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Guildline 6530 Series Operator's Manual

Digital teraohm bridge-meter
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OPERATORS MANUAL
FOR
6530 SERIES
DIGITAL TERAOHM BRIDGE-METER
NOTICE
The contents and information contained in this manual are proprietary to Guildline
Instruments Limited.
They are to be used only as a guide to the operation and
maintenance of the equipment with which this manual was issued and may not be
duplicated or transmitted by any means, either in whole or in part, without the written
permission of Guildline Instruments Limited.
OM6530-C1-00
19 November, 2019

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  • Page 1 6530 SERIES DIGITAL TERAOHM BRIDGE-METER NOTICE The contents and information contained in this manual are proprietary to Guildline Instruments Limited. They are to be used only as a guide to the operation and maintenance of the equipment with which this manual was issued and may not be duplicated or transmitted by any means, either in whole or in part, without the written permission of Guildline Instruments Limited.

  • Page 3: Table Of Contents

    TABLE OF CONTENTS INTRODUCTION ....................1-1 1.1. FUNCTION DESCRIPTION .......................1-1 1.1.1. PHYSICAL DESCRIPTION ......................1-2 1.1.2. PRINCIPLE OF OPERATION ......................1-3 1.1.3. MODES OF OPERATION .........................1-4 1.1.4. CIRCUIT DISCUSSION ........................1-5 INSTALLATION ....................2-1 2.1. INSTALLATION ..........................2-1 2.2. PRELIMINARIES ..........................2-1 2.3. PRECAUTIONS ............................2-3 2.4.
  • Page 4 INSTRUMENT OPERATION ................4-1 4.1. BASIC MENU OPERATION .......................4-1 4.1.1. Menu System ............................4-1 4.1.2. Key functions ............................4-1 4.1.2.1. Navigation keys (up/down, left/right arrow) ................4-2 4.1.3. Select Mode ............................4-3 4.1.4. Edit Mode ............................4-4 4.2. MAIN MENU ............................4-4 4.3. Measurement Menu ..........................4-5 4.4.
  • Page 5 4.9.3. Diagnostics ............................4-45 4.9.3.1. Digital PS ..........................4-45 4.9.3.2. Analog PS..........................4-46 4.9.3.3. Relay Test ..........................4-46 4.9.3.4. Voltage Test ..........................4-46 4.9.3.5. External Input .......................... 4-47 4.9.3.6. DAC7548 Calibrate ......................... 4-47 4.9.4. Password ............................4-47 4.10. Menu System Hierarchy Diagrams ....................4-48 REMOTE CONTROL ....................
  • Page 6 5.6.10. *SRE <u> - SERVICE REQUEST ENABLE COMMAND ............5-19 5.6.11. *SRE? - SERVICE REQUEST ENABLE QUERY ..............5-19 5.6.12. *STB? - STATUS BYTE QUERY ....................5-19 5.6.13. *TST? - QUERY RESULTS OF SELF TEST ................5-20 5.6.14. *WAI - WAIT-TO- CONTINUE COMMAND ................5-21 SYSTem:ATMospheric:PRESsure? –...
  • Page 7 MEASure:UNITS – SET CURRENT MEASUREMENT MODE ..........5-29 5.6.66. MEASure:UNITS? – DISPLAY MEASUREMENT MODE ............5-29 5.6.67. 5.6.68. READ:RESistance? ........................5-29 5.6.69. READ:CURRent? ........................5-29 5.6.70. READ:SURFace:RESistivity? ..................... 5-29 5.6.71. READ:VOLume:RESistivity? ..................... 5-29 5.6.72. SENSe:ATMospheric:PRESSure? ....................5-29 SENSe:CAPacitor – SET CURRENT CAPACITOR ..............5-29 5.6.73.
  • Page 8 VERIFICATION AND CALIBRATION ..............6-1 6.1. CALIBRATION DESCRIPTION ......................6-1 6.1.1. ENVIRONMENTAL CONDITIONS ....................6-1 6.1.2. INITIAL CONDITIONS ........................6-1 6.1.3. RECOMMENDED TEST EQUIPMENT ...................6-1 6.1.4. CHECK CALIBRATION REPORT ....................6-1 6.1.4.1. CALIBRATION COEFFICIENTS ...................6-2 6.1.5. TEST VOLTAGE VERIFICATION ....................6-2 6.1.6. OPERATIONAL CHECK ........................6-3 6.2.
  • Page 9 8.7. MEASUREMENT TECHNIQUE ...................... 8-10 8.7.1. LARGE VALUE RESISTOR MEASUREMENT TECHNIQUE ............ 8-10 8.7.2. ENVIRONMENT ..........................8-10 8.7.3. SAMPLE PREPARATION ......................8-10 8.7.4. TEST LEAD ROUTING ........................8-10 8.7.5. CAPACITIVE TEST SAMPLES ..................... 8-10 8.8. OTHER FEATURES .......................... 8-11 8.9. ACCESSORY EQUIPMENT ......................
  • Page 10 LIST OF FIGURES FIGURE 1-1: 6530 FRONT PANEL ........................1-2 FIGURE 1-2: 6530 REAR PANEL ........................1-2 FIGURE 1-3: 6530 SIMPLIFIED BLOCK DIAGRAM ..................1-3 FIGURE 1-4: 6530 OPERATIONAL INTEGRATOR ..................1-6 FIGURE 2-1: OPENING THE POWER RECEPTACLE ...................2-2 FIGURE 2-2: 6530 FRONT PANEL ........................2-3 FIGURE 2-3: 6530 FRONT PANEL CONNECTORS ..................2-4 FIGURE 2-4: 6530 REAR PANEL CONNECTORS ...................2-6 FIGURE 2-5: TYPICAL EXTERNAL TRIGGER CIRCUITS ................2-8...
  • Page 11 LIST OF TABLES TABLE 2-1: POWER FUSE SELECTION ......................2-2 TABLE 5-1 : IEEE-488 DEVICE CAPABILITIES ....................5-3 TABLE 5-2 : IEEE-488 PIN DESIGNATIONS .....................5-4 TABLE 5-3 : RS232 PIN DESIGNATIONS ......................5-5 TABLE 5-4 : REMOTE/LOCAL STATE TRANSITIONS ..................5-8 TABLE 5-5 : EVENT STATUS REGISTER ....................... 5-18 TABLE 5-6 : STATUS BYTE REGISTER ......................
  • Page 12 OM6530-C1-00 19 November, 2019...

  • Page 13: Introduction

    Section 1 INTRODUCTION This manual provides complete information on the installation and operation of the Guildline Instruments Model 6530 Digital TeraOhm Bridge-Meter. Also included is a general description of the theory of operation together with instructions for calibration. The TeraOhm Bridge-Meter is based on fundamental work performed by Dr.

  • Page 14: Physical Description

    Figure 1-2: 6530 Rear Panel 1.1.1. PHYSICAL DESCRIPTION The Guildline 6530 Digital TeraOhm Bridge-Meter is housed in a steel case for reduction of electromagnetic emissions in compliance to CE standards, and to protect the measurement circuitry from EMI. All indicators and frequently used controls are located on the front panel together with two connectors for connection of the unknown resistor or current.

  • Page 15: Principle Of Operation

    Section 1 UNKNOWN RESISTANCE OR CURRENT INTEGRATOR THRESHOLD VOLTAGE DETECTOR COMPARATO THRESHOLD TIME LOGIC MEASUREMENT 2700 pF THRESHOLD 270 pF CONTROL 27 pF 0.1V THRESHOLD CONTROL CONTROL CONTROL +/- 10 VOLT TEST VOLTAGE REFERENC POWER SUPPLY MICROPROCESSOR AND MEMORY CONTROL RS232 PANEL SWITCHES DISPLA...

