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MT-17E-003-D
Seiko MT-17E-003-D Manuals
Manuals and User Guides for Seiko MT-17E-003-D. We have
1
Seiko MT-17E-003-D manual available for free PDF download: Instruction Manual
Seiko MT-17E-003-D Instruction Manual (124 pages)
Turbomolecular Pump
Brand:
Seiko
| Category:
Water Pump
| Size: 2.38 MB
Table of Contents
Safety Precautions
2
Limited Warranty
8
Table of Contents
10
1 Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance Precautions
15
Inspection Precautions
16
Labels
16
2 Unpacking
21
Unpacking the STP Pump
21
Figure 2.1 Example of Lifting the STP Pump
21
Unpacking the STP Control Unit
22
3 Installation of the STP Pump
23
Name and Function of each Part
23
Figure 3.1 Configuration of the STP Pump
24
Precautions before Installation
25
Operating Environment
25
Installation Area
26
Bench
26
How to Install the STP Pump
27
Figure 3.2 Installation of the STP Pump to the Vacuum Equipment
27
Cleaning the Seal
28
Figure 3.3 STP Pump Installation Positions
29
Figure 3.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
29
STP Pump Installation Positions
29
How to Secure the STP Pump
30
Table 3.1 Tightening Torque of Bolt
30
Figure 3.5 Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)
31
Table 3.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
31
Table 3.3 Number of Claw Clamps by Size of Flange
32
Vacuum Piping
34
Connecting the Emergency Vent. Valve
36
Connecting the Purge Port
36
Connecting the Ground Cable
37
Figure 3.8 Connecting the Purge Port and Emergency Vent. Valve
37
4 Installation of the STP Control Unit
38
Name and Function of each Part
38
Front Panel
38
Figure 4.1 STP Control Unit Front Panel
40
Rear Panel
41
Figure 4.2 STP Control Unit Rear Panel
42
Inside of the STP Control Unit
43
Figure 4.3 Inside of the STP Control Unit
44
Precautions before Installation
45
Operating Environment
45
Installation Area
46
Figure 4.4 Peripheral Space of the STP Control Unit
46
Attaching the STP Control Unit Front Panel to a Rack
47
Figure 4.5 Example of Securing the STP Control Unit
47
Cable Connection
48
Name and Dimensions of each Cable
48
Figure 4.6 External Dimensions of each Cable
48
Figure 4.7 External Dimensions of He Power Cable
49
How to Connect the Cables
50
Table 4.1 Connecting Primary Power Cable
52
Figure 4.8 How to Secure Primary Power Cable
53
5 How to Start/Stop the STP Pump
54
Before Starting
54
Starting/Stopping Time
54
Start Procedures
55
Stop Procedures
55
Manual Operation
56
Powering on
56
Starting the STP Pump
56
Stopping the STP Pump
56
Starting the STP Pump after Stopping
56
Powering off
57
Remote Operation
58
Powering on
58
Starting/Stopping the STP Pump
58
Starting the STP Pump after Stopping
58
Table 5.1 Starting/Stopping the STP Pump During Remote Operation
58
Powering off
59
6 Safety Functions When an Abnormality/Error Occurs
60
Safety Functions
60
Power Failure
60
Table 6.1 State of Lamps and REMOTE Output Signal at Power Failure
61
Table 6.2 Operation of the STP Pump after Power Recovery
61
Abnormal State of Magnetic Bearing
62
Excessive Vibration
62
Inverter Overload
62
Overheating Inside the STP Pump
62
Overheating Inside the STP Control Unit
62
Overspeed
62
Abnormal Battery Voltage
63
Failure of Brake
63
Restarting after any Safety Function Operates
64
Operation of the Emergency Vent. Valve
66
Table 6.3 Safety Functions
67
7 Gas Suction, Cooling and Baking the STP Pump
69
Gas Suction
