 7AF) Wafer Grinder Tellect Read the status of Spin Chuck Up on the Input Status table. GOAL: Spin Chuck Up should be displayed in green, indicating the reed switch is ON when the chuck is in up position.
Page 407 Operations and Maintenance Manual Mechanical Maintenance Procedures DJUSTMENT ROCEDURE Open door 10. Note: Opening door 10 will turn machine power off. Up Position Switch Using a 7/64-in. hex key, loosen the socket head capscrew securing the upper switch to the cylinder by rotating it counterclockwise. Slide the switch as far up as it will go.
Page 408 Strasbaugh (Model 7AF) Wafer Grinder Tellect Retest by repeating Steps 1. and 2. in Section B., above. a. If the goals are met for both switches, skip to When Satisfactory Adjustment Is Achieved, below. b. If either goal is not met, repeat the adjustment procedure, moving the affected switch toward the middle of the cylinder in 1/8-in.
Page 409 Operations and Maintenance Manual Mechanical Maintenance Procedures CASSETTE TURRETS OTARY CTUATOR ENSOR OBOT OSITION DJUSTMENTS Notes: In robot position the cassette turret faces the robot. In load position the cassette turret faces the operator. EFORE EGIN Tools Required • flathead screwdriver Confirm that Compressed Air Is ON Follow the procedures detailed in the Operator Functions chapter of this manual.
Page 410 Strasbaugh (Model 7AF) Wafer Grinder Tellect OSITION HECK URRET WITCHES AND ECORD ESULTS Send 1 Cassette (Turret 1) Move the cassette turret to its load position: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint"...
Page 411 Operations and Maintenance Manual Mechanical Maintenance Procedures Read the screen status of the Send1 Load Pos input: GOAL: When the Send 1 turret is in load position the screen display for Send1 Load Pos should be green, indicating the sensor is ON. Record whether the goal is met or not met: _____________ Send 2 Cassette (Turret 2) Repeat as for Send 1, substituting Send 2 for Send 1 where appropriate.
Page 412 Strasbaugh (Model 7AF) Wafer Grinder Tellect DJUST THE OSITION ENSORS Using the notes recorded above, adjust the positions of the sensors not meeting the goal. Send 1 Cassette (Turret 1) Open door 7. Reposition the sensor: a. Using a flathead screwdriver, loosen the sensor retaining screw by rotating it counterclockwise.
Page 413 Operations and Maintenance Manual Mechanical Maintenance Procedures EST THE OSITIONING Power up the machine. Repeat Section B., above. a. If the goal is met for all four turrets, skip to Robot Position, below. b. For any sensor still not meeting the goal, repeat the adjustment procedure, moving the affected sensor toward the middle of the actuator in 1/8-in.
Page 414 Strasbaugh (Model 7AF) Wafer Grinder Tellect Cassette 1 icon Touch the "Cassette 1" (Send1 Cassette) icon to rotate its platform. Read the screen status of the Send1 Robot Pos input: GOAL: When the Send 1 turret is in load position the screen display for Send1 Robot Pos should be green, indicating the sensor is ON.
Page 415 Operations and Maintenance Manual Mechanical Maintenance Procedures DJUST THE OBOT OSITION ENSORS Using the notes recorded above, adjust the positions of the sensors not meeting the goal. Send 1 Cassette (Turret 1) Open door 7. Reposition the sensor: a. Using a flathead screwdriver, loosen the sensor retaining screw by rotating it counterclockwise.
Page 416 Strasbaugh (Model 7AF) Wafer Grinder Tellect EST THE OSITIONING Power up the machine. Repeat Section B., above. a. If the goal is met for all four turrets, skip to When Satisfactory Adjustment Is Achieved, below. b. For any sensor still not meeting the goal, repeat the adjustment procedure, moving the affected sensor toward the middle of the actuator in 1/8-in.
Page 417 Operations and Maintenance Manual Software Calibration Software Calibration Procedures • Menus Used in Software Calibration • Robot (and Pre-Aligner) • Setup and Calibration Version 1.2 - June 2004 12 - 1...
Page 418: Figure 12-1 Machine Maintenance Menu
Strasbaugh Tellect (Model 7AF) Wafer Grinder SOFTWARE CALIBRATION PROCEDURES Overview Menus Used in Maintenance and Calibration Machine Maintenance Menu Information Available at the Maintenance Menu Choices Available at the Machine Maintenance Menu Using the Machine Maintenance Menu's Manual Controls - An Example...
Page 419 Operations and Maintenance Manual Software Calibration SOFTWARE CALIBRATION PROCEDURES OVERVIEW This Software Calibration chapter provides details on the menus used in maintenance and calibration procedures as well as information on the software calibration required for the wafer handling robot (and pre-aligner). Messages Displayed on the Control Computer Screen Take Precedence! Messages and information displayed on the control computer screen always take precedence over information in this manual.
Page 420 Strasbaugh Tellect (Model 7AF) Wafer Grinder MENUS USED IN MAINTENANCE AND CALIBRATION CAUTION! The functions at the Machine Maintenance, Input Control/Output Status, and Machine Setup Entry menus should be used only by trained service personnel. ACHINE AINTENANCE Manual Control of Assemblies...
Page 421 Operations and Maintenance Manual Software Calibration Figure 12-1 Machine Maintenance Menu The images (icons) displayed on this menu represent the bridge, the coarse and fine grind spindles, and the left and right work chucks. NFORMATION VAILABLE AT THE AINTENANCE Status Display Area The real time status display, located at the right side of the Machine Maintenance menu screen, monitors machine component position and function values continuously while machine power is on.
Page 422 Strasbaugh Tellect (Model 7AF) Wafer Grinder Component Position or Status Function Present location of the bridge as measured in inches BRIDGE from its right side (home) position. Wheel Coarse Fine Height Coarse spindle height Fine spindle height above above the work chuck...
Page 423 Operations and Maintenance Manual Software Calibration After referencing, the zero point is reestablished at the work chuck. After power up and the initial referencing, for subsequent referencing, the count is upward from the work chuck beginning with zero. Upward movement of the spindles is always positive; downward movement is always negative.
Page 424 Strasbaugh Tellect (Model 7AF) Wafer Grinder Manual Control of Components BRIDGE The buttons on the bridge icon, located at the upper left of the menu screen, permit manual control of left and right movement of the bridge. Left/Right Movement: Touch the L button to move the bridge to its left position.
Page 425 Operations and Maintenance Manual Software Calibration The buttons on the coarse grind spindle icon, located at the COARSE GRIND left of the menu screen and just below the bridge icon, permit SPINDLE manual control of up and down movement and rotation of the coarse grind spindle.
Page 426 Strasbaugh Tellect (Model 7AF) Wafer Grinder The buttons on the fine grind spindle icon, located at the FINE GRIND right of the menu screen and just below the bridge icon, SPINDLE permit manual control of up and down movement and rotation of the fine grind spindle.
Page 427 Operations and Maintenance Manual Software Calibration The buttons on the left work chuck icon, located at the left LEFT WORK CHUCK side of the menu screen and just below the coarse spindle icon, permit manual control of chuck rotation. Rotational Movement: Touch the Minus button to decrease the chuck speed by 1 revolution per minute.
Page 428 Strasbaugh Tellect (Model 7AF) Wafer Grinder The four factor buttons, located just below the left and right FACTOR work chucks, select the size of component movements. Refer to the chart below for the resulting movement sizes when factor buttons are used in combination with the arrow keys, plus keys, or minus keys.
Page 429 Operations and Maintenance Manual Software Calibration Effects of Using the Factor Buttons The chart below shows the resulting movement sizes and speed adjustments for each combination of component function unit and factor. FACTOR FUNCTION x 10 x 100 x 1000 Bridge Travel 0.001 inches 0.01 inches 0.1 inches...
Page 430 Strasbaugh Tellect (Model 7AF) Wafer Grinder SING THE ACHINE AINTENANCE ANUAL ONTROLS XAMPLE The steps below show an example of using the bridge travel function and the Factor buttons to position the bridge as near as possible to the right travel sensor.
Page 431 Operations and Maintenance Manual Software Calibration Touch to Select Explanation/Screen Display Factor x 1000 Estimate the distance the bridge must move and set the factor. For example, touch the "Factor x 1000" button to set the factor at .001 inches x 1000. Notes: .001 inches x 1000 = one inch of movement per touch of the Right or Left Arrow button touch.
Page 432 Strasbaugh Tellect (Model 7AF) Wafer Grinder UTPUT ONTROL NPUT TATUS The Output Control/Input Status menu, selected at the Machine Maintenance menu, displays the current state of the machine inputs and permits the outputs for each of the machine functions to be forced on and off. The outputs are grouped according to machine function and accessed by pressing the corresponding icon.
Page 433 Operations and Maintenance Manual Software Calibration Figure 12-2 Output Control / Input Status Menu NFORMATION AND HOICES VAILABLE AT THE UTPUT ONTROL NPUT TATUS Notes on Input Status • Refer to Appendix D of this manual for the 7AF Input/Output Address Lists. •...
Page 434 Strasbaugh Tellect (Model 7AF) Wafer Grinder Notes on Output Control The Output Control section of the table below lists machine components and the controls available on their associated drop down menus. • Options labels on drop down menus change to display the current state of the component.
Page 435 Operations and Maintenance Manual Software Calibration Buttons, Submenus, Function(s) and Icons QUIT Touch the QUIT button to return to the Machine Maintenance menu. Output Control LEFT WORK CHUCK Touch the left work chuck icon to display the left work chuck drop down menu, listing the selections shown below: Coolant ON/OFF Touch to turn coolant on or off to the left work...
Page 436 Strasbaugh Tellect (Model 7AF) Wafer Grinder Touch the right work chuck icon to display the RIGHT WORK CHUCK right work chuck drop down menu, listing the button selections shown below: Coolant ON/OFF Touch to turn coolant on or off to the right work chuck, provided the bridge is positioned over the chuck.
Page 437 Operations and Maintenance Manual Software Calibration Touch the right chuck conditioner icon to RIGHT CHUCK CONDITIONER display the right chuck conditioner drop down menu, listing the button selections shown below: Touch to move the right conditioning brush arm Brush Arm up or down.
Page 438 Strasbaugh Tellect (Model 7AF) Wafer Grinder Touch the spin/rinse icon to display the SPIN/RINSE STATION spin/rinse drop down menu, listing the button selections shown below: Lid UP/DOWN Touch to move the spin/rinse lid up or down. Touch to move the spin/rinse spindle up or Spindle UP/DOWN down.
Page 439 Operations and Maintenance Manual Software Calibration Touch the robot icon to display the robot drop ROBOT down menu, listing the button selections shown below: WARNING! To avoid breakage of the released wafer, manually grasp the wafer before turning vacuum off to the robot. Touch to turn vacuum on or off to the robot.
Page 440 Strasbaugh Tellect (Model 7AF) Wafer Grinder SING THE UTPUT ONTROL NPUT TATUS ANUAL ONTROLS XAMPLE Follow the steps below to move the spin-rinse spindle (chuck) to its up position: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint"...
Page 441 Operations and Maintenance Manual Software Calibration Touch to Select Explanation/Screen Display Spin-Rinse Station icon At the Output Control/Input Status menu, touch the "Spin-Rinse Station" icon to select the Spin-Rinse drop down menu. Lid Up Touch the "Lid Up/Dn" button until Lid Up is displayed.
Page 442 Strasbaugh Tellect (Model 7AF) Wafer Grinder ACHINE ALIBRATION ETUP NTRY WARNING! If set incorrectly, the parameters at the Machine Setup Entry menu may render the machine inoperable, damage the product, or damage the machine. Calibration variable values should be altered only by a trained service technician or process engineer.
Page 443: Figure 12-3 Machine Setup Entry Menu
Operations and Maintenance Manual Software Calibration Operator Action Explanation/Screen Display Machine Setup At the Machine Maintenance menu screen, touch the "Machine Setup" button to select the Machine (Calibration) Setup Entry menu. The screen displays the Machine Setup Entry menu, shown below. Figure 12-3 Machine Setup Entry Menu The Machine Setup Entry menu lists the current values of the calibration list variables...
Page 444 Strasbaugh Tellect (Model 7AF) Wafer Grinder NFORMATION AND HOICES VAILABLE AT THE ACHINE ETUP NTRY Buttons, Submenus, Function(s) and Icons QUIT Touch the QUIT button to return to the Machine Maintenance menu. The Save Data message is displayed when the Quit button is Save Data selected.
Page 445 Operations and Maintenance Manual Software Calibration The Calibration Parameters box displays the information and Calibration Parameters function listed below: Variable The selected variable's number will be displayed at this Number location. Variable The selected variable's label will be displayed at this Label location.
Page 446 Strasbaugh Tellect (Model 7AF) Wafer Grinder SING THE ACHINE ETUP NTRY XAMPLE Before you begin: Variable values can be changed only by using the control computer keyboard supplied with the 7AF to enter new values. • Before beginning the procedure shown below for entering a new calibration value, refer to the Physical Description chapter of this manual for information on attaching the keyboard.
Page 447 Operations and Maintenance Manual Software Calibration To enter a new calibration value for the variable displayed in the Variable Label box: Operator Action Explanation/Screen Display New Value At the Machine Setup Entry menu, touch the "New Value" entry box to select it. An entry cursor ("...
Page 448 Strasbaugh Tellect (Model 7AF) Wafer Grinder ROBOT (AND PRE-ALIGNER) SETUP AND CALIBRATION Manufactured by Equipe Technologies, the 7AF's wafer handling robot is a three-axis servo activated device controlled by its own PC compatible controller. For detailed information on the robot's hardware, software, and programming, refer to the Equipe Technologies Atmospheric Robot, ATM - 100;...
Page 449 Operations and Maintenance Manual Software Calibration Station Names The station names for the Model 7AF are shown in the table below. Note: The pre-aligner and spin station have separate coordinates for placing and receiving wafers. Station Name Function send 2 turret placing and retrieving wafers send 1 turret placing and retrieving wafers...
Page 450 Strasbaugh Tellect (Model 7AF) Wafer Grinder Homes all three axes of the robot in a predetermined order; must be issued upon powering up the robot before the robot can be utilized. HOMFF Will home all three axes of the pre-aligner; must be issued upon powering up the pre- aligner before pre-aligner can be utilized.
Page 451 Operations and Maintenance Manual Software Calibration Restores the motor speed and acceleration parameters for the robot to their default setting. The "RSA" command must be issued before using the "SAV" command. RSCI [STATION],[VARIABLE #] A set of variables associated with each station instructs the robot on handling the scanning data and end effector orientation for that station.
Page 452 Strasbaugh Tellect (Model 7AF) Wafer Grinder CAUTION! Use the SAV command only after the robot wafer size has been set at 150 mm (6 inches) by issuing the "SWS 150" command. To use SAV with the wafer size at any other setting will corrupt all coordinates for all the stations.
Page 453 Operations and Maintenance Manual Software Calibration SPC [STATION],[THETA],[RADIUS],]Z-AXIS] Sets the coordinates for the [STATION] to [THETA],[RADIUS], [Z-AXIS]. For example, the command "SPC B,10350,8500,4000" would set the coordinates for station B to (10350,8500,4000). SPSC [STATION],[THETA],[RADIUS],]Z-AXIS] Sets the scanning coordinates for the [STATION] to [THETA], [RADIUS],[Z-AXIS]. For example, the command "SPSC B,10000,8400,50"...
Page 454 Strasbaugh Tellect (Model 7AF) Wafer Grinder OBOT ASSETTE URRET OSITION ALIBRATION The robot/cassette turret position calibration procedure, below, provides an example of using the root commands and macros to calibrate a robot position. NOTICE! Always use a 150 mm (6-inch) test wafer when calibrating the robot.
Page 455: Figure 12-4 Top View Of Robot Theta Positioning At Cassette Turret
Operations and Maintenance Manual Software Calibration Manually place the robot in a position such that the end effector is pointing directly at the center of the turret, as shown in the figure below. Figure 12-4 Top View of Robot Theta Positioning at Cassette Turret Using the "SVON"...
Page 456: Figure 12-5 Top View Of Radial Positioning Of Robot
Strasbaugh Tellect (Model 7AF) Wafer Grinder Gently move the robot arm in toward the cassette until the edge of the end effector is just in front of the H-bar of the cassette, as shown in the figure below. Figure 12-5...
Page 457: Figure 12-6 Top View Of Z-Axis Positioning Of Robot
Operations and Maintenance Manual Software Calibration Using the "TGVAC" command, pull vacuum on a wafer such that it is centered on the robot end effector as shown in the figure below. Figure 12-6 Top View of Z-Axis Positioning of Robot Place a cassette containing one 150 mm (6-inch) test wafer on the turret.
Page 458 Strasbaugh Tellect (Model 7AF) Wafer Grinder ETTING AND AVING THE OORDINATES Use the "SPC [STATION],[THETA],[RADIUS],[Z-AXIS]" command to set the station's coordinates to the correct values. Use the "RSA" command to reset the motor parameters to their default settings. Use the "SWS 150" command to set the wafer size at 150 mm.
