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Plasma I-BEAM RF Series Manual

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I-BEAM RF POWER SUPPLY
MANUAL
ESTABLISHED 2003
1

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  • Page 1 I-BEAM RF POWER SUPPLY MANUAL ESTABLISHED 2003...
  • Page 2 Thank you for purchasing an ion beam source power supply from Plasma Process Group! We want your new source to operate safely. Anyone who installs or operates this equipment should read this publication (and any other manuals) before installing or using the ion beam source, neutralizer and power supply.
  • Page 3 Many issues can be solved over the phone or email. In the event hardware needs to be returned, all equipment, including warranty, returned to Plasma Process Group (PPG) requires a return authorization (RA) number. Our support team will provide a return request form with instructions to start the process.
  • Page 4 Warning Statements This manual uses these symbols to indicate potential hazards. ALERT - This symbol is used for tips and other pointers. WARNING This symbol illustrates a electrical shock hazard. Warning- Risk of Injury to Persons This symbol is used to warn of a heavy lift operation. CAUTION This symbol is used to alert of a potential risk to person or equip- ment.

  • Page 5: Table Of Contents

    Section 2.7: External Generator or Legacy Installation Section 2.8: Preflight Check Section 2.9: Input Power Chapter 3: Specifications Section 3.1: Specifications for I-BEAM RF Series Chapter 4: Operation Section 4.1: Power On Section 4.2: Layout Section 4.3: Mode of Operation for the Source Section 4.4: Adjustments using Keypad Entry...

  • Page 6: Chapter 1: Getting Started

    I-BEAM RF POWER SUPPLY MANUAL Chapter 1: Getting Started Ion beam technology was developed at NASA in the 1960s as a means of producing thrust on spacecraft. Today, ion beam sources are used on vacuum systems for depositing precise thin film coatings of oxides, diamond-like carbon, and other useful materials on optical and mechanical components.
  • Page 7 The RF antenna will then excite free electrons causing ionization of the process gas. A plasma is then created inside the discharge chamber. A plasma is an electrically conductive gas where the density of ions and electrons are approximately equal.

  • Page 8: Section 1.2: Overview

    ±2500 V. The oscillating field will excite free electrons that can ionize the process gas and sustain a plasma discharge (ions and electrons). Ions created in the discharge chamber that drift towards the grids are then accelerated to high velocities with electrostatic potential applied to the grids. The screen grid is biased positive, the accelerator grid is biased negative and the decelerator grid is grounded.
  • Page 9 Electrons from the neutralizer do not recombine with source ions, rather they provide space-charge- neutralization for the downstream plasma. Under normal operation, the neutralizer will emit between 125% to 200% of the measured beam current. In this fashion substrates or targets downstream will not suffer damage due to arcing or surface charging.
  • Page 10 Chapter 1: Getting Started I-BEAM RF POWER SUPPLY MANUAL The source and RFN are both controlled using the I-BEAM power supply. The I-BEAM supply is connected to the source, RFN and it will monitor the source matching network controller. It houses the beam, accel, RF power for the source and power supplies necessary for the RFN.

  • Page 11: Chapter 2: Installation

    I-BEAM RF POWER SUPPLY MANUAL Chapter 2: Installation This chapter will cover the installation of the power supply. Please contact us with any concerns or issues that arise during the installation of the power supply. Please consult the Ion Beam RF Sources Manual for a complete description of the source installation procedure.

  • Page 12: Section 2.2: Unpacking

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.2: Unpacking We take extra care in packaging our equipment for shipment. Please inspect all containers for any shipping damage. Send us a photo of the shipping container if there are any issues. Handle all equipment with care. Personal protection Eye protection should always be worn.

  • Page 13: Section 2.4: Mounting And Air Cooling

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.4: Mounting and Air Cooling The power supply is designed to be installed in a standard 19" equipment rack adjacent to the vacuum system. For safety, the top, bottom, sides and rear should not be accessible while the power is ON and operating. When installed in an equipment rack, it must be supported with rails or slides in the cabinet.