  • Page 16: Modes Of Operation

    Guildline manufactures 9336 and 9337 calibration resistors that are ideally suited for this purpose. Guildline also manufactures a 6636 Temperature Stabilized Resistor set that is suited to calibrate the 6530 in environments where the temperature is not regulated to laboratory standards.

  • Page 17: Circuit Discussion

    Section 1 1.1.4. CIRCUIT DISCUSSION The Model 6530 TeraOhm Bridge-Meter measures high values of resistance by charging a small capacitor through the resistance to be measured. An operational integrator is shown in Figure 1-4. The equations for this integrator are as follows: delta V (The equality is not exact ______________...

  • Page 18: Figure 1-4: 6530 Operational Integrator

    Section 1 Figure 1-4: 6530 Operational Integrator OM6530-C1-00 19 November, 2019...

  • Page 19: Installation

    Section 2 INSTALLATION 2.1. INSTALLATION This instrument was thoroughly tested and inspected before shipment and should be free from damage when received. Inspect it carefully, verify that all items on the packing list are present and check the instrument operation as soon as possible. Refer to the warranty card at the front of this manual if any damage or deficiencies are found.

  • Page 20: Figure 2-1: Opening The Power Receptacle

    Section 2 DISCONNECT POWER PRY HERE TO REMOVE COVER 100V 120V 220V 240V EXPOSE LINE SELECTOR SLIDER REMOVE SELECTOR (120V SHOWN) ROTATE SELECTOR AND REPOSITION SLIDER TO DESIRED LINE INPUT (240V SHOWN) AND REINSERT REPLACE COVER 100V 120V 220V 240V Figure 2-1: Opening the Power Receptacle Check to see that the fuses inserted in the receptacle correspond to the correct type specified in Table 2-1.

  • Page 21: Precautions

    Section 2 cover is closed. This is important because the drum selects the proper transformer connection for the required voltage. The supplied moulded line cord should be plugged into the 3 pin power receptacle on the rear panel of the instrument. Plug the line cord into a receptacle with the required voltage and a protective ground connection.

  • Page 22: Switch Functions

    Section 2 2.4.1. SWITCH FUNCTIONS 2.4.1.1.Rear Panel POWER Entry The on/off toggle switch is the only function that cannot be controlled by the GPIB and RS-232C bus interfaces. 2.4.1.2.Front Panel KEYPAD The keypad consists of a 3 key by 5 key momentary switch arrangement that allows entry of a numeric sequence (0, 1, 2, 3, 4, 5, 6, 7, 8, 9).

  • Page 23: Source Connector

    SOURCE cable provided with the 6530 is HV BNC at the instrument end and Type-N at the U.U.T. end to provide direct connection with Guildline 9336 and 9337 series resistors. Other connector end cables are available as an option.

  • Page 24: Rear Panel Controls

    6530 and to power ground of the line input connector. 2.4.4.4.PRESSURE A 5-pin DIN connector provides the input connection for the Guildline Absolute Pressure Environmental sensor (part no. 65220). OM6530-C1-00 19 November, 2019...

  • Page 25: Rh/Temp

    Section 2 2.4.4.5.RH/TEMP A 5-pin DIN connector provides the input connection for the Guildline combined %Relative Humidity and Temperature Environmental sensor (part no. 65220). 2.4.4.6.LINE INPUT CONNECTOR The Line Input Connector is a combination of a 3-prong AC standard male connector, an ON/OFF switch and a fused input line voltage selector.

  • Page 26: External Trigger Connector

    Section 2 EXTERNAL TRIGGER CONNECTOR EXTERNAL TRIGGER CONNECTOR PUSHBUTTON Figure 2-5: Typical External Trigger Circuits TEST ENCLOSURE INTERLOCK SWITCH PIN 1 RESISTVITY FIXTURE SURFACE / VOLUME SWITCH Interlock PIN 4 Connector PIN 5 Figure 2-6: Typical Interlock Circuit Configuration OM6530-C1-00 19 November, 2019...

  • Page 27: Quick Measurement Guide

    Most high and ultra-high value resistors come as a 2 or 3 terminal device. An example of each are the Guildline model 9336 resistor which is a 2-terminal device, and a model 9337 which is a 3-terminal device. The measurement procedure for both the 9336 and 9337 is identical. They both have a “Source”...

  • Page 28: 2-Terminal Resistance Connection Schematic

    Section 3 3.1.2. 2-TERMINAL RESISTANCE CONNECTION SCHEMATIC Outlined below is an example of a typical 2-terminal resistance device connected to the 6530. Note that the known voltage is dropped on the U.U.T. resistor element and the resultant current is returned to the electrometer to be measured. The resistance is determined by the measured current and known voltage.

  • Page 29: 3-Terminal Resistance Connection Schematic

    Section 3 3.1.3. 3-TERMINAL RESISTANCE CONNECTION SCHEMATIC Outlined below is an example of a typical 3-terminal resistance device connected to the 6530. Note that the known voltage is dropped on the U.U.T. resistor elements and the resultant current is ratio divided and partially returned to the electrometer to be measured. The effective resistance is determined by the measured return current and known voltage.

  • Page 30: Bridge Vs Direct Measurement

    3.2. BRIDGE VS DIRECT MEASUREMENT Two measurement methods are available to perform resistance measurements using a Guildline 6530 High Resistance Bridge-Meter. One method is simply to directly measure the resistance of the unit under test (UUT) and take the published or previously calibrated long-term measurement uncertainty of the 6530 High Resistance Bridge-Meter.
  • Page 31 Section 3 Rxc = Rsc * Rxm / Rsm Where: Rxc = Calibrated resistance value of the UUT Rxm = Measured resistance value of the UUT by the high resistance meter Rsc = Previously known calibrated resistance value of the resistance reference standard Rsm = Measured resistance value of the resistance standard by the high resistance meter...
  • Page 32 Section 3 Step 3) Measure the unknown resistor on the 6530. For this example, the reference resistor is a 1 GΩ resistor. Again, the measurement should run for 300 samples keeping the last 50 for determination of standard deviation and mean. The optimum measurement parameters for a 1 GΩ...

  • Page 33: Current Measurement

    1.000083 GΩ ± 22.949 µΩ/Ω (ppm) The mathematics behind this process is simplified using the Transfer Cal Utility in the Guildline TeraCal Software and the process can be automated with the use of a Guildline 6564 High Resistance Scanner in conjunction with the TeraCal software.

  • Page 34: Current Source Connection Schematic

    Section 3 3.3.2. CURRENT SOURCE CONNECTION SCHEMATIC Outlined below is an example of a typical current source device connected to the 6530. Note that the known voltage source is not required or used and the current is actively driven from the unknown current source to the electrometer to be measured. While many current sources are referenced to chassis ground, some may not be.

  • Page 35: Instrument Operation

    Section 4 INSTRUMENT OPERATION Instrument operation is controlled from a menu display and command function key approach that uses the front panel graphic display, programmable function keys, cursor movement keys and numeric keypad arrangement. The comprehensive user interface used, prompts the operator for the next required keystroke or it will automatically perform the required function on selection of the displayed operation.

  • Page 36: Navigation Keys (Up/Down, Left/Right Arrow)

    Section 4 The <previous> key causes the menu system to return to the previous menu level. Numeric keys (0-9) are used to enter data during the edit operations. The <clear> key is used to clear the current entry during edit operations. The <exponentiation>...
  • Page 37 Section 4 The right arrow positions to the end of the trace buffer and also activates an automatic refresh every 3 seconds. The up arrow will scroll the data up by one entry. The down arrow will scroll data down by one entry. 3.

