MKS Newport IDL280-LM Series User Manual

MKS Newport IDL280-LM Series User Manual

Long travel industrial linear stages

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IDL280-LM Series
Long Travel
Industrial Linear Stages
U
'
M
SER
S
ANUAL
A1045F

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Summary of Contents for MKS Newport IDL280-LM Series

  • Page 1 IDL280-LM Series Long Travel Industrial Linear Stages ’ ANUAL A1045F...
  • Page 2: Warranty

    IDL280-LM Series Long Travel Industrial Linear Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
  • Page 3: Table Of Contents

    IDL280-LM Series Long Travel Industrial Linear Stages Table of Contents Warranty .........................ii Declaration of Incorporation ................v Definitions and Symbols..................vi Warnings .......................vii Caution ........................ix — Introduction .................1 — Description ...................2 2.1 Design Details ....................2 — Characteristics ................3 3.1 Definitions ....................3 3.2 Mechanical Specifications ...............4 3.3 Hard Stop: Speed Limitation Versus Load ..........4 3.4 Load Characteristics and Stiffness ............5 3.5 Stage Weights ....................5...
  • Page 4 IDL280-LM Series Long Travel Industrial Linear Stages — Connection to Newport Controllers ......14 6.1 Warnings on Controllers ................14 6.2 Connection....................15 6.3 Cables .......................15 6.4 Adapter for the XPS-D Newport Controller..........15 — Connection to Non-Newport Controllers ....16 — Dimensions .................17 — Maintenance ................17 9.1 Maintenance ....................18 9.2 Repair .......................18...
  • Page 5: Declaration Of Incorporation

    IDL280-LM Series Long Travel Industrial Linear Stages Declaration of Incorporation DECLARA ATION OF N° of C Certificate INCORPO ORATION IDL2 280-LM OF PARTL Y COMPL ETED MAC CHINERY Numbe r of pages following A Annex II-1B of the Di irective 2006/ /42/EC on ma chinery THE MANU...
  • Page 6: Definitions And Symbols

    IDL280-LM Series Long Travel Industrial Linear Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document.
  • Page 7: Warnings

    IDL280-LM Series Long Travel Industrial Linear Stages WARNING When the IDL280-LM stage is installed or combined with other instruments in a machine, additional testing to directive 2006/42/EC may be required. It is the responsibility of the end-user or integrator to perform a risk- analysis and the necessary tests to conform to the EC directives.
  • Page 8 IDL280-LM Series Long Travel Industrial Linear Stages WARNING The magnetic channel included in this device has the potential to disrupt pacemakers. Consequently, it is recommended that individuals maintain a distance of 1 meter or more from the stage as a precautionary measure. WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any...
  • Page 9: Caution

    IDL280-LM Series Long Travel Industrial Linear Stages Caution CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in any vacuum environment. CAUTION Do not place this stage in a location affected by dust, oil fumes, steam or high humidity.
  • Page 10 IDL280-LM Series Long Travel Industrial Linear Stages A1045F0 - EDH0362En1050 — 02/20...
  • Page 11: Introduction

    IDL280-LM Series Long Travel Industrial Linear Stages Long Travel Industrial Linear Stages IDL280-LM Series —Introduction This manual provides operating instructions for the IDL280-LM stage that you have purchased. RECOMMENDATION Read and understand this user's manual before operating an IDL280-LM stage. Inside this manual you will find useful information and technical references.
  • Page 12: Description

    IDL280-LM Series Long Travel Industrial Linear Stages —Description The IDL280-LM Series of Industrial-grade linear stages is another robust family of high quality Newport products, designed for higher throughput and reliability. This series is designed specifically for laser micro- machining applications that require high precision, down to 250 nm. Additional features for use in industrial environments include a hard top cover, flexible side bands and air purge.
  • Page 13: Characteristics

    IDL280-LM Series Long Travel Industrial Linear Stages —Characteristics Definitions Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”. This standard gives the definition of position uncertainty which depends on the 3 following parameters: Absolute Accuracy Difference between ideal position and real position.
  • Page 14: Mechanical Specifications

    IDL280-LM Series Long Travel Industrial Linear Stages Mechanical Specifications IDL280-300LM IDL280-400LM IDL280-600LM IDL280-1200LM Travel Range (mm) 1200 Minimum Incremental Motion (µm) 0.050 Bi-directional Repeatability (µm) ±0.10 (±0.25) ±0.10 (±0.25) ±0.10 (±0.25) ±0.10 (±0.50) Typical (Guaranteed) Accuracy (µm) ±0.7 (±2.0) (±2.3) ±1.3 (±3.0) (±5.0) Typical (Guaranteed)
  • Page 15: Load Characteristics And Stiffness

    IDL280-LM Series Long Travel Industrial Linear Stages Load Characteristics and Stiffness Normal Load Capacity (Cz) Maximum load a stage can move while maintaining specifications. k α y k α Cz, Normal center load capacity on bearings 1500 N ± C x k α...
  • Page 16: Drive And Motor

    IDL280-LM Series Long Travel Industrial Linear Stages —Drive and Motor Motor characteristics (Direct Drive Brushless Motor) Continuous force, coil @ 100 °C 221 N Continuous force, 3-bar Air Cooling, coil @ 100 °C 265 N Peak force 1248 N Motor constant 335 N Continuous power 97.5 W...
  • Page 17: Sensor Positions

