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Energetiq LDLS EQ-400 Operation Manual

Laser-driven light source
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Model EQ-400
™
LDLS
Laser-Driven Light Source
Operation Manual
Revision 7
April 2018
Part Number DOC-7388

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Summary of Contents for Energetiq LDLS EQ-400

  • Page 1 Model EQ-400 ™ LDLS Laser-Driven Light Source Operation Manual Revision 7 April 2018 Part Number DOC-7388...
  • Page 2 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.
  • Page 3 EU Declaration of Conformity...

  • Page 5: Table Of Contents

    TABLE OF CONTENTS Chapter 1 ..............................1 General Information ........................... 1 Safety ............................... 1 Chapter 2 ..............................9 Description ............................9 General ............................9 Specifications ..........................10 System Description ........................12 Power/Control Unit (PCU) ..................... 13 Lamp House ..........................14 Chapter 3 ..............................

  • Page 7: Chapter 1

    C h a p t e r 1 GENERAL INFORMATION Safety WARNING This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure to the direct or reflected output beam. Make certain that the appropriate output beam shields and optics are in place prior to energizing the unit.
  • Page 8 There are no user-serviceable parts inside the EQ-400. For any problems encountered during operation, please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to open the Power/Control Unit or Lamp House enclosure of the EQ-400.
  • Page 9 CAUTION Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure. INVISIBLE LASER RADIATION AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION CLASS 4 LASER PRODUCT The EQ-400 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before operating the system.
  • Page 10 Nominal Ocular Hazard Distance (NOHD) based on 400W 1070nm pump laser under a failure mode condition where aperture is itself accessible: 4 meters Required Optical Density (OD) for safety eyewear: 6 or higher at 1070 nm These values are based on a theoretical failure condition. Labels and Safety Notification The following safety labels appear on the product.
  • Page 11 Hazard warning label – indicates that a laser hazard is present Protective housing label – warns of an enclosed laser radiation hazard Protective housing label – warns of an enclosed laser radiation hazard Error! Reference source not found. EQ-400 Operation Manual Rev.
  • Page 12 Aperture Label Hazard Warning Label Manufacturer’s Identification label UV Hazard Warning Label Protective Housing Label Error! Reference source not found EQ-400 Operation Manual Rev.
  • Page 13 Protective Housing Label (inside chassis on laser module) Certification Label Explanatory Label Figure 1: Safety Label Locations Safety Interlocks The EQ-400 is equipped with interlocks to prevent operation of the device when any of the following conditions are present: 1. A remote interlock is open 2.
  • Page 14 Remote Interlock Remote interlock pins are provided for the customer’s use (see Chapter 3 for connection details). Any suitable normally-open contact or solid-state switch can operate the interlock circuit. The contact or switch should be rated for 8mA minimum at 5VDC. The interlock circuit must be connected to enable the operation of the unit.

  • Page 15: Chapter 2

    C h a p t e r 2 DESCRIPTION General The EQ-400 is a broad-band lamp system for use in a wide variety of applications. The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond. The output is very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use.

  • Page 16: Specifications

    Specifications Optical Performance  Typical output spectrum: see Figure 2. Figure 2: Typical Output Spectrum Physical Specifications Dimensions (H x W x D)  Lamp House: 136 x 145 x 56 mm (5.4 x 5.7 x 2.2 in)  Power/Control Unit: 133 x 483 x 584 mm (5.2 x 19.0 x 23.0 in) Weight ...
  • Page 17 Remote Interface Digital Inputs  Type: Optocoupler LED  Logic: Active High  Input voltage: 5VDC  Input current: 8mA Digital Outputs  Type: Open collector to ground (digital common)  Logic: Active Low  Voltage: 30VDC max.  Sink current: 30mA max. User Power ...

  • Page 18: System Description

    System Description The EQ-400 system consists of a Power/Control Unit (PCU), Lamp House, Controller to Lamp House interconnect cable, and power input cable. Laser light is generated in the PCU and transmitted to the Lamp House by an optical fiber permanently attached to the PCU. The following sections provide descriptions of the system components and controls, and give an overview of their functions.

  • Page 19: Power/Control Unit (Pcu)

    Power/Control Unit (PCU) The Power/Control Unit contains:  Laser module  Laser power supply  Control electronics  Status indicator LEDs  Operate switch  Keyswitch  Interface connectors  Cooling water connectors External features (refer to Figure 3): Status Indicator LEDs These LEDs indicate the system status.