  • Page 38: Main Menu

    Section 4 4.1.4. Edit Mode Data is entered using the numeric keys. The cancel key will restore all values to their original state. All of the data that has been changed is saved using the ok function. Multiple screens of data are processed using function key 4 (more n-n). 4.2.

  • Page 39: Measurement Menu

    Section 4 <Setup> allows the setting up of the operating environment. An example of this would be to setup the display resolution for a measurement. <Sofcal> is the calibration and diagnostics section of the system. Most of this section is under password control.
  • Page 40 Section 4 The 6530 operates in both auto range and manual mode. It is recommended that auto range mode be selected whenever possible. As with all precision measurement instrumentation, the 6530 TeraOhm Bridge-Meter input is very sensitive to external stray electromagnetic and electrostatic fields. The presence of these stray fields can adversely affect the resistance under test as well as the 6530 reading.

  • Page 41: Ohms Setup

    Section 4 The 6530 will check the value of the resistor and select the optimum parameters for measurement purposes. It will report the approximate setting that it is trying to use as it locates the best settings. The 6530 will display the measurement values as they become available. It will also display the voltage that is being supplied to the output terminal.
  • Page 42 Section 4 The setup menu allows the user to select the polarity using the polarity command function. Changing polarity will not stop the measurement. It is recommended that attention is paid to the parameters for auto reverse as this will drastically affect the accuracy of the measurement.

  • Page 43: Ohms Parameters Menu

    Section 4 4.4.2. Ohms Parameters Menu The parameters menu allows the manual selection of settings. The Max Volts limits all measurements. Max Volts is set to 30 V as power up default. This also applies to auto ranging. This may be important to note as some resistors may be damaged if high voltage is applied.

  • Page 44: Resistance, Manual Ranging

    Section 4 The 6530 will display the suggested range of the resistor based on the selected settings. This suggestion can be ignored but it may have a direct effect on the accuracy of the measurement and/or the length of time for a measurement to take place. In Auto Range mode the parameters are automatically selected up to the Max Volts setting.
  • Page 45 Section 4 The integration time is affected by the selection of the capacitor, threshold and test voltage according to the formula: 2 x C x R x V threshold _________________________ source Where: T is the integration time in seconds, R is the unknown resistance in ohms, C is the integrator capacitance in farads, is the threshold voltage in volts, threshold...

  • Page 46: Control Menu

    Section 4 4.4.4. Control Menu The valid Source selections are: Manual - requires trigger from <Trigger> function key to start a measurement. <Trigger> is also available on the Ohms Measurement Menu if this mode is selected External - external trigger contact closure required on external trigger source on input connector - measurement initiated by *TRG remote command Continuous...

  • Page 47: Trace

    Section 4 4.4.5. Trace <All> selects Timestamp, Temperature, Humidity, Atmospheric Pressure, and Machine State. <None> clears all trace elements. <Time Mode> toggles between Relative Time and the Real Time Clock. This is only traced if Timestamp is selected. < Time Stamp> selects and removes the Time Stamp in the trace. <Temp.>...

  • Page 48: Timers

    Section 4 <Pressure> selects and removes the atmospheric pressure data from the trace. <State> selects and removes the machine state data from the trace. 4.4.6. Timers Delay is the time to wait between each sample. It is an internal time based sample trigger. Soak Time is the initial settling wait time after a change in voltage or polarity.
  • Page 49 Section 4 <Ok> selects the highlighted profile. <Delete> deletes the currently selected profile. This option is only available on user profiles and will not be present when LOCAL, GPIB, or RS232 is highlighted. <Save> saves the current profile information in the selected profile. The saved parameters are: Delay Time, Soak Time, Sensor Time, Trigger Source, Display Resolution, Display Brightness, Auto Reverse Mode, Manual Mode, GPIB status, RS232 status, Capacitor, Threshold, Polarity, Max Voltage, Output...

  • Page 50: View

    Section 4 4.4.8. View The View Menu allows the user to view the trace data in graphical and text format. The last 1000 entries are kept in memory and the individual entries can be viewed. A summarization of the data is kept from the last <Clear Sum> point. A graphical summary is also maintained by averaging all samples within a 180 point array.
  • Page 51 Section 4 4.4.8.2.Detail Graph <Data> switches to the detail display. <Previous> (if present) scrolls the trace buffer window left. <Next> (if present) scrolls the trace buffer window right. <Summary> switches to the summary display. The Up arrow scrolls the trace buffer left by Up/Down Arrow Scroll Size. The Down arrow scrolls the trace buffer right by Up/Down Arrow Scroll Size.

  • Page 52: Detail Graph

    Section 4 4.4.8.3.Detail <Graph> switches to the graph display. <Previous> (if present) scrolls back by 5 entries. <Next> (if present) scrolls forward by 5 entries. The Up arrow scrolls the trace buffer up by one (1) entry. The Down arrow scrolls the trace buffer down by one (1) entry. The Left Arrow scrolls to the beginning of the trace buffer.

  • Page 53: Current - Measuring Picoamperes

    Noise pickup may cause a slight degradation of accuracy when using this coaxial cable configuration. Guildline supplies a triaxial cable where the outer and inner shield are joined together at the Type-N connector end.

  • Page 54: Autoranging - Current

    Section 4 4.5.1. AUTORANGING - Current The simplest technique for measuring low currents is to use the autoranging feature of the 6530: 1. Connect the unknown current source. 2. Select the <Measure> function key in the Main Menu 3. Select the <Current> function key in the Measure Option Menu 4.
  • Page 55 Section 4 I is the unknown current in amperes, C is the integration capacitance in farads, is the threshold voltage in volts. threshold Shunt is 1000 if it has been selected otherwise it is 1. Note: The shunt should be enabled only when trying to measure currents higher than 10 µA.

  • Page 56: Surface Resistivity

    Section 4 Capacitor 27 pF | 270 pF | 2700 pF Threshold 0.1 V | 1.0 V | 10.0 V Shunt On | Off 4.6. Surface Resistivity Select <Measure> function key in the Main Menu Select <Surface> function key in the Measure Option Menu <Continue>...

  • Page 57: Surface Resistivity Configure

    Section 4 4.6.1. Surface Resistivity Configure The effective perimeter and distance are fixed parameters for the Model 8009 Resistivity Test Fixture. For a detailed description of these parameters consult the Keithley Model 8009 manual. This is only used for custom fixtures and is not part of the menu selection when the fixture is standard.

  • Page 58: Volume Resistivity Thickness Setup

    Section 4 4.7.1. Volume Resistivity Thickness Setup The thickness of the sample can be changed from the default if necessary. For a detailed description of these parameters consult the Keithley Model 8009 manual. Units allows the selection of inches or centimeters. The configuration values are automatically converted.

  • Page 59: Configure

    “Ramp” to Digital displays ramp volts in digital and Analog displays the ramp graphically. <Fixture> allows the selection of the Standard Guildline Resistivity fixture and also allows the user to define a custom fixture. <Inches> toggles between inches and centimeters.

  • Page 60: Gpib

    Section 4 <Interlock> can be off or on. On prevents an Ohms measurement if the external input is not enabled. Resistivity always operates in interlock “on” mode. (This switch is for Manual operation only; see Service Manual SM6530 for Remote operation.) <Prompt>...

  • Page 61: Rs232

    Section 4 4.8.2. RS232 Baud is the RS232 Baud Rate. 1200 | 4800 | 9600 | 19200 | 38400 | 115200. Parity NONE | EVEN | ODD Stop Bits 1 | 2 Data Bits 7 | 8 Echo ON | OFF Flow Control XON/XOFF | RTS/CTS | NONE Mode Talk Only | Talk Listen | Disable <Ok>...

