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Newport IDL280-600LM
MKS Newport IDL280-600LM Manuals
Manuals and User Guides for MKS Newport IDL280-600LM. We have
1
MKS Newport IDL280-600LM manual available for free PDF download: User Manual
MKS Newport IDL280-600LM User Manual (30 pages)
Long Travel Industrial Linear Stages
Brand:
MKS
| Category:
Industrial Equipment
| Size: 2 MB
Table of Contents
Warranty
2
Table of Contents
3
Declaration of Incorporation
5
Definitions and Symbols
6
Warnings
7
Caution
9
1 Introduction
11
2 Description
12
Design Details
12
3 Characteristics
13
Definitions
13
Mechanical Specifications
14
Hard Stop: Speed Limitation Versus Load
14
Load Characteristics and Stiffness
15
Stage Weights
15
4 Drive and Motor
16
Motor Characteristics (Direct Drive Brushless Motor)
16
Command Signals
16
Sensor Positions
17
Position Feedback Signals
17
General Wiring
18
Pinouts
18
Hall Effect Sensor (SUB-D15F Connector)
18
Encoder (SUB-D15M Connector)
18
Encoder (SUB-D26HDM Connector on E5820A Adapter)
19
Motor (DB9W4M Connector)
19
IDL280-LM Cable Wirings
19
Air Tube
20
5 Stage Installation
21
Unpacking
21
Setting up
21
Mounting Conditions
23
Air Blowing
23
6 Connection to Newport Controllers
24
Warnings on Controllers
24
Connection
25
Cables
25
Adapter for the XPS-D Newport Controller
25
7 Connection to Non-Newport Controllers
26
8 Dimensions
27
9 Maintenance
27
Maintenance
28
Repair
28
Calibration
28
Service Form
29
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