  • Page 14: Section 2.5: Source And Neutralizer Connections

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.5: Source and Neutralizer Connections Connect the RED source cable to the I-BEAM 4 pin SOURCE output connector. Connect the other end of the cable to the source interface kit. This cable provides connections to the source screen (beam) and accelerator grids.
  • Page 15 CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Connect the BLUE neutralizer cable to the I-BEAM 5 pin NEUTRALIZER output connector. Connect the other end of the cable to the RFN matching network. This cable provides the DC bias connections for the RFN's keeper and collector as well as starting relay control.

  • Page 16: Section 2.6: Communication And Switches

    PIN 2 STANDARD PC CONNECTION PIN 7 CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL PIN 3 PIN 8 PIN 2 PIN 9 Section 2.6: Communication and Switches PIN 3 PIN 4 PIN 5 User COM port PIN 5 The USER COM port is designed for remote connections to a RS232 device for remote control and monitoring. Please see Chapter 5 - Remote Control for a complete description of the electrical wiring and commands that can be sent to the I-BEAM via RS232 protocol.
  • Page 17 INSIDE IBEAM POWER SUPPLY END USER RS232 CONNECTIONS CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL 150 1/2w RECEIVE DATA INTERLOCK and REMOTE SWITCH port TRANSMIT DATA The INTERLOCK port is provided so the power supply can be connected into a system for safety. The interlock is SIGNAL GND SIGNAL GND satisfied when it is shorted to ground.

  • Page 18: Section 2.7: External Generator Or Legacy Installation

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.7: External Generator or Legacy Installation I-BEAM power supplies which have an interface box (IBOX) are designed for sources that require an external generator (I-BEAM 701 series) or the installation of the supply into older systems. A complete description of the connections is provided in Appendix A - Legacy Installation.

  • Page 19: Section 2.8: Preflight Check

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.8: Preflight Check Use the illustration below and confirm the cable connections are in place for all of the items. Electrical connection setup for I-BEAM RF series power supplies.

  • Page 20: Section 2.9: Input Power

    CHAPTER 2: Installation I-BEAM RF POWER SUPPLY MANUAL Section 2.9: Input Power The input power requirement is 208VAC, 1ø, 50/60 Hz at 16 Amp. Proper wiring for the power connection is GROUND (green / yellow stripe) and 2 HOT (brown or blue).

  • Page 21: Chapter 3: Specifications

    50 - 1500 V 6 x 30 cm 50 - 500 mA 50 - 1500 V Section 3.1: Specifications for I-BEAM RF Series Size (w x h x d): 19” x 7” x 20” weight: 23.1 kg I-BEAM POWER SUPPLY CONFIGURATIONS MODEL...

  • Page 22: Chapter 4: Operation

    I-BEAM RF POWER SUPPLY MANUAL Chapter 4: Operation With the power supply and ion beam source installed it should now be ready for operation. This chapter will de- scribe nominal operation of the power supply. An overview of the key features and how they relate to source operation are introduced.

  • Page 23: Section 4.3: Mode Of Operation For The Source

    Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Section 4.3: Mode of Operation for the Source Press the MODE button to toggle the operational mode. Excluding special test modes, the power supply can be operated in one of 3 possible modes. These are MANUAL, LOCAL, and REMOTE.

  • Page 24: Section 4.4: Adjustments Using Keypad Entry

    Physically, increasing the RF source forward power increases the rate of ion production in the discharge chamber. This causes a plasma density increase in the discharge chamber, thereby allowing more ions to be extracted, and increasing beam current.
  • Page 25 Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Pressing the MODULE button again and the CONTROL module LED light will turn green. Global parameters can now be entered. If the MODULE button is pressed again, the LED light will loop back to the BEAM module. Adjustments to all the modules, including the control module, are performed at the MAIN DISPLAY.
  • Page 26 Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL The following tables are a listing of the abbreviations for specific modules, the corresponding parameter and description. An acceptable range is provided. The Ion Beam RF Sources Manual should be consulted for typical and safe values.
  • Page 27 Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL NEUTRALIZER MODULE ABBREVIATION PARAMETER DESCRIPTION ACCEPTABLE RANGE Emission The electron emission current from the RFN. 100 mA to maximum current Only adjustable in MANUAL mode, or with E/B Ratio. (model specific) RFN FWD RF forward RF power that controls the emission current.

  • Page 28: Section 4.5: Interface Examples

    Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Section 4.5: Interface Examples The following are examples of how to set target values and other user interface navigation. Example 1: Put the I-BEAM in LOCAL mode and select the RF Power module. •...

