Strasbaugh nTellect 7AF Manuals
Manuals and User Guides for Strasbaugh nTellect 7AF. We have 1 Strasbaugh nTellect 7AF manual available for free PDF download: Operation And Maintenance Manual
Strasbaugh nTellect 7AF Operation And Maintenance Manual (2493 pages)
Wafer Grinder
Brand: Strasbaugh
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Category: Industrial Equipment
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Size: 25 MB
Table of Contents
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Section 2
1964-
Setting AC28 Jumpers2004
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Overview2019
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Installation2020
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Pamux Error Codes2023
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Working with Banks2023
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Command Reference2024
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Installation2048
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Architecture2048
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Pamux Apis2049
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AC28 Operations2050
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Status/Error Codes2061
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Overview2063
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Bus Timing2064
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Write Timing2064
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Read Timing2064
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TURN off Reset2067
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Resetting the System2067
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Watchdog Registers2076
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Status Register2077
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Common Subroutines2080
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Overview2081
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Notes on Leds2082
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Useful Tips2083
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AC28 Adapter Card2085
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AC36 Adapter Card2085
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B4 Brain Board2086
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B5 Brain Board2086
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B6 Brain Board2087
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Cables2090
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Connectors2092
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Power Supplies2093
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Appendix E: Glossary
2103-
Index2109
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Section 3
2121-
Introduction2123
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What's in this Book2123
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For Help2124
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G4PB4 Mounting Rack2127
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G4PB4R Mounting Rack2128
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G4PB8 Mounting Rack2129
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G4PB8H Mounting Rack2130
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G4PB16 Mounting Rack2132
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G4PB24 Mounting Rack2143
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Fuses2176
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Jumper Strap2176
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Introduction2177
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Dimensions2177
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Parts List2178
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Section 4
2194-
Overview2196
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Pre-Aligner Axes2196
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Wafer Sizes2197
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Fast Align Option2198
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Aligning a Wafer2200
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CE Mark2202
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Cable Connectors2203
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Safety Features2203
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High Voltage Label2204
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Manufacturing Label2204
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Safety Labels2204
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Electrical2206
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Environmental2206
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Mechanical2206
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Vacuum2207
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Unpacking2208
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Preliminary Teaching2215
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Pre-Aligner Files2216
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Wafer Parameter File2217
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Commands2221
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Pre-Aligner Macros2222
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Macro for Aligning2223
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Loading Position2227
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Chuck Position2228
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Maintenance2230
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Starting Diagnostics2232
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Galil & I/O Test2233
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NVSRAM Test2233
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Encoder Read Test2235
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Limit & Home Test2235
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Servo Test2236
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Home Test and Set2238
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R & Z Home Offset2239
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Scaling Factor Test2241
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Vacuum Valve Sensor2242
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CCD and Chuck Test2244
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Troubleshooting2246
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Section 5
2262-
Flat Panel Display2268
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Wafer Handlers2268
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Wetbots2269
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Dual-Arm Robot2270
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End Effectors2271
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Laser Scanner2271
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Robot Accessories2271
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Robotic Systems2272
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Wafer Pre-Aligner2272
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Front-End System2274
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Track2274
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User Interfaces2275
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CE Mark2277
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Laser Radiation2278
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Safety2278
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Safety Interlock2279
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Lockout/Tagout2281
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Robot Cables2283
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Safety Labels2283
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High Voltage Label2285
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Fuse Label2286
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Manufacturing Labels2286
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SEMI S2-93A Systems2287
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Center of Gravity2288
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Teach Pendant2289
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System Description2291
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Hardware Connections2294
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Macros2295
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Software2295
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Coordinate File2296
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Robot Parameter File2296
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Electrical2299
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Environmental2299
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Installing the Robot2301
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Unpacking2301
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Mechanical Setup2302
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Leveling2304
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Safety Verification2313
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Coordinate File2316
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Teaching Stations2318
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Scanner Mapping2323
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Robot Parameter File2327
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Accessing Galil Mode2329
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Flipper End Effector2329
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Saving the Positions2331
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Testing the Flipper2331
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Shipping and Storage2333
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NVS-Ram Test2335
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Galil and I/O Test2336
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Encoder Read Test2338
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Limit and Home Test2338
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Servo Test2339
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Home Test and Set2340
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R-Home Test and Set2341
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Scaling Factor Test2342
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Scanning Test2343
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Step #7 (Servo Test)2349
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Step #13 (Scanning)2356
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Common Problems2357
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Troubleshooting2357
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Aftermath Analysis2372
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Section 6
2388-
End Effectors2391
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User Interfaces2392
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Hardware Connections2394
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Coordinate File2395
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Macros2395
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Robot Parameter File2395
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Software Control2395
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Electrical2398
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Environmental2398
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Mechanical2398
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Installing the Robot2400
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Unpacking2400
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Safety Verification2411
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Coordinate File2413
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Teaching Stations2417
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Robot Parameter File2423
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Shipping and Storage2426
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NVS-Ram Test2428
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Galil and I/O Test2429
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Encoder Read Test2431
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Limit and Home Test2431
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Servo Test2432
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Home Test and Set2433
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R-Home Test and Set2434
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Scaling Factor Test2435
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Step #7 (Servo Test)2441
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Common Problems2446
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Troubleshooting2446
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Aftermath Analysis2460
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