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Seiko MT-17E-003-D Instruction Manual

Turbomolecular pump
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MT-17E-003-D
STP-H600/H1000 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Third Edition-d)
Read through the Safety Precautions of this Manual
carefully before using the STP pump.
Keep this Manual in a place where you can quickly access
it at any time.
Seiko Instruments Inc.
Dec. 2001
Copyright 2001 Seiko Instruments Inc. All rights reserved. Printed in Japan.

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Summary of Contents for Seiko MT-17E-003-D

  • Page 1 Read through the Safety Precautions of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Seiko Instruments Inc. Dec. 2001 Copyright 2001 Seiko Instruments Inc. All rights reserved. Printed in Japan.

  • Page 2: Safety Precautions

    Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by the Seiko Instruments, the protection provided by the equipment may be impaired.
  • Page 3 WARNING ◇ Check the properties of the gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety precautions and/or recommendations instructed by the gas supplier. Take appropriate measures specified in the MSDS to prevent a problem if you use any corrosive, reactive, flammable or other system gas.
  • Page 4 If the model names are different, they may not be used even when performing adjustment. In both cases, contact Seiko Instruments. ◇ Use the STP connection cable and the motor connection cable that have a label affixed...
  • Page 5 CAUTION ◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage. ◇ NEVER turn OFF the primary power (DO NOT switch the breaker “OFF”) while the STP pump is rotating. Doing so may result in product damage. ◇...
  • Page 6 Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and...
  • Page 7 No part of this manual may be reproduced in any form by any means written permission from Seiko Instruments. Seiko Instruments pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice.

  • Page 8: Limited Warranty

    LIMITED WARRANTY This WARRANTY applies to the customer to whom Seiko Instruments has delivered this product. 1. WARRANTY PERIOD: Seiko Instruments warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Seiko Instruments.
  • Page 9 STP-H600/H1000 Series Instruction Manual indication (“WARNING” message) on the LCD display; 16) Overhaul and replacement of maintenance parts; 4. SPARE PARTS: ● Fuse and air cooling fan for control unit ● Touch down bearing ● Heater...

  • Page 10: Table Of Contents

    TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY 1 Precautions for Safe Operation of the STP Pump ... 1-1 Usable Gases... 1-1 Maintenance Precautions... 1-1 Inspection Precautions... 1-2 Labels... 1-2 2 Unpacking ... 2-1 Unpacking the STP Pump... 2-1 Unpacking the STP Control Unit ... 2-2 3 Installation of the STP pump...
  • Page 11 5.5.4 Starting the STP Pump after Stopping ... 5-3 5.5.5 Powering OFF ... 5-4 Remote Operation... 5-5 5.6.1 Powering ON... 5-5 5.6.2 Starting/Stopping the STP Pump ... 5-5 5.6.3 Starting the STP Pump After Stopping... 5-5 5.6.4 Powering OFF ... 5-6 6 Safety Functions When an Abnormality/Error Occurs ...
  • Page 12 12 Maintenance and Inspection ... 12-1 12.1 Replacing the Internal Battery ... 12-1 12.2 Inspecting the Air Cooling Fan ... 12-1 12.3 Replacing the Fuses ... 12-2 12.4 Inspecting for Deposit ... 12-3 12.5 Overhaul... 12-4 12.6 Transporting for Repair or Overhaul ... 12-5 13 Storage ...
  • Page 13 Table 3.1 Tightening torque of bolt ... 3-8 Table 3.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange ... 3-9 Table 3.3 Number of Claw Clamps by Size of Flange ... 3-10 Table 4.1 Connecting Primary Power Cable... 4-15 Table 5.1 Starting/Stopping the STP Pump During Remote Operation...
  • Page 14 Figure 2.1 Example of Lifting the STP Pump... 2-1 Figure 3.1 Configuration of the STP Pump ... 3-2 Figure 3.2 Installation of the STP Pump to the Vacuum Equipment... 3-5 Figure 3.3 STP Pump Installation Positions... 3-7 Figure 3.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump .. 3-7 Figure 3.5 Example of securing the STP pump (When securing the inlet port with bolts)...

  • Page 15: Precautions For Safe Operation Of The Stp Pump

    1 Precautions for Safe Operation of the STP Pump Usable Gases Chlorine or fluorine system gases can be used in chemical specific pumps (STP- H600C/H1000C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki. WARNING ◇...

  • Page 16: Inspection Precautions

    Inspection Precautions Perform inspections of the STP pump and the STP control unit (check of the air cooling fan and reset of the "BATTERY NG" lamp), following Section 12, "Maintenance and Inspection" When performing inspections (check of the air cooling fan and reset of the "BATTERY NG" lamp), always turn OFF the primary power (switch the breaker "OFF") before opening the front panel, then turn ON the primary power again (switch the breaker "ON").
  • Page 17 STP-H600/H1000 Series Instruction Manual (3) Heavy Product Caution Label This label is affixed to the product with a mass of 20 kg or more. Follow the precautions of Section 2, "Unpacking" so as not to cause any accident during handling. (4) STP Pump Installation Warning Label This label describes installation of the STP pump.
  • Page 18 (6) Connector Caution Label ◇ This label describes lock of the connector. ◇ This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. (7) STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit. (8) High Voltage Device Caution Label The STP control unit is equipped with a high voltage device.
  • Page 19 STP-H600/H1000 Series Instruction Manual (9) Battery Instruction Label This label instructs operators to replace batteries once a year. The next replacement date of batteries is specified upon delivery of the STP pump. Record the next replacement date (after one year) of batteries in the blank of the label when replacing them.
  • Page 20 This label describes precautions for performing the tuning. Tuning should be performed by Seiko Seiki trained or authorized personnel only. STP-H600/H1000 Series Instruction Manual 注意 浮上調整を行う場合は弊社 のトレーニングまたは許可を 受けてください。 CAUTION Tuning must be performed by Seiko Instruments Inc. or authorized personnel only.

