Lintec MC-7000D Series Instruction Manual

High Response
Mass Flow Controller for Device Net™
Instruction Manual
MC-7000D Series

Safety Precautions

Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereinafter, the fluid used is referred as "gas" or "fluid").
(2) DO NOT apply any corrosive fluid to materials exposed to gas. Corrosion may
cause gas to leak into the atmosphere. Check the gas type to be used in advance
(3) This device is not designed as an explosion proof structure. DO NOT use this device in a
place where explosion-proof structures are required. Doing so may cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1) Observe the precautions listed in the WARNING (above).
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) This device is not designed to handle hot swap. Please avoid attaching and removing the
power supply connector and interface connector with the power switched on. Attachment
and/or removal with the power on may result in failure of the device.
(6) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while moving
or setting the device.
(7) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).

1. Introduction

This manual explains basic operation of the MC-7000D series (Hereinafter referred
as "MFC"). MFC is equipped with a network interface, and can be operated by
connecting to a network environment of Device Net ™.
Since MFC is a slave device, please prepare a master device of Device Net ™
network interface.
The device profile follows the MFC profile in ODVA specification.
Please go through the ODVA specification and MC-7000D device profile manual
for proper use.

2. Summary

The MFC is high performance mass flow controller for gas using high response
thermal flow sensor and high response piezoelectric valve. Valve operation mode
is normally closed type. Also, MFC interface employs Device Net™ network, so
MFC is compatible with other makers.

3. Features

The MFC is the following features.
(1) LINTEC's proprietary ambient temperature compensation type flow sensor is carried.
· Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
· The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
· Steady temperature distribution of sensor and high-speed response.
(2) Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
· By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) MFC employs Device Net™ network protocol.
(4) Small dead space structure using a diaphragm valve.
(5) Single power supply 24VDC (Recommended).
(6) Superior corrosion resistant sealing materials make maintenance easy. Metal seals (Au).
(7) Particle-free structure.
(8) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(9) Based on RoHS.

4. Structure

The MFC consists of sensors, valves, and a microcomputer for signal processing.
A digital PID feedback control system controls the valve action so that flow rate
output from the sensor agrees with flow rate setting value.
LN0575E2202A1

5. Specification / Dimensions

(1) Specification
Name
Model
Flow rate range
(N2 conversion)
Valve operation mode
Internal surface treatment
Minimum controllable flow rate
Accuracy
Repeatability
Response time
Operating differential
pressure
Maximum operating pressure
Withstanding pressure
.
Operating temperature &
Humidity
Storage temperature &
Humidity
Leak integrity
Mounting direction
Wetted materials
Seal Materials
Actuator
Fittings
Power supply
Digital interface
Weight
Note1) Using 24VDC power supply for high response.
· Connect the MFC to the frame ground.
(2) Dimensions
MC-7100D, MC-7200D (6.35VCR, 106mm)
MC-7100D, MC-7200D (1.125W-Seal, 79.8mm)
Mass Flow Controller
MC-7100D
10 SCCM ~5 SLM
Normally closed
Precision polishing (LEP)
2%F.S.
100%F.S. to 25%F.S. ±1.0%S.P.
25%F.S. to 2%F.S. ±0.25%F.S.
±0.2%F.S.
0.2 second (Typical)
50 to 300kPa
300kPa(G)
1MPa(G)
5 to 50 ºC·0 to 80%RH (Condensation should be avoided)
0 to 60 ºC·0 to 80%RH (Condensation should be avoided)
-11
Less than 1×10
Free
Stainless steel 316L, PCTFE, PTFE, Au
Au
Piezoelectric actuator
6.35VCR (106mm, 124mm)
1.125 W-Seal (79.8mm), 1.125 W-Seal (92mm)
24VDC (Recommended) (Note1)
Device Net™
Approx. 1kg
MSD LSD RATE
DeviceNet
Connector
28.6 NET MOD
ZERO ADJ.
STATUS
14.3
17.9 6.9 71
77.4
28.6
106
±0.5
38
MSD LSD RATE
DeviceNet
Connector
28.6 NET MOD
ZERO ADJ.
STATUS
14.3
17.9 6.9 71
79.8 ±0.3
28.6
38
INLET
MC-7200D
~20SLM
100 to 300kPa (~10SLM)
200 to 300kPa (~20SLM)
3
Pa · m /sec (He)
2×M4 Depth 5mm
4ｘφ4.4
OUTLET
2×M4 Depth 5mm