Page 459 Operations and Maintenance Manual Software Calibration WORK AND SPIN CHUCK HOME INDEX CALIBRATION The home (index) position for the work and spin chucks is only set when a "Home All" function is performed in the Home Screen. The spin chuck uses home index hardware (sensors) that will index the chuck in the same place in all cases.
Page 460 Strasbaugh Tellect (Model 7AF) Wafer Grinder ACHINES WITH NDEX ARDWARE NSTALLED During installation, the PC-DSP card must be loaded with the configuration that supports this function. In addition, jumpers must be installed on the PC-DSP card grounding the home input signals from the work and spin chucks.
Page 461 Operations and Maintenance Manual Pneumatic Adjustments Pneumatic Adjustments • Clean Dry Air • Vacuum • De-Ionized Water • Blow Off • Spindle Cooling Water Version 1.2 - June 2004 13- 1...
Page 462 Strasbaugh (Model 7AF) Wafer Grinder Tellect PNEUMATIC ADJUSTMENTS Overview Clean Dry Air Incoming Clean Dry Air Left/Right Grind Chamber Seals Left/Right Chuck Conditioning Arms Up Left/Right Chuck Conditioning Arms Engage Left/Right Chuck Conditioning Arms Brush Rotation Left/Right Chuck Conditioning Arms Downforce...
Page 463 Operations and Maintenance Manual Pneumatic Adjustments PNEUMATIC ADJUSTMENTS OVERVIEW IMPORTANT! After completing each adjustment below, RECORD all dial gauge settings for use with the procedures in the Preventive Maintenance chapter of this manual. Assumption The procedures below were written with the assumption that the reader is thoroughly familiar with the Model 7AF Wafer Grinder.
Page 464 Strasbaugh (Model 7AF) Wafer Grinder Tellect Panel Location____________________ Door 7 Panel Located at the lower left side of the machine inside door 7. Door 14 Panel Located at the lower left side of the machine inside door 14. Lower Rear Utility Panel Located at the lower rear of the machine cabinet.
Page 465 Operations and Maintenance Manual Pneumatic Adjustments CLEAN DRY AIR Notes: • The air supplied must be clean and dry. • The air supply to the spindles should be filtered to remove oil and water particles in excess of one micron. Oil carryover at 21 ° C (39.8 ° F) should not exceed .01 mg/cubic meter.
Page 466 Strasbaugh (Model 7AF) Wafer Grinder Tellect NCOMING LEAN Solenoid Location/ Component Name Drawing No. Setting Goals Regulator: Supply Pressure: 100 PSI None Incoming Clean Dry Air Supply regulator; connection to machine located on Lower Rear Utility Panel. Drawing: 224004, Sheet 4 of 6...
Page 467 Operations and Maintenance Manual Pneumatic Adjustments IGHT RIND HAMBER EALS Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 20 PSI Left Grind Chamber Seal Gauges: Door 14 Panel Drawing: 224038 Right Grind Chamber Seal WARNING: Do NOT set the regulators to exceed 20 PSI. To do so may destroy the seals.
Page 468 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT HUCK ONDITIONING Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 60 PSI Left Chuck Conditioning Gauges: Door 14 Panel Flow Controls: 1 at Flow Controls: Set to Right Chuck Conditioning each cylinder.
Page 469 Operations and Maintenance Manual Pneumatic Adjustments Remove the two 3/8-16 wing nuts and washers, located at the right side of the machine behind door 17, which secure the grinding section of the machine to the handling section: a. Manually rotate each wing nut counterclockwise to loosen and remove.
Page 470 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Output Control/Input Status menu, exercise the cylinders: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu. Displays: Machine Maintenance menu...
Page 471 Operations and Maintenance Manual Pneumatic Adjustments Exercise the left chuck conditioner arm cylinder and set its flow control: Touch to Select Explanation/Screen Display Left Chuck Conditioner icon Touch the "Left Chuck Conditioner icon", located in the Output Control section of the menu, to display the Left Chuck Conditioner drop down menu.
Page 472 Strasbaugh (Model 7AF) Wafer Grinder Tellect Exercise the right chuck conditioner arm cylinder and set its flow control: Repeat Steps 7b., 7c., 7d., 8., 9., and 10, immediately above, substituting right for left. When the cylinder motion for each arm meets the goal, return to the Main...
Page 473 Operations and Maintenance Manual Pneumatic Adjustments IGHT HUCK ONDITIONING NGAGE Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 40 PSI Left Chuck Conditioning Arm Engage Gauges: Door 14 Panel Right Chuck Conditioning Drawing: 224038 Engage Procedure: • Turn the knob on the regulator until the pressure gauge reads 40 PSI.
Page 474 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT HUCK ONDITIONING OWNFORCE Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 60 PSI Left Chuck Conditioning Arm Downforce Gauges: Door 14 Panel Right Chuck Conditioning Drawing: 224038 Downforce Procedure: •...
Page 475 Operations and Maintenance Manual Pneumatic Adjustments ASSETTE URRET OTARY CTUATOR Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 50 PSI Send 1 Cassette Turret Rotary Actuator Gauges: Door 7 Panel Flow Control: At Flow Control: Set to the cylinder, located produce smooth, inside a small drip...
Page 476 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Output Control/Input Status menu, exercise the cylinder: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu. Displays: Machine Maintenance menu...
Page 477 Operations and Maintenance Manual Pneumatic Adjustments Observe motion while the cylinder exercises: WARNING: AVOID PINCH POINTS WHILE SETTING THE FLOW CONTROL! GOAL: Set the flow control to produce smooth, steady movement of the cylinder. Remove the drip pan, exposing the flow control. Using a flatblade screwdriver, set the flow control as needed to meet the goal.
Page 478 Strasbaugh (Model 7AF) Wafer Grinder Tellect ASSETTE URRET OTARY CTUATOR Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 50 PSI Send 2 Cassette Turret Rotary Actuator Gauges: Door 7 Panel Flow Control: At Flow Control: Set to...
Page 479 Operations and Maintenance Manual Pneumatic Adjustments ECEIVE ASSETTE URRET OTARY CTUATOR Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 50 PSI Receive 1 Cassette Turret Rotary Actuator Gauges: Door 7 Panel Flow Control: At Flow Control: Set to the cylinder, located produce smooth, inside a small drip...
Page 480 Strasbaugh (Model 7AF) Wafer Grinder Tellect ECEIVE ASSETTE URRET OTARY CTUATOR Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: 50 PSI Receive 2 Cassette Turret Rotary Actuator Gauges: Door 7 Panel Flow Control: At Flow Control: Set to...
Page 481 Operations and Maintenance Manual Pneumatic Adjustments IGHT EASUREMENT ROBES Notes: • The probe requires from 3 inches Hg to 6 inches Hg for lifting. • Set the regulator of the SMC NZM Series vacuum ejector at 22 PSI incoming to produce 5 inches Hg out.
Page 482 Strasbaugh (Model 7AF) Wafer Grinder Tellect TATION PINDLE Solenoid Location/ Component Name Drawing No. Setting Goals Regulator and Pressure: 50 PSI Spin Station Spindle Gauge: Door 7 Panel 2 Flow Controls: At Flow Controls: Set to the cylinder, located produce smooth, inside door 10.
Page 483 Operations and Maintenance Manual Pneumatic Adjustments At the Output Control/Input Status menu, exercise the cylinder: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu. Displays: Machine Maintenance menu Touch to Select Explanation/Screen Display Inputs/Outputs...
Page 484 Strasbaugh (Model 7AF) Wafer Grinder Tellect Repeat Steps 3.e and 3.f, immediately above as needed to test the flow control adjustments. Repeat testing and adjusting until the goal is met. When the cylinder motion meets the goal, return to the Main Menu:...
Page 485 Operations and Maintenance Manual Pneumatic Adjustments TATION Solenoid Location/ Component Name Drawing No. Setting Goals Regulator and Pressure: 80 PSI Spin Station Lid Gauge: Door 7 Panel 2 Flow Controls: At Flow Controls: Set to the lid cylinder, produce smooth, located just inside efficient movement the handling area...
Page 486 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Output Control/Input Status menu, exercise the cylinder: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu. Displays: Machine Maintenance menu...
Page 487 Operations and Maintenance Manual Pneumatic Adjustments Observe lid motion while the cylinder exercises: GOAL: Set both flow controls to produce smooth, efficient movement of the cylinder in both directions, with no banging at either end. Using a slotted screwdriver, set the flow controls, located at the lid cylinder just inside the handling section, as needed to meet the goal.
Page 488 Strasbaugh (Model 7AF) Wafer Grinder Tellect TATION RUSH Solenoid Location/ Component Name Drawing No. Setting Goals Regulator and Pressure: 15 PSI Spin Station Brush Arm Park Gauge: Door 7 Panel Drawing: 224039 Procedure: • Turn the knob on the regulator until the pressure gauge reads 15 PSI.
Page 489 Operations and Maintenance Manual Pneumatic Adjustments OBOT LIPPER Solenoid Location/ Component Name Drawing No. Setting Goals Regulators and Pressure: not Robot Flipper Gauges: no gauge or regulated regulator; solenoids located inside robot’s head 2 Flow Controls: Flow Controls: Set to Located on top of the produce smooth, Note: Part No.
Page 490 Strasbaugh (Model 7AF) Wafer Grinder Tellect Attach the keyboard to the control computer: Note: The keyboard must be used to communicate with the Equipe robot software. a. Shut all machine power OFF by pulling the main machine disconnect switch, located at the rear of the machine on the disconnect enclosure, down to the off position.
Page 491 Operations and Maintenance Manual Pneumatic Adjustments Observe the movement of the robot end effector while exercising the cylinder: GOAL: Set the flow controls to produce smooth, steady movement of the cylinder. You Type or Select Explanation/Screen Display FLIP 0 <Enter> To flip the robot end effector, type "FLIP 0"...
Page 492 Strasbaugh (Model 7AF) Wafer Grinder Tellect OWER HUCK EARING PINDLES Note: Also known as "Machine Air." Solenoid Location/ Component Name Drawing No. Setting Goals none Lower (Work Chuck) Regulator: At right Pressure: 83 PSI Spindles side of Lower Rear Utility Panel.
Page 493 Operations and Maintenance Manual Pneumatic Adjustments URRET YDRAULIC CCUMULATOR ESERVOIRS Notes: • The hydraulic system for the four cassette turrets is powered by air pressure; the oil in the four hydraulic reservoirs provides a dampener for smooth, steady movement. • The air pressure is controlled by one regulator and one gauge for the four turrets. Solenoid Location/ Component Name...
Page 494 Strasbaugh (Model 7AF) Wafer Grinder Tellect VACUUM IGHT RIND HAMBER ACUUM Solenoid Location/ Component Name Drawing No. Setting Goals Valves: Door 14 not regulated Left Grind Chamber Seal Vacuum Panel Drawing: 224038 Right Grind Chamber Seal Vacuum Procedure: • None required.
Page 495 Operations and Maintenance Manual Pneumatic Adjustments ALIGNER ACUUM Solenoid Location/ Component Name Drawing No. Setting Goals Pre-aligner Valve: Door 7 Panel not regulated Drawing: 224039 Procedure: • None required. INSE HUCK ACUUM Solenoid Location/ Component Name Drawing No. Setting Goals Rinse Spin Chuck Valve: Door 7 Panel not regulated...
Page 496 Strasbaugh (Model 7AF) Wafer Grinder Tellect D.I. WATER HUCK UTTING ATER Solenoid Location/ Component Name Drawing No. Setting Goals Sol. 18 Valve only: not regulated Left Work Chuck Cutting Water Door 14 Panel Sol. 1VAL valve and Flow: 2.0 GPM...
Page 497 Operations and Maintenance Manual Pneumatic Adjustments At the Machine Maintenance menu, move the bridge to its center position: Touch to Select Explanation/Screen Display Machine Maint At the Main Menu screen, touch the "Machine Maint" button to select the Machine Maintenance menu. Displays: Machine Maintenance menu Touch the "C"...
Page 498 Strasbaugh (Model 7AF) Wafer Grinder Tellect Left Work Chuck icon Touch the "Left Work Chuck icon", located in the Output Control section of the menu, to display the Left Work Chuck drop down menu. (Right Work Chuck icon) Grind Seal DEflate/INflate Touch the "Grind Seal DEflate/INflate"...
Page 499 Operations and Maintenance Manual Pneumatic Adjustments At the Output Control/Input Status menu, DEflate the left grind seal and turn coolant OFF to the left work chuck: Touch to Select Explanation/Screen Display Inputs/Outputs At the Machine Maintenance menu screen, touch the "Inputs/Outputs" button to select the Output Control/Input Status menu.
Page 500 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT HUCK UTTING ATER Solenoid Location/ Component Name Drawing No. Setting Goals Sol. 22 Valve only: not regulated Right Work Chuck Cutting Water Door 14 Panel Sol. 2VAL valve and Flow: 2.0 GPM Regulator: Door 14...
Page 501 Operations and Maintenance Manual Pneumatic Adjustments D.I. W IGHT HUCK ATER ACKFLUSH Notes: • Chuck backflush and blow off must always be readjusted whenever you change to a work chuck with a pore size different from the one previously installed. •...
Page 502 Strasbaugh (Model 7AF) Wafer Grinder Tellect Procedure for Setting Pressure: Left Work Chuck D.I. Water Backflush and Air Blow Off Following the procedures found in the Basic Operation section of the Operator Functions chapter of this manual, power up and home the machine.
Page 503 Operations and Maintenance Manual Pneumatic Adjustments At the Output Control/Input Status menu, turn backflush ON to the left work chuck: Touch to Select Explanation/Screen Display Inputs/Outputs At the Machine Maintenance menu screen, touch the "Inputs/Outputs" button to select the Output Control/Input Status menu.
Page 504 Strasbaugh (Model 7AF) Wafer Grinder Tellect At the Output Control/Input Status menu, turn blow off ON to the left work chuck: Touch to Select Explanation/Screen Display Inputs/Outputs At the Machine Maintenance menu screen, touch the "Inputs/Outputs" button to select the Output Control/Input Status menu.
Page 505 Operations and Maintenance Manual Pneumatic Adjustments At the Output Control/Input Status menu, turn blow off and backflush OFF to the left work chuck: Touch to Select Explanation/Screen Display Inputs/Outputs At the Machine Maintenance menu screen, touch the "Inputs/Outputs" button to select the Output Control/Input Status menu.
Page 506 Strasbaugh (Model 7AF) Wafer Grinder Tellect TATION AFER LEAN Solenoid Location/ Component Name Drawing No. Setting Goals Flow Control: Inside Flow: Set to Spin Station Door 10. effectively clean wafer and permit Drawing: 224039 wafer to be spun dry. Note: Inadequate flow results in poor cleaning;...
Page 507 Operations and Maintenance Manual Pneumatic Adjustments BLOW OFF IGHT HUCK Notes: • Chuck backflush and blow off must always be readjusted whenever you change to a work chuck with a pore size different from the one previously installed. • Chuck D.I. water backflush and air blow off, which together prevent the wafer from sticking to the chuck, are set together.
Page 508 Strasbaugh (Model 7AF) Wafer Grinder Tellect Procedure for Setting Pressure: • Refer to Left/Right Work Chuck D.I. Water Backflush, above in the D.I. Water section of this chapter, for the chuck blow off setting procedure. TATION AFER Solenoid Location/ Component Name Drawing No.
Page 509 Operations and Maintenance Manual Pneumatic Adjustments SPINDLE COOLING WATER FOR THE FOUR AIR BEARING SPINDLES Note: The spindle cooling water flow rate for the four air bearing spindles is controlled by four needle valves (no gauges). Onscreen error messages replace the gauges. OARSE PINDLE OOLING...
Page 510 Strasbaugh (Model 7AF) Wafer Grinder Tellect Procedure for Setting Pressure: Before you begin: Following the procedures found in the Basic Operation section of the Operator Functions chapter of this manual, power up and home the machine. Move the monitor to a position such that the screen may be viewed from the left side of the machine.
Page 511 Operations and Maintenance Manual Pneumatic Adjustments While watching the monitor, rotate the valve, located at the Door 14 Panel, labeled "Coarse Spindle" clockwise (from the bottom) until an orange error message appears on the screen. Displays: "Coarse Spindle Coolant Error" Rotate the valve counterclockwise (from the bottom) until the error message disappears from the screen.
Page 512 Strasbaugh (Model 7AF) Wafer Grinder Tellect HUCK PINDLE OOLING ATER Solenoid Location/ Component Name Drawing No. Setting Goals Valve regulator only: Suggested Pressure none Left (Work Chuck) Spindle Door 14 Panel Setting: .1 GPM Flow requirement: Gauge: Orange • Rotate valve CW error message "Left Spindle...
Page 513 Operations and Maintenance Manual Pneumatic Adjustments IGHT HUCK PINDLE OOLING ATER Solenoid Location/ Component Name Drawing No. Setting Goals Valve regulator only: Suggested Pressure none Right (Work Chuck) Spindle Door 14 Panel Setting: .1 GPM Flow requirement: Gauge: Orange • Rotate valve CW error message "Right Spindle (from the bottom)
Page 514 Strasbaugh (Model 7AF) Wafer Grinder Tellect (This page intentionally left blank) 13 - 54 Version 1.2 - June 2004...
Page 515 Operations and Maintenance Manual Troubleshooting Troubleshooting • Machine Operation Checkout • Normal Operating Conditions and Strategies for Maintaining Them • Fault Messages Version 1.2 - June 2004 14 - 1...
Page 516 Strasbaugh (Model 7AF) Wafer Grinder Tellect TROUBLESHOOTING Overview Messages Displayed on the Control Computer Screen Take Precedence! Assumption Work and Spin Chuck Homing Hardware Machine Operation Checkout Normal Operating Conditions and Strategies for Maintaining Them Grind Force Motor Current Probe...
Page 517 Operations and Maintenance Manual Troubleshooting Grind Wheel Coarse Wheel is Down Fine Wheel is Down Load Cell Coarse Z Load Cell Fine Z Load Cell Prealigner Prealigner Error Probes Left Probe Right Probe Left Probe is Down Right Probe is Down Reference Bad Reference Robot Communication...