  • Page 21: Unpacking

    2 Unpacking Unpacking the STP Pump Check the following before unpacking the STP pump. Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki. Check the contents of the package. See Section 16.3, "Accessories."...

  • Page 22: Unpacking The Stp Control Unit

    Unpacking the STP Control Unit Check the following before unpacking the STP control unit. Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki. Check the contents of the package. See Section 16.3, "Accessories."...

  • Page 23: Installation Of The Stp Pump

    3 Installation of the STP pump Name and Function of Each Part (1) Inlet Port Flange (ICF Connected to the vacuum equipment (at the high vacuum side). CAUTION ◇ A splinter shield is attached to the inlet port flange to prevent foreign particles from falling into the STP pump.

  • Page 24: Figure 3.1 Configuration Of The Stp Pump

    ) Inlet Port Flange ) Temperature Sensor Connector Optional Accessory ) Cooling Water Port ) STP Connector ) Motor Connector ) Ground Terminal ) Emergency Vent Valve Figure 3.1 Configuration of the STP Pump STP-H600/H1000 Series Instruction Manual ) Outlet Port Flange ) Cooling Water Port ) Purge Port...

  • Page 25: Precautions Before Installation

    Chlorine or fluorine system gases can be used in chemical specific pumps (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Seiko Instruments. ◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP-H600/STP-H1000 pump or other models without anti-corrosion treatment (see Section 1.1, "Usable Gases").

  • Page 26: Installation Area

    3.2.2 Installation Area Leave enough space for the following in addition to that for the STP pump: Space for maintenance and inspection · Space for connecting cables · ◇ The minimum bending radius of the STP connection cable is 150 mm (see Figure 16.1, "External Appearance of the STP Pump"...

  • Page 27: How To Install The Stp Pump

    Chlorine or fluorine system gases can be used in chemical specific pumps (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Instruments. ◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP-H600/H1000 pump or other models without anti-corrosion treatment (see Section 1.1, "Usable Gases").

  • Page 28: Cleaning The Seal

    NOTICE ◇ The STP pump cannot be used with the outlet port open to atmospheric air. Always use the auxiliary pump (dry pump or similar one). ◇ Use an auxiliary pump with a pumping speed of 240 L/min or more. ◇...

  • Page 29: Stp Pump Installation Positions

    STP-H600/H1000 Series Instruction Manual 3.3.2 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, upside-down and slanted. Upside-down Horizontal STP Pump Slanted Vertical Figure 3.3 STP Pump Installation Positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.

  • Page 30: How To Secure The Stp Pump

    When securing the base, use stainless steel securing bolts with a tensile strength class is 70 or more. ◇ When using any securing method other than that specified in this manual, contact Seiko Instruments. STP-H600/H1000 Series Instruction Manual with bolts Refer to “1) When securing the inlet port with bolts”...

  • Page 31: Table 3.2 Maximum Torque Predicted And Recommended Securing Bolt For Inlet Port Flange

    When securing the inlet port with bolts Refer to Table 3.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the boltholes of the size specified in the Inlet Port Flange Standard. Secure the base with all 8 screw-holes for legs or all 8 attached legs.

  • Page 32: Table 3.3 Number Of Claw Clamps By Size Of Flange

    When securing the inlet port flange with claw clamps Refer to Table 3.2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with all 8 screw-holes for legs or all 8 attached legs.
  • Page 33 When installing the damper in the inlet port flange Refer to Table 3.2 for rotational torque. In case of using a damper, secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow “CAUTION” on page 3-8 about legs and bolts for securing the base.

  • Page 34: Vacuum Piping

    3.3.4 Vacuum Piping ◇ DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. ◇ Depending upon the type of the auxiliary pump used, atmospheric air may reverse flow into the STP pump when the auxiliary pump stops.
  • Page 35 (1) Piping at the Inlet Port Flange Attach the inlet port to the high vacuum side. Maximum working pressure (Pressure at the inlet port flange applicable continuously) 67 Pa [0.5 Torr] (for water cooled) 5.3 Pa [4×10 Torr] (for air cooled) 0.9 Pa [7×10 Torr] (for natural air cooled) 13 Pa [0.1 Torr] (when TMS unit is used)

  • Page 36: Connecting The Emergency Vent. Valve

    3.3.5 Connecting the Emergency Vent. Valve The emergency vent. valve stops the STP pump by introducing gases if any abnormality/error occurs in the STP pump. Connect the emergency vent. valve (contained in the attached accessories) to the purge port as shown in Figure 3.7. Note that the side of the emergency vent. valve without filter is connected to the purge port.