  • Page 20: Lamp House

    Operate switch Turns the lamp on or off. Key switch Enables or disables operation of the lamp. The keyswitch must be in the ENABLE position for the lamp to operate. The key can only be removed in the DISABLE position. I/O Interface Connector Provides access to control and status signals.
  • Page 21 Laser Collimator Output Window (also on opposite side). Laser radiation in excess of Class 1 exposure limits is emitted from these apertures. Nitrogen Purge Nitrogen Purge Inlet Outlet Cooling Water Cooling Water Inlet Outlet Control Connector Laser ON (to PCU) Indicator Figure 4: Lamp House Assembly Error! Reference source not found.
  • Page 22 External features (refer to Figure 4): Output Windows The lamp windows at the optical output provide protection from the high pressure bulb inside the Lamp House. An internally-threaded SM30 adapter is provided for easy connection of optical hardware. An optional retroreflector can be installed on the output window on one side of the Lamp House if only one optical output is required.

  • Page 23: Chapter 3

    1) AC Power cable 1) Chiller tubing kit (Optional) If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any parts. There are no user-serviceable parts inside the EQ-400 Lamp House or Power Supply Controller unit.
  • Page 24 Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light safety measures in place. It is recommended that any enclosure or aperture-blocking hardware utilize switches wired to the EQ-400 remote interlock circuit. See drawing OTD-8159 in Appendix A for mechanical details of the Lamp House. 3.
  • Page 25 The system is now ready to operate. Description Pin # Details Commands (Inputs) LAMP OPERATE OPERATE REQUEST, apply +5V (referenced to digital common) to initiate start cycle EXTERNAL INTERLOCK EXTERNAL INTERLOCK, apply +5V (referenced to digital common) to close interlock and allow operation. REMOTE MODE ENABLE REMOTE MODE ENABLE, apply +5V (referenced to digital common) to enable remote control mode...
  • Page 26 Figure 5: Remote Interface Schematic Error! Reference source not found EQ-400 Operation Manual Rev.

  • Page 27: Chapter 4

    LASER ON LED will go out, the PCU FAULT LED will be lit, and LAMP ON LED will remain off. If this occurs, turn the OPERATE switch to the OFF position (down) and begin at Step 1 again. If this occurs multiple times, contact Energetiq service.

  • Page 28: Manual Reset

    Manual Reset If any fault occurs during operation of the lamp (including actuation of the remote interlock), the laser is immediately shut off, and light output ceases. When the fault condition is cleared, the lamp will not automatically restart. The system must be manually reset by turning the OPERATE switch to the OFF position.
  • Page 29 Displays a help menu listing the mm/dd/yyyy available commands Energetiq Technology, Inc. Inc/Dec laser pwr (by 0.5% full scale) Query laser pwr setpoint Reset laser pwr to default Burn settings to flash memory Query bulb operating hrs...
  • Page 30 Bit # Definition 0 (LSB) Fault status: 1 = one or more faults present, 0 = no faults Laser status: 1 = on, 0 = off Lamp status: 1 = on, 0 = off Laser temperature: 1 = overtemperature, 0 = OK Laser power supply voltage: 1 = out of range, 0 = OK Laser current source: 1 = fault, 0 = OK Lamphead temperature: 1 = overtemperature, 0 = OK...

  • Page 31: Engineering Drawings

    A p p e n d i x A ENGINEERING DRAWINGS The following engineering drawings are included for reference. Drawing number Revision Title OTD-8159 EQ-400 Lamp Housing Outline OTD-8198 EQ-400 Power Supply Assembly Error! Reference source not found. EQ-400 Operation Manual Rev.
  • Page 32 Error! Reference source not found EQ-400 Operation Manual Rev.

  • Page 33: Revision History

    A p p e n d i x B REVISION HISTORY Date Revision Description 07 September 2016 Prelim Preliminary version 23 January 2017 Initial release Added protective housing label and additional safety 08 February 2017 information 10 February 2017 Updated labeling information 7 September 2017 Miscellaneous edits 20 October 2017...
  • Page 34 Error! Reference source not found EQ-400 Operation Manual Rev.
  • Page 36 All technical information, including drawings, schematics and specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq. The content of this manual is subject to change without notice.

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