  • Page 29: Section 4.6: Beam And Source On/Off

    Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Example 10: Adjust the E/B ratio to 150%. • STEP 1 Press MODULE button until Control module indicator LED is ON. • STEP 2 Select SETUP in the control keys. BEAM I TOL should be displayed. •...

  • Page 30: Section 4.7: Quick Start Sequence

    Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Section 4.7: Quick Start Sequence CAUTION Please consult the Ion Beam RF Sources Manual for installation instructions and operating limitations for each source. The power supply will accept target values that may damage the source. Install the source as described in the Ion Beam RF Sources Manual.
  • Page 31 Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Step 3: Turn on the water cooling. Turn on the cooling water to the source and test the flow switch interlock. Check the flow rate to ensure 1 L/min is achieved. The flow rate will vary with facilities but should not be less than 0.5 L/min. TIP - Best practice is to connect the water flow interlock in series to the power supply interlock.
  • Page 32 Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL TIP - To just test the source, select a beam current of 150 mA, beam voltage of 1000 V and accelerator voltage of 200 V. Step 7: Turn the source on and allow it to warm-up Turn on the source by pressing the SOURCE button.

  • Page 33: Section 4.8: Additional Resources

    Chapter 4: Operation I-BEAM RF POWER SUPPLY MANUAL Step 9: Neutralizer operation When the BEAM button is pressed, the neutralizer emission current will change. If the power supply is in MANUAL mode, the emission current is determined by the settings in the neutralizer module. If the power supply is in LOCAL (or REMOTE) mode, the emission current will adjust to the E/B ratio (emission current to beam current ratio).

  • Page 34: Chapter 5: Remote Control

    I-BEAM RF POWER SUPPLY MANUAL Chapter 5: Remote Control This chapter will provide a description of how the I-BEAM can be controlled remotely using RS232 communica- tions and switches. The I-BEAM communication mode is toggled in the Control module under REMOTE S/N. The 3 possible modes are: DB 9 MALE PIN REMOTE S/B –...
  • Page 35 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL RS232 Commands Commands are sent to the I-BEAM with carriage return <cr>. The I-BEAM will respond with an echo of the command followed by a specific response. If an invalid command is sent, the I-BEAM will respond with a <lf><cr>?<lf><cr><eot>, where <lf>...

  • Page 36: Section 5.2: Rs232 Command Details

    Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Section 5.2: RS232 Command Details The specifics of each command are described below. For these examples, the command contained within the quotes needs to be sent. For example “command<cr>” is to send command followed by carriage return <cr>. Do not send the quotes.
  • Page 37 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Serial command: Description: Set the beam high-pulse voltage. Usage: BL(0-1250)<cr> Example: Send “BP1000<cr>”. The beam high–pulse voltage will be set to 1000 volts Response: <lf><cr>OK<lf><cr><eot> Serial command: Description: Set the beam voltage. Usage: BV(0-1500)<cr>...
  • Page 38 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Serial command: Description: Enable or disable the RFS Power Control Mode. Usage: PC(0 or 1)<cr>. 1 enables, and is the default. 0 disables. Example: Send “PE1<cr>”. The Power control mode is enabled. Response: <lf><cr>OK<lf><cr><eot>...
  • Page 39 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Serial command: Description: Request running conditions (HEX). Usage: RA<cr> Example: Send “RA<cr>”. The current running conditions will be sent back 64 bytes in HEX format for data compression purposes. It is recommended this command should not be sent more than 1 time per second.
  • Page 40 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Serial command: Description: Request running conditions (ASCII). Usage: RC<cr> Example: Send “RC<cr>”. The current running conditions will be sent to the buffer in ASCII format. It is recommended this command should not be sent more than 1 time per second. Response: <lf><cr>_AAAA,_BBBB,_____,_CCCC,_DDDD,_EEEE,_FFFF,_GGGG, __HHH,__III,__JJJ,KLMNO,P,QRST1,<lf><cr><eot>...
  • Page 41 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Serial command: Description: Recall set point (or target) conditions. Usage: RN(0-9)<cr> Example: Send “RN0<cr>”. The current set point (or target) conditions will be returned. Acceptable range is 0 to 9 with 0 as the current conditions and 1 thru 9 as the stored conditions in the I-BEAM memory locations 1 thru 9.