Page 518 Strasbaugh (Model 7AF) Wafer Grinder Tellect TROUBLESHOOTING OVERVIEW The most effective means of preventing problems is careful adherence to all preventive maintenance schedules listed in the Preventive Maintenance and Operator Functions chapters of this manual. The Machine Operation Checkout schedule and the section on Normal Operating Conditions and Strategies for Maintaining Them provide details on common grinding problems and the recommended corrective action for each.
Page 519 Operations and Maintenance Manual Troubleshooting ORK AND HUCK OMING ARDWARE The home (index) position for the work and spin chucks is only set when a "Home All" function is performed in the Home Screen. The spin chuck uses home index hardware (sensors) that will index the chuck in the same place in all cases.
Page 520 Strasbaugh (Model 7AF) Wafer Grinder Tellect MACHINE OPERATION CHECKOUT SUBJECT ACTION FREQUENCY Verify Finish: Resolution: Weekly 1. Thickness (1a) Check/confirm settings. (1b) Confirm probe adjustment. (2a) Dress work chuck. (2b) Check/adjust spindle alignment. 2. Edge to Center < 3 microns (3) Dress wheel.
Page 521 Operations and Maintenance Manual Troubleshooting SUBJECT ACTION FREQUENCY Work Chuck Flatness Dress, inspect, and check work chuck Monthly Inspection and Check flatness; record: • Flatness in inches _____ Readjust chuck backflush and blow off. Even Blow-Off and Dress the work chuck. As needed Backflush Version 1.2 - June 2004...
Page 522 Strasbaugh (Model 7AF) Wafer Grinder Tellect NORMAL OPERATING CONDITIONS AND STRATEGIES FOR MAINTAINING THEM This section lists normal operating conditions and strategies for maintaining them as well as the means of identifying and correcting six frequently encountered grind process problems.
Page 523 Operations and Maintenance Manual Troubleshooting ANUAL RESSING AND RUING The force during dressing should remain steady and should not rise above 10 lbs. The motor current during dressing may rise slightly while the wheel is feeding down, but it should quickly level back out. If during dressing the grind force and/or the motor current are not steady, the wheel may need to be changed.
Page 524: Figure 14-1 Wafer Surface Finish Examples
Strasbaugh (Model 7AF) Wafer Grinder Tellect ISUAL AFER NSPECTION DENTIFYING AND ORRECTING RIND ROCESS ROBLEMS The six grind process problems shown in Figure 14-1 and detailed in this section may be easily identified during a visual wafer inspection. After identifying a problem, take corrective action by following the instructions shown below the problem illustration.
Page 525 Operations and Maintenance Manual Troubleshooting 1. Cross-Hatching on the Wafer Edge Figure 14-2 Description: Cross-hatching marks are located on the outer diameter of the wafer, curving in the direction opposite the normal grind marks. The marks can range from 1/4 inch to 1 inch in length. Corrective Action: Cross-hatching is usually caused by insufficient vacuum at the wafer edge due to clogging in the work chuck.
Page 526 Strasbaugh (Model 7AF) Wafer Grinder Tellect 3. Circular Marks Around Center of Wafer Figure 14-4 Description: These marks form concentric rings around the center of the wafer. They are sometimes hard to see and may not decrease the overall strength of the wafer.
Page 527 Operations and Maintenance Manual Troubleshooting 5. Chatter Marks on the Wafer Edge Figure 14-6 Description: Chatter marks are located around the edge of the wafer and are generally 1/4 inch in length or less. They are probably caused by a wheel that needs to be dressed or has not been trued.
Page 528 Strasbaugh (Model 7AF) Wafer Grinder Tellect FAULT MESSAGES The fault messages and resolutions listed in the section below are organized alphabetically by problem category and, within each category, alphabetically also. Each message is accompanied by its cause(s) and resolution(s). 14 - 14...
Page 529 Operations and Maintenance Manual Troubleshooting (PSI) RESSURE OARSE PINDLE Cause: Air pressure < switch setting. Resolution: Increase air pressure. PINDLE Cause: Air pressure < switch setting. Resolution: Increase air pressure. HUCK Cause: Air pressure < switch setting. Resolution: Increase air pressure. IGHT HUCK Cause: Air pressure <...
Page 530 Strasbaugh (Model 7AF) Wafer Grinder Tellect HUCKS OTATIONAL Cause: The procedure to home the work Resolution: • and spin chucks failed. If the homing sensor hardware is not installed in the machine, turn the chuck homing functions OFF in the machine software variables.
Page 531 Operations and Maintenance Manual Troubleshooting IGHT ONDITION Cause: Right condition arm has not Resolution: • moved into the commanded position. Check condition arm up/down position sensors. • Check condition arm park/engage position sensors. OOLANT HUCK OOLANT Cause: Water flow to grind wafers < Resolution: •...
Page 532 Strasbaugh (Model 7AF) Wafer Grinder Tellect OORS AND ANELS PERATOR Cause: Operator panel door open; refer Resolution: Close door. to Chapter 3, Physical Description, in this manual. ERVICE ANELS Cause: Service panel door open; refer to Resolution: Close door. Chapter 3, Physical Description, in this manual.
Page 533 Operations and Maintenance Manual Troubleshooting ORCE IMIT Cause: Resolution: • • Fine grind wheel can not grind at the Compare "FZ max grind force lbs" programmed feedrate. variable in machine setup variables against normal grinding forces. If "FZ max grind force lbs" > normal grinding forces, dress coarse wheel.
Page 534 Strasbaugh (Model 7AF) Wafer Grinder Tellect RIND BORT RIND BORT NSAFE Cause: Resolution: • • Low air pressure. Check left work chuck air supply; it must be > 80 PSI. • Check right work chuck air supply; it must be > 80 PSI.
Page 535 Operations and Maintenance Manual Troubleshooting RIND RIND Cause: Left grind seal has not Resolution: • inflated/deflated to the commanded Check and/or replace grind seal position. inflate/deflate position sensors. • Deflate seal in Machine Maintenance GUI screen. IGHT RIND Cause: Right grind seal has not Resolution: inflated/deflated to the commanded Resolution:...
Page 536 Strasbaugh (Model 7AF) Wafer Grinder Tellect OARSE Cause: Resolution: • • Reading is out of range. Check position of spindle. • • Spindle is against hard stop. Move spindle off hard stop. • • Counterbalance is seriously out of Check counterbalance pressure adjustment.
Page 537 Operations and Maintenance Manual Troubleshooting ROBES ROBE Cause: Probe not referenced. Resolution: Reference Probe. NOTE: Bridge must not obstruct probe from reaching chuck. IGHT ROBE Cause: Probe not referenced. Resolution: Reference Probe. NOTE: Bridge must not obstruct probe from reaching chuck. ROBE IS Cause: Resolution:...
Page 538 Strasbaugh (Model 7AF) Wafer Grinder Tellect EFERENCE EFERENCE Cause: Reference wafer too thick. Resolution: • Check input wafer thickness. • Check probe operation. • Compare "Reference Wafer" variable in machine set up variables. OBOT OMMUNICATION OBOT OMMUNICATION Cause: Low level fault on the robot Resolution: Shut down power and restart communication port.
Page 539 Operations and Maintenance Manual Troubleshooting ERVO RIDGE ERVO Cause: Resolution: • • Controller error due to loss of Service and operator doors must control. remain closed during "Auto Grind Cycle" and "Machine Maintenance Menu" functions for entire operation. • Check for obstructions, etc. •...
Page 540 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT HUCK ERVO Cause: Resolution: • • Controller error due to loss of Check for obstructions. control. • • Servo amplifier requires adjustment. Consult factory. • • Check the red LED on the servo Replace servo amp or amp fuse.
Page 541 Operations and Maintenance Manual Troubleshooting PINDLE ERVO Cause: Resolution: • • Controller error due to loss of Check for obstructions. control. • • Inverter malfunction. Check inverter. • • Servo amplifier requires adjustment. Consult factory. • • Check the red LED on the servo Replace servo amp or amp fuse.
Page 542 Strasbaugh (Model 7AF) Wafer Grinder Tellect TATION HUCK Cause: Spin station chuck has not moved Resolution: Check spin station chuck into the commanded position. up/down position sensors. Cause: Spin station lid has not moved Resolution: Check spin station lid into the commanded position.
Page 543 Operations and Maintenance Manual Troubleshooting URRETS LOSE URRETS Cause: At initialization, an unknown Resolution: Move all turrets to an open or state was detected on the position sensors closed position (preferable closed) by hand for one or more turrets and the software and check the turret input sensors.
Page 544 Strasbaugh (Model 7AF) Wafer Grinder Tellect IGHT HUCK ACUUM Cause: Vacuum < minimum Resolution: • requirement. Increase vacuum. • Check "Rt chuck min vac. " hg." Note: Occurs when a request for vacuum variable in machine set up variables. is made and no vacuum is detected after a timer delay.
Page 545 Operations and Maintenance Manual Software and Control Computer Maintenance Software and Control Computer Maintenance • Backup and Recovery • Protecting Recipes - Temporary Security • Grind Data Files Version 1.2 - June 2004 15- 1...
Page 546 Strasbaugh (Model 7AF) Wafer Grinder Tellect SOFTWARE AND CONTROL COMPUTER MAINTENANCE Overview Messages Displayed on the Control Computer Screen Take Precedence! Assumption Backup and Recovery Software Version Required Backup Restore Protecting Recipe Files--Temporary Security Measures Software Version Required Protecting Recipes...
Page 547 Operations and Maintenance Manual Software and Control Computer Maintenance SOFTWARE AND CONTROL COMPUTER MAINTENANCE OVERVIEW This chapter provides procedures for backup and recovery of 7AF software files customized by the user during machine setup and operation and for protecting recipe files.
Page 548 Strasbaugh (Model 7AF) Wafer Grinder Tellect BACKUP AND RECOVERY The procedures below detail steps for backup and restoration of files customized by the user during machine setup and operation. The functions which perform backup and restoration are executed by batch files stored in the c:\7AF\EXECODE directory.
Page 549 Help is available from the factory for individuals with basic DOS skills but uncomfortable with the actual process. Users lacking basic DOS skills should contact Strasbaugh, Inc., Field Service to perform the restore procedure. Follow the steps below to restore files backed up to a floppy diskette: Confirm that DOS is installed on the 7AF control computer.
Page 550 Strasbaugh (Model 7AF) Wafer Grinder Tellect Insert the diskette containing the files “backed up” in the Backup procedure shown above. Copy the backup files to the c:\7AF\EXECODE directory. Restart the 7AF software by rebooting the computer. 15 - 6 Version 1.2 - June 2004...
Page 551 Operations and Maintenance Manual Software and Control Computer Maintenance PROTECTING RECIPE FILES--TEMPORARY SECURITY MEASURES The procedures below detail steps for protecting and removing protection from recipe files. These functions are performed by batch files stored in the c:\7AF\EXECODE directory. SOFTWARE VERSION REQUIRED The utility batch files needed for the recipe security functions are included in all 7AF software releases Version 2.06 and later.
Page 552 Strasbaugh (Model 7AF) Wafer Grinder Tellect REMOVING PROTECTION FROM RECIPES This procedure removes the “read only” attribute from recipe files, permitting modification. To protect a recipe after modification, follow the steps for Protecting Recipes (above in this chapter). Follow the steps below to remove protection from recipe files: Touch the 7AF in the 7AF logo to exit the 7AF software.
Page 553 Operations and Maintenance Manual Software and Control Computer Maintenance GRIND DATA FILES Versions of the 7AF software dated December 12, 1994 and later store grind data onto the hard disk. At the Grind Data menu screen, grind data may be transferred from the hard disk to a floppy diskette.
Page 554 Strasbaugh (Model 7AF) Wafer Grinder Tellect EXAMPLE OF A GRIND DATA FILE COARSDAT.TXT GRIND DATA Step Probe Feed Fri Jan 13 20:31:35 1995 704.1 950.1 800.0 400.0 332.7 384.9 325.8 362.6 322.2 361.9 349.1 50.0 11997.5 361.0 Fri Jan 13 20:38:49 1995 703.0...
Page 555 Operations and Maintenance Manual Software and Control Computer Maintenance OPERATION Data collection is automatic. Files grow until they are either moved to floppy diskette and purged from the hard disk or until they grow too large. When files reach about 900K, the software erases the file and begins a new one.
Page 556: Figure 15-1 Grind Data Transfer To Diskette
Strasbaugh (Model 7AF) Wafer Grinder Tellect Figure 15-1 Grind Data Transfer to Diskette 15 - 12 Version 1.2 - June 2004...
Page 557 Strasbaugh Appendices Appendices • Appendix A Calibration Variables Listing • Appendix B Assembly Drawings (bound under separate cover) • Appendix C Customer Parts List • Appendix D Electrical Input/Output System Address List • Appendix E Options • Appendix F Maintenance Log Sheets •...
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Page 559 Strasbaugh Appendices Appendix A Calibration Variables Listing...
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Page 561 Strasbaugh Calibration Variables 7AF CALIBRATION VARIABLES ALIBRATE ERVOS ARIABLE The calibration variables listed in the table below are displayed at the Machine (Calibration) Setup Entry menu. For further information on the Machine Setup Entry menu, refer to the Software Calibration chapter of the Model 7AF Operation And Maintenance Manual.
Page 562 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 10 Value: 0.0 Label: LT Chuck Home Offset If you do NOT have rotational homing hardware installed, any value other than zero will prevent you from operating the 7AF. With the value zero, an attempt to home will be made, and when a full revolution is completed without seeing the home pulse, that position will be called the home position.
Page 563 Strasbaugh Calibration Variables Number: 12 Value: 0.5 Label: Bridge Home in When the bridge is homed or sent to the right, it will stop this many inches from the right end of travel. The fine spindle, located on the right, is positioned along the linear travel via a ball screw.
Page 564 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 16 Value: 0.0 Label: Auto Clean Chucks 0=No During the grind cycle, the work chucks are conditioned after each wafer. Starting with software version 5.06 there will be additional chuck conditioning. If the 7AF is left at the Grind Cycle screen and is not processing wafers, the chucks will be conditioned every fifteen minutes.
Page 565 Strasbaugh Calibration Variables Note on conditioning the work chucks. The cycle normally works like this. In Part One, called conditioning, the chuck is washed and brushed clean. In Part Two, called rinse, the brush is removed but the water remains turned-on to remove material still on the chuck.
Page 566 Operation and Maintenance Manual Model 7AF Wafer Grinder When the coarse wheel is referenced over the left work chuck, the actual measurement is used in the software instead of this default. During grinding, as the wheel is worn away, the actual measurement is adjusted by the amount of wheel wear, so it continues to tell the left chuck reference position relative to the (now thinner) grind wheel.
Page 567 Strasbaugh Calibration Variables Number: 27 Value: 0.0 Label: 27 reserved unused Number: 28 Value: 0.0 Label: Coarse Approach Params As the grind wheel descends towards the wafer at the start of a grind cycle, it descends rapidly until reaching an intermediate height. Then it switches to an intermediate speed of descent.
Page 568 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 36 Value: 0.0 Label: Fine Max Whl/Wafer When this much material has been worn away from the fine wheel during the grinding of a single wafer, a warning is issued. The value zero in variable 36 means “do not test fine wheel wear per wafer.”...
Page 569 Strasbaugh Calibration Variables Dry time is limited to 60 seconds. However version 6.05 allows adding 100 to this time as a flag to request raising the grind seal during spinning. The intention is to prevent water being thrown off the wafer into the 7AF and, especially, onto finished wafers in the receive cassettes.
Page 570 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 48 Value: 0.0 Label: Dual Coarse or Fine Grnd The value 0 allows Traditional use of the 7AF, with one coarse grind wheel on the left and one fine grind wheel on the right. The value 1 allows use of the 7AF with two fine wheels and the value 2 allows use of the 7AF with two coarse wheels.
Page 571 Strasbaugh Calibration Variables Number: 54 Value: 4.0 Label: CZ Dwell LBS In the Dwell step of the coarse grind cycle, raise the wheel until the force is less than this value. Number: 55 Value: 6.0 Label: FZ Dwell LBS In the Dwell step of the fine grind cycle, raise the wheel until the force is less than this value.
Page 572 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 61 Value: 0.2 Label: Fine Max Deceleration Regardless of the feed rate in the grind recipe, do not allow the fine wheel to move faster than it would if decelerated to the target at this deceleration. Number: 62 Value: 250.0 Label: LT Chuck Condition rpm During the first part of the condition chuck cycle, rotate at this speed.
Page 573 Strasbaugh Calibration Variables Number: 68 Value: 250.0 Label: RT Chuck Condition rpm During the first part of the condition chuck cycle, rotate at this speed. Number: 69 Value: 8.0 Label: RT Chuck Condition secs Duration of the first part of the condition chuck cycle.
Page 574 Operation and Maintenance Manual Model 7AF Wafer Grinder Number: 80 Value: 0.0 Label: Cassette Pitch inches If this is set to zero, the height between wafers in the send and receive cassettes will be set to 0.1875 inch for wafers of diameter 4-, 5-, and 6-inch and set to 0.2500 inch for wafers of diameter 8-inch.
