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QUICK REFERENCE GUIDE
AGILENT TWISTORR 304FS
2. Preparation for Installation
INLET SCREEN
Not supplied with the pump. The screen protects the pump
blades against solid particles.
Always use the appropriate inlet screen according to the
pump flanges as shown in the table.
ISO 100
X3500-68000
ISO 160
X3500-68001
CFF6''
9699302
CFF8''
9699304
MECHANICAL FIXING
Pump can be installed in any position. However do not
operate the pump until it is safely and securely fixed in a
stable position, mounting the inlet flange to the system
flange with a connection capable of withstanding a torque
of 1000 Nm around its axis.
ISO 100/160
4xM10 Claw-Clamps with fixing torque 22Nm
CFF6''
16 screws with fixing Torque 20Nm
CFF 8''
20 screws with fixing torque 20Nm
All inlet flange bolts should be retightened once the system
is under vacuum.
Do not install/fix the TMP through its base.
The safety condition in the table must be respected
COOLING REQUIREMENTS
TwisTorr 304FS can be water cooled or air cooled, according
to the pump model. The 304FS with the water cooling option
can also be air cooled but not the other way round.
Temperature requirements:
● Max forced cooling air temperature ≤ 35°C
● Max cooling water temperature ≤ 25°C
For water cooling:
flow of 50 l/hr is mandatory if ambient temperature is
> 35°C or pumping high gas load.
If none of above conditions the air cooling can be used.
CONNECTION TO A FORELINE PUMP
As a backing pump use a dry scroll vacuum pump or a rotary
vane pump from the Agilent catalog.
Minimum requirement is SH110 (Dry)/DS102 (Wet). Backing
pump must have an ultimate pressure of < 5 mbar.
Connect the fore-vacuum line with small-flange components
or threaded hose couplings.
A valve can be also used in between the Turbo foreline and
the backing pump.
ACCESSORIES
A few accessories can be interfaced with turbopump and
controller:
Vent valve: different option available according to the
controller type, orifice, with or without delay time and N.O.
or N.C. (see paragraph).
Purge: to be used in presence of heavy gases or Oxygen.
Wide 10 and 20 SCCM purge valves selection range is
available (see paragraph)
Gauges: only for 304AG RACK (contact Customer Care).
Valves: a complete series of valves can be interfaced witht
the 304FS for a full system compatibility. Check that the
accessories are well connected and fixed properly and that
the vent screw is tightened properly.
3
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