  • Page 37: Connecting The Ground Cable

    Filter Side KF10 Dry N Gas or Other Purge Port Figure 3.8 Connecting the Purge Port and Emergency Vent. Valve 3.3.7 Connecting the Ground Cable Connect the ground cable (yellow/green) between the ground terminal of the STP pump and the ground terminal of the STP control unit. When the resistance between the ground terminals is lower than 0.1 W, it is not necessary to connect the ground cable after installing the STP pump and the STP control unit.

  • Page 38: Installation Of The Stp Control Unit

    4 Installation of the STP Control Unit Name and Function of Each Part 4.1.1 Front Panel (1) "POWER ON/OFF" Switch (illuminated alternate push button switch, green LED) Press this switch to power ON/OFF the STP pump (MANUAL operation only). The POWER ON/OFF built-in lamp lights when the power is ON. (2) "MOTOR START"...
  • Page 39 (8) "OVER TEMPERATURE" Lamp (red LED) Lights when any of the following abnormalities occurs: When the motor or electromagnet overheats (110 ℃ or higher). When the STP connection cable is not connected. (9) "BATTERY OPERATION" Lamp (red LED) Lights while the power is being supplied from the battery to the STP pump during a power failure.

  • Page 40: Figure 4.1 Stp Control Unit Front Panel

    STP-H600/H1000 Series Instruction Manual (12) (10) (11) Figure 4.1 STP Control Unit Front Panel...

  • Page 41: Rear Panel

    4.1.2 Rear Panel CAUTION ◇ A hazardous live voltage may exist at connector/terminal that marked DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to terminal, always power OFF the STP pump (Switch the breaker "OFF"). (13) AC POWER Terminal Block (TB1) A maximum voltage : Equal to the input voltage of this terminal block.

  • Page 42: Figure 4.2 Stp Control Unit Rear Panel

    (22) START/STOP TB6 Terminal Block A maximum voltage : Equal to the input voltage of this terminal block. (MAX 250VAC) For remote control. For details concerning remote control terminal blocks (19) to (22), see Section 8, "Remote Input/Output Signal Terminal Blocks." (23) "MANUAL/REMOTE"...

  • Page 43: Inside Of The Stp Control Unit

    4.1.3 Inside of the STP Control Unit (25) Inverter This is a three-phase transistor-inverter which starts/stops the STP pump. (26) Fuses 3 to 9, 11, and 12 These fuses protect as follows: F3 and 4: 250 V, 5 A (for control power protection) F5 to 7 : 250 V, 10 A, arc-extinguishing fuses (for I/O TB2 terminal block power optional drive protection) F8 and 9: 250 V, 10 A, arc-extinguishing fuses...

  • Page 44: Figure 4.3 Inside Of The Stp Control Unit

    STP-H600/H1000 Series Instruction Manual (25) (30) (26) (27) (28) (29) (30) (32) (31) Figure 4.3 Inside of the STP Control Unit...

  • Page 45: Precautions Before Installation

    Precautions Before Installation 4.2.1 Operating Environment Install the STP control unit in a place meeting the following requirements: Ambient Temperature Ambient Relative Humidity Environment Installation Condition STP-H600/H1000 Series Instruction Manual 0 ℃ to 40 ℃ 30 to 95% (no dew condensing) A place free of exposure to direct sunlight.

  • Page 46: Installation Area

    4.2.2 Installation Area Leave enough space for the following in addition to that for the STP control unit. · Space for maintenance and inspection · Space for inlet and outlet of air for cooling - Top and side: - Bottom: ·...

  • Page 47: Attaching The Stp Control Unit Front Panel To A Rack

    Attaching the STP Control Unit Front Panel to a Rack The dimensions of the STP control unit front panel conform to JIS. Therefore, this panel can be attached to any type of commercially-available racks. Attach the front panel unit to the rack according to the following steps: 1) When attaching the front panel to a rack: Attach the front panel to a rack using the screw holes for the front panel.

  • Page 48: Cable Connection

    Cable Connection 4.4.1 Name and Dimensions of Each Cable STP Control Unit Side Ground Terminal ( Crimp-Type Terminal Lug Yellow / Green Wire ≦ 20m : 4mm ＞ 20m : 10mm 24.5 Figure 4.6 External Dimensions of Each Cable : JIS STP-H600/H1000 Series Instruction Manual Ground Terminal ( Crimp-Type Terminal Lug (M4...

  • Page 49: Figure 4.7 External Dimensions Of He Power Cable

    STP Control Unit Side Crimp-Type Terminal Lug (M4 STP Control Unit Side Crimp-Type Terminal Lug (M4 Figure 4.7 External Dimensions of he Power Cable : JIS : Recognized model to UL3101-1 standard has power cable with the plug. STP-H600/H1000 Series Instruction Manual ×...