  • Page 62: Sensors

    Section 4 4.8.3. Sensors This enables/disables the three (3) sensors. The off state will stop all monitoring of the selected sensor. 4.8.4. Sys Time This allows the updating of the system date and time. The time is entered in 24 hour format.

  • Page 63: User

    Section 4 4.9.1. User 4.9.1.1.Calibration Coefficients This menu displays the Calibration coefficients. It can be updated to re-enter the coefficients from the report given with you 6530 in the event of a non-volatile memory failure. These values are determined during the factory alignment or calibration. OM6530-C1-00 4-29 19 November, 2019...
  • Page 64 Section 4 4.9.1.2.Self Test Self Test checks various parameters and displays the results. Error Status. Bit 0 – Non-Volatile checksum failure Bit 1 – Rom checksum failure. Could be ROM/Aux ROM. Bit 2 – Analog failure. Bit 3 - +5 volts Bit 4 - -5 volts Bit 5 - +15 volts Bit 6 - -15 volts...
  • Page 65 Section 4 4.9.2. Calibrate <Utilities> is used to calibrate the capacitors, thresholds, protection resistor and shunt. <Cal. Vals> is used to enter or modify the test volts, threshold, protection resistor and shunt correction values. <Ref. Vals> is used to enter/modify the instrument serial number, calibration date, auto cal parameters, zero parameters and shunt parameters.
  • Page 66 Section 4 4.9.2.1.1.Auto Calibration This automates the Capacitor and Threshold calibrations. It utilizes the same procedures as the Capacitor and Threshold calibration, but it automatically steps through the three capacitors and the two thresholds. It also automatically sets the calibration date from the system date/time. <Calc>...
  • Page 67 Section 4 If the specified variance or standard deviation is exceeded, then the sample count is reset to zero and the failed spec is displayed on the 5 line of the display. Line 6 of the display consists of the total measurement count, the number of samples which have currently been taken for the valid sample set and the current variance (in ppm) and standard deviation (in ppm) for the valid sample set.
  • Page 68 Section 4 If the specified variance or standard deviation is exceeded, then the sample count is reset to zero and the failed spec is displayed on the 5 line of the display. Line 6 of the display consists of the total measurement count, the number of samples which have currently been taken for the valid sample set and the current variance (ppm) and standard deviation (ppm) for the valid sample set.
  • Page 69 Section 4 4.9.2.1.4.Zero Calibration This is the value of the internal resistance presented by the 6530 between the input connector and ground. The 6530 maintains a stored value for this resistance in its memory and subtracts it from all resistance measurements before the final value of the unknown resistance is put on the front panel display or made available at either control bus.
  • Page 70 Section 4 actual variance (ppm) and standard deviation (ppm) is displayed. If for some reason the routine continues until the maximum retries has been reached, then the last window of samples is used to generate the actual variance (ppm) and standard deviation (ppm) that is displayed.
  • Page 71 Section 4 Pressing the <Thresholds> key will display the coefficients stored for each threshold. By pressing the <Edit> key the numbers may be altered by pressing a new sequence of numbers followed by pressing the <Ok> key. Pressing the <PREVIOUS> key exits to the SOFCAL Calibrate Menu. 4.9.2.2.3.Test Volts Pressing the <Test Volts>...

  • Page 72: Calibrate

    Section 4 Coefficient into display | Nominal Voltage | Due to the large number of output test voltage points to be measured during calibration, it is recommended that the numbers are entered using one of the interface busses (GPIB or RS-232C). 4.9.2.2.4.Cal Spec.
  • Page 73 Section 4 4.9.2.2.6.Protection Resistor Pressing the <Protection> key will display the error stored for the internal series protection resistor. By pressing the <Edit> key the number may be altered by pressing a new sequence of numbers followed by pressing the <Ok> key. Pressing the <PREVIOUS>...
  • Page 74 Section 4 4.9.2.3.1.Serial Number Used to record serial number from the back plate of 6530. 4.9.2.3.2.Calibration Date This is the date of last calibration. If a new calibration date is to be entered press the <Edit> key. A new date may be keyed in with the numeric keys of the keypad.
  • Page 75 Section 4 4.9.2.3.3.Reference Resistor This is used to record the value of the reference resistor used to calibrate the 6530. It is critical that it be entered prior to calibration of the 6530. A separate value for variance, standard deviation and sample size is used for 2700 pF, 270 pF, 27 pF, 1.0 V threshold and 0.1 V threshold.
  • Page 76 Section 4 Standard deviation (ppm) is used to further ensure that the measurement is stable and within spec. Sample Size is used to specify the number of measurements to be used for calculating the coefficients. Maximum Sample Count is set to specify the total number of measurements to be taken before the process is interrupted.
  • Page 77 1000 4.9.2.4.Sensors This section allows setting the gain and Offset Voltage for the sensors. The gain is specified in mV per each unit of measurement. N.B. The default parameters are set for the Guildline environmental sensors option. 4.9.2.4.1.Temperature OM6530-C1-00 4-43...
  • Page 78 Section 4 This example supports a sensor that generates 417 mV at 0 °C and has a sensitivity of 83.333 mV/°C. 4.9.2.4.2.Humidity This example supports a sensor that generates 0 V at 0 % rH and has a sensitivity of 50 mV/% rH. 4.9.2.4.3.Pressure This example supports a sensor that generates –6.390 V at 0 kPa atmospheric pressure and has a sensitivity of: 105 mV/kPa.
  • Page 79 Section 4 4.9.3. Diagnostics <ErrMsg Off> | <ErrMsg On> Disables/Enables on screen error messages. The diagnostics section is used by the service technician to monitor voltage and to allow the testing of some of the input and outputs of the system. 4.9.3.1.Digital PS The screen updates the values every 5 seconds.
  • Page 80 Any key exits to Diagnostics Menu. 4.9.3.3.Relay Test This diagnostic tool requires a Guildline test jig and is only used by a qualified Guildline technician. It allows the monitoring of the digital outputs of the CPU board through the LED indicators on the test jig. An example of this is the source voltage relay controls (J801-9 –...
  • Page 81 Section 4 Volts On/Volts Off turns the high voltage on/off. Polarity Positive | Negative 4.9.3.5.External Input This is used to check the status of external inputs. It can also be used to test the inputs. Interlock can be disabled from the Configure Menu. 4.9.3.6.DAC7548 Calibrate This is a factory calibration procedure for aligning the DAC7548 and is not part of the operational procedures.
  • Page 82 Section 4 If the system is signed on with the correct password, then the system will prompt for the new password. Enter the new password then press <Ok>. <PREVIOUS> will return to the Sofcal Menu. 4.10. Menu System Hierarchy Diagrams The menu system hierarchy used by the 6530 is outlined below.

  • Page 83: Figure 4-1: Ohms Hierarchy

    Section 4 Main Menu Measure Configure Sofcal Detail Graph Window Size View Menu Up/Down Arrow Scroll Size Graph Detail Window Refresh Minimum Scroll Size Summary Measure Menu Edit Ohms Current Surface Volume Ohms Menu Detail Graph Previous Next Summary Start Auto Range Setup View...

  • Page 84: Figure 4-2: Current Hierarchy

    Section 4 Main Menu Measure Configure Sofcal Detail Graph Window Size View Menu Up/Down Arrow Scroll Size Refresh Minimum Scroll Size Summary Graph Detail Window Measure Menu Ohms Current Surface Volume Edit Current Menu Detail Graph Previous Next Summary Start Auto Range Setup View...