69
How to Introduce a Purge Gas
69
Cooling the STP Pump
70
Water Cooling Method
70
Air Cooling Method
71
Baking the STP Pump
72
Attaching a Baking Heater
72
Table 7.1 Attaching Positions of the Cooling Unit and Baking Heater
73
Interlocking the STP Pump Operation with Baking
74
8 Remote Input/Output Signal Terminal Blocks
75
I/O TB2 Terminal Block
75
Table 8.1 I/O TB2 Terminal Block
75
Figure 8.1 I/O TB2 Remote Output Signal Terminal Block
77
Table 8.2 Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10
78
Figure 8.2 Example of Connecting I/O TB2 R. Pump Terminal
79
Figure 8.3 Example of Securing the Remote Cable
79
DC I/O TB3 Terminal Block
80
Table 8.4 DC I/O TB3 Terminal Block
80
Figure 8.4 DC I/O TB3 Remote Input Signal Terminal Block
81
START STOP TB5 Terminal Block
82
Table 8.5 START STOP TB5 Terminal Block
82
Figure 8.5 START STOP TB5 Remote Input Signal Terminal Block
82
START/STOP TB6 Terminal Block
83
Table 8.6 START/STOP TB6 Terminal Block
83
Figure 8.6 START/STOP TB6 Remote Input Signal Terminal Block
83
9 Internal Battery
84
Life of the Internal Battery
84
Allowable Shelf Life of the Internal Battery
84
How to Charge the Internal Battery
85
Figure 9.1 Life of the Internal Battery
85
Figure 9.2 Allowable Shelf Life of the Internal Battery
85
BATTERY NG Lamp
86
How to Replace the Internal Battery
87
How to Replace the Battery Case
87
How to Replace the Battery in the Battery Case
88
Figure 9.1 How to Replace the Internal Battery
89
How to Dispose of the Internal Battery
90
10 External Battery
91
Specifications for the External Battery
91
Table 10.1 Specifications for the External Battery
91
Installation of the External Battery
92
How to Charge the External Battery
93
How to Dispose of the External Battery
93
11 Operation Principle of the STP Pump
94
Figure 11.1 Cross Sectional View of the STP Pump
95
12 Maintenance and Inspection
96
Replacing the Internal Battery
96
Inspecting the Air Cooling Fan
96
Replacing the Fuses
97
Inspecting for Deposit
98
Overhaul
99
Transporting for Repair or Overhaul
100
13 Storage
101
The STP Pump
101
The STP Control Unit
102
Restarting Precautions
102
14 Disposal
103
The STP Pump
103
The STP Control Unit
103
The Battery
104
15 Troubleshooting
105
Troubleshooting Immediately after an Abnormality/Error Occurs
105
Abnormalities When Powering on
106
Table 15.1 Troubleshooting after Powering on
106
Abnormalities When Performing the STP Pump Start Operation
107
Abnormalities While the STP Pump Is Rotating
107
Table 15.2 Troubleshooting When Performing the STP Pump Start Operation
107
Table 15.3 Troubleshooting While the STP Pump Is Rotating
107
When any Abnormality/Error Warning Lamp Lights
109
Table 15.4 Cross Reference of Items of Abnormality Warning Lamps
109
Table 15.5 Troubleshooting When any of Abnormality/Error Warning Lamp Lights
110
16 Specifications and Accessories
113
Specifications for the STP Pump
113
Table 16.1 Specifications for the STP Pump
113
Specifications for the STP Control Unit
114
Table 16.2 Specifications for the STP Control Unit
114
Table 16.3 Accessories
116
Table 16.4 Recommended Spare Parts
116
Figure 16.1 External Appearance of the STP Pump (Example: STP-H1000 Series)
117
Figure 16.2 External Appearance of the STP Control Unit
118
Figure 16.3 Label Affixing Positions for the STP Pump
119
Figure 16.4 Label Affixing Positions for the STP Control Unit
120
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