  • Page 50: How To Connect The Cables

    4.4.2 How to Connect the Cables CAUTION ◇ When connecting/disconnecting cables, always power OFF the STP pump (switch the breaker "OFF"). Failure to do so may result in electric shock or product damage. ◇ With each connector, align the position of the guide key and insert the pin vertically so as not to bend it.
  • Page 51 Connecting the STP Connection Cable Connect the socket side of the STP connection cable to the STP connector of the STP pump and connect the pin side to "P.CONNECTOR CON5A" of the STP control unit. CAUTION ◇ Always use the STP pump, STP control unit and the STP connection cables of the same model name, serial number and cable length.

  • Page 52: Table 4.1 Connecting Primary Power Cable

    Connecting Primary Power (Primary Side) Cable Connect power cable to the "AC POWER TB1" on the STP control unit rear panel as shown in Table 4.1. Table 4.1 Connecting Primary Power Cable TB1 Pin No. Cable Color 1 [L(L1)] Brown 2 [N(L2)] Blue 3 [PE(...

  • Page 53: Figure 4.8 How To Secure Primary Power Cable

    STP-H600/H1000 Series Instruction Manual Magnified TB1 Cover Ground Cable for Cover Cable Fitting Tool Primary Power Cable part: Secure using attached screws Figure 4.8 How to Secure Primary Power Cable 4-16...

  • Page 54: How To Start/Stop The Stp Pump

    5 How to Start/Stop the STP Pump CAUTION ◇ NEVER connect or disconnect any cables while the power is ON. ◇ NEVER turn the primary power OFF (switch the breaker "OFF") while the STP pump is in rotation. ◇ DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is in rotation.

  • Page 55: Start Procedures

    Start Procedures Start the auxiliary pump before or simultaneously with start of the STP pump. Open the vacuum valve located at the outlet port flange side after starting the auxiliary pump. NOTICE ◇ DO NOT open the vacuum valve without operating the auxiliary pump. Doing so may cause a reverse flow of oil, which could contaminate the inside of the STP pump.

  • Page 56: Manual Operation

    There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equipment. Manual Operation Slide the "MANUAL/REMOTE" changeover switch on the rear panel to "MANUAL." 5.5.1 Powering ON Switch ON the breaker on the rear panel (to prevent incorrect operation, a metal fitting is attached to the breaker.

  • Page 57: Powering Off

    5.5.5 Powering OFF When all of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE" lamps are off: Press the "POWER ON/OFF" switch. The switch pops up into the unlocked position, the magnetic bearing stops, and the rotor lands (POWER OFF state). The "POWER ON/OFF" switch built-in lamp goes out. When one of the "ACCELERATION,"...

  • Page 58: Remote Operation

    Remote Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit rear panel to "REMOTE." 5.6.1 Powering ON Switch ON the breaker on the STP control unit rear panel, (to prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the metal fitting and secure it ).

  • Page 59: Powering Off

    5.6.4 Powering OFF When all three ("ACCELERATION", "NORMAL OPERATION" and "BRAKE") lamps are off, switch the breaker OFF on the rear panel. The magnetic bearing stops, and the rotor lands. The POWER ON/OFF switch built-in lamp goes out. CAUTION ◇ NEVER switch OFF the breaker on the rear panel while any of the "ACCELERATION,"...

  • Page 60: Safety Functions When An Abnormality/Error Occurs

    6 Safety Functions When an Abnormality/Error Occurs The STP pump is provided with safety functions for various abnormalities/errors (See Tables 6.3 and 6.4, "Safety Functions"). For troubleshooting, see Section 6.2, "Restarting After Any Safely Function Operates" and Section 15, "Troubleshooting." Safety Functions 6.1.1 Power Failure <Operation at a Power Failure>...

  • Page 61: Table 6.1 State Of Lamps And Remote Output Signal At Power Failure

    <Operation after a Power Recovery> MANUAL Operation The STP pump continues decelerating even after a power recovery. Press the "START" switch to reaccelerate the STP pump. REMOTE Operation When the START signal is input to the REMOTE input terminal at a ·...

  • Page 62: Abnormal State Of Magnetic Bearing

    6.1.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor falls on the touch down bearing. Simultaneously, the emergency vent.

  • Page 63: Abnormal Battery Voltage

    6.1.8 Abnormal Battery Voltage When battery capacity became less than operating limit value or there was connection mistake, there may be the thing that battery abnormality is detected. When battery abnormality was detected, the STP pump does not operate even if the STP pump START operation is performed.

  • Page 64: Restarting After Any Safety Function Operates

    Restarting after Any Safety Function Operates In case of a power failure: Establish a sequence so that power can be supplied to the STP control unit immediately after a power recovery. In case the "FAILURE" lamp lights due to an overload of the inverter (the STP pump continues rotating by inertia: [FREE RUN state]): <MANUAL OPERATION>...
  • Page 65 STP-H600/H1000 Series Instruction Manual Other Cases After the STP pump stops thoroughly, power OFF, switch the breaker "OFF" and remove the cause of the abnormality/error. Then, restart the STP pump and check if it operates correctly. NOTICE ◇ For probable causes and troubleshooting, See Section 15, "Troubleshooting."...

  • Page 66: Operation Of The Emergency Vent. Valve

    Operation of the Emergency Vent. Valve The emergency vent. valve is opened immediately after an abnormality/error in the magnetic bearing, excessive vibration or any other abnormality/error is found. Gases (dry gases or other) are introduced through the emergency vent. valve into the STP pump. Attach the emergency vent.