  • Page 85: Figure 4-3: Resistivity Hierarchy

    Section 4 Main Menu Measure Configure Sofcal Measure Menu Ohms Current Surface Volume Surface Resistivity Menu Volume Resistivity Menu Continue Configure Continue Thickness Configure See Figure See Figure Diameter Distance Ohms Ohms Area Coefficient Thickness Edit Effective Perimeter Edit Units Distance Inches Centimeters...

  • Page 86: Figure 4-4: Setup Hierarchy

    Section 4 Main Menu Measure Configure Sofcal Setup Menu 4 Prompt Sys Time Bright L1 More 4-4 Keep Data Bright L2 Clear Data Bright L3 Bright L4 Setup Menu 1 Date (YYY/MM/DD) Time (HH:MM:SS) 6530 Disp Res 3 Ramp More 1-4 Trace 6530 Disp Res 4 Analog...

  • Page 87: Figure 4-5: Sofcal Hierarchy

    Section 4 Main Menu Sofcal Menu Measure Configure Sofcal User Calibrate Diagnostic Password Password Sofcal User Menu Sofcal Calibrate Menu See Figure 4.8 Edit Diagnositc Cal Coeff. Self Test Utilities Cal. Vals Ref. Vals Sensors Sensors Adjust Menu Utilities Menu 1 Temp.

  • Page 88: Figure 4-6: Sofcal Cal. Vals. Hierarchy

    Section 4 Cal. Vals Menu 1 Capacitors Thresholds Test Volts More 1-2 1.0 V 0.1 V Edit Test Volts 27 pf - 1,3,10,30,100 2700 pf ,300,1000 2700 pF + 1,3,10,30,100 ,300,1000 Edit Edit Screens 2 Cal Values Menu 2 Cal Spec Sys Params Protection More 2-2...

  • Page 89: Analog Ps

    Section 4 Diagnostic Menu 3 Main Menu ErrMsg Off More 3-3 Measure Setup Sofcal ErrMsg On Sofcal Menu User Calibrate Diagnostic Passwor Diagnostic Menu 1 Diagnostic Menu 2 Digital PS Analog PS Relay Test More 1-3 Volt Test Ext. Input DAC7548 More 2-3 Digital...

  • Page 90: Remote Control

    Section 5 REMOTE CONTROL The 6530 TeraOhm Bridge-Meter operates directly from the front panel or under remote control of an instrument controller, computer or terminal. Remote control can be interactive, with the user controlling each step from a terminal, or under the control of a computer running the 6530 in an automated system.

  • Page 91: Controller

    Section 5 This manual assumes that the user is familiar with the basics of the IEEE-488 interface bus. The IEEE-488 interfacing standard applies to the interface of instrumentation systems or portions of them, in which the: 1. Data exchanged among the interconnected apparatus is digital. 2.

  • Page 92: Address And Talk/Listen Selection

    Section 5 1. DAV (DATA VALID) is used to indicate the condition of (availability and validity) information on the DIO signal lines. 2. NDAC (NOT DATA ACCEPTED) 3. NRFD (NOT READY FOR DATA) is used to indicate the condition of readiness of devices to accept data.

  • Page 93: Ieee-488 Input Buffering

    Section 5 Name Description DIO1 Data Input Output Line 1 DIO2 Data Input Output Line 2 DIO3 Data Input Output Line 3 DIO4 Data Input Output Line 4 End or Identify Data Valid NRFD Not Ready for Data NDAC Not Data Accepted Interface Clear Service Request Attention...

  • Page 94: Ieee-488 Deadlock

    Section 5 error bit in the status register will be set. When the output buffer is not empty then the message available (MAV) bit will be set in the status register. 5.2.9. IEEE-488 DEADLOCK If the controller demands a byte of data from the 6530 and the buffer is empty, the 6530 will set the Query Error flag in the Event Status Register.

  • Page 95: Rs-232C Responses

    Section 5 5.3.1. RS-232C RESPONSES The reply to any RS-232C query command will be a sequence of ASCII characters followed by a Carriage-Return character (0x0D) and then a Line-Feed character (0x0A). The Line-Feed character may also be expressed as 0A or 10 or 12 or Ctrl-J.

  • Page 96: General Syntax For Numbers

    Section 5 5.4.2. GENERAL SYNTAX FOR NUMBERS Numeric parameters may have up to 30 characters, and although the 6530 will accept numeric parameters in the range ±2.2E-308 through ±1.8E308, the useful range of numbers is between ±1.0E-8 and ±1.0E5. The portion of the command parser that interprets numeric input will correctly recognize most common forms of numeric input, for example the following are all valid methods of expressing the number 123.4: •...

  • Page 97: Remote With Lockout

    Section 5 Front panel operation is restricted to the use of the <remote> key. Pressing the <remote> key or sending the GTL (Go To Local) interface message returns the 6530 to the local state. 5.4.6. REMOTE WITH LOCKOUT The remote with lockout state can be entered from remote or local with lockout, but not directly from local.

  • Page 98: Programming Command Summary

    Section 5 5.5. PROGRAMMING COMMAND SUMMARY A brief description of each of the possible remote RS232 and IEEE-488 commands and their syntax in BNF (Backus Naur Form) follows: • words inside angle brackets (i.e. <digit> ) are defined items • :== means "is defined to be" •...

  • Page 99: Standard System Commands

    Section 5 SCPI Specification for 6530 5.5.1. Standard System Commands *CLS ; clear event status register, empty input queue *ESE <enable value (no units)> ; clear event status register, empty input queue *ESE? ; report event status enable *ESR? ; report event status register *IDN? ;...
  • Page 100 Section 5 System Commands SYSTem:ATMospheric:PRESsure? SYSTem:CHECk:SUM? SYSTem:COMMunications:GPIB <address>, TALK Only | TALK Listen | DISable address 0-31 :GPIB? SYSTem:COMMunications:SERial <baud>, <data>, <stop>, <parity>, <echo>, <flow control>, <mode> baud 1200 | 2400 | 4800 | 9600 | 19200 | 38400 databits 7 | 8 stop 1 | 2...

  • Page 101: Calibration Commands

    Section 5 :SERial:NUMBer? SYSTem:TEMPerature? SYSTem:TIME <hh,mm,ss> :TIME? SYSTem:TERSe SYSTem:VERBose SYSTem:VERSion? 5.5.2. Calibration Commands CALibration:CAPacitor 27 | 270 | 2700 , <calibration coefficient (ppm)> :CAPacitor? CALibration:DATE <yyyy,mm,dd,hh,mm,ss> :DATE? CALibration:OUTPut:VOLTage +1 | +2 | +5 | +10 | +20 | +50 | +100 | +200 | +500 | +1000 | -1 | -2 | -5 | -10 | -20 | -50 | -100 | -200 | -500 | -1000 , <calibration coefficient (ppm)>...

  • Page 102: Configuration Commands

    Section 5 CALibration:REFerence:RESistor <value> ; 80M - 12G :REFerence:RESistor? CALibration:SERial:NUMber <string> ; maximum length is 20 :SERial:NUMber? CALibration:SPEC:CLEar CALibration:SPEC? CALibration:THReshold:VOLTage 0.1 | 1.0, <calibration coefficient (ppm)> :THReshold:VOLTage? CALibrate:SYSTem:COEFficient <nominal value>, <volts>, <pos coefficient>, <neg coefficient> :SYSTem:COEFficient? <nominal value>, <volts> CALibrate:SYSTem:PARameters <nominal value>, <volts>, <sample count>, <sample size>, <sample window>...
  • Page 103 Section 5 MEASure:TERA:SIZE? ; 0.0 – 0.9e+15 MEASure:TERA:THReshold <value> :TERA:THReshold? ; 0 – 100 MEASure:STABilize:SIZE <value> :STABilize:SIZE? READ:RESistance? READ:CURRent? :SURface:RESistivity? :VOLume:RESistivity? SENSe:ATMospheric:PRESsure? SENSe:CAPacitor 27 | 270 | 2700 :CAPacitor? SENSe:HUMidity? SENSe:INTegration:TIME? SENSe:INTegrator:THReshold 0.1 | 1.0 | 10.0 :THReshold? SENSe:MAXimum:VOLTage 1 | 3 | 10 | 30 | 100 | 300 | 1000 :VOLTage? SENSe:OUTput:VOLTage 1 | 3 | 10 | 30 | 100 | 300 | 1000...