Page 575 Strasbaugh Calibration Variables Number: 84 Value: 0.0 Label: Ind Wafer Grind Type Before software version 5.00, this was labeled Delta Grind 0=No and was used to distinguish Delta Grind from the other kinds of grinding. With version 5.00 that choice was moved into the grind recipe.
Page 576 Operation and Maintenance Manual Model 7AF Wafer Grinder In software version 6.05 this was given an additional meaning. The integer part still gives the minimum vacuum. The fractional part, limited to two digits, tells how many seconds to tolerate vacuum below the minimum. Vacuum may build slowly when first turned on, or there may be momentary fluctuation.
Page 577 Strasbaugh Calibration Variables Number: 97 Value: 0.0 Label: Probe Options 0=No This used to be called “Raise Probe Before Dwell.” In software versions 5.04-5.07, it became a two-digit number with different meanings assigned to each digit. For the one’s digit, 0 Raise the probe after the Dwell step of the recipe.
Page 578 Items of the Equipe robot controller have been used as machine variables. These can be set by Strasbaugh Field Service or by the customer, but setting them requires a bit more care than setting one of the variables listed above.
Page 579 Strasbaugh Calibration Variables Station Item Meaning c = Prealigner (GET) angle between robot & prealigner; need for align square wafers c = Prealigner (GET) change the offset for GET/PUT of 4-inch wafers C = Prealigner (PUT) pause before vacuum on in GET at all...
Page 580 Operation and Maintenance Manual Model 7AF Wafer Grinder l (small L, not station) special align options 0 normal align 1 if align fails rotate back to start 2 try one align; if fails, pretend ok 3 both options 1 and 2 above TLIGN pin speed;...
Page 581 RPM for Following Error 1000.0000 Reference wafer 305.6000 Coarse Deadweight lbs 306.2000 Fine Deadweight lbs 0.0000 Password Needed 0=No 4.0000 CZ Dwell LBS 6.0000 FZ Dwell LBS 10.0000 FZ Grind Force Hystr LBS 50.0000 FZ Max Grind Force LBS STRASBAUGH CONFIDENTIAL INFORMATION...
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Page 583 7AF Version 2.00 Features 3/9/95 Ken Hill Purpose Software version 2.00 for the model 7AF contains many new features. This document will briefly describe them. Reference Wafer Diameter Refererence wafer diameter for the Reference Chuck cycle in the Home screen was fixed at 6 inch (150mm) wafers. Now the wafer diameter is determined by the DEFAULTO recipe.
Page 584 7AF Version 2.01 Features 3/15/95 Ken Hill Purpose Software version 2.01 for the model 7AF is to fix one problem and change the dwell display. Fine Wheel Dress Disk Thickness If a Dress disk exceeding 2000 microns was used a "Reference Bad" fault was displayed. Version 2.01 allows a dressing disk up to 4000 microns to be used.
Page 585 Robot Macros 2.03 / May 9, 1995 This revision was installed on the lab machine on May 9, 1995. This revision was to allow sending cassette pitch and wafer count information to the robot. The Set Wafer Size (SWS) command has been modified to take cassette pitch and wafer count parameters.
Page 586 FloPro, October 2, 1995 This revision was installed on the lab machine on October 2, 1995. This revision was to implement Low Coolant Grind Abort, Chuck Stopped Grind Abort, support Retain Chuck in Use Status, eliminate a redundant clean cycle during dual grind, support single chuck operation for dress/true, and provide support for a light tower.
Page 587 Chuck Vacuum Checking If vacuum ever fails when a wafer is on a turning chuck during the Auto grinding, the grinding process will be terminated. This now includes the halt mode. Miscellaneous Increase manual Z axis travel 10 times to facilitate moving large distances. Increase Chuck RPM limit to 700 RPM.
Page 588 Grind Data Maintenance and Archival In the past, a single grind data file was maintained for coarse wafers, COARSDAT.TXT, and for fine wafers, FINEDAT.TXT. If this file exceeded the size that could be sent to a floppy disk, about 1 MB, it was deleted and restarted.
Page 589 Machine Setup Changes When the Left/Right/Both “Chuck Used” indicator is changed, the servos must all be homed and referenced. When any variables are changed, the amplifiers are turned off and a notification is given to the operator. This is to avoid “creep” if there are offsets in the servo system that could cause the Z axes to jam against the hard stops.
Page 590 Prealigner Bypass When wafers cannot be accommodated by the prealigner, as in square media, the prealigning step can be bypassed. The wafer will still be placed on the prealigner and retrieved, but the prealigning procedure will not be done. To use this feature, change “Prealigner Bypass” (Machine Variable #83) to a non-zero number.
Page 591 7AF Version 3.04 Features 5/13/97 Ken Hill Purpose Software version 3.04 for the model 7AF is primarily to support the use of the ESC 212 robot controller. Other minor changes were made. If upgraded from a version before v3.00, new FloPro runtime software, version 2.776, will be automatically installed.
Page 592 Use of In-situ Dress Capabilities In-situ dress will dedicate the left chuck to act as a dressing device for the coarse wheel. Therefore, if in-situ dress is used, the machine will be automatically set for right chuck only grinding. If the machine is returned to normal grinding and both chucks are to be used, choose both chucks in the Machine Setup screen.
Page 593 Robot Macros For Picking Up Widely Varying Media Thicknesses Two new macro files are included in the C:\EQUIPE\ directory. The RP212.MAC file is for the ESC 212 controller and the V2_05.MAC file is for the ESC 100 controller. At all chucks( effector facing down), this macro will attempt to pick up the media with a stroke down, then retry up to 0.1 inch, “feeling”...
Page 594 Robot Macros Be sure to read documentation for version 3.06 for information about the included robot macros. Users of the ESC 212 controller (combined robot and prealigner) should read the document, Using the New ESC 212 Scan Macros. It is highly recommended that all users of the ESC 212 controller load the new macros. 7AF Version 4.01 Features 5/5/98 Ken Hill Purpose...
Page 595 Wheel Wear Detection Wheel wear measurement and functionality has been expanded. The exact behavior is different if the machine is set for grinding AlTiC and alternative materials (Machine Variable 82, ATC Grinder) or its default state, silicon grinding. The conditions that are detected will be identical, but in the case of silicon grinding, the operator information is presented as a warning, asking that maintenance be notified, but to continue grinding.
Page 596 Throughout the entire grind/polish step, the thickness is being monitored. If the thickness is reduced by more than the Machine Variable Polish Removal Limit (variable 73), the grind will move immediately to the dwell step. Because the default value of Polish Removal Limit (variable 73) is 0.0, it must be set prior to fine grinding in AlTiC mode! Otherwise, a near “air grind”...
Page 597 If the hardware for home indexing is not installed, Machine Variables in LT Chuck Home Offset (variable 10) and RT Chuck Home Offset (variable 11) should be set to 0.0, which is the default value. Setting these variables without the indexing hardware installed will result in a “Rotational Home” Fault. When the hardware is installed, the homing procedure will first locate the edge of the index pulse.
Page 598 After the given number of wafers, a wheel dress message will be issued. In the case of AlTiC and alternative materials grinding, the send cassettes are disabled and the turrets are locked. Fine Polish Capability (Force Profile Grinding) For grinding AlTiC and alternative materials (Machine Variable 82, ATC Grinder), a new mode of operation has been implemented for the fine grind/polish step.
Page 599 7AF Version 4.03 Features 5/27/98 Ken Hill Purpose Software version 4.03 for the model 7AF is primarily to implement features for AlTiC and alternative materials Grinding. It replaces the unreleased version 4.02 which had a small error relating to AlTiC only. If upgraded from a version before v3.00, new FloPro runtime software, version 2.776, will be automatically installed.
Page 600 Wheel wear is now checked every time material is ground on the right work chuck. Wheel wear measurements only use the right probe and reference data. As in previous releases, the amount of wheel wear is compared to the Machine Variables Coarse Wear Lim microns (variable 25) and Fine Wear Lim microns (variable 35).
Page 601 Other Features There is now a message instructing the operator to remove the dressing pad after dressing a wheel. Alarms have been added to latch conditions and help in diagnosing “Grind Abort” faults. Specifically, the “Right and Left Vacuum Abort” and “Service Panel Abort” are now implemented. Robot Macros There are two new macro sets for the ESC212 controller.
Page 602 Raising the Probes During Grinding The normal behavior of the 7AF is to raise the probes after the Dwell step of the grind cycle. Some customers have requested that the probes be raised before the Dwell instead. To accomplish this change, set the Machine Variable in Raise Probe Before Dwell (variable 97) to 1.0.
Page 603 This has saved the 9.25 degree angle into the Equipe Controller. It should also be saved into the Station Coordinates file on disk drive C which can be done as follows while you are still in the Equipe software. Press ALT-S to save the station information. This will prompt you for the name of a disk file to use. The name you enter should be of the form R______.COR where the fill-in is the serial number of the 7AF.
Page 604 Robot Macros Merged for Square and Round Wafers (Equipe Model 212 only) With the inclusion of square wafer grinding in software version 4.01, users have been able to set up their 7AF for square or round wafers by downloading either SQ212.MAC or RP212.MAC. The ALIGN macro would correctly align square or round wafers depending on which set of macros was downloaded.
Page 605 The first optional change is a pause between (b) and (c). It has the effect of re-ordering the list as a,b,d,c. It has been helpful in some situations to have the blowoff begin before the robot starts to lift. With very heavy wafers, the robot can experience a servo fault if it starts to lift without the assistance of the blowoff.
Page 606 How to postpone turning off the work chuck or spin-station vacuum: How to specify a duration for the blowoff: These changes are stored as a six-digit number in Machine Variable 98, Vacuum Delays 0=No. Leading zeros are understood, so that 501 is the same as 000501. If the first digit is zero, do not postpone turning off the vacuum for the Left Work Chuck.
Page 607 2. Using coordinate special item 1 for the prealigner (station c), it is possible to shift the radial value for Get/Put of 4-inch wafers. Normally, the robot will Get/Put 6-inch wafers on center, and will Get/Put 4- inch wafers slightly off center. In order to Get/Put both 6-inch and 4-inch wafers on center, use the command SCSI c,1,-400 and then save the coordinates as shown in the discussion of Optional Timing Changes.
Page 608 Examples of unrelated variables are: Grind Seal Sensors 0=No Password Needed 0=No Cassette pitch inches Wafers per Cassette Vacuum Delays 0=No Changing Machine Variable Names Made Easier When a new software release introduces new machine variables, it has been necessary to enter each of those names on the Machine Setup screen.
Page 609 Another new GEM variable is a 2-byte integer GemLimitsDelay (VID 142). This allows the Host to monitor some of the other variables to see whether they go out of a specified range. The value to be placed into GemLimitsDelay is the number of seconds to wait between tests of these other variables. The following variables are eligible for monitoring.
Page 610 GEM Manual On the release floppies you will also find the latest copy of the Strasbaugh 7AF Backgrinder SECS/GEM Interface manual. It is not installed onto the 7AF, but you may wish to copy it to a different computer as a reference document or to be printed.
Page 611 7AF Version 5.01 Features 6/15/99 Steve Jacobson Purpose Software version 5.01 treats the situation where a customer grinds wafers having very different characteristics so that a single set of robot station coordinates cannot be used for the different wafer types. New coordinates must be downloaded to the robot controller when changing wafer type.
Page 612 7AF Version 5.02 Features 9/10/99 Steve Jacobson Purpose Software version 5.02 introduces a new grinding mode to treat the situation where a customer’s wafers are attached to a substrate with a wax layer, forming a kind of sandwich. The difficulty is that the wax layer, although smooth, may vary in thickness from sandwich to sandwich.
Page 613 To allow the file to be downloaded from GEM, it needs to be the size of a grinding recipe (currently 162 bytes), since the GEM subsystem checks the size of recipe files as a confidence test at download time. To assist in the creation of the data file, both with the correct ordering of the lines and with padding the file to correct number of bytes for GEM, we provide a stand-alone DOS utility program called THIKNESS.
Page 614 Process Preparation The grind recipe is prepared as if the wafers were not mounted on a substrate. The numeric portion of the recipe looks like an ordinary Target Grind recipe. The target thickness for each step should be the target thickness of the wafer (the top layer of the sandwich).
Page 615 amount of time the grind, dress, or true will be allowed to continue during an interruption to the coolant flow. This variable is a four-digit number, similar to the six-digit number in variable 98 for vacuum delays. The first digit tells how many seconds to allow during the approach to the wafer on the left work chuck. The second digit tells how many seconds to allow during actual grinding on the left work chuck, beginning from the end of the approach until the grind wheel lifts up at the end of the grind.
Page 616 When the probe reference takes place at the start of the cycle, a delay is needed at the end of the cycle to make sure that the grind seals are fully deflated. If the optional Grind Seal Sensors are installed, they determine the delay. Otherwise, the software has a brief waiting period. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 617 Microsoft Excel, they do not appear on the Grind Data screen, and are not passed through to GEM. However, GEM is able to obtain this information in other ways, such as reading real-time data. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 618 109 was unreported. In the new software, “ERR109” will still appear, but the fault message will be more descriptive. For 109, it will say “Servo Following Error.” GEM will also see these new alarm messages. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 619 3. A new macro RWS reports the currently selected wafer diameter. 4. The optional delay in GET’s stroke up (introduced in software version 5.00) is available. 5. There is an optional change allowing GET 4-inch wafers on center. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 620 Now the sagging wafer is no longer in the way. This feature is sold separately as a software option called “No Flip” having Strasbaugh Part Number 248211. When the option is purchased, you will receive an additional floppy disk that will unlock the option for use, as well as instructions telling how to request “No Flip.”.
Page 621 This feature is sold separately as a software option called “No Flip” having Strasbaugh Part Number 248211. When the option is purchased, you will receive an additional floppy disk that will unlock the option for use, as well as instructions telling how to request “No Flip”.
Page 622 Warning. The obstacles on some of the rough wafers tested at Strasbaugh were strong enough to bend the probe in addition to smacking it out of the way. If your wafers damage the probe, the 7AF should not be used to grind them until some other tool has removed the bumps.
Page 623 This feature is sold separately as a software option called “No Flip” having Strasbaugh Part Number 248211. When the option is purchased, you will receive an additional floppy disk that will unlock the option for use, as well as instructions telling how to request “No Flip”.
Page 624 Warning. The obstacles on some of the rough wafers tested at Strasbaugh were strong enough to bend the probe in addition to smacking it out of the way. If your wafers damage the probe, the 7AF should not be used to grind them until some other tool has removed the bumps.
Page 625 Different labels had been used previously to describe the position of the conditioning arm as over the chuck or not over the chuck. Those have been renamed so that they are either over or park. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 626 Modify coord1.cor so that the pitch is set as follows. PITCH A,3750 PITCH G,3750 PITCH C,12 PITCH F,12 Modify coord2.cor so that the pitch is set as follows. PITCH A,3750 PITCH G,5000 PITCH C,12 PITCH F,9 May 21, 2001 7AF Software Version 5.07 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 627 The software tests at appropriate times whether fast or slow speed is desired and sets the desired speed. If you use this feature, please save your robot coordinates with the new version of stations.exe that saves station g. May 21, 2001 7AF Software Version 5.07 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 628 This returns you to the original screen. Press Quit once more and the program exits to DOS. Run the 7AFBAK command to save on a floppy disk the change you just made. May 21, 2001 7AF Software Version 5.07 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 629 R173.dat. The old names, Coarsdat.txt, Finedat.txt, C173.dat, F173.dat will no longer be used. Some messages have also been changed to refer to Left and Right grind wheels instead of Coarse and Fine. May 21, 2001 7AF Software Version 5.07 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 630 Machine variables 52 and 51 now let you set the chuck RPM during rinse and dry, respectively. This may be especially useful for the dry phase, where you may want to increase the chuck speed in order to dry the wafers faster. February 22, 2002 7AF Software Version 6.01 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 631 The customer should not normally need to adjust these values. February 22, 2002 7AF Software Version 6.01 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 632 With value 0 in variable 84, the data file contains the thickness of the top wafer. With value 1 in variable 84, the data file contains the thickness of the bottom two layers (wax plus lower wafer). March 24, 2004 7AF Software Version 6.04.0 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 633 7AF Version “6.05” Features 04/21/2004 Steven Jacobson Purpose Version 6.05.0 adds several small improvements and corrections to the software. Approach to the Wafer in the Grind Cycle As the grind wheel descends towards the wafer at the start of a grind cycle, it descends rapidly until reaching an intermediate height.
