Figure 1-1: Step And Settle Performance; Table 1-4: Ant20G Series Specifications (-110 And -160) - Aerotech ANT20G Series Hardware Manual

Overview
Table 1-4: ANT20G Series Specifications (-110 and -160)
Model
Rotation Angle
(1)
Accuracy
Resolution (Minimum Incremental Motion)
Bidirectional Repeatability
Unidirectional Repeatability
Tilt Error Motion
Maximum Speed
Maximum Acceleration
Settling Time
(2)
In-Position Stability
Nominal Radius of Rotation
Height from Tabletop to Rotation Point
Maximum Torque (Continuous)
Axial
Load Capacity
Moment
Stage Mass
Material
MTBF (Mean Time Between Failure)
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent.
Consult factory for multi-axis or non-standard applications.
12
(1)
±0.2 µrad (±0.04 arc sec)
Figure 1-1: Step and Settle Performance
Chapter 1
ANT20G Hardware Manual
-110
20°
±40 µrad (±8 arc sec)
0.25 µrad (0.05 arc sec)
±10 µrad (±2 arc sec)
±5 µrad (±1 arc sec)
±40 µrad (±8 arc sec)
150 degrees per second
2
375 rad/s
Refer to Figure
110 mm
76.2 mm
1.00 N·m
2.0 kg
80 kg·mm
1.2 kg (2.6 lb)
Aluminum
30,000 Hours
-160
20°
±30 µrad (±6 arc sec)
0.25 µrad (0.05 arc sec)
±10 µrad (±2 arc sec)
±5 µrad (±1 arc sec)
±30 µrad (±6 arc sec)
2
250 rad/s
Figure 1-1
±0.15 µrad (±0.03 arc sec)
160 mm
120.4 mm
2.40 N·m
3.5 kg
140 kg·mm
1.6 kg (3.5 lb)
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