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Related Manuals for Brooks EtherCAT VDM300
Summary of Contents for Brooks EtherCAT VDM300
- Page 1 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Supplemental Manual for Brooks EtherCAT VDM300 ® ® DI Water Vapor Delivery Module Brooks VDM300 Series ® with EtherCAT Communications ®...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 EtherCAT® VDM300. Should you require any additional information concerning the EtherCAT VDM300, please feel free to contact your local Brooks Sales and Service Office; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciate this opportunity to service your fluid measurement and control requirements, and trust that we will be able to provide you with further assistance in the future.
- Page 4 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
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Page 5: Table Of Contents
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Paragraph Page Number Number Section 1 General Information Introduction ....................1-1 Definition of Terms ..................1-1 Numbers ..................... 1-2 Section 2 Quick Start Quick Start ....................2-1 Master Hardware .................. - Page 6 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Figure Figure Number Number VDM300 Device Bottom Panel ..............2-2 15-Pin D-sub Male Connector Pin Layout ........... 2-2 Table Table Number Number Pin Labeling of 15-Pin D-sub Connector ............ 2-3...
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Page 7: Introduction
This manual does not make any assumptions about any particular manufacturer of equipment or custom software used by the user to communicate with the Brooks device, but assumes the user has thorough understanding of such equipment and any configuration software. -
Page 8: Numbers
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 1.3 Numbers Numeric values used throughout this manual will be clearly denoted as to the base numeric system it represents. All hexadecimal numbers (base 16) will be prefixed with a 0x, like 0xA4. All binary numbers (base 2) will be suffixed with a b, like 1001b. -
Page 9: Quick Start
This section also assumes that an EtherCAT master application is connected to the network capable of PDO and mailbox data communication. Both types of data communication modes are supported by the Brooks VDM300 EtherCAT device. Brooks VDM300Series conforms to the ETG.5003 ®... -
Page 10: Physical Interface
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 2.2 Physical Interface The available physical interfaces on the EtherCAT device are listed below. Refer to the VDM300 Series Installation and Operation Manual for more details. - Page 11 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 2-1 Pin Labelling of 15-Pin D-sub Connector Direction Signal State (w/o Low Description Schematic 15-Pin Level Alarm Signal Name Connector Configuration) Sets logic levels for digital I/O...
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Page 12: Leds
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 2.2.1 LEDs The device supports RUN and LA LED indicators on the RJ45 jacks to indicate the status of network communication and the device mode. The RUN LED will indicate the following:... -
Page 13: Slave Configuration
XML format) and/or EEPROM, master applications are able to configure the EtherCAT network. For the EtherCAT network configuration of the VDM300 Series devices, ESI files are provided on the Brooks website or contact Brooks Technical Support for more info. -
Page 14: Rxpdo Mapping
SAFEOP state. The Error LED will flash RED and the resulting device state will be ERRPREOP. 3.2.1 RxPDO Mapping The Brooks VDM300 Series device supports one preconfigured, default RxPDO at 0x1600 and one user configurable RxPDO at 0x1601. Table 3-2 Default RxPDO... -
Page 15: Communication Specific Data
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.3 Communication Specific Data Table 3-4 Communication Specific Data Index Data Type Access Name Description Index 0x1000 UDINT Device Type 5003. Sub-profile number is defined in... -
Page 16: Sdp Device Type Specific Data
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.4 SDP Device Type Specific Data 3.4.1 Input Data Table 3-5 Input Data Index Data Access Name Description Index Type 0x6000 Sensor: Flow (floating) 0x01 REAL... -
Page 17: Output Data
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.4.2 Output Data Table 3-6 Output Data Index Data Access Name Description Index Type 0x7003 Controller: Flow SP (floating) 0x01 REAL WRITE_OP Flow SP Sets MFC Flow Set point. -
Page 18: Information Data
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.4.4 Information Data Table 3-8 Information Data Index Data Access Name Description Type 0x9000 Sensor: Flow (floating) 0x01 REAL Flow Reading Zero Stores Result of last Zero Offset service Offset command executed. -
Page 19: Semi Device Profile Area
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.5 Semi Device Profile Area Table 3-9 Semi Device Profile Index Data Access Name Description Index Type 0xF000 Semiconductor Device Profile 0x01 UINT Index Distance Index offset between PDO entries of two consecutive modules (for ETG.5003 =... -
Page 20: Manufacturer Specific Device Data
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 3-10 Value Range Setting (Continued) TxPDO Manufacturer warning exceptions specified by the Warning Details manufacturer Mandatory if 0xF382 supported 0xF393 0x01 UDINT Latched Device Error... -
Page 21: Sdp And Cdp Device Specific Inputs
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® Mach, 2019 Table 3-12 Manufacturer Specific Device Input Data Index Data Access Name Description Index Type 0x3000 Commands: VDM Specific 0x01 USINT WRITE_OP Normal Pin 0 will prepare the system for vapor delivery if Drain is not 0, erp the manual for the Normal Pin 3. -
Page 22: Sdp And Cdp Command Objects
Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 3.10 SDP and CDP Command Objects Table 3-15 SDP and CDP Command Objects Index Data Type Acce Name Description Index 0xFB10 COMMAND Zero Adjust for Service causes the device to modify flow _PAR reading offset [0x9nn0.01] such that flow... - Page 23 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® Mrach, 2019 Table 3-15 SDP and CDP Command Objects (Continued) Index Data Type Acce Name Description Index additionally, all parameters are restored to as-shipped defaults 0x01 ARRAY Command A device reset is initiated when the [0…5] OF...
- Page 24 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 3-15 SDP and CDP Command Objects (Continued) Index Data Type Acce Name Description Index percentage display is not supported) 0x03 ARRAY [0..1] Response Byte 0: See Sub index 2...
- Page 25 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 3-15 SDP and CDP Command Objects (Continued) Index Data Type Acce Name Description Index 0x01 ARRAY Command Read: Returns information about the [0…3] OF supported checksum type...
- Page 26 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 3-15 SDP and CDP Command Objects (Continued) Index Data Type Acce Name Description Index Start Calculation A write access to this subindex shall only set one bit true in Bit [0...7]. If other values are written the Abort Code "0x06040043 Parameter is incompatible"...
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Page 27: Section 4 Appendix 4 Exceptions Implementation
EtherCAT defines objects to report Exception information and objects to control the reporting of exceptions as shown in Table 1. In addition, the Brooks VDM300 defines 1 additional object to control the display of active errors and warnings. - Page 28 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 4-1 Objects for Reporting and Controlling Exceptions Data Index Index Type Access Name Description F380 USINT Active Exception A condensed summary byte summarizing Status all active device and manufacturer defined...
- Page 29 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 The VDM300 supports exceptions as defined in Table 4-2, Table 4-3, and Table 4-4. Table 4-2 Device Errors Condition Detected Reported As Severity Exception Type Valve Drive Failure, indicates...
- Page 30 Installation and Operation Manual X-DPT-EtherCAT-VDM300-eng Part Number: 541B217AAG Brooks EtherCAT ® ® March, 2019 Table 4-4 Manufacturer Warnings Condition Detected Reported As Severity Exception Type Flow Sensor Block 0x00000001 Alert Manufacturer Warning Temperature Stability Warning, after the warmup period indicates that the sensor block temperature is out of control range.
- Page 31 In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. SEMINARS AND TRAINING Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. without notice.