Page 634 It is likely that additional decimal digits of this variable will be used for additional flags in the future. When that happens this safety feature will use the one’s digit of the machine variable. New Flag For Spinning the Wafer Dry Since version 5.07, Machine Variables 42 and 44 have given times for the wafer to remain spinning on the chuck after grinding has finished and the bridge has moved away.
Page 635 Gem is also changed to allow this additional size file to be transferred. (File size is an issue only if Gem is used. Without Gem, any size file is allowed.) May 14, 2004 7AF Software Version 6.06.0 Features STRASBAUGH CONFIDENTIAL INFORMATION...
Page 637 If only the left chuck is being used, as specified on the Machine Setup screen, then only the right grind wheel will be used during the grind cycle. When the bridge is at the left, grinding will take place on the left chuck using the May 21, 2001 7AF Dual Fine Grind and Dual Coarse Grind STRASBAUGH CONFIDENTIAL INFORMATION...
Page 638 In the two new modes, a remote Host command to set the Grind Type will be rejected with an acknowledge code of 65, meaning, “This command is not supported in the selected grind mode configuration.” May 21, 2001 7AF Dual Fine Grind and Dual Coarse Grind STRASBAUGH CONFIDENTIAL INFORMATION...
Page 639 This procedure should only be attempted by someone familiar with basic DOS file commands. Help is available from the factory for people with these basic skills, but uncomfortable with the actual process. People without these basic skills should contact Strasbaugh Field Service to do the following operation.
Page 640 The machine is set with default codes to get started. You should change these immediately to your own codes. The default Identification Code is: OPER First Code The default passwords are: Operator Level OPER Process Engineer Level PROC Maintenance Level MAIN Supervisor Level SUPR STRASBAUGH CONFIDENTIAL INFORMATION...
Page 641 When you have reached the correct character, press “NEXT” to advance to the next character. Note that the first character is now covered. Don’t worry, it is still there. Repeat until you have all four characters of your Identification Code set. Figure 1 STRASBAUGH CONFIDENTIAL INFORMATION...
Page 642 If you forget the supervisory password, you must call the factory or contact a Strasbaugh technician to get the emergency password. Note that this is the same algorithm used on the 6DS-SP model and expires daily. First, enter the least significant 4 digits in the “Maintenance”...
Page 643 Note that if you are clearing the code, an error is produced noting that unprintable characters have been found. If your intention is to clear the name, ignore this error. Figure 3 STRASBAUGH CONFIDENTIAL INFORMATION...
Page 644 Press backspace three times to clear the New Value box, and then enter your choices. Allowed entries are O for operator, P for process, and M for maintenance, in that order. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 645 If you have been working on a different computer, you may send UTIL7AF.BUT and UTIL7AF.PAS to the 7AF directory C:\7AF\EXECODE via GEM or on a floppy disk. These are kept as separate files in order to meet the file size requirement for GEM transfer. STRASBAUGH CONFIDENTIAL INFORMATION...
Page 647 Strasbaugh Appendices Appendix B Assembly Drawings (bound under separate cover)
Page 648 Operation and Maintenance Manual Model 7AF Wafer Grinder This page intentionally left blank.
Page 649 DRAWING CROSS REFERENCE INDEX FOR nTellect (Model 7AF) DRAWING # DESCRIPTION DRAWING # DESCRIPTION 118168 MAIN MACHINE ASSEMBLY 224014 UPPER SPINDLE ASSEMBLY 118168 FOOT PRINT 224014 JUNCTION BOX ASSEMBLY 118168 CONTROL LAYOUT 224015 LOWER SPINDLE ASSEMBLY 118168 ELECTRICAL SCHEMATIC 224015 LOWER SPINDLE ASSEMBLY 118168 ELECTRICAL SCHEMATIC INPUTS 1-32...
Page 657 Electronically Approved - ISA...
Page 658 12--19--00 12--13--00...
Page 717 02--02--00 02--03--00...
Page 720 09--07--00 09--08--00...
Page 721 09--07--00 09--08--00...
Page 723 12--20--00 12--21--00...
Page 724 PARTS, OR DEVICES WITHOUT THE WRITTEN CONSENT OF 224019 ANGLE ±.5° STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED GRIND PART NO. DWG NO. AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON 248300 248300A1 BREAK ALL SHARP EDGES...
Page 726 PARTS, OR DEVICES WITHOUT THE WRITTEN CONSENT OF ANGLE ±.5° GRIND STRASBAUGH, INC. THIS DRAWING IS TO BE RETURNED PART NO. DWG NO. AT ANY TIME REQUESTED BY STRASBAUGH, INC. OR AT APPROVALS DATES NEXT ASSY USED ON 265679 265679A1 BREAK ALL SHARP EDGES SPECIFIED TIME.
Page 728 03--28--01 03--21--01...
Page 729 03--28--01 03--21--01...
Page 732 Introduction ARTS ISTING...
Page 733 Strasbaugh Appendices Appendix C Customer Parts List...
Page 734 Operation a nd Maintenance Manual Model 7AF Wafer Grinder This page intentionally left blank.
Page 735 Introduction USTOMER SN: 0561004...
Page 736 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 1 Strasbaugh Time: 16:14:51 Item: 118168 MODEL 7AF AUTOMATIC WAFER BACK GRINDING> Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-118168A1-T1 > Rev: Release: 01/06/05 1239969 Item Type: ASSY-FG Item UM Description...
Page 737 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 2 Strasbaugh Time: 16:14:51 Item: 141719 7AF,,ASSY,BOARD, WIRING,ROBOT I/O Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-141719A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 738 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 3 Strasbaugh Time: 16:14:51 Item: 224001 7AF,ASSY,GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224001A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 739 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 4 Strasbaugh Time: 16:14:51 Item: 224002 7AF,ASSY,WAFER HANDLING SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224002A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 740 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 5 Strasbaugh Time: 16:14:51 Item: 224004 7AF,ASSY,LOWER GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224004A1-E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 741 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 6 Strasbaugh Time: 16:14:51 Item: 224004 7AF,ASSY,LOWER GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224004A1-E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 742 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 7 Strasbaugh Time: 16:14:51 Item: 224004 7AF,ASSY,LOWER GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224004A1-E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 743 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 8 Strasbaugh Time: 16:14:51 Item: 224004 7AF,ASSY,LOWER GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224004A1-E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 744 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 9 Strasbaugh Time: 16:14:51 Item: 224005 7AF,ASSY,GRIND SECTION,UPPER Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224005A1-2,E1> Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 745 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 10 Strasbaugh Time: 16:14:52 Item: 224005 7AF,ASSY,GRIND SECTION,UPPER Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224005A1-2,E1> Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 746 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 11 Strasbaugh Time: 16:14:52 Item: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224006A1,A2 Rev: AA.1 Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 747 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 12 Strasbaugh Time: 16:14:52 Item: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224006A1,A2 Rev: AA.1 Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 748 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 13 Strasbaugh Time: 16:14:52 Item: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224006A1,A2 Rev: AA.1 Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 749 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 14 Strasbaugh Time: 16:14:52 Item: 224007 7AF,ASSY,MACHINE TOP COVER Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF 224007A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 750 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 15 Strasbaugh Time: 16:14:52 Item: 224009 7AF,ASSY,FLAT PANEL MONITOR & EXTENSION ARM Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224009A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description...
Page 751 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 16 Strasbaugh Time: 16:14:52 Item: 224013 7AF,ASSY,BED Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224013A1,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 100717 1.00...
Page 752 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 17 Strasbaugh Time: 16:14:52 Item: 224013 7AF,ASSY,BED Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224013A1,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 172208 4.00...
Page 753 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 18 Strasbaugh Time: 16:14:52 Item: 224014 7AF,ASSY,UPPER SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224014A1-A4,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 754 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 19 Strasbaugh Time: 16:14:52 Item: 224014 7AF,ASSY,UPPER SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224014A1-A4,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 755 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 20 Strasbaugh Time: 16:14:52 Item: 224014 7AF,ASSY,UPPER SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224014A1-A4,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 756 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 21 Strasbaugh Time: 16:14:52 Item: 224014 7AF,ASSY,UPPER SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224014A1-A4,E1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 757 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 22 Strasbaugh Time: 16:14:52 Item: 224015 7AF,ASSY,LOWER,SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224015A1-A2 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 104705 2.00...
Page 758 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 23 Strasbaugh Time: 16:14:52 Item: 224015 7AF,ASSY,LOWER,SPINDLE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224015A1-A2 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 172215 2.00...
Page 759 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 24 Strasbaugh Time: 16:14:52 Item: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224016A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 760 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 25 Strasbaugh Time: 16:14:52 Item: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224016A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 761 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 26 Strasbaugh Time: 16:14:52 Item: 224017 7AF,ASSY,CONDITIONING ARM,WORK CHUCK Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224017A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 762 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 27 Strasbaugh Time: 16:14:52 Item: 224017 7AF,ASSY,CONDITIONING ARM,WORK CHUCK Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224017A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 763 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 28 Strasbaugh Time: 16:14:52 Item: 224018 7AF,ASSY,PROBE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224018A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 106989 2.00...
Page 764 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 29 Strasbaugh Time: 16:14:52 Item: 224019 7AF,ASSY,ROBOT Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224019A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 105081 20.00...
Page 765 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 30 Strasbaugh Time: 16:14:52 Item: 224020 7AF,ASSY,FRONT WINDOW Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224020A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 766 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 31 Strasbaugh Time: 16:14:52 Item: 224023 7AF,ASSY,CASSETTE TURRET Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224023A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 767 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 32 Strasbaugh Time: 16:14:52 Item: 224023 7AF,ASSY,CASSETTE TURRET Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224023A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 768 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 33 Strasbaugh Time: 16:14:52 Item: 224024 7AF,ASSY,SPIN/RINSE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224024A1-A3 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 100717 2.00...
Page 769 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 34 Strasbaugh Time: 16:14:52 Item: 224024 7AF,ASSY,SPIN/RINSE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224024A1-A3 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 113147 4.00...
Page 770 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 35 Strasbaugh Time: 16:14:52 Item: 224024 7AF,ASSY,SPIN/RINSE Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224024A1-A3 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 224060 1.00...
Page 771 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 36 Strasbaugh Time: 16:14:52 Item: 224025 7AF,ASSY,PULL OUT TRAY,COMPUTER Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224025A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 772 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 37 Strasbaugh Time: 16:14:52 Item: 224027 7AF,ASSY,CONTROLLER PULL-OUT TRAY Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224027A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 773 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 38 Strasbaugh Time: 16:14:52 Item: 224029 7AF,ASSY,WORKCHUCK, MOUNT Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224029A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks...
Page 774 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 39 Strasbaugh Time: 16:14:52 Item: 224035 7AF,ASSY,PANEL,WAFER HANDLING SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224035A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 775 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 40 Strasbaugh Time: 16:14:52 Item: 224036 7AF,ASSY,PANEL, WAFER HANDLING Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224036A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 776 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 41 Strasbaugh Time: 16:14:52 Item: 224037 7AF,ASS'Y,DRAIN,SYSTEM Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224037 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 101644 30.00...
Page 777 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 42 Strasbaugh Time: 16:14:52 Item: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224038A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type Drawing...
Page 778 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 44 Strasbaugh Time: 16:14:52 Item: 224039 7AF,ASSY,PANEL,VALVE, WAFER HANDLING SECTION Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224039A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 779 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 45 Strasbaugh Time: 16:14:52 Item: 224040 7AF,SPLASH PAN,SPIN RINSE ASSEMBLY Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-224040A1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-SUB Item UM Description Description P/M Type...
Page 780 4.3.4 Exploded WO BOM Date: 05/31/05 Page: 46 Strasbaugh Time: 16:14:52 Item: 248266 7AF,RAIL,MOUNTING, Qty Released: Work Order: 7AF0079 Assembly Drawing: 7AF-248266D1 Rev: Release: 01/06/05 1239969 Item Type: ASSY-MSC Item UM Description Description P/M Type Drawing Remarks ------ ---------- -- ------------------------ ------------------------ --- -------- ------------------ ------------ ------------ 107700 5.25...
Page 781 4.3.1 Standard BOM Date: 05/31/05 Page: 1 Strasbaugh Time: 16:26:11 Item: 248456 7AF,KIT,2" CONVERSION Design Group: mmenz Type: KIT-UPGD Bom Code #: 248456 REV E Assembly Drawing: 7AF-248456A1-A3 Status: PROD ECO: Group: Rev: Resp. Engr.: Item Description Description...
Page 782 4.3.1 Standard BOM Date: 05/31/05 Page: 1 Strasbaugh Time: 16:30:20 Item: 289001 UVS,ASSY, COMPONENTS Design Group: jfuller Type: ASSY-SUB Bom Code #: 289001 REV G.3 Assembly Drawing: UVS 289001A1,E1,P Status: EC REV ECO: SECTION C-C Group: Rev: Resp. Engr.:...
Page 783 4.3.1 Standard BOM Date: 05/31/05 Page: 2 Strasbaugh Time: 16:30:20 Item: 289001 UVS,ASSY, COMPONENTS Design Group: jfuller Type: ASSY-SUB Bom Code #: 289001 REV G.3 Assembly Drawing: UVS 289001A1,E1,P Status: EC REV ECO: SECTION C-C Group: Rev: Resp. Engr.:...