  • Page 104: Trace Commands

    Section 5 SENSe:RESistivity:AREA <value> :AREA? SENSe:RESistivity:PERimeter <value> :PERimeter? SENSe:RESistivity:DISTance <value> :DISTance? SENSe:TEMPerature? 5.5.5. Trace Commands TRACe:CLEar TRACe:DATA? ; dump buffer TRACe:DIAGnostics ON | OFF | SENSORS :DIAGnostics? TRACe:ELEMents TIMEstamp , HUMidity , TEMPerature , ATMOSpheric Pressure , NONE , ALL , RELative Time , RTClock :ELEMents? TRACe:MODE CLEAR | PROMPT | KEEP...

  • Page 105: Trigger Commands

    Section 5 5.5.6. Trigger Commands TRIGger:SOURce MANual | BUS | EXTernal | CONTinuous :SOURce? TRIGger:DELay <value> ; 0-999999.999 seconds :DELay? TRIGger:SOAK <value> ; 0-999999.999 seconds :SOAK? TRIGger:SENSor:TIMer <value> ; 0-999 seconds :SENSor_TIMer? Figure 5-1 : Event Status Bit Operation OM6530-C1-00 5-16 19 November, 2019...

  • Page 106: Remote Commands

    Section 5 5.6. REMOTE COMMANDS This section details all the valid commands that may be sent over either the IEEE-488 or the RS-232C interface port. The responses listed below are the verbose response. If the numeric parameter to the command is missing or unrecognizable the CME (CoMmand Error) bit in the Event Status Register (see Figure 5-1) will be set.

  • Page 107: Idn? - Identification Query

    (4) fields delimited by commas (,). The first field is the manufacturer (i.e. Guildline Instruments), the second field is the model (i.e. 6530), the third field is the serial number (i.e. 55065), and the final field is the firmware revision (i.e.

  • Page 108: Opt? - Report Available Options

    Section 5 5.6.8. *OPT? - REPORT AVAILABLE OPTIONS This query command reports the presence or absence of various options. The format of the reply is a series of arbitrary ASCII response fields separated by commas. The 6530 will always report the value 0. 5.6.9.

  • Page 109: Tst? - Query Results Of Self Test

    Section 5 Location Name Description Interlock status. 0=enabled, 1=disabled. Reading complete. min_max Minimum/Maximum timeout error if set. Input FuLl. This bit is set when the input queue is over 75% full and cleared when the queue drops below 25% full. Message AVailable.

  • Page 110: Wai - Wait-To- Continue Command

    Section 5 5.6.14. *WAI - WAIT-TO- CONTINUE COMMAND This command is intended to suspend the execution of any further commands until all pending operations have been completed. Since the 6530 does not implement a new command until the last operation has been completed, this command has no effect. It is included in the list of remote commands because it is a mandatory IEEE-488.2 command.

  • Page 111: System:communications:serial

    Section 5 Talk Only will output measurement values as well as the selected trace elements (i.e. Temperature) to the RS232 interface. N.B. Use of this command from the remote RS232 interface will change the configuration immediately. This will require the Remote Communications package which you are using to also be reconfigured to comply with your changes.

  • Page 112: System:serial:number? - Display System Serial Number

    Section 5 5.6.28. SYSTem:SERial:NUMBer? – DISPLAY SYSTEM SERIAL NUMBER Typical response: 67630 5.6.29. SYSTem:STATe - UPDATE SYSTEM STATE LOCAL | REMote | LOCKout 5.6.30. SYSTem:STATe? – DISPLAY SYSTEM STATE Typical response: LOCAL 5.6.31. SYSTem:TEMPerature? – DISPLAY TEMPERATURE Typical response: OM6530-C1-00 5-23 19 November, 2019...

  • Page 113: System:terse - Set System To Terse

    Section 5 5.6.32. SYSTem:TERSe – SET SYSTEM TO TERSE Set the system to only display data on responses. (no text description) 5.6.33. SYSTem:TIME – SET SYSTEM TIME <hh, mm, ss> (limit range to 0...23) (limit range to 0...59) (limit range to 0...59) 5.6.34.

  • Page 114: Calibration:date? - Display Last Calibration Date

    Section 5 5.6.40. CALibration:DATE? – DISPLAY LAST CALIBRATION DATE Typical response: 2003, 08, 21, 15, 30, 0 5.6.41. CALibration:OUTPut:VOLTage – UPDATE COEFFICIENTS +1 | +3 | +10 | +30 | +100 | +300 | +1000 | -1 | -3 | -10 | -30 | -100 | -300 | -1000, <error coefficient (ppm)> The error coefficient is a long integer and cannot exceed ±100,000.

  • Page 115: Calibration:parameters:resistor

    Section 5 5.6.45. CALibration:PARameters:RESistor 27 pF Capacitor ; 1.0 – 1000.0 <variance (ppm)> , ; 0.01 – 250.0 <standard deviation (ppm)> , ; 25 – 500 <sample size> , 270 pF Capacitor ; 1.0 – 1000.0 <variance (ppm)> , ; 0.01 – 250.0 <standard deviation (ppm)>...

  • Page 116: Calibration:protection:resistor

    Section 5 5.6.48. CALibration:PROTection:RESistor? Typical response: 100083 5.6.49. CALibration:REFerence:RESistor <value> ; 80M - 12G 5.6.50. CALibration:REFerence:RESistor? Typical response: 100001800 5.6.51. CALibration:SERial:NUMBer <string> ; maximum length is 20 5.6.52. CALibration:SERial:NUMBer? Typical response: 62153 5.6.53. CALibration:SPEC:CLEar 5.6.54. CALibration:SPEC? Typical response: "Date",,"Coefficient","Count","Sample","Variance","Std Dev”,”Temperature","Humidity","Atmospheric Pressure" 2005/03/31 05:03:12, 27pF,-22926,97,30,26.389,7.951, 0.0, 0.0, 0.0 2005/03/30 22:41:39, 27pF,-22908,111,30,21.759,6.067, 0.0, 0.0, 0.0 2005/03/31 04:36:20, 270pF,6298,88,30,21.991,5.333, 0.0, 0.0, 0.0...

  • Page 117: Calibration:system:parameters

    Section 5 5.6.56. CALibration:SYSTem:COEFficient? Typical response: 90k to 200k, 1V, 273,273 5.6.57. CALibration:SYSTem:PARameters <nominal value>, <volts>, <sample count>, <sample size>, <sample average>,<sample window> 5.6.58. CALibration:SYSTem:PARameters? Typical response: 90k to 200k, 1V, 90, 100, 1, 2 5.6.59. CALibration:SYSTem:REV <user rev> 5.6.60. CALibration:SYSTem:REV? Typical response: <user rev>...