  • Page 67: Table 6.3 Safety Functions

    Abnormality Operation state of safety /Error functions Power failure Failure time: 2 seconds or more (for details, refer to Section 6.1.1, "Power Failure"). Abnormal Rotor descends onto the magnetic touch down bearing. bearing Excessive Rotor vibration: vibration 100 mm p-p or more. Overload of Current of more than 40A inverter...
  • Page 68 Abnormality Operation state of safety /Error functions Overheating Temperature of the STP inside the pump motor: 110 ℃ or STP pump more Overheating 90℃ or more in the STP inside the control unit and heat sink. STP control unit Rotational speed of the STP Overspeed pump:37,500 rpm or more.

  • Page 69: Gas Suction, Cooling And Baking The Stp Pump

    7 Gas Suction, Cooling and Baking the STP Pump Gas Suction WARNING ◇ When sucking gases, they may remain in the STP pump. Introduce a purge gas and then exhaust all gasses. Residual gases in the STP pump may cause an accident when the STP pump is removed.

  • Page 70: Cooling The Stp Pump

    Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When sucking gases, cool the STP pump in accordance with the operating pressure range. Also, when performing baking, always cool the STP pump. Select the best one which fits your vacuum equipment. 7.2.1 Water Cooling Method Connect the cooling water pipe to the cooling water port in accordance with Figure 7.1.

  • Page 71: Air Cooling Method

    7.2.2 Air Cooling Method When water cooling is not available, an air cooling unit (optional accessory) can be used. Follow the steps below: Remove the water cooling unit (it is attached with the four M8 Attach the air cooling unit using screw holes for the water cooling unit. CAUTION ◇...

  • Page 72: Baking The Stp Pump

    Baking the STP Pump To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump. WARNING ◇ The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION ◇...

  • Page 73: Table 7.1 Attaching Positions Of The Cooling Unit And Baking Heater

    Cooling Water Port Water Cooling Unit (Standard Accessory): Used when water cooled Table 7.1 Attaching Positions of the Cooling Unit and Baking Heater STP-H600/H1000 Series Instruction Manual ・警告 高温部 やけどします。 触らないでく ださい。 Cooling Water Port Air Cooling Unit (Optional Accessory): Used when air cooled ・...

  • Page 74: Interlocking The Stp Pump Operation With Baking

    7.3.2 Interlocking the STP Pump Operation with Baking Follow the steps below to interlock the STP pump operation with baking (read through Section 8, " Remote Input/Output Signal Terminal Blocks," then start operation). CAUTION ◇ Check the rated voltage of the baking heater before use. ◇...

  • Page 75: Remote Input/Output Signal Terminal Blocks

    8 Remote Input/Output Signal Terminal Blocks I/O TB2 Terminal Block This is a terminal block for a remote output signal. Use it in accordance with Table 8.1 and Figure 8.1. The terminal block functions in both the MANUAL and REMOTE operations. The screw for the terminal is M3 Five abbreviations are used in the following tables: N.O :Normal Open...
  • Page 76 Terminal N.O OUT POW ER N.O OUT (10) ALARM OUT (11) (12) (14) NORM OUT (13) (16) (15) (18) POW ER (17) N.O OUT STP-H600/H1000 Series Instruction Manual Description Terminal for connecting the air cooling unit. The voltage input to AC. POWER terminal ((19)-(20)) is output to this terminal when the STP pump is in acceleration or rated operation.

  • Page 77: Figure 8.1 I/O Tb2 Remote Output Signal Terminal Block

    I/O TB2 : Remote Output Signal Terminal Block Fuse F5 250 V AC 10A Fuse F7 250 V AC 10A Fuse F6 250 V AC 10A CR10 Figure 8.1 I/O TB2 Remote Output Signal Terminal Block STP-H600/H1000 Series Instruction Manual :Normal Open :Normal Close :Common...

  • Page 78: Table 8.2 Rated Contacts For Relays Cr1 To 4, Cr7, Cr8 And Cr10

    Table 8.2 shows rated contacts for relays CR1 to 4, CR7, and CR10 (See Figure 8.1) and CR8 (See Figure 8.4). Table 8.2 Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10 Rated Load Rated Current Maximum Contact Point Voltage Maximum Contact Point Current...

  • Page 79: Figure 8.2 Example Of Connecting I/O Tb2 R. Pump Terminal

    Relay R.PUMP NO.OUT Figure 8.2 Example of Connecting I/O TB2 R. Pump Terminal CAUTION ◇ When connecting optional power (over 25 V AC or over 60 V DC) to terminals (1) to (6), (19) and (20), secure the remote cable using the attached cable fitting tool (see Figure 8.3).

  • Page 80: Dc I/O Tb3 Terminal Block

    DC I/O TB3 Terminal Block This is a terminal block for a remote input/output signal. Use it in accordance with Table 8.4 and Figure 8.4. Terminals excluding the HEATING terminal function in either case of the REMOTE/MANUAL operation. The screw for the terminal is M3 Four abbreviations are used in the following tables: N.O :Normal Open :Input Terminal OUT :Output Terminal.