Page 784 4.3.1 Standard BOM Date: 05/31/05 Page: 3 Strasbaugh Time: 16:30:20 Item: 289001 UVS,ASSY, COMPONENTS Design Group: jfuller Type: ASSY-SUB Bom Code #: 289001 REV G.3 Assembly Drawing: UVS 289001A1,E1,P Status: EC REV ECO: SECTION C-C Group: Rev: Resp. Engr.:...
Page 785 4.3.1 Standard BOM Date: 05/31/05 Page: 4 Strasbaugh Time: 16:30:20 Item: 289001 UVS,ASSY, COMPONENTS Design Group: jfuller Type: ASSY-SUB Bom Code #: 289001 REV G.3 Assembly Drawing: UVS 289001A1,E1,P Status: EC REV ECO: SECTION C-C Group: Rev: Resp. Engr.:...
Page 786 4.3.1 Standard BOM Date: 05/31/05 Page: 1 Strasbaugh Time: 16:31:14 Item: 289003 KIT,VACUUM PUMP,1HP, 100-120V, 60HZ Design Group: jfuller Type: ASSY-OPT Bom Code #: 289003 REV C Assembly Drawing: UVS 289001A1 Status: PROD ECO: Group: Rev: Resp. Engr.:...
Page 787 4.3.1 Standard BOM Date: 05/31/05 Page: 1 Strasbaugh Time: 16:30:57 Item: 289008 KIT,3 LINE 1/2" VACUUM SYSTEM Design Group: jfuller Type: ASSY-OPT Bom Code #: 289008 REV C Assembly Drawing: UVS 289001 Status: PROD ECO: SECTION B-B Group: Rev: Resp.
Page 788 Introduction IELD ERVICE...
Page 789 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 1 Strasbaugh Time: 11:57:31 Parent: 118168 MODEL 7AF AUTOMATIC WAFER BACK GRINDING> Drawing: 7AF-118168A1-T1 > Rev: L Type: ASSY-FG Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks...
Page 790 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 2 Strasbaugh Time: 11:57:31 Parent: 118168 MODEL 7AF AUTOMATIC WAFER BACK GRINDING> Drawing: 7AF-118168A1-T1 > Rev: L Type: ASSY-FG Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks...
Page 791 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 3 Strasbaugh Time: 11:57:31 Parent: 118168 MODEL 7AF AUTOMATIC WAFER BACK GRINDING> Drawing: 7AF-118168A1-T1 > Rev: L Type: ASSY-FG Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks...
Page 792 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 4 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 793 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 5 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 794 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 6 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 795 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 7 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 796 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 8 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 797 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 9 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 798 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 10 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 799 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 11 Strasbaugh Time: 11:57:31 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 800 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 12 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 801 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 13 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 802 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 14 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 803 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 15 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 804 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 16 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 805 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 17 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 806 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 18 Strasbaugh Time: 11:57:32 Parent: 118313 7AF,ASSY,VACUUM PUMPING PLANT AND > Drawing: 7AF-118313A1-A3 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 807 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 19 Strasbaugh Time: 11:57:32 Parent: 119041 DRESSER WHEEL,WD2000- 200MM DIA Drawing: 7AF-119041A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 808 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 20 Strasbaugh Time: 11:57:32 Parent: 119041 DRESSER WHEEL,WD2000- 200MM DIA Drawing: 7AF-119041A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 809 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 21 Strasbaugh Time: 11:57:32 Parent: 119044 7AF,DRESSING,DISK 200mm COARSE Drawing: 7AA-119044A1 Rev: C Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 810 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 22 Strasbaugh Time: 11:57:32 Parent: 119044 7AF,DRESSING,DISK 200mm COARSE Drawing: 7AA-119044A1 Rev: C Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 811 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 23 Strasbaugh Time: 11:57:32 Parent: 141719 7AF,,ASSY,BOARD, WIRING,ROBOT I/O Drawing: 7AF-141719A1 Rev: E Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 812 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 24 Strasbaugh Time: 11:57:32 Parent: 141719 7AF,,ASSY,BOARD, WIRING,ROBOT I/O Drawing: 7AF-141719A1 Rev: E Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 813 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 25 Strasbaugh Time: 11:57:32 Parent: 218742 ENCLOSER,INVERTERS (7AF) Drawing: 7AF-218742 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218743 2.00 EA 7AF,ENCLOSURE,CLAMP SP...
Page 814 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 26 Strasbaugh Time: 11:57:32 Parent: 220757 CABINET FRONT TOP (7AF) Drawing: 7AF-220757 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 815 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 27 Strasbaugh Time: 11:57:32 Parent: 220761 BED MOUNT TO CABINET (7AF) Drawing: 7AF-220761 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 816 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 28 Strasbaugh Time: 11:57:32 Parent: 223242 7AF,LIGHTPOLE,RETROFIT > Drawing: 7AF-224009 Rev: Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 817 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 29 Strasbaugh Time: 11:57:32 Parent: 223248 7AF,ENCLOSURE,COOLING FA N RETROFIT > Drawing: Rev: Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 818 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 30 Strasbaugh Time: 11:57:32 Parent: 223253 ASSY,INDICATOR,DIAL - 0.5 MICRON RES.> Drawing: NO DWG Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 819 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 31 Strasbaugh Time: 11:57:32 Parent: 223258 7AF,ASSY,METAL CASSETTE FOR 6" WAFERS > Drawing: Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 820 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 32 Strasbaugh Time: 11:57:32 Parent: 223263 7AF,VACUUM,ACCUMULATOR TANK RETROFIT > Drawing: Rev: Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110893 2.00 EA VALVE,BALL CHECK 1/4"...
Page 821 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 33 Strasbaugh Time: 11:57:32 Parent: 223264 7AF,ASSY,UPPER SPINDLE LEADSCREW Drawing: 7AF-224014 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 3.00 EA SCREW,1/4-20x3/4,SHCS...
Page 822 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 34 Strasbaugh Time: 11:57:32 Parent: 223286 COMPUTER ASSY,GEM 386 CARD *OBS* > Drawing: Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 823 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 35 Strasbaugh Time: 11:57:32 Parent: 223286 COMPUTER ASSY,GEM 386 CARD *OBS* > Drawing: Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 824 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 36 Strasbaugh Time: 11:57:32 Parent: 223602 7AF,UPGRADE,KIT,COND. RUSH ARM - AMD Drawing: Rev: Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 825 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 37 Strasbaugh Time: 11:57:32 Parent: 223610 7AF MINIMUM SPARE PART Drawing: Rev: Type: KIT-SPRS Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104603 1.00 EA AMPL,SVOSRSHL,25A,120VAC...
Page 826 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 38 Strasbaugh Time: 11:57:32 Parent: 223634 7AF,ASSY,ROBOT, FOR TRAINING >> Drawing: REF 7AF-224019A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 827 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 39 Strasbaugh Time: 11:57:32 Parent: 223634 7AF,ASSY,ROBOT, FOR TRAINING >> Drawing: REF 7AF-224019A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 828 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 40 Strasbaugh Time: 11:57:32 Parent: 223637 7AF,ASSY,WORK CHUCK> HOME SWITCH,UPGRADE Drawing: Rev: A Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 829 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 41 Strasbaugh Time: 11:57:32 Parent: 223637 7AF,ASSY,WORK CHUCK> HOME SWITCH,UPGRADE Drawing: Rev: A Type: KIT-UPGD Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 830 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 42 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 831 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 43 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 832 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 44 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 833 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 45 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 834 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 46 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 835 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 47 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107293 1.00 EA THERMOCOUPLE PROBE,-130...
Page 836 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 48 Strasbaugh Time: 11:57:33 Parent: 224001 7AF,ASSY,GRIND SECTION Drawing: 7AF-224001A1 Rev: L.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 102084 1.00 EA TUBING,COILED,3/8ODx10FT ,1W-005-10...
Page 837 1.00 EA 7AF,DOOR,SIDE LEFT FAB-WELD 7AF-224295D1,W1 240103 2.00 EA WSHR,AS,2x2x1/4 W 7/1 6 DIA HOLE, CS-HDW-E 241905 5.00 EA LABEL,"CAUTION PINCH POI NTS/HANDS CS-MISC 241921 4.00 EA LABEL,"DO NOT PLACE CASS ETTES IN T CS-MISC 284511 2.00 EA GRAPHICS,"STRASBAUGH" MBLEM CS-MISC...
Page 838 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 50 Strasbaugh Time: 11:57:33 Parent: 224002 7AF,ASSY,WAFER HANDLING SECTION Drawing: 7AF-224002A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 839 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 51 Strasbaugh Time: 11:57:33 Parent: 224002 7AF,ASSY,WAFER HANDLING SECTION Drawing: 7AF-224002A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 840 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 52 Strasbaugh Time: 11:57:33 Parent: 224002 7AF,ASSY,WAFER HANDLING SECTION Drawing: 7AF-224002A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 841 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 53 Strasbaugh Time: 11:57:33 Parent: 224002 7AF,ASSY,WAFER HANDLING SECTION Drawing: 7AF-224002A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 842 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 241921 4.00 EA LABEL,"DO NOT PLACE CASS ETTES IN T CS-MISC 284511 2.00 EA GRAPHICS,"STRASBAUGH" MBLEM CS-MISC...
Page 843 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 55 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 844 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 56 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 845 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 57 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 846 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 58 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 847 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 59 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 848 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 60 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 849 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 61 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 850 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 62 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 851 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 63 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 852 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 64 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 853 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 65 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 854 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 66 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 855 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 67 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 856 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 68 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 857 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 69 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 858 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 70 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 859 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 71 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 860 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 72 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 861 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 73 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 862 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 74 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 863 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 75 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 864 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 76 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 865 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 77 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 866 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 78 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 867 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 79 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 868 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 80 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 869 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 81 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 870 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 82 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 871 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 83 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 872 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 84 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 873 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 85 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 874 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 86 Strasbaugh Time: 11:57:33 Parent: 224004 7AF,ASSY,LOWER GRIND SECTION Drawing: 7AF-224004A1-E1 Rev: K.2 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 875 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 87 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 876 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 88 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224192 1.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /4MNPT ONE...
Page 877 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 89 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 878 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 90 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224192 1.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /4MNPT ONE...
Page 879 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 91 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 880 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 92 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224194 1.00 EA FTG,SS,M,CONN,1/4T,X,1/8 MNPT ONE T...
Page 881 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 93 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 882 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 94 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224192 1.00 EA FTG,SS,BRCH,TEE,1/4T,X,1 /4MNPT ONE...
Page 883 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 95 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104643 1.00 EA BOX,2-1/8 X 4 X 1-1/2"...
Page 884 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 96 Strasbaugh Time: 11:57:33 Parent: 224005 7AF,ASSY,GRIND SECTION,UPPER Drawing: 7AF-224005A1-2,E1> Rev: L Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224144 1.00 EA 7AF,WELDMENT,DOOR REAR...