  • Page 118: Measure - Start/Stop Measurement

    Section 5 5.6.64. MEASure – START/STOP MEASUREMENT ON | OFF This is used to start or stop a measurement from a remote device (RS232 or GPIB) 5.6.65. MEASure? Typical response: 5.6.66. MEASure:UNITS – SET CURRENT MEASUREMENT MODE OHMS | AMPS | SURFACE resistivity | VOLume Resistivity 5.6.67.

  • Page 119: Sense:capacitor? - Display Current Capacitor

    Section 5 5.6.74. SENSe:CAPacitor? – DISPLAY CURRENT CAPACITOR Typical response: 2700pf 5.6.75. SENSe:HUMidity? Typical response: 5.6.76. SENSe:INTegration:TIME? Typical response: 1.1036 This is the time in seconds that it took to take the last measurement. 5.6.77. SENSe:INTEGrator:THREShold 0.1 | 1.0 | 10.0 5.6.78.

  • Page 120: Sense:polarity

    Section 5 5.6.84. SENSe:POLarity Typical response: Auto 5.6.85. SENSe:RANGe AUTO | MANual 5.6.86. SENSe:RANGe? Typical response: Auto 5.6.87. SENSe:REMote:INTerlock ON | OFF This will enable or disable the interlock function while controlling the 6530 remotely. 5.6.88. SENSe:REMote:INTerlock? Typical response: 5.6.89. SENSe:RESistivity:THICkness <value>...

  • Page 121: Sense:resistivity:perimeter

    Section 5 5.6.93. SENSe:RESistivity:PERimeter <value> This is the perimeter. It is normally set to 0.125 if unit is inches but can be set to another value if you are using the custom mode of measuring resistivity. 5.6.94. SENSe:RESistivity:PERimeter? Typical response: 0.125 5.6.95.

  • Page 122: Trace:diagnostics

    Section 5 5.6.100.TRACe:DIAGnostics ON | OFF | SENSORS This is normally set to off. <On> provides a means to automatically output the Digital Diagnostics or the Analog Diagnostics to the remote device as well as the display while this diagnostic is running. <Sensors> adds the state of the internal instrument temperature to the remote trace data when the remote device is set to Talk Only.

  • Page 123: Trace:tstamp:type

    Section 5 5.6.109.TRACe:TSTamp:TYPE RELative | RTClock This allows the time of each entry in the trace buffer to be displayed either as the date and time or as relative time from the last <TRACe:CLEar> command or the last detail clear on the instrument.

  • Page 124: Trigger:soak

    Section 5 5.6.116.TRIGger:SOAK? Typical response: 5.6.117.TRIGger:SENSor:TIMer <value> ; 0-999 seconds This sets the rate for the instrument to take automatic readings of the Temperature, Humidity and Atmospheric Pressure. It is normally set to three (3) seconds. 5.6.118.TRIGger:SENSor:TIMer? Typical response: OM6530-C1-00 5-35 19 November, 2019...

  • Page 125: Verification And Calibration

    Section 6 VERIFICATION AND CALIBRATION 6.1. CALIBRATION DESCRIPTION The procedure outlined in this section may be used to perform system verification of the 6530 TeraOhm Bridge-Meter for proper operation. This verification procedure may be performed when the instrument is first received to ensure that no damage or maladjustment has occurred during shipment.

  • Page 126: Calibration Coefficients

    Section 6 6.1.4.1.CALIBRATION COEFFICIENTS Reference should be made to Section 6.5.2 Apply power to the instrument Verify that the unit passes all self-tests Press the <SOFCAL> key Press the <Calibrate> key Press the <Ref Vals> key Press the <Serial Num> key Verify that the serial number displayed matches the serial number printed on the rear of the instrument and on the instrument calibration report.

  • Page 127: Operational Check

    Service Manual (SM6530). This manual can be obtained from Guildline Instruments Limited. A brief description of the Calibration and Instrument theory can be found in Section 6.4.

  • Page 128: Recommended Test Equipment

    Threshold coefficients 1.0 V ± 1000 ppm Resistor, calibrated, max. Uncertainty 30 ppm Short Circuit 0 ohm link Guildline 65224 Input Current Range (± 10m to ± 10µ) DC A Fluke 5700A (optional) ± 200 ppm or equivalent Table 6-2: Recommended Calibration Test Equipment 6.2.4.

  • Page 129: Auto Calibration

    Section 6 Select the <Calibrate> function key Reference Section 4.9.2.2 Verify the unit is in the <Calibrate> Menu Select the <Ref. Vals> function key Verify the unit is in the <Reference> Menu Select the <Serial Number> key Verify that the Serial Number displayed matches the serial number printed on the rear of the instrument and on the calibration report.

  • Page 130: Capacitor Calibration

    Section 6 New values for variance, standard deviation and sample size criteria for the 2700 pF capacitor may be entered using the numeric keypad ifs required (see Section 4.9.2.3.3) Repeat this process for the 270 pF and 27 pF capacitors, as well as the 1.0 V and 0.1 V thresholds.

  • Page 131: Threshold Calibration

    Section 6 Connect the 100 MΩ reference resistor between the SOURCE and INPUT terminals of the instrument. Select the SOFCAL CALIBRATE MENU by pressing the <Calibrate> function key when in the Sofcal Menu Press the <Ref Vals> function key. Press the <Ref Res> function key. Press the <Edit>...
  • Page 132 Section 6 NOTE: This operation DOES change the coefficients and voids the previous calibration, both resistance and current. Upon completion the 6530 will have to verified across the operation range. Reference Section 4.9.2.1.3. Connect the 100 MΩ reference resistor between the SOURCE and INPUT terminals of the instrument.

  • Page 133: Zero Coefficient Calibration

    Section 6 6.2.8. ZERO COEFFICIENT CALIBRATION The Zero Coefficient Calibration is a stand-alone routine that is built in the 6530 to calibrate the absolute value of the 100 kΩ protection resistor with the 100 MΩ traceable resistor. To execute this process follow the steps below. Reference Section 4.9.2.1.4.

  • Page 134: Calibration Report

    Section 6 6.3. CALIBRATION REPORT Prepare a tabulated results sheet similar to that shown in Table 6-3, using the data reported by the instrument during the calibration procedure of Section 6.2. OM6530-C1-00 6-10 19 November, 2019...

  • Page 135: Table 6-3: Sample Calibration Report Format

    Section 6 MODEL 6530 TeraOhm Bridge-Meter Serial Number: _________________ Variant: _________________ Test Voltage Coefficient Limits Capacitor Coefficient Limits  (ppm)  (ppm) (volts) (ppm) (ppm) 1000 1000 200000 1000 80000 1000 2700 20000 1000 1000 Threshold Coefficient Limits 1000 1000 ...

  • Page 136: Calibration Theory

    Section 6 6.4. CALIBRATION THEORY After each resistance reading the integration time is converted to a resistance. The conversion from time to resistance is achieved using the formula: test integration ___________________________ Resistance = protection 2 x C integrator integrator Where: Resistance is the value of the unknown resistor is the test voltage from the 6530 source test is the time for the integration...

  • Page 137: Cintegrator Coefficients

    Section 6 6.4.3. Cintegrator COEFFICIENTS The exact value of the reference resistor (used during calibration to compute the capacitor and threshold variances) is entered into the instruments Non-Volatile memory either from the front panel (see section 4) or through one of the bus interfaces. The instrument computes the variance of each integration capacitor.

  • Page 138: Trouble Shooting And Maintenance

    Section 7 TROUBLE SHOOTING AND MAINTENANCE 7.1. PREVENTATIVE MAINTENANCE Preventative maintenance consists of cleaning and visual inspection of the instrument. Preventative maintenance performed on a regular basis will prevent instrument breakdown and will improve the reliability of this instrument. The severity of the environment to which the 6530 is subjected determines the frequency of maintenance.