  • Page 42: Section 5.3: Operation Example

    Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL Section 5.3: Operation Example The following is a line-by-line short example of how turn on the beam and monitor its conditions. Each line represents a command sent to the I-BEAM. The time duration between each command line should be a least one (1) second.

  • Page 43: Section 5.4: Remote Switches

    DB 9 MALE PIN PIN 1 PIN 6 Chapter 5: Remote Control I-BEAM RF POWER SUPPLY MANUAL PIN 2 STANDARD PC CONNECTION Section 5.4: Remote Switches PIN 7 PIN 3 PIN 8 PIN 2 For faster control, the source and beam switches can be toggled using remote switches. The remote switch link PIN 9 PIN 3 is provided at the INTERLOCK port located on the rear of the unit (see Chapter 2 - Installation).

  • Page 44: Chapter 6: Troubleshooting

    It is important to be aware of the electrical nature of the ion beam source. Most issues arise from electrical shorting or openings that disrupt proper operation. These issues may not present themselves easily, say with a multi-meter, as it may be a plasma short or an open connection that creates the issue. This chapter is divided into: •...

  • Page 45: Section 6.1: Common Issues And Quick Fixes

    Chapter 6: Troubleshooting I-BEAM RF POWER SUPPLY MANUAL Section 6.1: Common Issues and Quick Fixes This page is a punch list or quick check for common items that may be inhibiting the source from normal operation. They are presented in the order of installation, startup and beam on. Installation •...

  • Page 46: Section 6.2: Power Supply Error Codes

    Output of module 1. Electrical short: Check electrical connections. non fatal is higher than 2. Plasma short: Check the source and feed-through for electrical wire requested. proximity problems or coated insulators. 3. Gas flow is too high: Check gas flow level.
  • Page 47 Beam I dropped beam during operation. below start-detect 2. Momentary RF circuit disturbance - probably a plasma leak: Check for setting gaps between grid assembly and mounting hardware. 3. Tuning Issues: RF power ramped down too far during idle mode (overshot).
  • Page 48 The detect threshold value (START DETECT I) is usually set to 5mA. This means if the beam current drops below 5 mA, error -71- is activated, indicating plasma is no longer present. It is a Fatal alarm, so it turns the ion source off and stops process.

  • Page 49: Section 6.3: Rf Neutralizer (Rfn) Errors

    Chapter 6: Troubleshooting I-BEAM RF POWER SUPPLY MANUAL Section 6.3: RF Neutralizer (RFN) Errors It can be advantageous to view the RFN as it attempts to start. Use a silicon wafer as a mirror if necessary. The table below covers the tuning and starting of the RFN. The possible solutions are presented with the highest probability being first.
  • Page 50 Chapter 6: Troubleshooting I-BEAM RF POWER SUPPLY MANUAL The table below covers the starting and running of the RFN. The possible solutions are presented with the highest probability being first. RFN TROUBLESHOOTING TABLE PROBLEM DESCRIPTION POSSIBLE PROBLEMS AND SOLUTIONS Emission current normal, but 1.

  • Page 51: Section 6.4: Starting The Source

    Step 3. Once START POWER is achieved, the power supply will pulse the beam and accel grids to the BV PULSE setting, and cycle between BV PULSE and BV IDLE. • Step 4. The pulse draws free electrons from the RFN in through the grids, to help start plasma in the discharge chamber. •...

  • Page 52: Section 6.5: Turning On The Beam

    1. Backstreaming electrons gave false plasma detection indication. Increase zero immediately after START DETECT CURRENT setting. accel voltage rises. Source 2. Discharge chamber not installed or plasma ignition was near RF antenna. discharge is dark after beam Inspect source interior for plasma short. is on.

  • Page 53: Section 6.6: Additional Resources

    1. Accel grid is electrically shorted. Check accelerator connections. Look for normal. signs of plasma shorts inside the source, coated insulators and electrical lead wire proximity issues. Spring tab may be bent. 2. Damaged accelerator grid. Inspect accelerator grid for delamination or proximity issues to the screen or decel grids.