  • Page 81: Figure 8.4 Dc I/O Tb3 Remote Input Signal Terminal Block

    DC I/O TB3 : Remote Input Signal Terminal Block +12V Ω Ω Ω Ｃ Ｒ ８ NOTICE ◇ Short the circuit between (1)-(3), when the R.P.THER terminal is not used. ◇ Short the circuit between (5)-(7), when the INHIBIT terminal is not used. ◇...

  • Page 82: Start Stop Tb5 Terminal Block

    START STOP TB5 Terminal Block This is a terminal block for a contact type remote input signal. Use it in accordance with Table 8.5 and Figure 8.5 (See Section 5.6.2, "Starting/Stopping the STP Pump"). The terminal block operates only during the REMOTE operation. The screw for the terminal is M4 Three abbreviations are used in the following tables: N.O :Normal Open...

  • Page 83: Start/Stop Tb6 Terminal Block

    START/STOP TB6 Terminal Block This is a terminal block for a voltage type remote input signal. Use it in accordance with Table 8.6 and Figure 8.6 (See Section 5.6.2, “Starting/Stopping the STP Pump"). The terminal block operates only during REMOTE operation. The screw for the terminal is M4 CAUTION ◇...

  • Page 84: Internal Battery

    9 Internal Battery Four batteries (PORTALAC Series Small-Sized Sealed Lead-Acid Batteries, PE12V 2WS : 12V, 2Ah, manufactured by Japan Storage Battery Co., Ltd.) (hereinafter referred to as the internal battery) are inserted into the STP pump for backup during a power failure. These are rechargeable.

  • Page 85: How To Charge The Internal Battery

    Ambient Temperatures( Figure 9.1 Life of the Internal Battery How to Charge the Internal Battery The battery is charged while the power is "ON," regardless of the operation state of the STP pump. After a power failure, charge the battery for approx. 12 times the BATTERY BACKUP time. For example, when the BATTERY BACKUP time is 6 minutes, it takes approx.

  • Page 86: Battery Ng Lamp

    BATTERY NG Lamp If battery capacity became less than operating limit value or there was connection mistake, the "BATTERY NG" lamp on the rear side of the STP control unit front panel (See 9.3, "Life of the Internal Battery)", the "FAILURE" lamp, and the "EMERGENCY OPERATION" lamp on the STP control unit front panel light, and the STP pump does not start.

  • Page 87: How To Replace The Internal Battery

    How to Replace the Internal Battery WARNING ◇ When covering the battery case, be sure not to catch the battery cable in the battery case. Failure to do so may shortcircuit the battery and result in a leakage, production of fire or explosion. CAUTION ◇...

  • Page 88: How To Replace The Battery In The Battery Case

    9.5.2 How to Replace the Battery in the Battery Case Remove front plate (5) from battery case (4) by unscrewing 4 M2 screws. Disconnect battery internal connector (6). Remove inside plate(10) from battery case by unscrewing 4 M2 screws and pull out the battery from the case (it can be pulled out toward you).

  • Page 89: Figure 9.1 How To Replace The Internal Battery

    ・注意 ・ ◇バッテリーは１年毎に交換してく ◇ Change batteries every year ださい。 ◇ Do not use external batteries ◇内部バッテリーと外部バッテリー in combination with internal を同時に使用しないでください。 batteries 次回交換日／ Next exchange date Affix this label to the front panel. Figure 9.1 How to Replace the Internal Battery STP-H600/H1000 Series Instruction Manual STP Control Unit Front Panel Internal Battery Connector...

  • Page 90: How To Dispose Of The Internal Battery

    How to Dispose of the Internal Battery Dispose of or collect worn-out batteries in accordance with the guidelines given by each national and/or local government. If you procure batteries, dispose of them in accordance with the guidelines given by the battery manufacturer. CAUTION ◇...

  • Page 91: External Battery

    10 External Battery CAUTION ◇ DO NOT use (an) external batteries when internal batteries are inserted. Failure to do so may result in product damage or a problem. It could cause a problem, such as product damage. ◇ DO NOT connect batteries in parallel. ◇...

  • Page 92: Installation Of The External Battery

    10.2 Installation of the External Battery CAUTION ◇ Turn OFF the primary power (Switch the breaker "OFF"), before connecting the battery. Failure to do so may result in product damage or a problem due to electric shock or short-circuiting of the internal circuit. ◇...

  • Page 93: How To Charge The External Battery

    10.3 How to Charge the External Battery NOTICE ◇ The battery is charged while the power is "ON," regardless of the operation state of the STP pump. The STP control unit is equipped with a constant voltage (55 V) circuit and a constant current (0.3 A) circuit for charging the battery.

  • Page 94: Operation Principle Of The Stp Pump

    11 Operation Principle of the STP Pump The STP-H600/H1000 is a series of magnetically-levitated turbomolecular pumps, featuring the following: Oil free Low vibration High reliability The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.

  • Page 95: Figure 11.1 Cross Sectional View Of The Stp Pump

    ) Touch down bearing ) Touch down bearing ) Axial electromagnet ) Axial electromagnet Figure 11.1 Cross Sectional View of the STP Pump STP-H600/H1000 Series Instruction Manual ) Axial sensor 11-2 ) Rotor blade ) Stator blade ) Radial electromagnet ) Radial sensor ) Radial sensor ) Radial electromagnet...