    IDL280-LM Series Long Travel Industrial Linear Stages Sensor Positions Stage Travel Range Negative Positive Software Limit Software Limit Home Position (Origin) .08 (2) .08 (2) – End-of-Run Limit + End-of-Run Limit Index Pulse Index Pulse 1.97 Direction – Motion Direction + (50) Dimensions in inches (and millimeters)
  • Page 18: General Wiring

    IDL280-LM Series Long Travel Industrial Linear Stages General Wiring IDL-LM Controller i2c Data i2c Clock Fault Encoder Inhibit U command V command Driver V command U command Motor Inhibit Fault i2c Clock i2c Data Pinouts The pinout diagrams for IDL280-LM stage connectors are shown below. 4.6.1 Hall Effect Sensor (SUB-D15F Connector) +5 V...
  • Page 19: Encoder (Sub-D26Hdm Connector On E5820A Adapter)

    IDL280-LM Series Long Travel Industrial Linear Stages 4.6.3 Encoder (SUB-D26HDM Connector on E5820A Adapter) The E5820A adapter allows to connect the encoder cable with our XPS-D controller. +5 V + End-of-Run N.C. Encoder Phase /A N.C. N.C. Encoder Phase B Index Pulse /I –...
  • Page 20: Air Tube

    IDL280-LM Series Long Travel Industrial Linear Stages Motor Cable • Cable: Ø 6 mm • Min. dynamic bending radius: 60 mm DB9W4M Connector IDL-LM Phase U Motor Phase V Motor Phase W Motor Ground + Shield Connector NOTE A filter is supplied with each IDL280-LM stage. It can be used with an electronics other than the Newport XS-EDBL controller if the level of the noise is considered too high.
  • Page 21: Stage Installation

    IDL280-LM Series Long Travel Industrial Linear Stages —Stage Installation Unpacking The IDL280-LM stage will be delivered in packaging that is designed for safe transport. Attached to the body of the stage are lifting rings for safe removal from packaging. It is recommended to carefully lift and move the stage from packaging using these rings.
  • Page 22 IDL280-LM Series Long Travel Industrial Linear Stages Unscrew the lifting rings fixed on the rods. ② Unscrew with the supplied Allen key,4 CHc M8 screws from the 2 locking brackets on rods. ③ Unscrew with the supplied Allen key, 4 CHc M6 screws from the 2 locking brackets on the carriage.
  • Page 23: Mounting Conditions

    ⑤ Unscrew and remove 8 mounting rods of the lifting rings and the IDL280-LM Series Long Travel Industrial Linear Stages locking plate. Mounting Conditions IDL280-LM stages feature an eight-point mounting pattern which is ideal for non-flat surfaces. However it is recommended for all IDL280-LM stages that the following mounting conditions be adhered to for best performance and securiry.
  • Page 24: Connection To Newport Controllers

    IDL280-LM Series Long Travel Industrial Linear Stages —Connection to Newport Controllers Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user’s manual carefully before operating the instrument and pay attention to all written warnings and cautions.
  • Page 25: Connection

    IDL280-LM Series Long Travel Industrial Linear Stages Connection There is a label on every stage indicating its part and serial numbers. WARNING Always turn the controller's power OFF before connecting a stage. NOTE Supplied cables are compatible with Newport controllers. For more information, please contact your sales representative.
  • Page 26: Connection To Non-Newport Controllers

    IDL280-LM Series Long Travel Industrial Linear Stages —Connection to Non-Newport Controllers Newport stages can be operated with Non-Newport controllers. However, under such operating conditions Newport makes no guarantee regarding achievable specifications. To aid Newport customers using non-Newport Controllers with IDL280-LM Series stages, wiring conventions and motor characteristics are provided.
  • Page 27: Dimensions

    IDL280-LM Series Long Travel Industrial Linear Stages —Dimensions 6 HOLES M6 THD/ø9.84 (250), 4 SLOTS C’BORED 4.72 DEPTH: .35 (9) FOR M6 SCREWS (120) 1.57 6 HOLES M5 THD/ø6.85 (174), 17 HOLES M6 THD, n1 CLEARANCE HOLES .59 (15) DEPTH: .39 (10) (40) DEPTH: .35 (9) FOR M6 SCREWS...
  • Page 28: Maintenance

    IDL280-LM Series Long Travel Industrial Linear Stages Maintenance The IDL280-LM stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution. NOTE A slight wear is visible on protective sidebands the first 100 hours approximately.
  • Page 29: Service Form

    Service Form Your Local Representative Tel.: Fax: Name: Return authorization #: (Please obtain prior to return of item) Company: Address: Date: Country: Phone Number: P.O. Number: Fax Number: Item(s) Being Returned: Model #: Serial #: Description: Reasons of return of goods (please list any specific problems): A1045F0 - EDH0362En1050 —...
  • Page 30 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage Irvine, CA 92606, USA 91055 Évry CEDEX France Sales Sales & Technical Support Tel.: (800) 222-6440 Tel.: +33 (0)1.60.91.68.68 e-mail: sales@newport.com e-mail: france@newport.com Technical Support...

Table of Contents