Page 885 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 97 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 886 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 98 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 887 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 99 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 888 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 100 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 889 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 101 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 890 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 102 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 891 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 103 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 892 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 104 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 893 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 105 Strasbaugh Time: 11:57:33 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 894 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 106 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 895 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 107 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 896 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 108 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 897 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 109 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 898 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 110 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 899 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 111 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 900 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 112 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 901 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 113 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 902 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 114 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 903 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 115 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 904 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 116 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 905 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 117 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 906 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 118 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 907 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 119 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 908 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 120 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 909 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 121 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 910 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 122 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 911 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 123 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 912 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 124 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 913 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 125 Strasbaugh Time: 11:57:34 Parent: 224006 7AF,ASSY,ELECTRICAL CONTROL ENCLOSURES Drawing: 7AF-224006A1,A2 Rev: W Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 914 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 126 Strasbaugh Time: 11:57:34 Parent: 224007 7AF,ASSY,MACHINE TOP COVER Drawing: 7AF 224007A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 915 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 127 Strasbaugh Time: 11:57:34 Parent: 224007 7AF,ASSY,MACHINE TOP COVER Drawing: 7AF 224007A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 916 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 128 Strasbaugh Time: 11:57:34 Parent: 224009 7AF,ASSY,MONITOR EXTENSION ARM Drawing: 7AF-224009A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 917 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 129 Strasbaugh Time: 11:57:34 Parent: 224009 7AF,ASSY,MONITOR EXTENSION ARM Drawing: 7AF-224009A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 918 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 130 Strasbaugh Time: 11:57:34 Parent: 224009 7AF,ASSY,MONITOR EXTENSION ARM Drawing: 7AF-224009A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 919 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 131 Strasbaugh Time: 11:57:34 Parent: 224009 7AF,ASSY,MONITOR EXTENSION ARM Drawing: 7AF-224009A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 920 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 132 Strasbaugh Time: 11:57:34 Parent: 224009 7AF,ASSY,MONITOR EXTENSION ARM Drawing: 7AF-224009A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 921 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 133 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 1.00 IN CRS,FLAT BAR,...
Page 922 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 134 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172208 4.00 EA 7AF,CLAMP,GUIDEWAY BEA...
Page 923 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 135 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 1.00 IN CRS,FLAT BAR,...
Page 924 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 136 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172208 4.00 EA 7AF,CLAMP,GUIDEWAY BEA...
Page 925 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 137 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 1.00 IN CRS,FLAT BAR,...
Page 926 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 138 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172207 2.00 EA 7AF,BRACKET,SENSOR...
Page 927 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 139 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 1.00 IN CRS,FLAT BAR,...
Page 928 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 140 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172212 2.00 EA 7AF,KEY,LOWER SPINDLE...
Page 929 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 141 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 1.00 IN CRS,FLAT BAR,...
Page 930 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 142 Strasbaugh Time: 11:57:34 Parent: 224013 7AF,ASSY,BED Drawing: 7AF-224013A1,E1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 141742 4.00 EA TERM.
Page 931 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 143 Strasbaugh Time: 11:57:34 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 932 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 144 Strasbaugh Time: 11:57:34 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 6.00 EA SCREW,1/4-20x3/4,SHCS...
Page 933 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 145 Strasbaugh Time: 11:57:34 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172197 1.00 EA 7AF,SHAFT,RT/LT SPINDLE...
Page 934 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 146 Strasbaugh Time: 11:57:34 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218808 2.00 EA TERM,END,PLATE,02944.6,...
Page 935 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 147 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 936 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 148 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 38.00 EA SCREW,1/4-20x3/4,SHCS...
Page 937 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 149 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172195 2.00 EA 7AF,SHAFT,UPPER SPINDLE...
Page 938 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 150 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218778 2.00 EA CONN,AMPHENOL MS3106A2...
Page 939 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 151 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 940 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 152 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 38.00 EA SCREW,1/4-20x3/4,SHCS...
Page 941 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 153 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172195 2.00 EA 7AF,SHAFT,UPPER SPINDLE...
Page 942 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 154 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218778 2.00 EA CONN,AMPHENOL MS3106A2...
Page 943 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 155 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 944 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 156 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 38.00 EA SCREW,1/4-20x3/4,SHCS...
Page 945 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 157 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172195 2.00 EA 7AF,SHAFT,UPPER SPINDLE...
Page 946 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 158 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218778 2.00 EA CONN,AMPHENOL MS3106A2...
Page 947 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 159 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 948 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 160 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112864 38.00 EA SCREW,1/4-20x3/4,SHCS...
Page 949 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 161 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172195 2.00 EA 7AF,SHAFT,UPPER SPINDLE...
Page 950 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 162 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218778 2.00 EA CONN,AMPHENOL MS3106A2...
Page 951 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 163 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 952 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 164 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112867 44.00 EA SCREW,1/4-20X1,SHCS...
Page 953 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 165 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172198 1.00 EA 7AF,SHAFT CLAMP,RT SPI...
Page 954 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 166 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218826 2.00 EA LOAD CELL,MLP-500-T TE...
Page 955 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 167 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 956 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 168 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112818 16.00 EA SCREW,10-32x1/2,SHCS...
Page 957 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 169 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 115257 2.00 EA MOUNT,AIR #1M1A-3000 F...
Page 958 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 170 Strasbaugh Time: 11:57:35 Parent: 224014 7AF,ASSY,UPPER SPINDLE Drawing: 7AF-224014A1-A4,E1 Rev: P Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 218709 2.00 EA 7AF,COUPLER,LOADCELL...
Page 959 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 171 Strasbaugh Time: 11:57:35 Parent: 224015 7AF,ASS'Y,LOWER,SPINDLE Drawing: 7AF-224015A1-A2 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107393 2.00 EA SNSR,PROX SHLD,MICRO W...
Page 960 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 172 Strasbaugh Time: 11:57:35 Parent: 224015 7AF,ASS'Y,LOWER,SPINDLE Drawing: 7AF-224015A1-A2 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172298 2.00 EA 7AF,LOWER SPINDLE SIDE/...
Page 961 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 173 Strasbaugh Time: 11:57:35 Parent: 224015 7AF,ASS'Y,LOWER,SPINDLE Drawing: 7AF-224015A1-A2 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107393 2.00 EA SNSR,PROX SHLD,MICRO W...
Page 962 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 174 Strasbaugh Time: 11:57:35 Parent: 224015 7AF,ASS'Y,LOWER,SPINDLE Drawing: 7AF-224015A1-A2 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 172247 2.00 EA 7AF,BRACKET,SENSOR,...
Page 963 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 175 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 964 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 176 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 965 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 177 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 966 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 178 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 967 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 179 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 968 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 180 Strasbaugh Time: 11:57:35 Parent: 224016 7AF,ASSY,PAN,GRIND & EXHAUST Drawing: 7AF-224016A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 969 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 181 Strasbaugh Time: 11:57:35 Parent: 224017 7AF,ASS'Y,CONDITIONING, Drawing: 7AF-224017A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 106561 2.00 EA MTR,MMR-5001 MICRO MOT...
Page 970 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 182 Strasbaugh Time: 11:57:35 Parent: 224017 7AF,ASS'Y,CONDITIONING, Drawing: 7AF-224017A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224096 2.00 EA 7AF,COND.
Page 971 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 183 Strasbaugh Time: 11:57:35 Parent: 224017 7AF,ASS'Y,CONDITIONING, Drawing: 7AF-224017A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 106561 2.00 EA MTR,MMR-5001 MICRO MOT...
Page 972 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 184 Strasbaugh Time: 11:57:35 Parent: 224017 7AF,ASS'Y,CONDITIONING, Drawing: 7AF-224017A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224097 2.00 EA 7AF,COND.
Page 973 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 185 Strasbaugh Time: 11:57:35 Parent: 224018 7AF,ASS'Y,PROBE Drawing: 7AF-224018A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 106989 2.00 EA PROBE,MT25W HEIDENHAIN...
Page 974 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 186 Strasbaugh Time: 11:57:35 Parent: 224018 7AF,ASS'Y,PROBE Drawing: 7AF-224018A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 106989 2.00 EA PROBE,MT25W HEIDENHAIN...
Page 975 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 187 Strasbaugh Time: 11:57:35 Parent: 224018 7AF,ASS'Y,PROBE Drawing: 7AF-224018A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 106989 2.00 EA PROBE,MT25W HEIDENHAIN...
Page 976 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 188 Strasbaugh Time: 11:57:35 Parent: 224019 7AF,ASSY,ROBOT Drawing: 7AF-224019A1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 105081 20.00 EA CONTACT,CRMP,PIN,22-30,.
Page 977 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 189 Strasbaugh Time: 11:57:35 Parent: 224019 7AF,ASSY,ROBOT Drawing: 7AF-224019A1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 105081 20.00 EA CONTACT,CRMP,PIN,22-30,.
Page 978 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 190 Strasbaugh Time: 11:57:35 Parent: 224019 7AF,ASSY,ROBOT Drawing: 7AF-224019A1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 105081 20.00 EA CONTACT,CRMP,PIN,22-30,.
Page 979 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 191 Strasbaugh Time: 11:57:35 Parent: 224019 7AF,ASSY,ROBOT Drawing: 7AF-224019A1 Rev: H Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 105081 20.00 EA CONTACT,CRMP,PIN,22-30,.
Page 980 1.00 EA 7AF,FRAME,WINDOW CENTER FAB-MACH 7AF-220738D1 220739 1.00 EA 7AF,FRAME,WINDOW RIGHT FAB-MISC 7AF-220739D1 220740 1.00 EA 7AF,FRAME,WINDOW LEFT FAB-MISC 7AF-220740D1 225426 22.00 EA WSHR,SS,FLAT,#10 CS-HDW-E 238048 22.00 EA WSHR,NYL,FLAT,.260x.687x .060 CS-HDW-E 248146 7.00 EA SCREW,SS,8-32X5/8,FHSHCS CS-HDW NONE 284511 2.00 EA GRAPHICS,"STRASBAUGH" MBLEM CS-MISC...
Page 981 1.00 EA 7AF,FRAME,WINDOW RIGHT FAB-MISC 7AF-220739D1 220740 1.00 EA 7AF,FRAME,WINDOW LEFT FAB-MISC 7AF-220740D1 225426 22.00 EA WSHR,SS,FLAT,#10 CS-HDW-E 238048 22.00 EA WSHR,NYL,FLAT,.260x.687x .060 CS-HDW-E 245984 1.00 EA 7AF,WINDOW,TOP LEFT FAB-SHMT 7AF-245984D1 248146 7.00 EA SCREW,SS,8-32X5/8,FHSHCS CS-HDW NONE 284511 2.00 EA GRAPHICS,"STRASBAUGH" MBLEM CS-MISC...
Page 982 1.00 EA 7AF,FRAME,WINDOW LEFT FAB-MISC 7AF-220740D1 225426 22.00 EA WSHR,SS,FLAT,#10 CS-HDW-E 236899 4.00 EA WSHR,SS,LOCK,SPLIT,1/4 CS-HDW-E N/A 238048 26.00 EA WSHR,NYL,FLAT,.260x.687x .060 CS-HDW-E 245984 1.00 EA 7AF,WINDOW,TOP LEFT FAB-SHMT 7AF-245984D1 248146 7.00 EA SCREW,SS,8-32X5/8,FHSHCS CS-HDW NONE 284511 2.00 EA GRAPHICS,"STRASBAUGH" MBLEM CS-MISC...
Page 983 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 195 Strasbaugh Time: 11:57:35 Parent: 224020 7AF,ASSY,FRONT WINDOW Drawing: 7AF-224020A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112357 44.00 EA SCREW,SS,10-32x3/8,BHCS...
Page 984 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 196 Strasbaugh Time: 11:57:35 Parent: 224020 7AF,ASSY,FRONT WINDOW Drawing: 7AF-224020A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112357 44.00 EA SCREW,SS,10-32x3/8,BHCS...
Page 985 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 197 Strasbaugh Time: 11:57:35 Parent: 224022 7AF,ASS'Y,PRE-ALIGNER Drawing: 7AF-224022 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107340 1.00 EA PRE-ALIGNER,EQUIPE PRE...
Page 986 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 198 Strasbaugh Time: 11:57:35 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104586 1.00 EA AMPL...
Page 987 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 199 Strasbaugh Time: 11:57:35 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 226661 2.00 EA SWITCH,BRACKET,17000-3...
Page 988 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 200 Strasbaugh Time: 11:57:35 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104586 1.00 EA AMPL...
Page 989 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 201 Strasbaugh Time: 11:57:35 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 235004 6.00 EA NUT,SS,1/4-20,ELASTIC -...
Page 990 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 202 Strasbaugh Time: 11:57:35 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104586 1.00 EA AMPL...
Page 991 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 203 Strasbaugh Time: 11:57:36 Parent: 224023 7AF,ASSY,CASSETTE TURRET Drawing: 7AF-224023A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 237230 1.00 EA 7AF,SPECIAL,REAR CASS.
Page 992 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 204 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 993 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 205 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 113197 4.00 EA SCREW,5/16-18x1,SET SH...
Page 994 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 206 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224061 1.00 EA 7AF,CLAMP,BEARING,...
Page 995 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 207 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 996 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 208 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 113192 3.00 EA SCREW,SS,5/16-18x1/2,SET ,CUP...
Page 997 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 209 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224061 1.00 EA 7AF,CLAMP,BEARING,...
Page 998 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 210 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 100717 2.00 IN CRS,FLAT BAR,...
Page 999 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 211 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112962 2.00 EA SCREW,SS,3/8-16x1,SHCS...
Page 1000 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 212 Strasbaugh Time: 11:57:36 Parent: 224024 7AF,ASSY,SPIN/RINSE Drawing: 7AF-224024A1-A3 Rev: G Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224049 1.00 EA SPROCKET,MODIFIED SPIN-R INSE DRVR...