  • Page 96: Maintenance And Inspection

    (See Figure 4.3) inside the STP control unit is operating. Then, turn OFF the primary power (Switch the breaker "OFF") and close the front panel. If the air cooling fan is not operating, contact Seiko Instruments to replace it. NOTICE ◇...

  • Page 97: Replacing The Fuses

    12.3 Replacing the Fuses CAUTION ◇ Remove the probable causes of the blown fuse (Ex. a problem with the remote input signal, etc.) before replacing the fuse. ◇ Always use specified and rated fuses. NOTICE ◇ If fuses are blown frequently even after they are replaced, contact Seiko Instruments.

  • Page 98: Inspecting For Deposit

    Contact with atmospheric air may cause a reaction of the deposit. DO NOT open the STP pump to atmospheric air as much as possible. ◇ Seiko Instruments supplies you the Temperature Management System (TMS) unit to keep the temperature high inside the STP pump and prevent the accumulation of deposit.

  • Page 99: Overhaul

    12.5 Overhaul The recommended maintenance intervals for different process applications are tabulated below: Process Metal Etch Other Etch Processes It is recommended to change the pump rotor after 5 years due to accumulated wear of the protective plating material Other semiconductor process Clean applications (Only vacuum pumping)

  • Page 100: Transporting For Repair Or Overhaul

    STP pump before transport. iii) Specify the type of gases used and handling precautions on the package and return the STP pump to Seiko Instruments. When returning the STP pump to Seiko Instruments, be sure to pack it well to prevent external damage. Use similar or superior packaging material as originally supplied by Seiko Instruments.

  • Page 101: Storage

    13 Storage 13.1 The STP Pump When the STP pump is left unused over the specified period (more than a few months), follow the precautions below: Close the inlet port of the STP pump and vacuum it using an auxiliary pump. Purge dry N gas or dry air from the purge port.

  • Page 102: The Stp Control Unit

    13.2 The STP Control Unit If the STP control unit (including cables) is not used for a long period (more than a few months), follow the precautions below: Remove the internal battery from the STP control unit (see Section 9, "Internal Battery").

  • Page 103: Disposal

    14 Disposal 14.1 The STP Pump Dispose of the STP pump as industrial waste according to the guidelines given by each national and/or local government. WARNING ◇ When disposing of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident when disposing of the STP pump.

  • Page 104: The Battery

    14.3 The Battery Dispose of or collect worn-out batteries in accordance with the guidelines given by each national and/or local government. If you procure batteries, dispose of them in accordance with the guidelines given by the battery manufacturer. CAUTION ◇ Pay attention to short-circuiting or leakage of the battery at their disposal.

  • Page 105: Troubleshooting

    15 Troubleshooting If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures. If you cannot trace it or if the STP pump does not function normally after troubleshooting, fill in the necessary information in the "STP PUMP PROBLEM CHECK SHEET" and fax it to Seiko Seiki.

  • Page 106: Abnormalities When Powering On

    In case the FREE RUN state is not reset after troubleshooting: Check the tachometer on the front panel. If the needle is in the red, it means the STP pump has stopped. Power OFF and switch the breaker "OFF." iii. If the needle is in the black, the STP pump is rotating. Wait for it to enter the red.

  • Page 107: Abnormalities When Performing The Stp Pump Start Operation

    15.3 Abnormalities When Performing The STP Pump Start Operation (When any "Abnormality/Error Warning" lamp lights, see Section 15.5 "When Any Abnormality/Error Warning Lamp Lights.") Table 15.2 Troubleshooting When Performing The STP Pump Start Operation Symptom １ The "ACCELERATION" lamp does not light. 15.4 Abnormalities While the STP Pump is Rotating (When any "Abnormality/Error Warning"...
  • Page 108 Symptom 2 The STP pump (1) Baking temperature stops. (2) Insufficient cooling. (3) Power failure. (4) Over vibration (5) (vibration 100 mm p-p (6) Overheating inside the (7) Improper pressure of (8) Improper pressure of Rotor falls during (1) Failure of the STP operation.

  • Page 109: When Any Abnormality/Error Warning Lamp Lights

    15.5 When Any Abnormality/Error Warning Lamp Lights When any Abnormality/Error Warning lamp lights, check which lamp is being lit and see Table 15.5 for which procedure No. to follow. Then, follow the steps of that procedure No. (shown in Tables 15.6 to 15.8) to remove the problem (for the names and positions of the "Abnormality/Error Warning"...

