Lintec MC-3100 Series Instruction Manual

Mass Flow Controller
Instruction Manual
MC-3100/3200L Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called "gas" or "fluid").
(2) DO NOT apply any fluids corrosive to materials exposed to gas. Corrosion may
cause fluid to leak into the atmosphere. Check the gas type to be used in advance.
(3) This device is not designed as an explosion proof structure. DO NOT use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1) Observe the precautions listed in the WARNING (above)
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in failure
of the device.
(6) While a power supply is applied to MFC, ±15VDC must be applied
simultaneously. If only +15VDC or -15VDC is applied, electronic circuits will
become unstable and it may cause a malfunction of MFC.
(7) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-3100/3200L series (Hereafter, it is
called "MFC"). Please read through this manual and other separate volumes (Digital
Interface Manual, Special Function Manual, Command Chart) carefully to
familiarize yourself with the features of this device.
2. Summary
The MFC is high performance mass flow controller for gas using thermal flow
sensor and high response piezoelectric valve. In the MFC model, MO type and
MC type are available depending on the kind of valve operation mode.
3. Features
The MFC is the following features.
(1) LINTEC's proprietary ambient temperature compensation type flow sensor is carried.
· Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
· The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
· Steady temperature distribution of sensor and high-speed response.
(2) Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried
· High functionality
· By setting of device number (address), multiple devices can be controlled
through a single interface
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function
(3) Universal digital Interface (RS-485)
(4) Small dead space structure using a diaphragm valve
(5) Superior corrosion resistant sealing materials make maintenance easy. Metal
seals (Au)
(6) Particle-free structure
(7) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field
(8) Based on RoHS
4. Structure
The MFC consists of sensors, bypass, valves, and a microcomputer for signal
processing. A digital PID feedback control system controls the valve action so that
flow rate output from the sensor agrees with flow rate setting value.
LN0324E2103F0 5. Specification / Dimensions
(1) Specification
Name
Model
Standard flow rate in
nitrogen
Valve operation mode
Internal surface treatment
Minimum controllable flow rate
Analog flow rate output signal
Analog flow rate setting signal
Accuracy
Repeatability
Response time
Operating differential
pressure
Maximum operating
pressure (Note1)
Withstanding pressure
Operating temperature &
Humidity
Temperature
coefficient
(Standard
Temp.25 ºC)
Storage temperature &
Humidity
Leak integrity
Mounting direction
Wetted materials
Seal Materials
Actuator
Fittings
Power supply
Digital interface
Weight
Note1)There is a possibility that the gas does not flow in case of the gas pressure of more than
490kPa was used on the MC-3252L- MO /NO.
(2) Dimensions
Mass Flow Controller
MC-3102L MC-3202L
5 SCCM to 5 SLM ~ 20SLM
Normally open valve / Normally closed valve
No treatment / Precision polishing (LEP)
2%F.S.
Proportional to flow rate 0 to 5VDC
100%F.S. to 25%F.S. ±1.0%S.P.
25%F.S. to 2%F.S. ±0.25%F.S.
±0.2%F.S.
1 second (Typical)
Normally open valve
50 to 300kPa (~ 10SLM)
100 to 300kPa (10 to 20SLM)
50 to 300kPa
Normally closed valve
100 to 300kPa (~ 10SLM)
200 to 300kPa (10 to 20SLM)
300kPa(G)
1MPa(G)
5 to 50 ºC·0 to 80%RH (Condensation should be avoided)
Zero ±0.02%F.S./ºC
Span ±0.02%F.S./ ºC ±0.04%F.S./ ºC
0 to 60 ºC·0 to 80%RH (Condensation should be avoided)
Less than 1×10
Stainless steel 316L, PCTFE, Au
Piezoelectric actuator
6.35VCR (106, 124)
1.125W-Seal (79.8mm, 92mm) 1.5W-Seal (79.8mm, 92mm)
+15V DC±3%: 100mA
RS-485 (2-wire)
Approx. 1kg
MC-3252L
~ 50SLM
100 to 300kPa
(~ 30SLM)
150 to 300kPa
(~ 50SLM)
±0.08%F.S./ ºC
-11 3
Pa · m /sec (He)
Free
Au
6.35UJR (106, 124)
-15VDC±3%: 50mA