  • Page 54: Appendix A: Legacy Installation

    I-BEAM RF POWER SUPPLY MANUAL Appendix A: Legacy Installation The I-BEAM RF utilizes industry standard electrical connections and software control commands. As a result, it can replace existing power supplies in many systems. More specifically, the I-BEAM RF is a replacement for the RF2001, RF2051, RF2070 and RF5S generator offered by Veeco Instruments, Inc.

  • Page 55: Section A.2: Installation Location

    Appendix A: Legacy Installation I-BEAM RF POWER SUPPLY MANUAL Section A.2: Installation Location The I-BEAM RF can be installed in any rack mount location. Depicted in below is a recommended location. In addition, the position of the existing user interface cable is provided for reference. Recommended location for the I-BEAM supply.

  • Page 56: Section A.3: Installation Of An I-Beam 703 With Ibox

    Appendix A: Legacy Installation I-BEAM RF POWER SUPPLY MANUAL Section A.3: Installation of an I-BEAM 703 with IBOX The I-BEAM 703 comes with its own RF generator for the source. The figure below show the wiring diagram for installing the I-BEAM onto an existing system. Electrical schematic for interfacing the I-BEAM 703.

  • Page 57: Section A.4: Installation Of An I-Beam 701 With Ibox

    Appendix A: Legacy Installation I-BEAM RF POWER SUPPLY MANUAL Section A.4: Installation of an I-BEAM 701 with IBOX The I-BEAM 701 will require an external generator. If the generator is our 1kW it will require a 24' RF cable. The figure below show the wiring diagram for installing the I-BEAM onto an existing system.

  • Page 58: Section A.5: Pin Outs For The Ibox

    Appendix A: Legacy Installation I-BEAM RF POWER SUPPLY MANUAL Section A.5: Pin Outs for the IBOX The pin outs for the IBOX are provided for reference. Best practice is to connect the USER INTERFACE or USER COM to the PC but not both. Please contact us if you have any questions. Pin connections for the IBOX.

  • Page 59: Appendix B: Match Network Tuning

    I-BEAM RF POWER SUPPLY MANUAL Appendix B: Match Network Tuning Occasionally, after servicing or as the source ages, the source matching network may require re-calibration. This appendix describes the tuning procedure. Section B.1: Definitions Matching Network The matching network is a gold-colored box mounted close to the ion source flange.
  • Page 60 Appendix B: Match Network Tuning I-BEAM RF POWER SUPPLY MANUAL Phase and Mag adjustments The magnitude (M or MAG) sensor and phase (P or PHASE) sensor zero adjustments are potentiometers located just inside the matching network. The potentiometers appear as small brass screws visible when looking into the opening.
  • Page 61 Appendix B: Match Network Tuning I-BEAM RF POWER SUPPLY MANUAL Gages On the front of the Controller are two position indicator gages, marked LOAD and TUNE. Capacitor position is indicated from 0 to 1. Each gauge has two LEDs to indicate minimum or maximum position has been reached.

  • Page 62: Section B.2: Setup

    When the forward power reaches the starting power and reflected power is minimized, the power supply will apply the pulse voltage to the grids to start the source. When a plasma is ignited in the source (source starts), the RF forward power will drop again and reflected power will increase.

  • Page 63: Section B.3: Tuning Procedure

    Appendix B: Match Network Tuning I-BEAM RF POWER SUPPLY MANUAL Section B.3: Tuning Procedure Press MODULE button until RF Power indicator LED is ON. Select the control key marked MORE four (4) times to reach the LOAD values. This displayed number is equal to the reading on the matching network controller analog meter x 5000, allowing for a greater accuracy reading.

  • Page 64: Section B.4: Setting The Presets

    Appendix B: Match Network Tuning I-BEAM RF POWER SUPPLY MANUAL Connect a coaxial cable adapter to the J4 connector on the back of the controller. Take the positive lead from the digital voltmeter and connect it to the positive side of the coaxial cable adapter.
  • Page 65 Plasma Process Group Since its founding in 2003, Plasma Process Group has consistently provided the highest quality service and equipment to the ion beam industry. We offer innovative new designs and industry standard products compatible with legacy equipment. EQUIPMENT We provide a wide array of ion beam products ranging from turnkey sputter coating systems through stand alone ion beam source and power supply packages.

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