Chapter 1: Overview; Table 1-1: Ant20G Model Numbering System - Aerotech ANT20G Series Hardware Manual

ANT20G Hardware Manual

Chapter 1: Overview

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ANT20G Model Numbering System
ANT Series Vertical Travel Stage
Radius of Rotation (Required)
-050
-090
-110
-160
Metrology (Required)
-PL1
-PL2
Accessories (To be Ordered as a Separate Line)
ALIGN-PA10
ALIGN-PA5
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50 mm radius of rotation
90 mm radius of rotation
110 mm radius of rotation
160 mm radius of rotation
Base performance
High-accuracy performance, PLUS
XY assembly; 10 arc sec orthogonality
XY assembly; 5 arc sec orthogonality
Chapter 1
Overview
9