  • Page 139: Non Volatile Memory Checksum

    Section 7 7.2. NON VOLATILE MEMORY CHECKSUM The model 6530 TeraOhm Bridge-Meter contains a bank of memory into which certain operating data are written and stored. This memory is non-volatile in that data are kept even when power is removed from the instrument. The integrity of the data in this memory is checked on power up and on an instrument RESET by comparing a stored checksum value with a calculated value.

  • Page 140: Error Messages

    Section 7 7.4. ERROR MESSAGES Display Message Comment RAM FAILURE XX RAM Test Failure in bank XX where XX is in the range 01 through 16. FAST ADC FAILURE Interrupt from the ADC has not been generated or has not been recognized ADC NOT RUNNING ADC converter not running correctly.
  • Page 141 Section 7 Display Message Comment + 5 Volts X.X + 5 V digital power supply out of limits; measured X.X V. - 5 Volts X.X - 5 V digital power supply out of limits; measured X.X V. + 15 Volts X.X + 15 V digital power supply out of limits;...

  • Page 142: Appendices

    Section 8 APPENDICES 8.1. GENERAL SPECIFICATIONS MODEL 6530 General Specifications Operating Temperature (23 ± 5) °C (73.4 ± 9) °F Storage Temperature -20 to 60 °C -4 to 140 °F Operating Humidity (non-condensing) 20 to 50 % rH Storage Humidity (non-condensing) 15 to 80 % rH Power Requirements...

  • Page 143: Resistance Measurement Specifications

    Section 8 8.2. RESISTANCE MEASUREMENT SPECIFICATIONS Note: The uncertainties listed in Table 8-2 are applicable after a four-hour warm-up period when using the autoranging mode of operation and when the current is no less than one picoampere through the unknown resistor. Many types of high value resistors can be difficult to measure accurately with the 6530 in autoreverse mode because their actual resistance value changes slowly for a period of time after a polarity reversal.

  • Page 144: Picoammeter Measurement Specifications

    Section 8 8.3. PICOAMMETER MEASUREMENT SPECIFICATIONS Note: The uncertainties listed in Table 8-3 are applicable after a one-hour warm-up period when using the autoranging mode of operation. The accuracy is traceable to the International System of Units (SI) through NRCC (Canada) or other National Metrology Institutes. 12 Month Uncertainty Direct Measurement ±...

  • Page 145: System Parameter

    Section 8 8.5. SYSTEM PARAMETER The table below describes the valid 6530 measurement setups along with the default parameters defined for each resistance/voltage range in auto-reverse mode. These parameters can be accessed and modified in the System parameter section of the 6530. It should be noted that modification of these parameters from the same in which the 6530 was calibrated invalidates the calibration.
  • Page 146 Section 8 2700 2700 2700 2700 2700 1000 2700 0.54 100G 2700 100G 2700 20G to 200G 100G 2700 100G 2700 100G 1000 2700 2700 200G to 2T 2700 1000 2700 2T to 20T 1000 2700 20T to 200T 100T 1000 2700 6530-XR and 6530-XPR Models...

  • Page 147: Table 8-5: Default System Parameter

    Section 8 2700 2700 0.54 2700 0.18 1000 2700 0.054 2700 2700 2700 2G to 20G 2700 2700 2700 1000 2700 0.54 100G 100G 100G 2700 20G to 200G 100G 2700 100G 2700 100G 2700 100G 1000 2700 200G to 2T 2700 2700 1000...

  • Page 148: Sample Bus Control Program

    Send EOI at end of writes: Enable repeat addressing: Programming Note 1 : BASIC Sample Bus Control Program Using Basic And National Instruments GPIB-PC Controller 100 REM BASIC Example Program - for Guildline Model 6530 Teraohm Bridge- Meter 110 REM 6530 120 REM 130 REM You MUST merge this code with DECL.BAS.
  • Page 149 Section 8 IF IBSTA% < 0 THEN GOSUB 3000 330 REM 330 REM Tell the 6530 Teraohm Bridge-Meter to measure resistance 340 REM WRT$ = "MEAS ON" CALL IBWRT (DEV%,WRT$) IF IBSTA% < 0 THEN GOSUB 3000 380 REM 390 REM Loop on reading the status byte until 400 REM the 6530 says that the reading is complete 410 REM Check that the 6530 is still measuring.
  • Page 150 Section 8 3010 REM location would, among other things, 3020 REM check IBERR to determine the exact 3030 REM cause of the error condition and then 3040 REM take action appropriate to the 3050 REM application. For errors during data 3060 REM transfers, IBCNT may be examined to 3070 REM determine the actual number of bytes 3080 REM transferred.

  • Page 151: Measurement Technique

    Section 8 8.7. MEASUREMENT TECHNIQUE 8.7.1. LARGE VALUE RESISTOR MEASUREMENT TECHNIQUE The measurement of very large value resistors presents special challenges for the operator. The measurement is often rendered meaningless unless certain precautions are taken. 8.7.2. ENVIRONMENT The test equipment and the test sample should be located in a clean dry area where the temperature is relatively constant near 23C.

  • Page 152: Other Features

    Section 8 8.8. OTHER FEATURES * Mounting: Bench top with extra flanges provided separately for 19-inch rack mounting. * Input Connector: Front panel with rear panel access optional on request. * Power Selection Switch: On rear panel. * IEEE488.2 Connector: On rear panel.

  • Page 153: Accessory Equipment

    Section 8 8.9. ACCESSORY EQUIPMENT 8.9.1. Environmental Monitor Model 65220 Temperature/Humidity Pressure Module Module Temperature/Humidity Sensor Specifications 8.9.1.1.Humidity Features Low power design High accuracy Fast response time Stable, low drift performance Chemically resistant 8.9.1.2.RH Sensor Specification Sensor construction consists of a planar capacitor with a second polymer layer to protect against dirt, dust, oils and other hazards.

  • Page 154: Precision Centigrade Temperature Sensor

    Section 8 8.9.1.3.Precision Centigrade Temperature Sensor The temperature sensors are precision integrated-circuit temperature sensors, whose output voltage is linearly proportional to the Celsius (Centigrade) temperature. The sensor thus has an advantage over linear temperature sensors calibrated in ° Kelvin, as the user is not required to subtract a large constant voltage from its output to obtain convenient Centigrade scaling.
  • Page 155 Section 8 Pressure Offset (as configured - 0 to 60°C) V S = 5.0 Volts V off 0.088 Full Scale Output (as configured - 0 to 60°C) V S = 5.0 Volts V FSO 4.587 Full Scale Span (as configured - 0 to 60°C) V S = 5.0 Volts V FSS 4.500...

  • Page 156: Table 8-6: Calibration Resistors

    Section 8 Note: The 6530 will accept only a resistor of approximately 100 MΩ with an uncertainty better than ± 50ppm for setting the capacitor and threshold error coefficients. Model Nominal Nominal Calibration Stability Temperature Voltage Resistance Initial Uncertainty Coefficient Coefficient @23˚C±˚C Value...
  • Page 157 The 6530 includes a cable that has a standard BNC End (connects to 6530 Source Input) to a Male “N” connector which is the standard input for the Guildline 9336 and 9337 Source (Female “N” Connection. The 6530 standard cable set also includes one cable with a Triax End (Connects to 6530 Input) to Male “N”...

  • Page 158: Table 8-7: Ieee Interfaces

    Section 8 8.9.7. Calibration Kit Model 65226 This kit contains the following items: Two 1 meter (39-inch) extension cables fitted with a type N female connector on one end and mating coaxial connectors on the other end for connection to the 6530 front panel Source and Input connectors.

This manual is also suitable for:

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