  • Page 110: Table 15.5 Troubleshooting When Any Of Abnormality/Error Warning Lamp Lights

    Table 15.5 Troubleshooting When Any of Abnormality/Error Warning Lamp Lights PROCEDU Lamp Being Lit RE No. No.1 “OVER TEMPERATURE” “FAILURE” “EMERGENCY OPERATION” No.2 “OVER TEMPERATURE” “FAILURE” No.3 “BATTERY OPERATION” “EMERGENCY OPERATION” No.4 “FAILURE” STP-H600/H1000 Series Instruction Manual Probable Causes (1) Incorrect connection of Connect cables correctly.
  • Page 111 PROCEDU Lamp Being Lit RE No. No.4 “FAILURE” No.5 “EMERGENCY OPERATION” STP-H600/H1000 Series Instruction Manual Probable Causes (3) Overheating inside the STP control unit: 1) Ambient temperature. 1) Set the ambient 2) Insufficient cooling of 2) Remove obstacle from the the STP control unit.
  • Page 112 PROCEDU Lamp Being Lit RE No. No.6 “FAILURE” “BATTERY NG” (inside the front panel) ( “EMERGENCY OPERATION” lamp may light) CAUTION ◇ When checking the " BATTERY NG" lamp, turn OFF the primary power (Switch the breaker "OFF"), then open the front panel. After opening the front panel, turn ON the primary power (Switch the breaker "ON").

  • Page 113: Specifications And Accessories

    16 Specifications and Accessories 16.1 Specifications for the STP Pump Table 16.1 Specifications for the STP Pump Item Inlet port flange Flange size Outlet port flange Pumping speed Compression ratio Ultimate pressure Maximum working When cooled water: pressure When cooled air: Pa (Torr) When cooled natural air:...

  • Page 114: Specifications For The Stp Control Unit

    16.2 16.2 Specifications for the STP Control Unit Table 16.2 Specifications for the STP Control Unit Item Input voltage At start: Input power Under rated operation: Input frequency Input phase Rated current of main breaker Motor drive system Output voltage under rated operation(3-phase) Output frequency under rated operation...
  • Page 115 Item Input/output terminal Input/output cables Safety functions STP-H600/H1000 Series Instruction Manual Specifications · AC POWER TB1 (3 pins) · P.CONNECTOR CON5A (45 pins) · INVERTER OUTPUT CON2A (5 pins) · LEAK VALVE CON8A (8 pins) · I/O TB2 (20 pins) ·...

  • Page 116: Table 16.3 Accessories

    Accessories 16.3 Item STP control unit Primary power cable STP connection cable Motor connection cable Ground cable Inlet port cover Outlet port cover STP connector cover Motor connector cover Rubber foot for lug Emergency vent. valve Emergency vent. valve clamping ring Emergency vent.

  • Page 117: Figure 16.1 External Appearance Of The Stp Pump (Example: Stp-H1000 Series)

    STP-H600/H1000 Series Instruction Manual 147.5 141.5 Ｄ Ｃ Ａ Figure 16.1 External Appearance of the STP Pump (Example: STP-H1000 Series) 16-5...

  • Page 118: Figure 16.2 External Appearance Of The Stp Control Unit

    188.6 Space) (Cable (150) Figure 16.2 External Appearance of the STP Control Unit STP-H600/H1000 Series Instruction Manual 34.5 24.5 16-6 34.5 50 50 50 24.5...

  • Page 119: Figure 16.3 Label Affixing Positions For The Stp Pump

    STP-H600/H1000 Series Instruction Manual Figure 16.3 Label Affixing Positions for the STP Pump 16-7...

  • Page 120: Figure 16.4 Label Affixing Positions For The Stp Control Unit

    caution. with Handle ｋｇ product Heavy CAUTION ・ ・ ・注意 CAUTION L o c k ◇ ◇コネクタは確実に Lock connector ロックしてくださ securely い。 ◇ブレーカＯＮの時 ◇ Do not remove はコネクタを外さ connector while ないでください。 breaker is ON ∼ 240V From viewing arrow A STP- LENGTH Figure 16.4 Label Affixing Positions for the STP Control Unit...
  • Page 121 高温部 やけどします。 触らないでく ださい。 Figure 16.5 Label Affixing Positions for the Special Accessory Figure 16.5 Label Affixing Positions for the Special Accessory STP-H600/H1000 Series Instruction Manual ・警告 ・ WARNING Hot surface Can burn hands Do not touch 16-9 Baking Heater Air Cooling Unit AIR COOLING UNIT VOLTS AC...
  • Page 122 STP PUMP PROBLEM CHECK SHEET Contact your nearest Seiko Seiki’s office shown in the rear cover. To : Company Name Contact Name TEL. Number FAX. Number Address From: Customer Name Person in charge : TEL. Number FAX. Number Address Model Name : Inlet Flange Type : STP- M/C No.
  • Page 123 UNIT CONVERSION TABLE Length 0.01 1x10 0.10 25.4x10 2.54 Mass 1.00x10 1x10 0.454 Pressure Torr 7.50x10 9.81 x 10 1.00x10 10.0 25.4 2.20x10 2.20 kgf/cm 1.02x10 1.36x10 inch 39.4 0.394 39.4x10...
  • Page 124 Sales Office (Japan) Seiko Instruments Inc. Vacuum Innovative Products Sales Department 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN Telephone: <Vacuum Innovative Products Sales Department, Direct> Domestic International Facsimile: Domestic International Manufacturer, Sales Office (Japan) Seiko Instruments Inc. Vacuum Innovative Products Division 4-3-1 Yashiki, Narashino-shi, Chiba 275-0004 JAPAN Telephone: <Vacuum Innovative Products Service Section, Direct>...

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