Page 1001 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 213 Strasbaugh Time: 11:57:36 Parent: 224025 7AF,ASSY,PULL OUT TRAY,COMPUTER Drawing: 7AF-224025A1 Rev: J Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1002 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 214 Strasbaugh Time: 11:57:36 Parent: 224025 7AF,ASSY,PULL OUT TRAY,COMPUTER Drawing: 7AF-224025A1 Rev: J Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1003 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 215 Strasbaugh Time: 11:57:36 Parent: 224025 7AF,ASSY,PULL OUT TRAY,COMPUTER Drawing: 7AF-224025A1 Rev: J Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1004 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 216 Strasbaugh Time: 11:57:36 Parent: 224025 7AF,ASSY,PULL OUT TRAY,COMPUTER Drawing: 7AF-224025A1 Rev: J Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1005 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 217 Strasbaugh Time: 11:57:36 Parent: 224026 7AF,ASS'Y,PULL-OUT,TRAY, (ROBOT/PREALIGN) Drawing: 7AF-224026A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107338 0.00 EA PRE-ALIGNER,CONTROLLER,...
Page 1006 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 218 Strasbaugh Time: 11:57:36 Parent: 224026 7AF,ASS'Y,PULL-OUT,TRAY, (ROBOT/PREALIGN) Drawing: 7AF-224026A1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 107338 0.00 EA PRE-ALIGNER,CONTROLLER,...
Page 1007 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 219 Strasbaugh Time: 11:57:36 Parent: 224027 7AF,ASSY,CONTROLLER PULL-OUT TRAY Drawing: 7AF-224027A1 Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1008 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 220 Strasbaugh Time: 11:57:36 Parent: 224027 7AF,ASSY,CONTROLLER PULL-OUT TRAY Drawing: 7AF-224027A1 Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1009 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 221 Strasbaugh Time: 11:57:36 Parent: 224027 7AF,ASSY,CONTROLLER PULL-OUT TRAY Drawing: 7AF-224027A1 Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1010 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 222 Strasbaugh Time: 11:57:36 Parent: 224027 7AF,ASSY,CONTROLLER PULL-OUT TRAY Drawing: 7AF-224027A1 Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1011 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 223 Strasbaugh Time: 11:57:36 Parent: 224028 7AF,ASSY,GEM COMPUTER SYSTEM (OPTIONAL) Drawing: 7AF-224028A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1012 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 224 Strasbaugh Time: 11:57:36 Parent: 224028 7AF,ASSY,GEM COMPUTER SYSTEM (OPTIONAL) Drawing: 7AF-224028A1 Rev: D Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1013 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 225 Strasbaugh Time: 11:57:36 Parent: 224029 7AF,ASS'Y,WORKCHUCK, MOUNT Drawing: 7AF-224029A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111400 2.00 EA O-RING,BUNA,.103Wx1.049I D,-121,70A...
Page 1014 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 226 Strasbaugh Time: 11:57:36 Parent: 224029 7AF,ASS'Y,WORKCHUCK, MOUNT Drawing: 7AF-224029A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111400 2.00 EA O-RING,BUNA,.103Wx1.049I D,-121,70A...
Page 1015 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 227 Strasbaugh Time: 11:57:36 Parent: 224031 7AF,ASSY,WORKCHUCK LEVELING KIT Drawing: 7AF-224031A1 Rev: .1 Type: KIT-TOOL Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1016 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 228 Strasbaugh Time: 11:57:36 Parent: 224031 7AF,ASSY,WORKCHUCK LEVELING KIT Drawing: 7AF-224031A1 Rev: .1 Type: KIT-TOOL Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1017 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 229 Strasbaugh Time: 11:57:36 Parent: 224033 7AF,INSITU DRESSING CHUCK > Drawing: 7AF-218638D1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1018 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 230 Strasbaugh Time: 11:57:36 Parent: 224033 7AF,INSITU DRESSING CHUCK > Drawing: 7AF-218638D1 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1019 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 231 Strasbaugh Time: 11:57:36 Parent: 224034 7AF,VACUUM,CHUCK 8" POROUS RHS > Drawing: 7AF-224034 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1020 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 232 Strasbaugh Time: 11:57:36 Parent: 224035 7AF,ASSY,PANEL,(WAFER, HANDLING,SECTION) Drawing: 7AF-224035A1,S1 Rev: C Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 104673 1.00 EA BOX,BELL,4-1/2x4-1/2x2,...
Page 1021 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 233 Strasbaugh Time: 11:57:36 Parent: 224036 7AF,ASSY,PANEL, WAFER HANDLING Drawing: 7AF-224036A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1022 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 234 Strasbaugh Time: 11:57:36 Parent: 224036 7AF,ASSY,PANEL, WAFER HANDLING Drawing: 7AF-224036A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1023 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 235 Strasbaugh Time: 11:57:36 Parent: 224036 7AF,ASSY,PANEL, WAFER HANDLING Drawing: 7AF-224036A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1024 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 236 Strasbaugh Time: 11:57:36 Parent: 224037 7AF,ASS'Y,DRAIN,SYSTEM Drawing: 7AF-224037 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101644 30.00 IN PIPE,PVC,SCH.40,WHT,1-1/ 2...
Page 1025 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 237 Strasbaugh Time: 11:57:36 Parent: 224037 7AF,ASS'Y,DRAIN,SYSTEM Drawing: 7AF-224037 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101644 30.00 IN PIPE,PVC,SCH.40,WHT,1-1/ 2...
Page 1026 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 238 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1027 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 239 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1028 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 240 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1029 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 241 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1030 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 242 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1031 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 243 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1032 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 244 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1033 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 245 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1034 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 246 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1035 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 247 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1036 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 248 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1037 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 249 Strasbaugh Time: 11:57:36 Parent: 224038 7AF,ASSY,PANEL,VALVE, GRIND SECTION Drawing: 7AF-224038A1 Rev: K Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1038 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 250 Strasbaugh Time: 11:57:36 Parent: 224039 7AF,ASSY,PANEL,(WAFER, HANDLING,SECTION) Drawing: 7AF-224039A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101991 1.50 IN TUBING,SS,1/4ODx.035WALL ,304,T8504...
Page 1039 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 251 Strasbaugh Time: 11:57:36 Parent: 224039 7AF,ASSY,PANEL,(WAFER, HANDLING,SECTION) Drawing: 7AF-224039A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101991 1.50 IN TUBING,SS,1/4ODx.035WALL ,304,T8504...
Page 1040 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 252 Strasbaugh Time: 11:57:36 Parent: 224039 7AF,ASSY,PANEL,(WAFER, HANDLING,SECTION) Drawing: 7AF-224039A1 Rev: F Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101991 1.50 IN TUBING,SS,1/4ODx.035WALL ,304,T8504...
Page 1041 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 253 Strasbaugh Time: 11:57:36 Parent: 224040 7AF,SPLASH PAN,SPIN RINSE ASSEMBLY Drawing: 7AF-224040A1 Rev: IR Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1042 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 254 Strasbaugh Time: 11:57:36 Parent: 224042 7AF,KIT,CE COMPLIANCE> Drawing: 7AF-224042A1,E1 > Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1043 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 255 Strasbaugh Time: 11:57:36 Parent: 224042 7AF,KIT,CE COMPLIANCE> Drawing: 7AF-224042A1,E1 > Rev: B.1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1044 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 256 Strasbaugh Time: 11:57:36 Parent: 224043 7AF,ASSY,WORKCHUCK FLUSH-EXTERNAL Drawing: 7AF-224043 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101991 14.00 IN TUBING,SS,1/4ODx.035WALL ,304,T8504...
Page 1045 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 257 Strasbaugh Time: 11:57:36 Parent: 224043 7AF,ASSY,WORKCHUCK FLUSH-EXTERNAL Drawing: 7AF-224043 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 101991 14.00 IN TUBING,SS,1/4ODx.035WALL ,304,T8504...
Page 1046 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 258 Strasbaugh Time: 11:57:36 Parent: 224168 7AF,ASSY,FTGS,STAINLESS, STEEL Drawing: Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224171 1.00 EA 7AF,ASSY,OF,STAINLESS,...
Page 1047 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 259 Strasbaugh Time: 11:57:36 Parent: 224170 7AF,ASSY,OF,BRASS,ITEMS, FOR,224016 Drawing: 7AF-224016 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112050 2.00 EA FTG,PLYMAT,CONN,1/4TBG,1 /8MNPT...
Page 1048 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 260 Strasbaugh Time: 11:57:36 Parent: 224171 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224016 Drawing: 7AF-224016 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224194 2.00 EA FTG,SS,M,CONN,1/4T,X,1/8 MNPT ONE T...
Page 1049 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 261 Strasbaugh Time: 11:57:36 Parent: 224172 7AF,ASSY,OF,BRASS,ITEMS, FOR,224023 Drawing: 7AF-224023 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112020 2.00 EA FTG,PLYFLO,CONN,1/4TBG,...
Page 1050 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 262 Strasbaugh Time: 11:57:36 Parent: 224173 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224023 Drawing: 7AF-224023 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224189 2.00 EA FTG,SS,M,ELBOW,1/4T,X,1/ 8MNPT ONE...
Page 1051 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 263 Strasbaugh Time: 11:57:36 Parent: 224212 7AF,ASSY,OF,BRASS,ITEMS, FOR,224001 Drawing: 7AF-224001A1 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110717 3.00 EA GAUGE,2"...
Page 1052 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 264 Strasbaugh Time: 11:57:36 Parent: 224213 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224001 Drawing: 7AF-224001A1 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111914 1.00 EA FTG,SS,BLKHUNN,3/8TBG...
Page 1053 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 265 Strasbaugh Time: 11:57:36 Parent: 224214 7AF,ASSY,OF,BRASS,ITEMS, FOR,224004 Drawing: 7AF-224004A1,A4 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110704 14.00 EA GAUGE,15-1005-01B-0-10...
Page 1054 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 266 Strasbaugh Time: 11:57:36 Parent: 224215 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224004 Drawing: 7AF-224004A1,A4 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111861 3.00 EA FTG,SS,BRCHTEE,3/8MNPT...
Page 1055 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 267 Strasbaugh Time: 11:57:36 Parent: 224218 7AF,ASSY,OF,BRASS,ITEMS, FOR,224015 Drawing: 7AF-224015 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112026 2.00 EA FTG,PLYFLO,CONN,3/8TBG,1 /8NPT...
Page 1056 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 268 Strasbaugh Time: 11:57:36 Parent: 224219 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224015 Drawing: 7AF-224015 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111867 2.00 EA FTG,SS,ELB,1/4TBG,...
Page 1057 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 269 Strasbaugh Time: 11:57:36 Parent: 224220 7AF,ASSY,OF,BRASS,ITEMS, FOR,224005 Drawing: 7AF-224005A1 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112014 1.00 EA FTG,PLYFLO,UNNTEE,1/2TBG...
Page 1058 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 270 Strasbaugh Time: 11:57:36 Parent: 224221 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224005 Drawing: 7AF-224005A1 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112151 1.00 EA FTG,SS,CPLG,1/4NPT,1/4NP T...
Page 1059 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 271 Strasbaugh Time: 11:57:36 Parent: 224222 7AF,ASSY,OF,BRASS,ITEMS, FOR,224014 Drawing: 7AF-224014 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110704 2.00 EA GAUGE,15-1005-01B-0-10...
Page 1060 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 272 Strasbaugh Time: 11:57:36 Parent: 224223 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224014 Drawing: 7AF-224014 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111891 2.00 EA FTG,SS,CONN,1/4TBG,...
Page 1061 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 273 Strasbaugh Time: 11:57:36 Parent: 224226 7AF,ASSY,OF,BRASS,ITEMS, FOR,224017 Drawing: 7AF-224017 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112050 10.00 EA FTG,PLYMAT,CONN,1/4TBG,1 /8MNPT...
Page 1062 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 274 Strasbaugh Time: 11:57:36 Parent: 224227 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224017 Drawing: 7AF-224017 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 224194 10.00 EA FTG,SS,M,CONN,1/4T,X,1/8 MNPT ONE T...
Page 1063 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 275 Strasbaugh Time: 11:57:36 Parent: 224228 7AF,ASSY,OF,BRASS,ITEMS, FOR,224018 Drawing: 7AF-224018 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110704 1.00 EA GAUGE,15-1005-01B-0-10...
Page 1064 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 276 Strasbaugh Time: 11:57:36 Parent: 224229 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224018 Drawing: 7AF-224018 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111962 1.00 EA FTG,SS,HXNIP,1/4MNPT...
Page 1065 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 277 Strasbaugh Time: 11:57:36 Parent: 224230 7AF,ASSY,OF,BRASS,ITEMS, FOR,224024 Drawing: 7AF-224024 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112022 1.00 EA FTG,PLYFLO,CONN,3/8TBG,...
Page 1066 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 278 Strasbaugh Time: 11:57:36 Parent: 224231 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224024 Drawing: 7AF-224024 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111919 1.00 EA FTG,SS,CONN,3/8TBG,...
Page 1067 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 279 Strasbaugh Time: 11:57:36 Parent: 224241 7AF,ASSY,OF,BRASS,ITEMS, FOR,224038 Drawing: 7AF-224038 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 112029 2.00 EA FTG,PLYFLO,ELB,1/4TBG,1/ 8MNPT...
Page 1068 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 280 Strasbaugh Time: 11:57:36 Parent: 224242 7AF,ASSY,OF,STAINLESS,IT EMS,FOR,224038 Drawing: 7AF-224038 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111867 2.00 EA FTG,SS,ELB,1/4TBG,...
Page 1069 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 281 Strasbaugh Time: 11:57:36 Parent: 224243 7AF,ASSY,OF,BRASS,ITEMS, FOR,224039 Drawing: 7AF-224039 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 110704 10.00 EA GAUGE,15-1005-01B-0-10...
Page 1070 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 282 Strasbaugh Time: 11:57:36 Parent: 224244 7AF,ASSY,OF,STAINLESS, ITEMS,FOR,224039 Drawing: 7AF-224039 Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff ------- --------- -- ------------------------ ----------- -------- ------------------ ------------------------ --------- -------- 111862 1.00 EA FTG,SS,CPLG,1/8NPT,...
Page 1071 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 283 Strasbaugh Time: 11:57:36 Parent: 234359 7AF ROBOT END EFF. ARM> WITH VACUUM CHUCK>OBS Drawing: 7AF-172504/172505 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing...
Page 1072 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 284 Strasbaugh Time: 11:57:36 Parent: 234359 7AF ROBOT END EFF. ARM> WITH VACUUM CHUCK>OBS Drawing: 7AF-172504/172505 Rev: A Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing...
Page 1073 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 285 Strasbaugh Time: 11:57:37 Parent: 234475 7AF,RECOMMENDED ON-SITE SPARE PARTS Drawing: BOM ONLY Rev: .1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1074 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 286 Strasbaugh Time: 11:57:37 Parent: 234475 7AF,RECOMMENDED ON-SITE SPARE PARTS Drawing: BOM ONLY Rev: .1 Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...
Page 1075 15.3.9 Field Service Assy BOM Date: 08/09/01 Page: 287 Strasbaugh Time: 11:57:37 Parent: 236586 7AF S.S. FITTING IN LIEU OF BRASS Drawing: Rev: Type: ASSY-SUB Group: 400 Comp Qty Per UM Description Description Type Drawing Remarks Start Eff End Eff...

Strasbaugh nTellect 7AF Operation And Maintenance Manual

List of Figures

Section 2

Chapter 3: Programming with the Pamux Driver

Chapter 4: Programming Without the Pamux Driver

Appendix A: Troubleshooting and Tips

Appendix B: Specifications

Appendix C: Temperature Conversion Routines

Appendix D: Product Support

Appendix E: Glossary

Section 3

Appendix A: Designing Custom I/O Mounting Racks

Appendix B: Wiring Diagrams

Section 4

Section 5

Appendix A: Approved Laser Scanners

Appendix B: Circuit Drawings

Quick Links

Chapters

Troubleshooting

Need help?

Questions and answers

Related Manuals for Strasbaugh nTellect 7AF

Summary of Contents for Strasbaugh nTellect 7AF

Table of Contents